# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 05 11 00 02 56 3.210e+04 6.377e+03 2.315e+03 2.850e+02 3.000e+00 2020 05 11 00 12 56 3.439e+04 6.523e+03 2.447e+03 3.010e+02 2.000e+00 2020 05 11 00 22 57 4.312e+04 6.888e+03 2.745e+03 4.120e+02 0.000e+00 2020 05 11 00 32 57 3.198e+04 6.685e+03 2.766e+03 4.410e+02 1.000e+00 2020 05 11 00 42 57 3.098e+04 6.237e+03 2.459e+03 4.100e+02 1.000e+00 2020 05 11 00 52 57 2.839e+04 5.665e+03 2.160e+03 3.040e+02 1.000e+00 2020 05 11 01 02 57 2.770e+04 6.292e+03 2.308e+03 3.280e+02 2.000e+00 2020 05 11 01 12 57 2.097e+04 5.029e+03 1.886e+03 2.690e+02 2.000e+00 2020 05 11 01 22 57 1.388e+04 3.719e+03 1.589e+03 2.730e+02 0.000e+00 2020 05 11 01 32 57 1.318e+04 3.985e+03 1.665e+03 2.520e+02 1.000e+00 2020 05 11 01 42 57 1.313e+04 3.550e+03 1.470e+03 2.030e+02 1.000e+00 2020 05 11 01 52 57 2.542e+04 3.694e+03 1.661e+03 3.230e+02 1.000e+00 2020 05 11 02 02 58 3.636e+04 3.284e+03 1.322e+03 2.700e+02 1.000e+00 2020 05 11 02 12 58 2.287e+04 2.847e+03 1.112e+03 1.960e+02 2.000e+00 2020 05 11 02 22 58 8.844e+03 2.213e+03 9.130e+02 1.330e+02 1.000e+00 2020 05 11 02 32 58 9.912e+03 2.917e+03 1.215e+03 1.980e+02 3.000e+00 2020 05 11 02 42 58 1.110e+04 2.887e+03 1.132e+03 1.970e+02 0.000e+00 2020 05 11 02 52 58 1.128e+04 2.765e+03 1.125e+03 1.770e+02 0.000e+00 2020 05 11 03 02 58 1.770e+04 3.853e+03 1.388e+03 2.110e+02 3.000e+00 2020 05 11 03 12 58 1.689e+04 3.420e+03 1.305e+03 2.270e+02 3.000e+00 2020 05 11 03 22 58 2.169e+04 4.498e+03 1.637e+03 2.650e+02 0.000e+00 2020 05 11 03 32 58 2.531e+04 4.828e+03 1.728e+03 2.770e+02 0.000e+00 2020 05 11 03 42 59 2.672e+04 5.310e+03 1.902e+03 2.950e+02 2.000e+00 2020 05 11 03 52 59 3.178e+04 5.937e+03 2.085e+03 3.240e+02 1.000e+00 2020 05 11 04 02 59 4.656e+04 7.209e+03 2.371e+03 3.300e+02 1.000e+00 2020 05 11 04 12 59 4.786e+04 7.021e+03 2.325e+03 3.790e+02 2.000e+00 2020 05 11 04 22 59 4.434e+04 6.413e+03 2.180e+03 3.770e+02 2.000e+00 2020 05 11 04 32 59 4.643e+04 7.026e+03 2.499e+03 4.590e+02 4.000e+00 2020 05 11 04 42 59 4.996e+04 7.410e+03 2.637e+03 4.640e+02 7.000e+00 2020 05 11 04 52 59 5.472e+04 7.879e+03 2.670e+03 5.080e+02 4.000e+00 2020 05 11 05 02 59 5.601e+04 7.494e+03 2.499e+03 5.050e+02 2.000e+00 2020 05 11 05 12 59 5.695e+04 7.276e+03 2.371e+03 4.600e+02 3.000e+00 2020 05 11 05 23 00 5.621e+04 7.222e+03 2.419e+03 4.650e+02 4.000e+00 2020 05 11 05 33 00 5.620e+04 7.234e+03 2.511e+03 5.070e+02 4.000e+00 2020 05 11 05 43 00 7.200e+04 8.884e+03 2.805e+03 5.160e+02 7.000e+00 2020 05 11 05 53 00 7.151e+04 