# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 07 31 10 08 16 8.158e+04 3.725e+03 5.480e+02 1.230e+02 4.000e+00 2020 07 31 10 18 16 7.638e+04 3.012e+03 3.270e+02 5.600e+01 1.000e+00 2020 07 31 10 28 16 7.169e+04 2.828e+03 2.650e+02 3.000e+01 1.000e+00 2020 07 31 10 38 16 7.060e+04 2.831e+03 2.560e+02 3.200e+01 1.000e+00 2020 07 31 10 48 16 7.962e+04 3.202e+03 2.930e+02 3.900e+01 0.000e+00 2020 07 31 10 58 16 1.243e+05 5.548e+03 5.040e+02 9.400e+01 1.000e+00 2020 07 31 11 08 16 1.094e+05 4.507e+03 3.840e+02 7.400e+01 1.000e+00 2020 07 31 11 18 16 9.431e+04 3.779e+03 2.610e+02 2.800e+01 0.000e+00 2020 07 31 11 28 17 9.270e+04 3.569e+03 2.410e+02 1.800e+01 0.000e+00 2020 07 31 11 38 17 8.365e+04 3.364e+03 1.920e+02 2.800e+01 0.000e+00 2020 07 31 11 48 17 7.061e+04 3.001e+03 1.960e+02 2.000e+01 0.000e+00 2020 07 31 11 58 17 6.936e+04 3.485e+03 2.730e+02 2.000e+01 0.000e+00 2020 07 31 12 08 17 5.204e+04 2.701e+03 2.420e+02 3.000e+01 0.000e+00 2020 07 31 12 18 17 4.221e+04 2.367e+03 2.260e+02 1.800e+01 0.000e+00 2020 07 31 12 28 17 4.034e+04 2.255e+03 1.810e+02 2.100e+01 0.000e+00 2020 07 31 12 38 17 4.383e+04 2.389e+03 1.560e+02 1.600e+01 0.000e+00 2020 07 31 12 48 17 3.739e+04 2.047e+03 1.250e+02 1.000e+01 0.000e+00 2020 07 31 12 58 17 3.178e+04 1.582e+03 1.170e+02 1.500e+01 0.000e+00 2020 07 31 13 08 18 2.417e+04 1.306e+03 1.240e+02 1.400e+01 0.000e+00 2020 07 31 13 18 18 2.129e+04 1.145e+03 8.700e+01 1.000e+01 0.000e+00 2020 07 31 13 28 18 2.330e+04 1.214e+03 8.800e+01 1.300e+01 1.000e+00 2020 07 31 13 38 18 3.224e+04 1.565e+03 9.900e+01 1.300e+01 0.000e+00 2020 07 31 13 48 18 4.064e+04 1.884e+03 1.480e+02 2.200e+01 1.000e+00 2020 07 31 13 58 18 3.749e+04 2.067e+03 1.150e+02 6.000e+00 0.000e+00 2020 07 31 14 08 18 3.998e+04 3.125e+03 1.750e+02 2.700e+01 0.000e+00 2020 07 31 14 18 18 4.744e+04 4.416e+03 1.780e+02 1.100e+01 0.000e+00 2020 07 31 14 28 18 7.113e+04 7.390e+03 3.750e+02 2.300e+01 0.000e+00 2020 07 31 14 38 18 9.246e+04 9.869e+03 4.260e+02 3.400e+01 0.000e+00 2020 07 31 14 48 19 1.036e+05 1.079e+04 4.600e+02 3.800e+01 0.000e+00 2020 07 31 14 58 19 1.174e+05 1.109e+04 4.090e+02 2.200e+01 0.000e+00 2020 07 31 15 08 19 1.352e+05 1.226e+04 4.670e+02 3.400e+01 0.000e+00 2020 07 31 15 18 19 1.373e+05 1.210e+04 4.450e+02 2.500e+01 0.000e+00 2020 07 31 15 28 19 1.538e+05 1.389e+04 4.470e+02 2.800e+01 0.000e+00 2020 07 31 15 38 19 1.480e+05 1.345e+04 4.470e+02 2.100e+01 1.000e+00 2020 07 31 15 48 19 1.602e+05 1.502e+04 5.380e+02 3.100e+01 0.000e+00 2020 07 31 15 58 19 1.653e+05 1.535e+04 5.540e+02 4.000e+01 1.000e+00 2020 07 31 16 08 19 1.728e+05 1.591e+04 5.400e+02 3.800e+01 1.000e+00 2020 07 31 16 18 19 1.710e+05 1.450e+04 5.190e+02 2.000e+01 0.000e+00 2020 07 31 16 28 20 1.297e+05 8.907e+03 4.130e+02 3.700e+01 0.000e+00 2020 07 31 16 38 20 1.196e+05 6.794e+03 4.060e+02 4.700e+01 0.000e+00 2020 07 31 16 48 20 1.163e+05 5.903e+03 4.150e+02 5.000e+01 0.000e+00 2020 07 31 16 58 20 1.018e+05 4.718e+03 