# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2016 06 13 00 00 24 7.352e+03 6.928e+03 2.265e+03 4.139e+02 4.706e+01 2016 06 13 00 03 54 7.369e+03 6.941e+03 2.272e+03 4.196e+02 4.573e+01 2016 06 13 00 07 24 7.406e+03 6.970e+03 2.281e+03 4.242e+02 4.706e+01 2016 06 13 00 10 54 7.432e+03 6.981e+03 2.281e+03 4.228e+02 4.676e+01 2016 06 13 00 14 24 7.465e+03 7.015e+03 2.299e+03 4.252e+02 4.744e+01 2016 06 13 00 17 55 7.501e+03 7.039e+03 2.302e+03 4.241e+02 4.726e+01 2016 06 13 00 21 25 7.556e+03 7.088e+03 2.321e+03 4.305e+02 4.929e+01 2016 06 13 00 24 55 7.657e+03 7.151e+03 2.329e+03 4.273e+02 4.695e+01 2016 06 13 00 28 25 7.718e+03 7.217e+03 2.347e+03 4.349e+02 4.855e+01 2016 06 13 00 31 55 7.802e+03 7.313e+03 2.382e+03 4.409e+02 4.701e+01 2016 06 13 00 35 25 7.851e+03 7.381e+03 2.412e+03 4.418e+02 4.727e+01 2016 06 13 00 38 55 7.855e+03 7.397e+03 2.432e+03 4.382e+02 4.577e+01 2016 06 13 00 42 25 7.826e+03 7.399e+03 2.446e+03 4.448e+02 4.554e+01 2016 06 13 00 45 55 7.819e+03 7.392e+03 2.456e+03 4.445e+02 4.539e+01 2016 06 13 00 49 25 7.786e+03 7.375e+03 2.466e+03 4.465e+02 4.686e+01 2016 06 13 00 52 55 7.779e+03 7.380e+03 2.465e+03 4.441e+02 4.531e+01 2016 06 13 00 56 26 7.761e+03 7.368e+03 2.487e+03 4.520e+02 4.565e+01 2016 06 13 00 59 56 7.742e+03 7.369e+03 2.503e+03 4.524e+02 4.499e+01 2016 06 13 01 03 33 7.742e+03 7.366e+03 2.514e+03 4.585e+02 4.615e+01 2016 06 13 01 07 03 7.751e+03 7.387e+03 2.532e+03 4.569e+02 4.492e+01 2016 06 13 01 10 33 7.772e+03 7.414e+03 2.577e+03 4.744e+02 4.465e+01 2016 06 13 01 14 03 7.807e+03 7.446e+03 2.623e+03 4.862e+02 4.464e+01 2016 06 13 01 17 33 7.842e+03 7.494e+03 2.672e+03 4.995e+02 4.456e+01 2016 06 13 01 21 03 7.881e+03 7.537e+03 2.720e+03 5.151e+02 4.733e+01 2016 06 13 01 24 33 7.896e+03 7.555e+03 2.736e+03 5.181e+02 4.642e+01 2016 06 13 01 28 03 7.912e+03 7.560e+03 2.748e+03 5.198e+02 4.535e+01 2016 06 13 01 31 33 7.913e+03 7.566e+03 2.761e+03 5.196e+02 4.469e+01 2016 06 13 01 35 04 7.926e+03 7.582e+03 2.778e+03 5.273e+02 4.559e+01 2016 06 13 01 38 34 7.923e+03 7.598e+03 2.798e+03 5.274e+02 4.542e+01 2016 06 13 01 42 04 7.923e+03 7.593e+03 2.806e+03 5.285e+02 4.421e+01 2016 06 13 01 45 34 7.931e+03 7.603e+03 2.817e+03 5.331e+02 4.580e+01 2016 06 13 01 49 04 7.936e+03 7.611e+03 2.845e+03 5.363e+02 4.615e+01 2016 06 13 01 52 34 7.919e+03 7.596e+03 2.857e+03 5.395e+02 4.473e+01 2016 