# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2016 02 13 00 01 36 1.504e+03 1.075e+03 2.502e+02 7.708e+01 4.354e+00 2016 02 13 00 03 46 1.469e+03 1.049e+03 2.419e+02 7.527e+01 4.146e+00 2016 02 13 00 05 56 1.441e+03 1.026e+03 2.458e+02 7.571e+01 4.292e+00 2016 02 13 00 08 06 1.444e+03 1.035e+03 2.470e+02 7.506e+01 4.104e+00 2016 02 13 00 10 17 1.471e+03 1.054e+03 2.495e+02 7.848e+01 4.396e+00 2016 02 13 00 12 27 1.456e+03 1.047e+03 2.516e+02 7.862e+01 4.229e+00 2016 02 13 00 14 37 1.710e+03 1.240e+03 2.956e+02 9.404e+01 4.729e+00 2016 02 13 00 16 47 1.849e+03 1.355e+03 3.272e+02 1.058e+02 5.958e+00 2016 02 13 00 18 57 1.789e+03 1.299e+03 3.188e+02 1.032e+02 5.625e+00 2016 02 13 00 21 07 1.300e+03 9.235e+02 2.218e+02 7.027e+01 3.917e+00 2016 02 13 00 23 17 1.272e+03 9.089e+02 2.209e+02 7.065e+01 3.521e+00 2016 02 13 00 25 27 1.230e+03 8.801e+02 2.115e+02 6.644e+01 3.479e+00 2016 02 13 00 27 37 1.249e+03 8.815e+02 2.211e+02 7.392e+01 4.312e+00 2016 02 13 00 29 47 1.362e+03 9.607e+02 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1.399e+02 1.165e+01 2016 02 13 06 12 21 1.957e+03 1.527e+03 3.572e+02 1.331e+02 1.146e+01 2016 02 13 06 14 31 2.160e+03 1.709e+03 4.010e+02 1.441e+02 1.233e+01 2016 02 13 06 16 41 2.608e+03 2.090e+03 4.919e+02 1.842e+02 1.562e+01 2016 02 13 06 18 51 2.583e+03 2.078e+03 4.899e+02 1.811e+02 1.627e+01 2016 02 13 06 21 01 2.151e+03 1.709e+03 4.005e+02 1.492e+02 1.183e+01 2016 02 13 06 23 11 2.034e+03 1.604e+03 3.637e+02 1.341e+02 1.088e+01 2016 02 13 06 25 21 2.029e+03 1.606e+03 3.679e+02 1.334e+02 1.142e+01 2016 02 13 06 27 32 2.012e+03 1.587e+03 3.592e+02 1.304e+02 1.079e+01 2016 02 13 06 29 42 2.031e+03 1.605e+03 3.735e+02 1.354e+02 1.179e+01 2016 02 13 06 31 52 1.982e+03 1.556e+03 3.562e+02 1.287e+02 1.140e+01 2016 02 13 06 34 02 1.944e+03 1.526e+03 3.432e+02 1.245e+02 1.088e+01 2016 02 13 06 36 12 2.040e+03 1.597e+03 3.600e+02 1.318e+02 1.183e+01 2016 02 13 06 38 22 2.048e+03 1.596e+03 3.678e+02 1.374e+02 1.188e+01 2016 02 13 06 40 32 2.054e+03 1.594e+03 3.633e+02 1.328e+02 1.110e+01 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2.073e+03 1.647e+03 3.824e+02 1.421e+02 1.223e+01 2016 02 13 07 15 13 2.207e+03 1.761e+03 4.104e+02 1.542e+02 1.265e+01 2016 02 13 07 17 24 2.505e+03 2.021e+03 4.668e+02 1.762e+02 1.479e+01 2016 02 13 07 19 34 2.445e+03 1.957e+03 4.534e+02 1.721e+02 1.452e+01 2016 02 13 07 21 44 1.909e+03 1.500e+03 3.444e+02 1.282e+02 1.106e+01 2016 02 13 07 23 54 1.901e+03 1.492e+03 3.463e+02 1.315e+02 1.040e+01 2016 02 13 07 26 04 2.010e+03 1.588e+03 3.686e+02 1.382e+02 1.167e+01 2016 02 13 07 28 14 1.937e+03 1.513e+03 3.528e+02 1.303e+02 1.121e+01 2016 02 13 07 30 24 1.909e+03 1.482e+03 3.409e+02 1.275e+02 1.025e+01 2016 02 13 07 32 34 1.876e+03 1.453e+03 3.300e+02 1.227e+02 1.042e+01 2016 02 13 07 34 44 2.040e+03 1.593e+03 3.624e+02 1.335e+02 1.183e+01 2016 02 13 07 36 54 1.982e+03 1.546e+03 3.486e+02 1.294e+02 1.167e+01 2016 02 13 07 39 04 1.945e+03 1.508e+03 3.417e+02 1.292e+02 1.102e+01 2016 02 13 07 41 14 1.996e+03 1.550e+03 3.499e+02 1.300e+02 1.131e+01 2016 02 13 07 43 25 2.028e+03 1.588e+03 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