# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2015 06 09 00 03 21 6.555e+01 4.955e+01 9.500e+00 1.900e+00 5.125e-01 2015 06 09 00 06 51 6.634e+01 4.967e+01 9.625e+00 1.650e+00 5.250e-01 2015 06 09 00 10 21 6.317e+01 4.804e+01 9.525e+00 1.825e+00 4.250e-01 2015 06 09 00 13 51 6.249e+01 4.781e+01 9.162e+00 1.488e+00 3.500e-01 2015 06 09 00 17 21 6.399e+01 4.905e+01 9.787e+00 1.788e+00 5.500e-01 2015 06 09 00 20 51 6.084e+01 4.609e+01 9.912e+00 2.062e+00 5.875e-01 2015 06 09 00 24 21 6.509e+01 4.980e+01 1.051e+01 2.062e+00 6.375e-01 2015 06 09 00 27 52 6.509e+01 4.919e+01 9.688e+00 1.863e+00 4.125e-01 2015 06 09 00 31 22 6.345e+01 4.769e+01 9.738e+00 2.025e+00 4.250e-01 2015 06 09 00 34 52 6.377e+01 4.740e+01 9.975e+00 1.850e+00 4.000e-01 2015 06 09 00 38 22 6.424e+01 4.812e+01 9.988e+00 1.900e+00 5.375e-01 2015 06 09 00 41 52 6.470e+01 4.852e+01 1.025e+01 2.025e+00 5.125e-01 2015 06 09 00 45 22 6.701e+01 5.038e+01 9.938e+00 2.087e+00 5.625e-01 2015 06 09 00 48 52 6.679e+01 5.065e+01 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2015 06 09 05 00 58 2.209e+01 1.559e+01 2.850e+00 5.375e-01 1.625e-01 2015 06 09 05 04 28 2.121e+01 1.495e+01 2.212e+00 4.625e-01 1.375e-01 2015 06 09 05 07 58 2.102e+01 1.439e+01 2.150e+00 3.375e-01 5.000e-02 2015 06 09 05 11 28 1.925e+01 1.340e+01 1.875e+00 4.125e-01 1.125e-01 2015 06 09 05 14 58 1.882e+01 1.206e+01 1.650e+00 3.875e-01 1.500e-01 2015 06 09 05 18 28 1.965e+01 1.314e+01 1.863e+00 3.875e-01 1.500e-01 2015 06 09 05 21 58 1.800e+01 1.125e+01 1.700e+00 3.000e-01 1.125e-01 2015 06 09 05 25 28 1.677e+01 1.036e+01 1.538e+00 2.875e-01 7.500e-02 2015 06 09 05 28 58 1.511e+01 8.875e+00 1.325e+00 2.875e-01 8.750e-02 2015 06 09 05 32 29 1.400e+01 8.450e+00 1.150e+00 2.250e-01 1.125e-01 2015 06 09 05 35 59 1.571e+01 9.575e+00 1.400e+00 3.500e-01 1.250e-01 2015 06 09 05 39 29 1.807e+01 1.174e+01 1.425e+00 2.500e-01 5.000e-02 2015 06 09 05 42 59 2.209e+01 1.457e+01 1.613e+00 3.250e-01 1.000e-01 2015 06 09 05 46 29 2.534e+01 1.724e+01 1.762e+00 2.875e-01 6.250e-02 2015 06 09 05 49 59 2.462e+01 1.727e+01 1.550e+00 1.750e-01 2.500e-02 2015 06 09 05 53 29 2.609e+01 1.845e+01 1.825e+00 4.875e-01 2.000e-01 2015 06 09 05 56 59 2.560e+01 1.829e+01 1.363e+00 3.125e-01 7.500e-02 2015 06 09 06 00 29 2.590e+01 1.900e+01 1.387e+00 3.000e-01 7.500e-02 2015 06 09 