8.603e+03 2.712e+03 5.100e+02 7.000e+00 2020 05 11 06 03 00 7.380e+04 8.526e+03 2.571e+03 5.010e+02 8.000e+00 2020 05 11 06 13 00 8.478e+04 1.010e+04 3.016e+03 5.260e+02 3.000e+00 2020 05 11 06 23 00 7.182e+04 8.490e+03 2.718e+03 5.320e+02 5.000e+00 2020 05 11 06 33 00 6.804e+04 7.784e+03 2.527e+03 5.250e+02 5.000e+00 2020 05 11 06 43 00 6.957e+04 7.530e+03 2.551e+03 5.630e+02 7.000e+00 2020 05 11 06 53 00 6.980e+04 7.672e+03 2.518e+03 5.360e+02 4.000e+00 2020 05 11 07 03 01 6.997e+04 7.685e+03 2.558e+03 5.240e+02 9.000e+00 2020 05 11 07 13 01 7.086e+04 7.945e+03 2.701e+03 5.910e+02 4.000e+00 2020 05 11 07 23 01 7.220e+04 8.324e+03 2.936e+03 6.410e+02 6.000e+00 2020 05 11 07 33 01 6.779e+04 7.574e+03 2.575e+03 5.510e+02 5.000e+00 2020 05 11 07 43 01 6.720e+04 7.570e+03 2.602e+03 5.700e+02 5.000e+00 2020 05 11 07 53 01 6.656e+04 7.213e+03 2.480e+03 5.450e+02 9.000e+00 2020 05 11 08 03 01 6.524e+04 7.127e+03 2.401e+03 5.130e+02 7.000e+00 2020 05 11 08 13 01 6.538e+04 6.986e+03 2.396e+03 5.130e+02 6.000e+00 2020 05 11 08 23 01 1.026e+05 7.932e+03 2.482e+03 4.830e+02 4.000e+00 2020 05 11 08 33 01 1.096e+05 7.208e+03 2.404e+03 4.990e+02 3.000e+00 2020 05 11 08 43 02 1.358e+05 8.065e+03 1.980e+03 2.860e+02 7.000e+00 2020 05 11 08 53 02 1.082e+05 5.829e+03 1.561e+03 2.590e+02 0.000e+00 2020 05 11 09 03 02 9.851e+04 5.096e+03 1.318e+03 2.570e+02 5.000e+00 2020 05 11 09 13 02 9.629e+04 4.471e+03 1.003e+03 1.550e+02 0.000e+00 2020 05 11 09 23 02 9.682e+04 4.002e+03 8.480e+02 1.680e+02 3.000e+00 2020 05 11 09 33 02 1.019e+05 4.681e+03 1.007e+03 1.930e+02 3.000e+00 2020 05 11 09 43 02 9.428e+04 4.366e+03 1.056e+03 2.100e+02 2.000e+00 2020 05 11 09 53 02 1.040e+05 5.164e+03 1.220e+03 2.150e+02 4.000e+00 2020 05 11 10 03 02 1.022e+05 5.108e+03 1.253e+03 2.610e+02 8.000e+00 2020 05 11 10 13 02 1.412e+05 5.112e+03 1.012e+03 1.760e+02 3.000e+00 2020 05 11 10 23 03 1.577e+05 5.714e+03 1.095e+03 2.130e+02 4.000e+00 2020 05 11 10 33 03 1.572e+05 5.658e+03 9.840e+02 1.860e+02 3.000e+00 2020 05 11 10 43 03 1.536e+05 5.057e+03 9.760e+02 2.090e+02 6.000e+00 2020 05 11 10 53 03 1.345e+05 4.732e+03 8.440e+02 1.490e+02 3.000e+00 2020 05 11 11 03 03 1.191e+05 4.332e+03 7.380e+02 1.060e+02 1.000e+00 2020 05 11 11 13 03 1.103e+05 4.250e+03 7.510e+02 1.440e+02 1.000e+00 2020 05 11 11 23 03 1.011e+05 5.178e+03 1.001e+03 2.330e+02 2.000e+00 2020 05 11 11 33 03 8.539e+04 4.714e+03 9.890e+02 2.470e+02 2.000e+00 2020 05 11 11 43 03 8.166e+04 4.547e+03 7.610e+02 1.710e+02 4.000e+00 2020 05 11 11 53 03 6.808e+04 3.044e+03 