# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2017 10 16 10 11 52 4.561e+02 3.609e+02 1.538e+02 3.560e+01 3.275e+00 2017 10 16 10 13 42 4.442e+02 3.511e+02 1.447e+02 3.392e+01 2.500e+00 2017 10 16 10 15 32 4.161e+02 3.286e+02 1.315e+02 3.182e+01 3.000e+00 2017 10 16 10 17 22 4.109e+02 3.256e+02 1.310e+02 3.460e+01 4.575e+00 2017 10 16 10 19 12 4.005e+02 3.157e+02 1.266e+02 3.455e+01 5.175e+00 2017 10 16 10 28 23 4.064e+02 3.138e+02 1.205e+02 3.802e+01 9.300e+00 2017 10 16 10 30 13 3.811e+02 2.953e+02 1.146e+02 3.452e+01 8.350e+00 2017 10 16 10 32 03 3.976e+02 3.092e+02 1.172e+02 3.652e+01 8.275e+00 2017 10 16 10 33 53 3.856e+02 2.989e+02 1.112e+02 3.238e+01 6.675e+00 2017 10 16 10 35 43 3.916e+02 3.034e+02 1.122e+02 3.405e+01 7.150e+00 2017 10 16 10 37 33 4.149e+02 3.134e+02 1.155e+02 3.233e+01 2.500e+00 2017 10 16 10 39 24 4.199e+02 3.217e+02 1.161e+02 3.208e+01 2.425e+00 2017 10 16 10 41 14 4.212e+02 3.216e+02 1.164e+02 3.057e+01 2.100e+00 2017 10 16 10 43 04 4.328e+02 3.301e+02 1.184e+02 2.700e+01 1.525e+00 2017 10 16 10 44 54 4.198e+02 3.247e+02 1.108e+02 2.318e+01 1.050e+00 2017 10 16 10 46 44 4.075e+02 3.090e+02 1.026e+02 1.948e+01 9.250e-01 2017 10 16 10 48 34 4.072e+02 3.074e+02 9.840e+01 1.770e+01 8.750e-01 2017 10 16 10 50 24 3.939e+02 2.955e+02 9.072e+01 1.627e+01 1.125e+00 2017 10 16 10 52 14 3.948e+02 2.993e+02 9.415e+01 1.575e+01 9.750e-01 2017 10 16 10 54 04 3.961e+02 3.001e+02 9.490e+01 1.530e+01 9.500e-01 2017 10 16 10 55 54 3.781e+02 2.871e+02 8.915e+01 1.497e+01 5.000e-01 2017 10 16 10 57 44 3.807e+02 2.910e+02 8.822e+01 1.453e+01 6.000e-01 2017 10 16 10 59 34 4.006e+02 3.032e+02 9.033e+01 1.507e+01 5.750e-01 2017 10 16 11 01 25 3.647e+02 2.783e+02 8.472e+01 1.365e+01 7.250e-01 2017 10 16 11 03 15 3.529e+02 2.681e+02 8.033e+01 1.235e+01 8.250e-01 2017 10 16 11 05 05 3.372e+02 2.540e+02 7.558e+01 1.097e+01 7.750e-01 2017 10 16 11 06 55 3.236e+02 2.408e+02 7.217e+01 1.165e+01 7.000e-01 2017 10 16 11 08 45 3.349e+02 2.523e+02 7.465e+01 1.172e+01 8.000e-01 2017 10 16 11 10 35 3.474e+02 2.609e+02 7.728e+01 1.195e+01 7.250e-01 2017 10 16 11 12 25 3.536e+02 2.631e+02 7.838e+01 1.265e+01 6.250e-01 2017 10 16 11 14 15 3.602e+02 2.703e+02 7.785e+01 1.238e+01 6.500e-01 2017 10 16 11 16 05 3.617e+02 2.708e+02 8.197e+01 1.220e+01 7.250e-01 2017 10 16 11 17 55 3.569e+02 2.627e+02 7.695e+01 1.178e+01 5.750e-01 2017 10 16 11 19 45 3.641e+02 2.717e+02 7.942e+01 1.235e+01 7.250e-01 2017 10 16 11 21 36 3.666e+02 2.723e+02 7.942e+01 1.245e+01 6.500e-01 2017 10 16 11 23 26 3.623e+02 2.707e+02 8.295e+01 1.245e+01 7.250e-01 2017 10 16 11 25 16 3.655e+02 2.724e+02 8.088e+01 1.262e+01 6.000e-01 2017 10 16 11 27 06 3.671e+02 2.774e+02 7.935e+01 1.155e+01 7.750e-01