# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2017 03 28 13 53 57 4.579e+02 2.225e+02 5.908e+01 1.230e+01 7.250e-01 2017 03 28 22 39 45 1.951e+02 1.548e+02 4.867e+01 8.475e+00 5.500e-01 2017 03 28 22 41 35 1.944e+02 1.551e+02 5.033e+01 8.725e+00 4.250e-01 2017 03 28 22 43 25 1.889e+02 1.519e+02 4.900e+01 8.400e+00 4.250e-01 2017 03 28 22 45 16 1.872e+02 1.531e+02 5.062e+01 9.000e+00 4.250e-01 2017 03 28 22 47 06 1.837e+02 1.498e+02 4.990e+01 8.825e+00 5.000e-01 2017 03 28 22 48 56 1.928e+02 1.548e+02 5.040e+01 9.500e+00 3.000e-01 2017 03 28 22 50 46 1.806e+02 1.493e+02 4.742e+01 7.325e+00 3.000e-01 2017 03 28 22 52 36 1.838e+02 1.508e+02 4.840e+01 8.900e+00 4.250e-01 2017 03 28 22 54 26 1.804e+02 1.472e+02 4.910e+01 9.275e+00 3.000e-01 2017 03 28 22 56 16 1.862e+02 1.526e+02 5.092e+01 8.975e+00 3.250e-01 2017 03 28 22 58 06 1.865e+02 1.525e+02 5.158e+01 9.025e+00 3.250e-01 2017 03 28 22 59 56 1.839e+02 1.509e+02 4.867e+01 9.000e+00 4.750e-01 2017 03 28 23 01 46 1.844e+02 1.504e+02 4.923e+01 8.000e+00 3.000e-01 2017 03 28 23 03 36 1.757e+02 1.427e+02 4.648e+01 8.050e+00 5.250e-01 2017 03 28 23 05 26 1.767e+02 1.447e+02 4.712e+01 8.250e+00 4.750e-01 2017 03 28 23 07 17 1.750e+02 1.432e+02 4.595e+01 8.050e+00 3.750e-01 2017 03 28 23 09 07 1.770e+02 1.454e+02 4.683e+01 8.900e+00 4.750e-01 2017 03 28 23 10 57 1.824e+02 1.487e+02 4.642e+01 7.550e+00 3.250e-01 2017 03 28 23 12 47 1.824e+02 1.463e+02 4.633e+01 8.000e+00 3.500e-01 2017 03 28 23 14 37 1.815e+02 1.475e+02 4.605e+01 8.125e+00 3.750e-01 2017 03 28 23 16 27 1.851e+02 1.525e+02 4.967e+01 8.225e+00 3.500e-01 2017 03 28 23 18 17 1.786e+02 1.451e+02 4.477e+01 7.875e+00 3.000e-01 2017 03 28 23 20 07 1.716e+02 1.400e+02 4.462e+01 7.575e+00 3.750e-01 2017 03 28 23 21 57 1.737e+02 1.424e+02 4.592e+01 7.850e+00 3.500e-01 2017 03 28 23 23 47 1.650e+02 1.349e+02 4.152e+01 7.575e+00 3.000e-01 2017 03 28 23 25 37 1.691e+02 1.368e+02 4.290e+01 7.000e+00 2.000e-01 2017 03 28 23 27 27 1.686e+02 1.362e+02 4.158e+01 7.375e+00 4.500e-01 2017 03 28 23 29 17 1.776e+02 1.446e+02 4.633e+01 7.425e+00 4.000e-01 2017 03 28 23 31 08 1.642e+02 1.332e+02 4.102e+01 6.925e+00 3.750e-01 2017 03 28 23 32 58 1.633e+02 1.326e+02 4.017e+01 7.050e+00 2.500e-01 2017 03 28 23 34 48 1.742e+02 1.435e+02 4.398e+01 7.425e+00 1.250e-01 2017 03 28 23 36 38 1.772e+02 1.457e+02 4.625e+01 7.800e+00 3.250e-01 2017 03 28 23 38 28 1.755e+02 1.456e+02 4.838e+01 9.275e+00 4.250e-01 2017 03 28 23 40 18 1.763e+02 1.449e+02 4.785e+01 8.100e+00 3.000e-01 2017 03 28 23 42 08 1.789e+02 1.460e+02 4.827e+01 8.750e+00 5.000e-01 2017 03 28 23 43 58 1.911e+02 1.542e+02 5.135e+01 9.400e+00 4.750e-01 2017 03 28 23 45 48 1.869e+02 1.504e+02 4.965e+01 8.925e+00 3.250e-01 2017 03 28 23 47 38 2.011e+02 1.561e+02 5.183e+01 9.650e+00 3.750e-01 2017 03 28 23 49 28 1.949e+02 1.584e+02 5.395e+01 9.925e+00 3.750e-01 2017 03 28 23 51 18 1.935e+02 1.557e+02 5.225e+01 9.750e+00 3.750e-01 2017 03 28 23 53 08 1.879e+02 1.518e+02 5.055e+01 9.925e+00 2.750e-01 2017 03 28 23 54 59 2.528e+02 1.824e+02 4.995e+01 9.350e+00 4.750e-01 2017 03 28 23 56 49 1.994e+02 1.552e+02 4.788e+01 9.400e+00 4.000e-01 2017 03 28 23 58 39 1.924e+02 1.473e+02 4.838e+01 9.175e+00 4.750e-01