5.700e+02 1.170e+02 3.000e+00 2020 05 11 12 03 04 6.142e+04 3.014e+03 5.830e+02 1.320e+02 1.000e+00 2020 05 11 12 13 04 5.208e+04 2.433e+03 5.580e+02 1.340e+02 3.000e+00 2020 05 11 12 23 04 4.913e+04 2.260e+03 4.990e+02 1.210e+02 1.000e+00 2020 05 11 12 33 04 4.663e+04 1.935e+03 3.340e+02 8.100e+01 2.000e+00 2020 05 11 12 43 04 4.248e+04 1.670e+03 3.490e+02 5.700e+01 3.000e+00 2020 05 11 12 53 04 3.942e+04 1.390e+03 2.690e+02 5.700e+01 4.000e+00 2020 05 11 13 03 04 3.737e+04 1.597e+03 3.150e+02 6.700e+01 3.000e+00 2020 05 11 13 13 04 3.782e+04 1.993e+03 3.900e+02 9.100e+01 5.000e+00 2020 05 11 13 23 04 3.619e+04 1.863e+03 3.790e+02 9.200e+01 5.000e+00 2020 05 11 13 33 04 3.456e+04 1.596e+03 3.480e+02 7.900e+01 2.000e+00 2020 05 11 13 43 05 2.994e+04 1.546e+03 3.040e+02 5.300e+01 1.000e+00 2020 05 11 13 53 05 2.779e+04 1.435e+03 2.650e+02 6.200e+01 3.000e+00 2020 05 11 14 03 05 3.425e+04 1.939e+03 3.070e+02 6.600e+01 1.000e+00 2020 05 11 14 13 05 3.186e+04 1.765e+03 2.640e+02 7.400e+01 4.000e+00 2020 05 11 14 23 05 2.185e+04 1.289e+03 2.280e+02 5.300e+01 2.000e+00 2020 05 11 14 33 05 2.193e+04 1.399e+03 2.530e+02 5.600e+01 1.000e+00 2020 05 11 14 43 05 2.467e+04 1.507e+03 2.530e+02 5.800e+01 1.000e+00 2020 05 11 14 53 05 2.487e+04 1.616e+03 2.640e+02 5.200e+01 4.000e+00 2020 05 11 15 03 05 2.522e+04 1.728e+03 2.370e+02 5.600e+01 1.000e+00 2020 05 11 15 13 05 2.336e+04 1.499e+03 2.550e+02 6.000e+01 2.000e+00 2020 05 11 15 23 06 2.207e+04 1.407e+03 2.330e+02 5.500e+01 3.000e+00 2020 05 11 15 33 06 2.132e+04 1.338e+03 2.370e+02 5.700e+01 5.000e+00 2020 05 11 15 43 06 1.928e+04 1.309e+03 2.720e+02 7.200e+01 5.000e+00 2020 05 11 15 53 06 1.991e+04 1.301e+03 2.720e+02 6.400e+01 4.000e+00 2020 05 11 16 03 06 2.007e+04 1.279e+03 2.550e+02 5.000e+01 1.000e+00 2020 05 11 16 13 06 1.970e+04 1.250e+03 2.890e+02 6.500e+01 0.000e+00 2020 05 11 16 23 06 2.186e+04 1.471e+03 3.180e+02 7.000e+01 6.000e+00 2020 05 11 16 33 06 3.136e+04 2.351e+03 4.760e+02 1.070e+02 2.000e+00 2020 05 11 16 43 06 3.731e+04 2.865e+03 5.890e+02 1.280e+02 6.000e+00 2020 05 11 16 53 06 3.735e+04 2.795e+03 5.340e+02 8.700e+01 2.000e+00 2020 05 11 17 03 07 4.254e+04 3.109e+03 5.800e+02 1.080e+02 3.000e+00 2020 05 11 17 13 07 4.764e+04 3.480e+03 6.590e+02 1.160e+02 0.000e+00 2020 05 11 17 23 07 5.216e+04 3.557e+03 6.530e+02 1.100e+02 2.000e+00 2020 05 11 17 33 07 5.238e+04 3.558e+03 6.600e+02 1.260e+02 3.000e+00 2020 05 11 17 43 07 5.908e+04 3.689e+03 5.700e+02 9.600e+01 4.000e+00 2020 05 11 17 53 07 5.650e+04 3.667e+03 6.480e+02 1.150e+02 