# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2018 02 12 00 01 49 6.496e+03 3.628e+03 3.386e+02 5.108e+01 5.400e+00 2018 02 12 00 03 39 6.501e+03 3.658e+03 3.399e+02 4.805e+01 5.225e+00 2018 02 12 00 05 29 6.522e+03 3.628e+03 3.386e+02 4.933e+01 4.725e+00 2018 02 12 00 07 19 6.521e+03 3.648e+03 3.424e+02 5.077e+01 5.300e+00 2018 02 12 00 09 10 6.530e+03 3.650e+03 3.439e+02 5.105e+01 5.500e+00 2018 02 12 00 11 00 6.556e+03 3.618e+03 3.398e+02 5.048e+01 4.700e+00 2018 02 12 00 12 50 6.578e+03 3.624e+03 3.386e+02 4.948e+01 5.600e+00 2018 02 12 00 14 40 6.585e+03 3.647e+03 3.458e+02 5.052e+01 5.000e+00 2018 02 12 00 16 30 6.590e+03 3.647e+03 3.454e+02 5.012e+01 5.450e+00 2018 02 12 00 18 20 6.607e+03 3.624e+03 3.385e+02 4.985e+01 5.550e+00 2018 02 12 00 20 10 6.627e+03 3.647e+03 3.377e+02 5.098e+01 5.075e+00 2018 02 12 00 22 00 6.651e+03 3.672e+03 3.469e+02 5.215e+01 6.375e+00 2018 02 12 00 23 50 6.682e+03 3.726e+03 3.406e+02 5.008e+01 5.475e+00 2018 02 12 00 25 40 6.695e+03 3.696e+03 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01 18 57 6.811e+03 3.769e+03 3.585e+02 5.333e+01 6.400e+00 2018 02 12 01 20 47 6.829e+03 3.802e+03 3.593e+02 5.202e+01 6.725e+00 2018 02 12 01 22 37 6.838e+03 3.783e+03 3.599e+02 5.175e+01 6.225e+00 2018 02 12 01 24 27 6.850e+03 3.837e+03 3.620e+02 5.405e+01 5.425e+00 2018 02 12 01 26 17 6.857e+03 3.826e+03 3.587e+02 5.100e+01 5.575e+00 2018 02 12 01 28 08 6.883e+03 3.858e+03 3.647e+02 5.375e+01 4.650e+00 2018 02 12 01 29 58 6.890e+03 3.856e+03 3.664e+02 5.508e+01 5.850e+00 2018 02 12 01 31 48 6.899e+03 3.874e+03 3.643e+02 5.415e+01 6.175e+00 2018 02 12 01 33 38 6.876e+03 3.871e+03 3.701e+02 5.395e+01 5.525e+00 2018 02 12 01 35 28 6.850e+03 3.936e+03 3.773e+02 5.488e+01 5.850e+00 2018 02 12 01 37 18 6.838e+03 3.877e+03 3.676e+02 5.508e+01 6.100e+00 2018 02 12 01 39 08 6.854e+03 3.873e+03 3.698e+02 5.125e+01 6.075e+00 2018 02 12 01 40 58 6.893e+03 3.873e+03 3.654e+02 5.510e+01 5.525e+00 2018 02 12 01 42 48 6.955e+03 3.888e+03 3.706e+02 5.767e+01 6.925e+00 2018 02 12 01 44 38 6.954e+03 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