# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2020 06 20 00 01 36 1.170e+03 8.917e+02 2.071e+02 3.348e+01 1.575e+00 2020 06 20 00 03 26 1.160e+03 8.889e+02 2.092e+02 3.545e+01 1.625e+00 2020 06 20 00 05 17 1.089e+03 8.286e+02 1.918e+02 3.217e+01 1.550e+00 2020 06 20 00 07 07 1.005e+03 7.660e+02 1.790e+02 3.025e+01 1.150e+00 2020 06 20 00 08 57 1.024e+03 7.782e+02 1.833e+02 3.240e+01 1.525e+00 2020 06 20 00 10 47 1.158e+03 8.863e+02 2.044e+02 3.260e+01 1.225e+00 2020 06 20 00 12 37 1.151e+03 8.742e+02 1.997e+02 3.035e+01 1.525e+00 2020 06 20 00 14 27 1.123e+03 8.557e+02 1.960e+02 3.217e+01 1.525e+00 2020 06 20 00 16 17 1.007e+03 7.614e+02 1.725e+02 2.773e+01 1.450e+00 2020 06 20 00 18 07 9.965e+02 7.509e+02 1.733e+02 2.807e+01 1.425e+00 2020 06 20 00 19 57 1.093e+03 8.271e+02 1.891e+02 3.070e+01 1.425e+00 2020 06 20 00 21 47 1.154e+03 8.746e+02 2.004e+02 3.352e+01 1.600e+00 2020 06 20 00 23 37 1.139e+03 8.531e+02 1.933e+02 3.242e+01 1.800e+00 2020 06 20 00 25 27 1.037e+03 7.745e+02 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