06 13 01 56 04 7.908e+03 7.597e+03 2.869e+03 5.432e+02 4.560e+01 2016 06 13 01 59 34 7.909e+03 7.601e+03 2.900e+03 5.435e+02 4.483e+01 2016 06 13 02 03 04 7.888e+03 7.596e+03 2.929e+03 5.547e+02 4.509e+01 2016 06 13 02 06 34 7.890e+03 7.595e+03 2.963e+03 5.631e+02 4.369e+01 2016 06 13 02 10 05 7.874e+03 7.597e+03 2.991e+03 5.675e+02 4.375e+01 2016 06 13 02 13 35 7.868e+03 7.604e+03 3.021e+03 5.795e+02 4.551e+01 2016 06 13 02 17 05 7.878e+03 7.629e+03 3.068e+03 5.864e+02 4.374e+01 2016 06 13 02 20 35 7.908e+03 7.657e+03 3.090e+03 5.894e+02 4.427e+01 2016 06 13 02 24 05 7.942e+03 7.701e+03 3.125e+03 6.000e+02 4.544e+01 2016 06 13 02 27 35 7.967e+03 7.745e+03 3.180e+03 6.103e+02 4.504e+01 2016 06 13 02 31 05 7.997e+03 7.774e+03 3.235e+03 6.240e+02 4.383e+01 2016 06 13 02 34 35 8.033e+03 7.807e+03 3.237e+03 6.277e+02 4.319e+01 2016 06 13 02 38 05 8.040e+03 7.803e+03 3.229e+03 6.243e+02 4.389e+01 2016 06 13 02 41 35 8.046e+03 7.801e+03 3.232e+03 6.261e+02 4.208e+01 2016 06 13 02 45 05 8.029e+03 7.784e+03 3.225e+03 6.221e+02 4.042e+01 2016 06 13 02 48 35 8.024e+03 7.780e+03 3.250e+03 6.365e+02 3.991e+01 2016 06 13 02 52 06 8.016e+03 7.771e+03 3.248e+03 6.371e+02 4.111e+01 2016 06 13 02 55 36 8.030e+03 7.782e+03 3.247e+03 6.349e+02 3.836e+01 2016 06 13 02 59 06 7.997e+03 7.740e+03 3.215e+03 6.232e+02 3.750e+01 2016 06 13 03 02 36 7.979e+03 7.715e+03 3.181e+03 6.114e+02 3.624e+01 2016 06 13 03 06 06 7.937e+03 7.667e+03 3.177e+03 6.128e+02 3.596e+01 2016 06 13 03 09 36 7.899e+03 7.629e+03 3.132e+03 5.955e+02 3.633e+01 2016 06 13 03 13 06 7.874e+03 7.601e+03 3.105e+03 5.993e+02 3.464e+01 2016 06 13 03 16 36 7.805e+03 7.510e+03 3.022e+03 5.705e+02 3.214e+01 2016 06 13 03 20 06 7.763e+03 7.447e+03 2.939e+03 5.467e+02 3.102e+01 2016 06 13 03 23 36 7.743e+03 7.424e+03 2.912e+03 5.425e+02 3.038e+01 2016 06 13 03 27 06 7.667e+03 7.320e+03 2.785e+03 5.065e+02 2.689e+01 2016 06 13 03 30 36 7.607e+03 7.240e+03 2.720e+03 4.910e+02 2.581e+01 2016 06 13 03 34 07 7.574e+03 7.197e+03 2.673e+03 4.843e+02 2.374e+01 2016 06 13 03 37 37 7.541e+03 7.151e+03 2.595e+03 4.617e+02 2.271e+01 2016 06 13 03 41 07 7.498e+03 7.100e+03 2.507e+03 4.347e+02 2.050e+01 2016 06 13 03 44 37 7.500e+03 7.096e+03 2.495e+03 4.306e+02 2.171e+01 2016 06 13 03 48 07 7.508e+03 7.106e+03 2.515e+03 4.384e+02 2.075e+01 2016 06 13 03 51 37 7.497e+03 7.092e+03 2.474e+03 4.292e+02 2.016e+01 