# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2016 06 03 00 02 22 7.322e+03 6.712e+03 2.241e+03 4.208e+02 2.131e+01 2016 06 03 00 05 52 7.530e+03 6.902e+03 2.305e+03 4.341e+02 2.254e+01 2016 06 03 00 09 22 7.329e+03 6.736e+03 2.268e+03 4.279e+02 2.139e+01 2016 06 03 00 12 52 7.179e+03 6.629e+03 2.242e+03 4.159e+02 2.064e+01 2016 06 03 00 16 22 7.269e+03 6.694e+03 2.260e+03 4.243e+02 2.150e+01 2016 06 03 00 19 52 7.375e+03 6.812e+03 2.304e+03 4.288e+02 2.229e+01 2016 06 03 00 23 22 7.394e+03 6.853e+03 2.334e+03 4.359e+02 2.294e+01 2016 06 03 00 26 52 7.384e+03 6.821e+03 2.321e+03 4.374e+02 2.294e+01 2016 06 03 00 30 22 7.431e+03 6.848e+03 2.320e+03 4.334e+02 2.219e+01 2016 06 03 00 33 52 7.328e+03 6.800e+03 2.329e+03 4.389e+02 2.238e+01 2016 06 03 00 37 22 7.333e+03 6.805e+03 2.338e+03 4.360e+02 2.293e+01 2016 06 03 00 40 53 7.343e+03 6.826e+03 2.337e+03 4.381e+02 2.295e+01 2016 06 03 00 44 23 7.395e+03 6.880e+03 2.358e+03 4.417e+02 2.184e+01 2016 06 03 00 47 53 7.394e+03 6.880e+03 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8.876e+03 8.531e+03 3.431e+03 7.592e+02 5.542e+01 2016 06 03 23 22 56 8.837e+03 8.506e+03 3.466e+03 7.468e+02 5.352e+01 2016 06 03 23 26 26 8.914e+03 8.635e+03 3.622e+03 7.754e+02 5.677e+01 2016 06 03 23 29 57 9.007e+03 8.788e+03 3.764e+03 7.967e+02 6.417e+01 2016 06 03 23 33 27 9.032e+03 8.832e+03 3.798e+03 8.295e+02 7.820e+01 2016 06 03 23 36 57 9.092e+03 8.895e+03 3.864e+03 8.341e+02 7.822e+01 2016 06 03 23 40 27 9.037e+03 8.875e+03 4.110e+03 8.626e+02 7.060e+01 2016 06 03 23 43 57 9.050e+03 8.889e+03 4.197e+03 8.969e+02 6.697e+01 2016 06 03 23 47 27 8.989e+03 8.830e+03 4.156e+03 9.060e+02 6.034e+01 2016 06 03 23 50 57 9.120e+03 9.024e+03 4.698e+03 1.159e+03 5.988e+01 2016 06 03 23 54 27 9.066e+03 8.963e+03 4.642e+03 1.162e+03 6.126e+01 2016 06 03 23 57 57 9.132e+03 9.049e+03 4.773e+03 1.253e+03 8.526e+01