# yy mm dd HH MM SS      0.3um      0.5um        1um        2um        5um
2020 12 19 00 05 23  1.908e+04  1.505e+03  3.050e+02  5.800e+01  0.000e+00
2020 12 19 00 15 23  1.992e+04  1.657e+03  3.360e+02  5.700e+01  0.000e+00
2020 12 19 00 25 23  2.042e+04  1.691e+03  3.100e+02  6.200e+01  2.000e+00
2020 12 19 00 35 24  2.149e+04  1.534e+03  2.820e+02  5.600e+01  1.000e+00
2020 12 19 00 45 24  1.898e+04  1.316e+03  2.610e+02  5.900e+01  2.000e+00
2020 12 19 00 55 24  1.790e+04  1.225e+03  1.950e+02  4.500e+01  3.000e+00
2020 12 19 01 05 24  1.613e+04  1.147e+03  2.130e+02  5.600e+01  0.000e+00
2020 12 19 01 15 24  1.998e+04  1.371e+03  2.360e+02  6.100e+01  4.000e+00
2020 12 19 01 25 25  2.385e+04  1.709e+03  2.590e+02  4.900e+01  2.000e+00
2020 12 19 01 35 25  2.785e+04  2.006e+03  3.350e+02  7.300e+01  3.000e+00
2020 12 19 01 45 25  2.891e+04  1.974e+03  3.310e+02  7.800e+01  1.000e+00
2020 12 19 01 55 25  4.353e+04  2.694e+03  3.730e+02  9.000e+01  7.000e+00
2020 12 19 02 05 25  4.899e+04  2.940e+03  3.890e+02  8.200e+01  6.000e+00
2020 12 19 02 15 25  4.858e+04  2.951e+03  3.760e+02  8.700e+01  6.000e+00
2020 12 19 02 25 25  5.062e+04  3.000e+03  3.990e+02  7.400e+01  1.000e+00
2020 12 19 02 35 25  4.918e+04  2.870e+03  3.810e+02  9.200e+01  4.000e+00
2020 12 19 02 45 25  4.725e+04  2.663e+03  3.760e+02  9.800e+01  7.000e+00
2020 12 19 02 55 25  4.845e+04  3.254e+03  4.130e+02  9.100e+01  6.000e+00
2020 12 19 03 05 26  3.407e+04  2.228e+03  2.580e+02  5.200e+01  3.000e+00
2020 12 19 03 15 26  5.137e+04  3.671e+03  4.200e+02  9.200e+01  3.000e+00
2020 12 19 03 25 26  5.342e+04  3.705e+03  4.210e+02  8.500e+01  2.000e+00
2020 12 19 03 35 26  4.630e+04  3.004e+03  3.340e+02  6.600e+01  4.000e+00
2020 12 19 03 45 26  2.268e+04  1.551e+03  2.000e+02  3.700e+01  2.000e+00
2020 12 19 03 55 26  1.973e+04  1.326e+03  1.690e+02  3.600e+01  2.000e+00
2020 12 19 04 05 26  2.035e+04  1.382e+03  1.900e+02  4.200e+01  3.000e+00
2020 12 19 04 15 26  1.863e+04  1.197e+03  1.440e+02  2.900e+01  3.000e+00
2020 12 19 04 25 26  1.688e+04  1.113e+03  1.460e+02  2.100e+01  3.000e+00
2020 12 19 04 35 26  1.499e+04  1.022e+03  1.280e+02  2.600e+01  0.000e+00
2020 12 19 04 45 27  1.453e+04  1.017e+03  1.310e+02  2.900e+01  2.000e+00
2020 12 19 04 55 27  1.146e+04  8.020e+02  1.060e+02  2.800e+01  4.000e+00
2020 12 19 05 05 27  6.902e+03  5.190e+02  9.100e+01  2.200e+01  0.000e+00
2020 12 19 05 15 27  4.560e+03  3.380e+02  6.400e+01  2.100e+01  1.000e+00
2020 12 19 05 25 27  2.996e+03  2.380e+02  4.800e+01  1.800e+01  2.000e+00
2020 12 19 05 35 27  2.288e+03  1.680e+02  3.500e+01  1.600e+01  1.000e+00
2020 12 19 05 45 27  1.787e+03  1.500e+02  2.900e+01  1.100e+01  1.000e+00