# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 05 21 00 05 33 1.074e+04 1.541e+03 4.600e+02 8.500e+01 3.000e+00 2020 05 21 00 15 33 9.699e+03 1.405e+03 4.550e+02 9.400e+01 2.000e+00 2020 05 21 00 25 33 9.104e+03 1.210e+03 3.490e+02 6.600e+01 0.000e+00 2020 05 21 00 35 33 8.880e+03 1.181e+03 3.650e+02 8.100e+01 2.000e+00 2020 05 21 00 45 33 1.063e+04 1.054e+03 3.180e+02 5.400e+01 0.000e+00 2020 05 21 00 55 34 1.050e+04 1.027e+03 3.260e+02 6.400e+01 2.000e+00 2020 05 21 01 05 34 1.029e+04 1.093e+03 3.480e+02 8.200e+01 1.000e+00 2020 05 21 01 15 34 1.191e+04 1.207e+03 3.600e+02 7.800e+01 4.000e+00 2020 05 21 01 25 32 1.320e+04 1.315e+03 3.580e+02 7.000e+01 1.000e+00 2020 05 21 01 35 32 1.561e+04 1.404e+03 3.930e+02 6.700e+01 0.000e+00 2020 05 21 01 45 32 1.534e+04 1.368e+03 4.240e+02 1.100e+02 1.000e+00 2020 05 21 01 55 32 1.749e+04 1.341e+03 3.700e+02 7.900e+01 2.000e+00 2020 05 21 02 05 32 1.810e+04 1.418e+03 3.920e+02 7.700e+01 1.000e+00 2020 05 21 02 15 32 2.060e+04 1.426e+03 4.270e+02 7.600e+01 2.000e+00 2020 05 21 02 25 32 2.103e+04 1.439e+03 4.290e+02 8.800e+01 2.000e+00 2020 05 21 02 35 33 2.229e+04 1.439e+03 4.320e+02 8.500e+01 4.000e+00 2020 05 21 02 45 33 2.046e+04 1.594e+03 4.870e+02 8.800e+01 2.000e+00 2020 05 21 02 55 33 2.088e+04 1.387e+03 4.160e+02 9.600e+01 6.000e+00 2020 05 21 03 05 33 2.300e+04 1.617e+03 4.900e+02 1.130e+02 1.000e+00 2020 05 21 03 15 33 1.984e+04 1.386e+03 4.640e+02 1.050e+02 0.000e+00 2020 05 21 03 25 33 1.838e+04 1.346e+03 4.530e+02 9.800e+01 0.000e+00 2020 05 21 03 35 33 1.873e+04 1.274e+03 4.100e+02 9.800e+01 1.000e+00 2020 05 21 03 45 33 1.956e+04 1.363e+03 4.330e+02 9.500e+01 1.000e+00 2020 05 21 03 55 33 2.258e+04 1.401e+03 4.460e+02 9.800e+01 2.000e+00 2020 05 21 04 05 33 2.212e+04 1.314e+03 4.010e+02 9.800e+01 4.000e+00 2020 05 21 04 15 34 2.213e+04 1.284e+03 3.910e+02 9.600e+01 3.000e+00 2020 05 21 04 25 34 2.378e+04 1.321e+03 3.920e+02 9.000e+01 1.000e+00 2020 05 21 04 35 34 2.727e+04 1.335e+03 4.160e+02 9.800e+01 3.000e+00 2020 05 21 04 45 34 2.689e+04 1.432e+03 4.100e+02 9.500e+01 1.000e+00 2020 05 21 04 55 34 2.233e+04 1.309e+03 3.830e+02 1.040e+02 2.000e+00 2020 05 21 05 05 34 1.807e+04 1.186e+03 3.950e+02 7.600e+01 2.000e+00 2020 05 21 05 15 34 1.746e+04 1.215e+03 4.250e+02 8.500e+01 0.000e+00 2020 05 21 05 25 34 1.581e+04 1.224e+03 4.270e+02 7.500e+01 3.000e+00 2020 05 21 05 35 34 1.806e+04 1.252e+03 3.800e+02 6.700e+01 2.000e+00 2020 05 21 05 45 34 1.865e+04 1.249e+03 3.820e+02 6.700e+01 3.000e+00 2020 05 21 05 55 35 2.034e+04 