# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2020 02 10 00 00 38 3.352e+03 2.451e+03 5.358e+02 7.145e+01 6.150e+00 2020 02 10 00 02 28 3.219e+03 2.318e+03 5.042e+02 6.690e+01 6.075e+00 2020 02 10 00 04 18 3.267e+03 2.362e+03 5.044e+02 6.778e+01 5.800e+00 2020 02 10 00 06 08 3.348e+03 2.434e+03 5.089e+02 7.088e+01 6.100e+00 2020 02 10 00 07 59 3.542e+03 2.621e+03 5.489e+02 7.545e+01 7.250e+00 2020 02 10 00 09 49 3.547e+03 2.627e+03 5.451e+02 7.460e+01 7.025e+00 2020 02 10 00 11 39 3.558e+03 2.630e+03 5.326e+02 7.472e+01 6.725e+00 2020 02 10 00 13 29 3.572e+03 2.637e+03 5.326e+02 7.515e+01 6.950e+00 2020 02 10 00 15 19 3.658e+03 2.712e+03 5.386e+02 7.622e+01 7.125e+00 2020 02 10 00 17 09 3.920e+03 2.962e+03 6.066e+02 8.462e+01 7.900e+00 2020 02 10 00 18 59 3.926e+03 2.978e+03 6.034e+02 8.265e+01 7.525e+00 2020 02 10 00 20 49 3.901e+03 2.962e+03 5.988e+02 8.295e+01 8.425e+00 2020 02 10 00 22 39 3.767e+03 2.829e+03 5.688e+02 7.783e+01 7.025e+00 2020 02 10 00 24 29 3.811e+03 2.872e+03 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