# yy mm dd HH MM SS      0.3um      0.5um        1um        2um        5um
2020 10 07 00 00 57  2.993e+04  3.324e+03  8.560e+02  1.740e+02  2.000e+00
2020 10 07 00 10 57  2.940e+04  3.311e+03  8.200e+02  1.820e+02  2.000e+00
2020 10 07 00 20 57  2.839e+04  3.302e+03  8.090e+02  1.750e+02  0.000e+00
2020 10 07 00 30 57  2.715e+04  2.970e+03  7.240e+02  1.480e+02  3.000e+00
2020 10 07 00 40 57  2.735e+04  2.914e+03  6.770e+02  1.620e+02  2.000e+00
2020 10 07 00 50 58  2.816e+04  3.052e+03  7.700e+02  1.730e+02  3.000e+00
2020 10 07 01 00 58  2.940e+04  3.129e+03  7.510e+02  1.530e+02  7.000e+00
2020 10 07 01 10 58  3.043e+04  3.140e+03  7.750e+02  1.720e+02  3.000e+00
2020 10 07 01 20 58  3.322e+04  3.406e+03  8.530e+02  1.790e+02  5.000e+00