1.202e+03 3.070e+02 6.000e+01 0.000e+00 2020 05 21 06 05 35 2.171e+04 1.238e+03 3.280e+02 5.600e+01 2.000e+00 2020 05 21 06 15 35 2.217e+04 1.199e+03 2.970e+02 5.400e+01 4.000e+00 2020 05 21 06 25 35 2.324e+04 1.181e+03 2.840e+02 6.100e+01 3.000e+00 2020 05 21 06 35 35 2.332e+04 1.200e+03 2.690e+02 5.500e+01 0.000e+00 2020 05 21 06 45 35 2.400e+04 8.740e+02 2.180e+02 5.300e+01 1.000e+00 2020 05 21 06 55 35 2.439e+04 9.250e+02 2.520e+02 5.400e+01 3.000e+00 2020 05 21 07 05 35 3.089e+04 1.005e+03 2.900e+02 6.600e+01 1.000e+00 2020 05 21 07 15 35 3.023e+04 1.143e+03 3.480e+02 7.200e+01 1.000e+00 2020 05 21 07 25 35 2.572e+04 1.256e+03 3.730e+02 8.500e+01 1.000e+00 2020 05 21 07 35 35 2.364e+04 1.493e+03 4.620e+02 1.100e+02 2.000e+00 2020 05 21 07 45 36 2.239e+04 1.625e+03 5.110e+02 1.150e+02 0.000e+00 2020 05 21 07 55 36 2.179e+04 1.689e+03 5.630e+02 1.340e+02 3.000e+00 2020 05 21 08 05 36 2.215e+04 1.832e+03 5.440e+02 1.110e+02 0.000e+00 2020 05 21 08 15 36 2.121e+04 1.688e+03 5.050e+02 1.120e+02 1.000e+00 2020 05 21 08 25 36 2.001e+04 1.713e+03 5.660e+02 1.420e+02 1.000e+00 2020 05 21 08 35 36 2.296e+04 1.777e+03 5.590e+02 1.150e+02 2.000e+00 2020 05 21 08 45 36 2.708e+04 1.812e+03 5.430e+02 1.200e+02 1.000e+00 2020 05 21 08 55 36 3.012e+04 1.834e+03 5.540e+02 1.320e+02 3.000e+00 2020 05 21 09 05 36 3.014e+04 2.158e+03 6.200e+02 1.420e+02 2.000e+00 2020 05 21 09 15 36 3.238e+04 2.225e+03 6.400e+02 1.450e+02 5.000e+00 2020 05 21 09 25 37 3.125e+04 2.232e+03 6.790e+02 1.500e+02 3.000e+00 2020 05 21 09 35 37 3.309e+04 2.310e+03 6.570e+02 1.520e+02 3.000e+00 2020 05 21 09 45 37 2.912e+04 2.281e+03 7.300e+02 1.850e+02 2.000e+00 2020 05 21 09 55 37 2.832e+04 2.254e+03 6.860e+02 1.390e+02 3.000e+00 2020 05 21 10 05 37 3.089e+04 2.455e+03 7.130e+02 1.690e+02 2.000e+00 2020 05 21 10 15 37 2.948e+04 2.698e+03 8.270e+02 1.810e+02 3.000e+00 2020 05 21 10 25 37 2.977e+04 2.755e+03 7.730e+02 1.920e+02 2.000e+00 2020 05 21 10 35 37 2.810e+04 2.780e+03 8.190e+02 1.620e+02 3.000e+00 2020 05 21 10 45 37 2.756e+04 2.873e+03 8.030e+02 1.720e+02 1.000e+00 2020 05 21 10 55 37 2.913e+04 3.275e+03 1.064e+03 2.070e+02 2.000e+00 2020 05 21 11 05 38 2.901e+04 3.335e+03 1.052e+03 1.720e+02 2.000e+00 2020 05 21 11 15 38 3.559e+04 4.033e+03 1.134e+03 2.340e+02 3.000e+00 2020 05 21 11 25 38 3.149e+04 3.423e+03 1.027e+03 1.790e+02 2.000e+00 2020 05 21 11 35 38 3.052e+04 3.289e+03 9.740e+02 1.920e+02 5.000e+00 2020 05 21 11 45 38 3.029e+04 3.397e+03 1.059e+03 2.190e+02 3.000e+00 2020 05 21 11 55 38 3.170e+04 3.572e+03 