2016 06 13 03 55 07 7.508e+03 7.108e+03 2.437e+03 4.145e+02 2.085e+01 2016 06 13 03 58 37 7.478e+03 7.068e+03 2.391e+03 4.062e+02 1.981e+01 2016 06 13 04 02 07 7.444e+03 7.039e+03 2.359e+03 4.006e+02 1.884e+01 2016 06 13 04 05 37 7.390e+03 6.950e+03 2.269e+03 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2016 06 13 04 58 09 6.387e+03 5.678e+03 1.474e+03 2.268e+02 1.124e+01 2016 06 13 05 01 39 6.386e+03 5.704e+03 1.507e+03 2.303e+02 1.139e+01 2016 06 13 05 05 09 6.417e+03 5.729e+03 1.535e+03 2.394e+02 1.224e+01 2016 06 13 05 08 39 6.358e+03 5.667e+03 1.525e+03 2.397e+02 1.306e+01 2016 06 13 05 12 09 6.302e+03 5.639e+03 1.514e+03 2.395e+02 1.355e+01 2016 06 13 05 15 39 6.298e+03 5.609e+03 1.494e+03 2.328e+02 1.285e+01 2016 06 13 05 19 09 6.275e+03 5.529e+03 1.444e+03 2.253e+02 1.200e+01 2016 06 13 05 22 39 6.234e+03 5.467e+03 1.404e+03 2.223e+02 1.316e+01 2016 06 13 05 26 09 6.222e+03 5.408e+03 1.381e+03 2.196e+02 1.330e+01 2016 06 13 05 29 39 6.115e+03 5.287e+03 1.328e+03 2.091e+02 1.281e+01 2016 06 13 05 33 09 6.048e+03 5.265e+03 1.314e+03 2.015e+02 1.203e+01 2016 06 13 05 36 40 6.045e+03 5.266e+03 1.297e+03 1.965e+02 1.171e+01 2016 06 13 05 40 10 6.146e+03 5.386e+03 1.337e+03 2.031e+02 1.214e+01 2016 06 13 05 43 40 6.204e+03 5.502e+03 1.392e+03 2.133e+02 1.294e+01 2016 06 13 05 47 10 6.246e+03 5.538e+03 1.414e+03 2.212e+02 1.344e+01 2016 06 13 05 50 40 6.195e+03 5.429e+03 1.349e+03 2.027e+02 1.103e+01 2016 06 13 05 54 10 6.175e+03 5.374e+03 1.316e+03 1.963e+02 1.096e+01 2016 06 13 05 57 40 6.102e+03 5.304e+03 1.293e+03 1.960e+02 1.060e+01 2016 06 13 06 01 10 6.107e+03 5.339e+03 1.316e+03 1.988e+02 1.069e+01 2016 06 13 06 04 40 6.067e+03 5.291e+03 1.302e+03 1.977e+02 1.070e+01 2016 06 13 06 08 10 6.060e+03 5.250e+03 1.273e+03 1.927e+02 1.029e+01 2016 06 13 06 11 40 6.098e+03 5.242e+03 1.260e+03 1.894e+02 1.010e+01 2016 06 13 06 15 11 5.937e+03 5.042e+03 1.166e+03 1.688e+02 8.963e+00 2016 06 13 06 18 41 5.936e+03 4.994e+03 1.130e+03 1.640e+02 8.963e+00 2016 06 13 06 22 11 5.906e+03 4.935e+03 1.097e+03 1.555e+02 8.287e+00 2016 06 13 06 25 41 5.838e+03 4.852e+03 1.039e+03 1.447e+02 7.400e+00 2016 06 13 06 29 11 5.796e+03 4.811e+03 1.001e+03 1.354e+02 6.975e+00 2016 06 13 06 32 41 5.677e+03 4.685e+03 9.409e+02 1.264e+02 6.362e+00 2016 06 13 06 36 11 5.579e+03 4.583e+03 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