# yy mm dd HH MM SS 0.08um 0.1um 0.2um 0.3um 0.5um 2015 01 18 00 01 41 1.019e+02 7.400e+01 1.281e+01 1.837e+00 1.000e-01 2015 01 18 00 05 11 9.197e+01 6.820e+01 1.268e+01 1.988e+00 7.500e-02 2015 01 18 00 08 41 8.012e+01 6.083e+01 1.136e+01 1.238e+00 8.750e-02 2015 01 18 00 12 12 6.886e+01 5.233e+01 1.000e+01 1.337e+00 1.500e-01 2015 01 18 00 15 42 9.460e+01 6.840e+01 1.125e+01 1.100e+00 3.750e-02 2015 01 18 00 19 12 1.044e+02 7.560e+01 1.278e+01 1.312e+00 1.375e-01 2015 01 18 00 22 42 9.621e+01 7.092e+01 1.201e+01 1.400e+00 2.500e-02 2015 01 18 00 26 12 8.730e+01 6.553e+01 1.243e+01 1.400e+00 3.750e-02 2015 01 18 00 29 42 8.226e+01 6.183e+01 1.210e+01 1.663e+00 6.250e-02 2015 01 18 00 33 12 9.149e+01 6.601e+01 1.196e+01 1.562e+00 1.500e-01 2015 01 18 00 36 42 9.045e+01 6.395e+01 1.131e+01 1.538e+00 5.000e-02 2015 01 18 00 40 12 6.383e+01 4.684e+01 9.213e+00 9.375e-01 2.500e-02 2015 01 18 00 43 42 8.155e+01 5.871e+01 1.114e+01 1.212e+00 6.250e-02 2015 01 18 00 47 12 7.792e+01 6.070e+01 1.146e+01 1.887e+00 6.250e-02 2015 01 18 00 50 42 9.147e+01 6.394e+01 1.239e+01 1.300e+00 3.750e-02 2015 01 18 00 54 13 1.007e+02 7.024e+01 1.185e+01 1.562e+00 2.875e-01 2015 01 18 00 57 43 8.728e+01 6.375e+01 1.180e+01 1.363e+00 2.250e-01 2015 01 18 01 01 13 8.809e+01 6.201e+01 1.171e+01 1.663e+00 1.125e-01 2015 01 18 01 04 43 8.284e+01 6.240e+01 1.094e+01 1.762e+00 1.375e-01 2015 01 18 01 08 13 8.215e+01 5.852e+01 1.144e+01 1.475e+00 1.125e-01 2015 01 18 01 11 43 9.326e+01 6.634e+01 1.134e+01 1.438e+00 7.500e-02 2015 01 18 01 15 13 8.495e+01 6.177e+01 1.165e+01 1.525e+00 3.750e-02 2015 01 18 01 18 43 9.258e+01 6.553e+01 1.169e+01 1.450e+00 1.000e-01 2015 01 18 01 22 13 8.928e+01 6.612e+01 1.203e+01 2.138e+00 5.000e-02 2015 01 18 01 25 43 8.025e+01 6.034e+01 1.200e+01 1.925e+00 1.750e-01 2015 01 18 01 29 13 9.092e+01 6.326e+01 1.200e+01 1.663e+00 7.500e-02 2015 01 18 01 32 43 9.038e+01 6.386e+01 1.200e+01 1.475e+00 1.125e-01 2015 01 18 01 36 14 7.764e+01 5.548e+01 1.066e+01 1.738e+00 2.125e-01 2015 01 18 01 39 44 6.146e+01 4.679e+01 1.049e+01 1.238e+00 1.500e-01 2015 01 18 01 43 14 7.245e+01 5.306e+01 1.143e+01 1.750e+00 1.250e-01 2015 01 18 01 46 44 1.009e+02 7.222e+01 1.194e+01 1.600e+00 1.875e-01 2015 01 18 01 50 14 1.215e+02 9.112e+01 1.181e+01 1.788e+00 1.000e-01 2015 01 18 01 53 44 9.160e+01 6.491e+01 1.109e+01 1.337e+00 1.625e-01 2015 01 18 01 57 14 8.472e+01 6.141e+01 1.174e+01 1.750e+00 1.000e-01 2015 01 18 02 00 44 8.347e+01 6.148e+01 1.311e+01 1.550e+00 1.000e-01