# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2020 02 23 00 01 10 5.199e+03 4.782e+03 1.598e+03 3.449e+02 2.912e+01 2020 02 23 00 03 00 5.167e+03 4.725e+03 1.539e+03 3.331e+02 2.405e+01 2020 02 23 00 04 50 5.132e+03 4.655e+03 1.457e+03 3.096e+02 2.400e+01 2020 02 23 00 06 40 4.999e+03 4.463e+03 1.334e+03 2.818e+02 2.248e+01 2020 02 23 00 08 30 4.974e+03 4.418e+03 1.298e+03 2.647e+02 2.038e+01 2020 02 23 00 10 20 5.017e+03 4.480e+03 1.331e+03 2.740e+02 2.143e+01 2020 02 23 00 12 10 4.998e+03 4.468e+03 1.302e+03 2.684e+02 1.943e+01 2020 02 23 00 14 00 4.886e+03 4.322e+03 1.214e+03 2.459e+02 1.885e+01 2020 02 23 00 15 50 4.739e+03 4.097e+03 1.104e+03 2.229e+02 1.690e+01 2020 02 23 00 17 40 4.677e+03 4.025e+03 1.054e+03 2.098e+02 1.757e+01 2020 02 23 00 19 30 4.654e+03 4.000e+03 1.039e+03 2.012e+02 1.515e+01 2020 02 23 00 21 20 4.775e+03 4.141e+03 1.086e+03 2.120e+02 1.725e+01 2020 02 23 00 23 11 4.670e+03 4.018e+03 1.035e+03 2.033e+02 1.470e+01 2020 02 23 00 25 01 4.617e+03 3.937e+03 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