06 03 59 2.495e+01 1.734e+01 1.325e+00 2.000e-01 6.250e-02 2015 06 09 06 07 29 2.334e+01 1.655e+01 1.212e+00 4.000e-01 1.500e-01 2015 06 09 06 10 59 2.429e+01 1.730e+01 1.400e+00 2.500e-01 6.250e-02 2015 06 09 06 14 29 2.110e+01 1.444e+01 9.750e-01 2.250e-01 8.750e-02 2015 06 09 06 18 00 1.711e+01 1.157e+01 9.125e-01 2.625e-01 8.750e-02 2015 06 09 06 21 30 1.493e+01 9.500e+00 7.750e-01 3.125e-01 8.750e-02 2015 06 09 06 25 00 1.370e+01 7.975e+00 5.250e-01 2.000e-01 6.250e-02 2015 06 09 06 28 30 1.314e+01 7.175e+00 6.500e-01 2.250e-01 1.250e-01 2015 06 09 06 32 00 1.297e+01 6.737e+00 5.375e-01 1.625e-01 2.500e-02 2015 06 09 06 35 30 1.293e+01 7.025e+00 5.875e-01 2.375e-01 6.250e-02 2015 06 09 06 39 00 1.254e+01 6.425e+00 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2015 06 09 16 41 14 4.522e+02 2.481e+02 2.857e+01 5.737e+00 5.125e-01 2015 06 09 16 44 44 4.677e+02 2.625e+02 2.766e+01 5.987e+00 6.500e-01 2015 06 09 16 48 14 4.682e+02 2.662e+02 3.324e+01 7.525e+00 7.875e-01 2015 06 09 16 51 44 4.402e+02 2.448e+02 3.238e+01 6.200e+00 7.875e-01 2015 06 09 16 55 14 4.204e+02 2.433e+02 3.431e+01 6.612e+00 8.625e-01 2015 06 09 16 58 44 4.337e+02 2.521e+02 3.451e+01 7.475e+00 5.500e-01 2015 06 09 17 02 14 4.551e+02 2.560e+02 2.865e+01 5.775e+00 7.000e-01 2015 06 09 17 05 44 4.474e+02 2.500e+02 2.919e+01 5.237e+00 6.125e-01 2015 06 09 17 09 14 4.661e+02 2.608e+02 2.686e+01 4.338e+00 4.375e-01 2015 06 09 17 12 44 4.389e+02 2.441e+02 2.527e+01 4.150e+00 5.375e-01 2015 06 09 17 16 14 4.002e+02 2.244e+02 2.456e+01 4.025e+00 4.875e-01 2015 06 09 17 19 44 4.498e+02 2.473e+02 2.762e+01 4.213e+00 3.375e-01 2015 06 09 17 23 14 4.682e+02 2.585e+02 2.918e+01 4.438e+00 5.625e-01 2015 06 09 17 26 44 4.688e+02 2.576e+02 3.081e+01 5.300e+00 6.750e-01 2015 06 09 17 30 15 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5.875e+00 3.750e-01 2015 06 09 21 42 20 5.013e+02 2.635e+02 2.641e+01 6.037e+00 4.375e-01 2015 06 09 21 45 50 5.110e+02 2.661e+02 2.736e+01 6.825e+00 5.875e-01 2015 06 09 21 49 20 5.163e+02 2.678e+02 2.732e+01 6.625e+00 5.875e-01 2015 06 09 21 52 51 5.328e+02 2.752e+02 2.707e+01 7.025e+00 5.125e-01 2015 06 09 21 56 21 5.497e+02 2.899e+02 2.915e+01 7.900e+00 7.500e-01 2015 06 09 21 59 51 5.757e+02 3.051e+02 2.994e+01 7.350e+00 5.625e-01 2015 06 09 22 03 21 5.911e+02 3.133e+02 3.314e+01 