1.113e+03 2.070e+02 0.000e+00 2020 05 21 12 05 38 3.196e+04 3.780e+03 1.167e+03 2.300e+02 5.000e+00 2020 05 21 12 15 38 3.236e+04 3.759e+03 1.160e+03 2.220e+02 0.000e+00 2020 05 21 12 25 38 3.240e+04 3.749e+03 1.230e+03 2.510e+02 3.000e+00 2020 05 21 12 35 38 3.336e+04 3.865e+03 1.278e+03 2.490e+02 4.000e+00 2020 05 21 12 45 39 3.405e+04 3.852e+03 1.258e+03 2.510e+02 1.000e+00 2020 05 21 12 55 39 3.405e+04 3.889e+03 1.213e+03 2.150e+02 4.000e+00 2020 05 21 13 05 39 3.572e+04 4.093e+03 1.315e+03 2.480e+02 2.000e+00 2020 05 21 13 15 39 3.504e+04 3.909e+03 1.235e+03 2.460e+02 1.000e+00 2020 05 21 13 25 39 3.423e+04 3.910e+03 1.218e+03 2.260e+02 2.000e+00 2020 05 21 13 35 39 3.468e+04 3.954e+03 1.169e+03 2.210e+02 1.000e+00 2020 05 21 13 45 39 4.253e+04 4.230e+03 1.256e+03 2.250e+02 1.000e+00 2020 05 21 13 55 39 4.012e+04 4.146e+03 1.173e+03 2.110e+02 1.000e+00 2020 05 21 14 05 39 4.565e+04 4.092e+03 1.159e+03 2.260e+02 5.000e+00 2020 05 21 14 15 39 4.087e+04 4.079e+03 1.189e+03 2.070e+02 1.000e+00 2020 05 21 14 25 40 4.162e+04 4.065e+03 1.199e+03 2.190e+02 2.000e+00 2020 05 21 14 35 40 4.110e+04 4.189e+03 1.216e+03 2.210e+02 3.000e+00 2020 05 21 14 45 40 3.858e+04 4.063e+03 1.259e+03 2.030e+02 1.000e+00 2020 05 21 14 55 40 3.756e+04 4.265e+03 1.254e+03 2.390e+02 1.000e+00 2020 05 21 15 05 40 4.000e+04 4.139e+03 1.213e+03 2.160e+02 5.000e+00 2020 05 21 15 15 40 3.801e+04 4.111e+03 1.287e+03 2.050e+02 4.000e+00 2020 05 21 15 25 40 3.608e+04 3.994e+03 1.156e+03 1.910e+02 2.000e+00 2020 05 21 15 35 40 3.693e+04 4.090e+03 1.341e+03 2.230e+02 3.000e+00 2020 05 21 15 45 40 3.456e+04 3.767e+03 1.210e+03 1.900e+02 3.000e+00 2020 05 21 15 55 40 3.580e+04 3.825e+03 1.268e+03 2.070e+02 2.000e+00 2020 05 21 16 05 40 3.502e+04 3.785e+03 1.261e+03 2.100e+02 3.000e+00 2020 05 21 16 15 41 3.395e+04 3.647e+03 1.192e+03 2.070e+02 4.000e+00 2020 05 21 16 25 41 3.477e+04 3.821e+03 1.317e+03 2.200e+02 5.000e+00 2020 05 21 16 35 41 3.698e+04 3.762e+03 1.226e+03 1.920e+02 1.000e+00 2020 05 21 16 45 41 3.820e+04 4.026e+03 1.428e+03 2.450e+02 3.000e+00 2020 05 21 16 55 41 3.855e+04 4.158e+03 1.331e+03 2.490e+02 8.000e+00 2020 05 21 17 05 41 3.627e+04 4.074e+03 1.367e+03 2.280e+02 3.000e+00 2020 05 21 17 15 41 3.387e+04 3.812e+03 1.226e+03 2.170e+02 2.000e+00 2020 05 21 17 25 41 3.556e+04 3.901e+03 1.143e+03 2.140e+02 2.000e+00 2020 05 21 17 35 41 3.519e+04 3.893e+03 1.223e+03 2.050e+02 2.000e+00 2020 05 21 17 45 41 3.598e+04 3.947e+03 1.131e+03 2.020e+02 3.000e+00 2020 05 21 17 55 42 3.889e+04 4.068e+03 1.229e+03 1.890e+02 