# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2020 02 26 00 00 15 4.844e+03 4.805e+03 2.174e+03 4.332e+02 3.685e+01 2020 02 26 00 02 06 4.907e+03 4.903e+03 2.285e+03 4.619e+02 3.845e+01 2020 02 26 00 03 56 4.864e+03 4.839e+03 2.241e+03 4.543e+02 4.070e+01 2020 02 26 00 05 46 4.860e+03 4.837e+03 2.242e+03 4.574e+02 3.915e+01 2020 02 26 00 07 36 4.803e+03 4.769e+03 2.197e+03 4.464e+02 3.795e+01 2020 02 26 00 09 26 4.814e+03 4.777e+03 2.194e+03 4.478e+02 3.960e+01 2020 02 26 00 11 16 4.892e+03 4.883e+03 2.293e+03 4.691e+02 3.992e+01 2020 02 26 00 13 06 4.888e+03 4.879e+03 2.286e+03 4.641e+02 3.910e+01 2020 02 26 00 14 56 4.901e+03 4.901e+03 2.359e+03 4.829e+02 4.048e+01 2020 02 26 00 16 46 4.841e+03 4.823e+03 2.229e+03 4.559e+02 3.683e+01 2020 02 26 00 18 36 4.815e+03 4.774e+03 2.180e+03 4.406e+02 3.915e+01 2020 02 26 00 20 26 4.817e+03 4.786e+03 2.195e+03 4.386e+02 3.852e+01 2020 02 26 00 22 16 4.901e+03 4.897e+03 2.296e+03 4.629e+02 3.940e+01 2020 02 26 00 24 07 4.863e+03 4.840e+03 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