# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2017 08 09 00 00 53 5.993e+02 3.102e+02 4.135e+01 8.050e+00 1.175e+00 2017 08 09 00 02 43 5.780e+02 3.099e+02 4.190e+01 7.100e+00 1.425e+00 2017 08 09 00 04 33 5.577e+02 2.992e+02 4.267e+01 6.750e+00 1.175e+00 2017 08 09 00 06 23 5.555e+02 3.019e+02 4.125e+01 6.175e+00 9.500e-01 2017 08 09 00 08 13 5.592e+02 3.049e+02 4.390e+01 6.325e+00 7.750e-01 2017 08 09 00 10 03 5.570e+02 3.041e+02 4.223e+01 7.450e+00 1.400e+00 2017 08 09 00 11 53 5.604e+02 3.026e+02 4.245e+01 6.450e+00 8.750e-01 2017 08 09 00 13 43 5.649e+02 3.058e+02 4.192e+01 6.475e+00 1.125e+00 2017 08 09 00 15 33 5.735e+02 3.183e+02 4.695e+01 7.400e+00 1.200e+00 2017 08 09 00 17 23 5.698e+02 3.129e+02 4.585e+01 7.000e+00 1.150e+00 2017 08 09 00 19 13 5.714e+02 3.183e+02 4.638e+01 6.900e+00 1.400e+00 2017 08 09 00 21 03 5.740e+02 3.201e+02 4.640e+01 7.275e+00 1.025e+00 2017 08 09 00 22 54 5.663e+02 3.153e+02 4.585e+01 7.850e+00 1.250e+00 2017 08 09 00 24 44 5.469e+02 3.097e+02 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5.100e+00 8.250e-01 2017 08 09 23 35 27 9.038e+01 6.597e+01 2.450e+01 5.125e+00 6.750e-01 2017 08 09 23 37 18 8.872e+01 6.447e+01 2.343e+01 5.050e+00 7.000e-01 2017 08 09 23 39 08 8.775e+01 6.383e+01 2.280e+01 5.350e+00 8.500e-01 2017 08 09 23 40 58 8.775e+01 6.360e+01 2.323e+01 5.075e+00 4.250e-01 2017 08 09 23 42 48 8.203e+01 5.988e+01 2.055e+01 4.550e+00 6.250e-01 2017 08 09 23 44 38 7.765e+01 5.702e+01 2.015e+01 4.250e+00 5.250e-01 2017 08 09 23 46 28 8.097e+01 6.005e+01 2.157e+01 4.900e+00 7.250e-01 2017 08 09 23 48 18 7.897e+01 5.817e+01 2.030e+01 4.150e+00 7.500e-01 2017 08 09 23 50 08 7.517e+01 5.440e+01 1.905e+01 3.675e+00 5.500e-01 2017 08 09 23 51 58 7.078e+01 5.210e+01 1.838e+01 4.150e+00 8.500e-01 2017 08 09 23 53 48 6.797e+01 4.850e+01 1.650e+01 3.500e+00 3.250e-01 2017 08 09 23 55 38 7.042e+01 5.110e+01 1.823e+01 3.775e+00 4.750e-01 2017 08 09 23 57 28 6.528e+01 4.877e+01 1.570e+01 3.450e+00 4.750e-01 2017 08 09 23 59 19 6.285e+01 4.690e+01 1.550e+01 3.475e+00 6.250e-01