# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2020 02 20 00 00 11 5.925e+03 5.319e+03 1.302e+03 2.292e+02 2.735e+01 2020 02 20 00 02 01 5.929e+03 5.344e+03 1.310e+03 2.327e+02 2.662e+01 2020 02 20 00 03 52 6.005e+03 5.433e+03 1.334e+03 2.340e+02 2.593e+01 2020 02 20 00 05 41 6.052e+03 5.457e+03 1.302e+03 2.332e+02 2.720e+01 2020 02 20 00 07 32 6.092e+03 5.492e+03 1.312e+03 2.308e+02 2.677e+01 2020 02 20 00 09 22 6.038e+03 5.474e+03 1.373e+03 2.408e+02 2.848e+01 2020 02 20 00 11 12 5.973e+03 5.420e+03 1.378e+03 2.420e+02 2.940e+01 2020 02 20 00 13 02 5.994e+03 5.447e+03 1.368e+03 2.399e+02 2.998e+01 2020 02 20 00 14 52 5.992e+03 5.387e+03 1.314e+03 2.264e+02 2.912e+01 2020 02 20 00 16 42 6.076e+03 5.467e+03 1.318e+03 2.296e+02 2.768e+01 2020 02 20 00 18 32 6.075e+03 5.494e+03 1.347e+03 2.338e+02 2.800e+01 2020 02 20 00 20 23 6.153e+03 5.653e+03 1.428e+03 2.427e+02 2.910e+01 2020 02 20 00 22 12 6.119e+03 5.603e+03 1.417e+03 2.444e+02 2.982e+01 2020 02 20 00 24 02 6.123e+03 5.557e+03 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