8.075e+00 7.750e-01 2015 06 09 22 06 51 6.144e+02 3.307e+02 3.283e+01 8.262e+00 6.500e-01 2015 06 09 22 10 21 6.750e+02 3.632e+02 3.445e+01 8.988e+00 8.500e-01 2015 06 09 22 13 51 6.874e+02 3.685e+02 3.545e+01 9.012e+00 8.875e-01 2015 06 09 22 17 21 6.439e+02 3.474e+02 3.241e+01 8.050e+00 7.250e-01 2015 06 09 22 20 51 6.164e+02 3.338e+02 3.070e+01 7.513e+00 5.000e-01 2015 06 09 22 24 21 6.055e+02 3.243e+02 2.802e+01 7.175e+00 5.875e-01 2015 06 09 22 27 51 6.540e+02 3.589e+02 3.141e+01 8.000e+00 7.875e-01 2015 06 09 22 31 21 6.316e+02 3.421e+02 2.939e+01 7.175e+00 7.375e-01 2015 06 09 22 34 52 5.990e+02 3.296e+02 2.793e+01 6.750e+00 6.500e-01 2015 06 09 22 38 22 5.743e+02 3.237e+02 3.100e+01 8.275e+00 7.000e-01 2015 06 09 22 41 52 5.652e+02 3.094e+02 2.901e+01 7.812e+00 6.875e-01 2015 06 09 22 45 22 5.909e+02 3.145e+02 2.771e+01 7.013e+00 4.875e-01 2015 06 09 22 48 52 6.536e+02 3.601e+02 3.091e+01 8.350e+00 7.625e-01 2015 06 09 22 52 22 6.542e+02 3.703e+02 3.571e+01 9.050e+00 7.250e-01 2015 06 09 22 55 52 6.762e+02 3.922e+02 3.901e+01 9.363e+00 9.125e-01 2015 06 09 22 59 22 6.837e+02 3.960e+02 4.144e+01 1.089e+01 8.375e-01 2015 06 09 23 02 52 6.898e+02 4.078e+02 4.995e+01 1.336e+01 1.450e+00 2015 06 09 23 06 22 6.799e+02 4.058e+02 5.336e+01 1.314e+01 1.275e+00 2015 06 09 23 09 52 6.723e+02 4.023e+02 5.370e+01 1.432e+01 1.275e+00 2015 06 09 23 13 22 6.938e+02 4.151e+02 5.377e+01 1.370e+01 1.637e+00 2015 06 09 23 16 53 6.660e+02 4.025e+02 5.516e+01 1.368e+01 1.137e+00 2015 06 09 23 20 23 6.948e+02 4.160e+02 5.325e+01 1.344e+01 1.450e+00 2015 06 09 23 23 53 6.842e+02 4.122e+02 5.567e+01 1.436e+01 1.387e+00 2015 06 09 23 27 23 7.027e+02 4.224e+02 5.721e+01 1.461e+01 1.337e+00 2015 06 09 23 30 53 7.020e+02 4.214e+02 5.634e+01 1.440e+01 1.650e+00 2015 06 09 23 34 23 6.728e+02 4.068e+02 5.567e+01 1.405e+01 1.587e+00 2015 06 09 23 37 53 6.685e+02 4.011e+02 5.370e+01 1.412e+01 1.475e+00 2015 06 09 23 41 23 6.881e+02 4.102e+02 5.539e+01 1.485e+01 1.625e+00 2015 06 09 23 44 53 7.260e+02 4.208e+02 5.629e+01 1.425e+01 1.550e+00 2015 06 09 23 48 23 7.595e+02 4.366e+02 5.710e+01 1.416e+01 1.288e+00 2015 06 09 23 51 53 7.030e+02 4.066e+02 5.088e+01 1.319e+01 1.325e+00 2015 06 09 23 55 23 6.873e+02 3.966e+02 5.012e+01 1.301e+01 1.337e+00 2015 06 09 23 58 54 6.561e+02 3.892e+02 5.139e+01 1.350e+01 1.550e+00