# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2020 06 02 00 01 19 4.532e+02 3.749e+02 1.198e+02 2.715e+01 2.875e+00 2020 06 02 00 03 09 4.497e+02 3.733e+02 1.165e+02 2.612e+01 2.725e+00 2020 06 02 00 04 59 4.711e+02 3.891e+02 1.260e+02 2.877e+01 2.525e+00 2020 06 02 00 06 49 5.469e+02 4.551e+02 1.485e+02 3.365e+01 2.975e+00 2020 06 02 00 08 39 5.480e+02 4.535e+02 1.477e+02 3.467e+01 2.975e+00 2020 06 02 00 10 29 4.861e+02 4.016e+02 1.274e+02 2.823e+01 2.600e+00 2020 06 02 00 12 19 4.531e+02 3.759e+02 1.208e+02 2.750e+01 2.675e+00 2020 06 02 00 14 09 4.629e+02 3.830e+02 1.197e+02 2.550e+01 2.475e+00 2020 06 02 00 15 59 5.418e+02 4.496e+02 1.437e+02 3.100e+01 2.675e+00 2020 06 02 00 17 49 5.296e+02 4.411e+02 1.418e+02 3.085e+01 2.325e+00 2020 06 02 00 19 39 5.296e+02 4.401e+02 1.422e+02 3.138e+01 2.950e+00 2020 06 02 00 21 30 4.672e+02 3.864e+02 1.233e+02 2.612e+01 2.125e+00 2020 06 02 00 23 20 4.626e+02 3.842e+02 1.245e+02 2.923e+01 2.375e+00 2020 06 02 00 25 10 4.931e+02 4.085e+02 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