2.000e+00 2020 05 11 18 03 07 5.273e+04 3.352e+03 6.920e+02 1.300e+02 3.000e+00 2020 05 11 18 13 07 5.363e+04 3.282e+03 6.580e+02 1.250e+02 3.000e+00 2020 05 11 18 23 07 5.182e+04 3.379e+03 6.520e+02 1.110e+02 2.000e+00 2020 05 11 18 33 07 5.153e+04 3.330e+03 7.280e+02 1.490e+02 1.000e+00 2020 05 11 18 43 08 5.215e+04 3.361e+03 6.990e+02 1.300e+02 2.000e+00 2020 05 11 18 53 08 5.342e+04 3.512e+03 7.520e+02 1.520e+02 1.000e+00 2020 05 11 19 03 08 5.382e+04 3.377e+03 7.330e+02 1.510e+02 2.000e+00 2020 05 11 19 13 10 5.521e+04 3.485e+03 7.600e+02 1.350e+02 2.000e+00 2020 05 11 19 23 10 5.739e+04 3.498e+03 7.720e+02 1.790e+02 2.000e+00 2020 05 11 19 33 10 5.829e+04 3.573e+03 7.580e+02 1.450e+02 2.000e+00 2020 05 11 19 43 10 6.116e+04 3.725e+03 8.020e+02 1.470e+02 4.000e+00 2020 05 11 19 53 10 6.186e+04 3.802e+03 8.350e+02 1.730e+02 4.000e+00 2020 05 11 20 03 10 6.375e+04 3.924e+03 8.320e+02 1.450e+02 0.000e+00 2020 05 11 20 13 10 6.511e+04 4.155e+03 9.250e+02 1.590e+02 2.000e+00 2020 05 11 20 23 11 6.488e+04 4.056e+03 9.510e+02 1.940e+02 1.000e+00 2020 05 11 20 33 11 6.805e+04 4.248e+03 9.590e+02 1.870e+02 1.000e+00 2020 05 11 20 43 11 7.916e+04 4.919e+03 1.062e+03 1.980e+02 0.000e+00 2020 05 11 20 53 11 7.632e+04 4.861e+03 1.141e+03 2.110e+02 5.000e+00 2020 05 11 21 03 11 7.472e+04 4.971e+03 1.186e+03 2.290e+02 5.000e+00 2020 05 11 21 13 11 7.890e+04 5.591e+03 1.379e+03 2.610e+02 1.000e+00 2020 05 11 21 23 11 7.780e+04 5.756e+03 1.511e+03 2.700e+02 4.000e+00 2020 05 11 21 33 11 7.917e+04 6.024e+03 1.593e+03 2.830e+02 4.000e+00 2020 05 11 21 43 11 8.017e+04 6.214e+03 1.705e+03 3.030e+02 6.000e+00 2020 05 11 21 53 11 7.824e+04 6.158e+03 1.710e+03 2.530e+02 4.000e+00 2020 05 11 22 03 12 8.151e+04 6.614e+03 1.900e+03 3.250e+02 4.000e+00 2020 05 11 22 13 12 8.448e+04 6.903e+03 2.007e+03 3.320e+02 5.000e+00 2020 05 11 22 23 12 8.976e+04 7.307e+03 2.130e+03 3.390e+02 5.000e+00 2020 05 11 22 33 12 9.086e+04 7.311e+03 2.106e+03 3.740e+02 6.000e+00 2020 05 11 22 43 12 1.022e+05 8.016e+03 2.232e+03 3.850e+02 5.000e+00 2020 05 11 22 53 12 1.060e+05 8.125e+03 2.213e+03 3.410e+02 2.000e+00 2020 05 11 23 03 12 1.040e+05 8.255e+03 2.315e+03 4.220e+02 2.000e+00 2020 05 11 23 13 12 9.851e+04 7.779e+03 2.156e+03 3.720e+02 4.000e+00 2020 05 11 23 23 12 9.616e+04 7.672e+03 2.122e+03 3.740e+02 8.000e+00 2020 05 11 23 33 12 9.473e+04 7.370e+03 2.142e+03 3.660e+02 2.000e+00 2020 05 11 23 43 13 9.550e+04 7.394e+03 2.167e+03 3.630e+02 1.000e+00 2020 05 11 23 53 13 1.025e+05 7.833e+03 2.213e+03 3.400e+02 1.000e+00