3.580e+02 5.000e+01 0.000e+00 2020 07 31 17 08 20 1.002e+05 4.675e+03 4.000e+02 5.900e+01 0.000e+00 2020 07 31 17 18 20 1.408e+05 8.263e+03 1.249e+03 2.140e+02 5.000e+00 2020 07 31 17 28 20 9.754e+04 4.900e+03 5.810e+02 7.800e+01 1.000e+00 2020 07 31 17 38 20 9.923e+04 4.860e+03 5.050e+02 6.800e+01 0.000e+00 2020 07 31 17 48 20 1.095e+05 5.226e+03 5.000e+02 7.400e+01 0.000e+00 2020 07 31 17 58 20 1.103e+05 5.284e+03 5.020e+02 7.100e+01 1.000e+00 2020 07 31 18 08 21 1.171e+05 5.929e+03 4.550e+02 5.100e+01 1.000e+00 2020 07 31 18 18 21 1.319e+05 7.000e+03 4.770e+02 5.000e+01 0.000e+00 2020 07 31 18 28 21 1.475e+05 8.640e+03 5.320e+02 5.500e+01 0.000e+00 2020 07 31 18 38 21 1.557e+05 9.981e+03 5.400e+02 6.700e+01 1.000e+00 2020 07 31 18 48 21 1.557e+05 1.074e+04 5.820e+02 5.700e+01 0.000e+00 2020 07 31 18 58 21 1.469e+05 1.010e+04 5.180e+02 5.300e+01 0.000e+00 2020 07 31 19 08 21 1.377e+05 9.845e+03 4.630e+02 3.500e+01 1.000e+00 2020 07 31 19 18 21 1.265e+05 9.084e+03 4.530e+02 4.000e+01 1.000e+00 2020 07 31 19 28 21 1.141e+05 8.096e+03 4.340e+02 3.400e+01 0.000e+00 2020 07 31 19 38 21 1.085e+05 7.676e+03 4.230e+02 3.700e+01 0.000e+00 2020 07 31 19 48 22 9.943e+04 6.982e+03 3.730e+02 4.200e+01 0.000e+00 2020 07 31 19 58 22 8.333e+04 5.858e+03 3.590e+02 3.700e+01 0.000e+00 2020 07 31 20 08 22 7.198e+04 4.890e+03 2.980e+02 2.900e+01 0.000e+00 2020 07 31 20 18 22 6.041e+04 3.906e+03 2.480e+02 3.000e+01 0.000e+00 2020 07 31 20 28 22 4.923e+04 3.219e+03 2.120e+02 2.400e+01 0.000e+00 2020 07 31 20 38 22 4.592e+04 2.913e+03 2.240e+02 2.800e+01 1.000e+00 2020 07 31 20 48 22 4.079e+04 2.752e+03 2.080e+02 2.600e+01 1.000e+00 2020 07 31 20 58 22 3.936e+04 2.620e+03 2.220e+02 2.400e+01 0.000e+00 2020 07 31 21 08 22 3.884e+04 2.548e+03 2.230e+02 1.600e+01 0.000e+00 2020 07 31 21 18 22 3.733e+04 2.550e+03 2.210e+02 2.300e+01 0.000e+00 2020 07 31 21 28 23 3.730e+04 2.315e+03 2.050e+02 2.700e+01 0.000e+00 2020 07 31 21 38 23 4.056e+04 2.494e+03 2.170e+02 2.700e+01 0.000e+00 2020 07 31 21 48 23 4.303e+04 2.461e+03 2.090e+02 2.200e+01 0.000e+00 2020 07 31 21 58 23 4.352e+04 2.605e+03 2.180e+02 2.200e+01 0.000e+00 2020 07 31 22 08 23 4.657e+04 2.677e+03 2.390e+02 2.400e+01 1.000e+00 2020 07 31 22 18 23 4.596e+04 2.599e+03 1.900e+02 2.000e+01 1.000e+00 2020 07 31 22 28 23 4.762e+04 2.540e+03 2.030e+02 2.800e+01 0.000e+00 2020 07 31 22 38 23 4.524e+04 2.470e+03 2.050e+02 2.700e+01 0.000e+00 2020 07 31 22 48 23 4.720e+04 2.668e+03 2.340e+02 3.100e+01 0.000e+00 2020 07 31 22 58 23 4.518e+04 2.817e+03 2.960e+02 3.400e+01 0.000e+00 2020 07 31 23 08 24 4.274e+04 2.545e+03 2.320e+02 3.700e+01 0.000e+00 2020 07 31 23 18 24 4.009e+04 2.390e+03 2.380e+02 3.100e+01 1.000e+00 2020 07 31 23 28 24 4.211e+04 2.604e+03 2.520e+02 3.700e+01 0.000e+00 2020 07 31 23 38 24 4.613e+04 2.811e+03 2.550e+02 3.900e+01 0.000e+00 2020 07 31 23 48 24 6.333e+04 3.665e+03 2.980e+02 5.300e+01 1.000e+00 2020 07 31 23 58 24 7.215e+04 3.941e+03 2.990e+02 4.200e+01 1.000e+00