# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 05 03 00 00 53 3.096e+05 8.756e+03 1.823e+03 4.190e+02 2.000e+00 2020 05 03 00 10 54 3.205e+05 9.378e+03 1.892e+03 4.690e+02 2.000e+00 2020 05 03 00 20 54 3.207e+05 9.122e+03 1.759e+03 4.060e+02 6.000e+00 2020 05 03 00 30 54 3.209e+05 9.102e+03 1.658e+03 3.880e+02 6.000e+00 2020 05 03 00 40 54 3.322e+05 9.684e+03 1.748e+03 4.150e+02 8.000e+00 2020 05 03 00 50 54 3.277e+05 9.503e+03 1.768e+03 4.480e+02 4.000e+00 2020 05 03 01 00 54 3.113e+05 8.761e+03 1.860e+03 4.500e+02 5.000e+00 2020 05 03 01 10 54 3.013e+05 8.264e+03 1.770e+03 4.310e+02 5.000e+00 2020 05 03 01 20 54 3.011e+05 8.469e+03 1.819e+03 4.420e+02 7.000e+00 2020 05 03 01 30 54 2.998e+05 8.352e+03 1.776e+03 4.590e+02 4.000e+00 2020 05 03 01 40 54 3.049e+05 8.581e+03 1.800e+03 4.390e+02 2.000e+00 2020 05 03 01 50 55 3.130e+05 8.832e+03 1.730e+03 4.320e+02 5.000e+00 2020 05 03 02 00 55 3.264e+05 9.537e+03 1.864e+03 4.490e+02 4.000e+00 2020 05 03 02 10 55 3.463e+05 1.027e+04 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