2.000e+00 2020 05 21 18 05 42 3.300e+04 3.286e+03 9.520e+02 1.600e+02 2.000e+00 2020 05 21 18 15 42 3.481e+04 3.265e+03 8.950e+02 1.650e+02 3.000e+00 2020 05 21 18 25 42 3.200e+04 2.979e+03 8.300e+02 1.410e+02 2.000e+00 2020 05 21 18 35 42 3.060e+04 3.021e+03 8.150e+02 1.360e+02 2.000e+00 2020 05 21 18 45 42 3.175e+04 3.229e+03 8.470e+02 1.500e+02 2.000e+00 2020 05 21 18 55 42 2.992e+04 3.018e+03 8.130e+02 1.600e+02 4.000e+00 2020 05 21 19 05 42 2.963e+04 2.984e+03 8.430e+02 1.590e+02 1.000e+00 2020 05 21 19 15 42 2.827e+04 2.872e+03 8.070e+02 1.490e+02 0.000e+00 2020 05 21 19 25 42 2.892e+04 2.893e+03 8.100e+02 1.370e+02 1.000e+00 2020 05 21 19 35 43 2.784e+04 2.911e+03 8.720e+02 1.810e+02 1.000e+00 2020 05 21 19 45 43 2.758e+04 2.963e+03 8.090e+02 1.460e+02 2.000e+00 2020 05 21 19 55 43 2.814e+04 3.146e+03 9.190e+02 1.790e+02 3.000e+00 2020 05 21 20 05 43 2.777e+04 3.111e+03 8.550e+02 1.720e+02 0.000e+00 2020 05 21 20 15 43 3.010e+04 3.268e+03 9.260e+02 1.830e+02 4.000e+00 2020 05 21 20 25 43 3.210e+04 3.403e+03 9.310e+02 1.670e+02 1.000e+00 2020 05 21 20 35 43 3.609e+04 4.036e+03 1.125e+03 2.020e+02 3.000e+00 2020 05 21 20 45 43 3.670e+04 4.006e+03 1.071e+03 2.030e+02 1.000e+00 2020 05 21 20 55 43 3.516e+04 3.983e+03 1.116e+03 2.190e+02 4.000e+00 2020 05 21 21 05 43 3.524e+04 4.085e+03 1.176e+03 1.870e+02 1.000e+00 2020 05 21 21 15 44 3.560e+04 4.141e+03 1.218e+03 2.230e+02 2.000e+00 2020 05 21 21 25 44 3.555e+04 4.095e+03 1.229e+03 1.850e+02 0.000e+00 2020 05 21 21 35 44 3.671e+04 4.139e+03 1.157e+03 1.870e+02 2.000e+00 2020 05 21 21 45 44 3.748e+04 4.248e+03 1.297e+03 2.150e+02 1.000e+00 2020 05 21 21 55 44 3.832e+04 4.463e+03 1.304e+03 2.390e+02 2.000e+00 2020 05 21 22 05 44 3.884e+04 4.411e+03 1.292e+03 2.260e+02 5.000e+00 2020 05 21 22 15 44 3.965e+04 4.460e+03 1.254e+03 2.310e+02 2.000e+00 2020 05 21 22 25 44 3.868e+04 4.537e+03 1.283e+03 2.310e+02 2.000e+00 2020 05 21 22 35 44 3.838e+04 4.381e+03 1.217e+03 2.090e+02 3.000e+00 2020 05 21 22 45 44 3.833e+04 4.454e+03 1.332e+03 2.070e+02 2.000e+00 2020 05 21 22 55 44 3.957e+04 4.615e+03 1.356e+03 2.260e+02 1.000e+00 2020 05 21 23 05 45 3.741e+04 4.664e+03 1.466e+03 2.330e+02 1.000e+00 2020 05 21 23 15 45 3.728e+04 4.591e+03 1.398e+03 1.970e+02 3.000e+00 2020 05 21 23 25 45 3.739e+04 4.431e+03 1.360e+03 2.320e+02 1.000e+00 2020 05 21 23 35 45 3.826e+04 4.798e+03 1.477e+03 2.170e+02 2.000e+00 2020 05 21 23 45 45 3.888e+04 4.855e+03 1.482e+03 2.260e+02 3.000e+00 2020 05 21 23 55 45 3.903e+04 4.796e+03 1.402e+03 2.410e+02 2.000e+00