# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 04 03 00 03 14 3.512e+04 1.994e+03 4.850e+02 1.060e+02 3.000e+00 2020 04 03 00 13 14 3.470e+04 1.962e+03 4.720e+02 9.300e+01 2.000e+00 2020 04 03 00 23 14 3.462e+04 1.864e+03 3.910e+02 8.300e+01 2.000e+00 2020 04 03 00 33 14 3.487e+04 1.872e+03 4.590e+02 9.900e+01 1.000e+00 2020 04 03 00 43 14 3.630e+04 1.916e+03 4.700e+02 9.500e+01 3.000e+00 2020 04 03 00 53 15 3.686e+04 2.015e+03 4.690e+02 9.700e+01 3.000e+00 2020 04 03 01 03 15 4.035e+04 2.705e+03 5.260e+02 9.500e+01 0.000e+00 2020 04 03 01 13 15 3.910e+04 2.496e+03 5.560e+02 1.210e+02 1.000e+00 2020 04 03 01 23 15 3.712e+04 2.053e+03 4.840e+02 1.030e+02 2.000e+00 2020 04 03 01 33 15 3.681e+04 1.948e+03 4.880e+02 1.200e+02 0.000e+00 2020 04 03 01 43 15 3.736e+04 1.977e+03 5.020e+02 1.100e+02 1.000e+00 2020 04 03 01 53 15 3.767e+04 1.985e+03 4.810e+02 1.120e+02 0.000e+00 2020 04 03 02 03 15 3.817e+04 1.952e+03 4.640e+02 1.120e+02 1.000e+00 2020 04 03 02 13 15 3.877e+04 1.976e+03 5.000e+02 1.100e+02 1.000e+00 2020 04 03 02 23 15 3.971e+04 2.023e+03 5.090e+02 1.000e+02 1.000e+00 2020 04 03 02 33 15 4.018e+04 1.999e+03 4.680e+02 1.150e+02 7.000e+00 2020 04 03 02 43 16 3.998e+04 1.997e+03 5.010e+02 1.000e+02 1.000e+00 2020 04 03 02 53 16 4.030e+04 2.039e+03 5.030e+02 1.100e+02 2.000e+00 2020 04 03 03 03 16 4.150e+04 2.018e+03 4.740e+02 1.090e+02 3.000e+00 2020 04 03 03 13 16 4.107e+04 1.979e+03 4.310e+02 7.000e+01 0.000e+00 2020 04 03 03 23 16 4.141e+04 2.079e+03 5.120e+02 1.190e+02 4.000e+00 2020 04 03 03 33 16 4.234e+04 2.025e+03 4.980e+02 9.600e+01 1.000e+00 2020 04 03 03 43 16 4.367e+04 2.216e+03 5.190e+02 1.140e+02 0.000e+00 2020 04 03 03 53 16 4.484e+04 2.237e+03 5.430e+02 1.160e+02 1.000e+00 2020 04 03 04 03 16 4.711e+04 2.471e+03 5.510e+02 1.230e+02 2.000e+00 2020 04 03 04 13 16 4.632e+04 2.458e+03 5.450e+02 1.140e+02 2.000e+00 2020 04 03 04 23 17 4.572e+04 2.485e+03 5.920e+02 1.100e+02 8.000e+00 2020 04 03 04 33 17 4.629e+04 2.411e+03 5.340e+02 1.090e+02 0.000e+00 2020 04 03 04 43 17 4.687e+04 2.398e+03 5.860e+02 1.280e+02 2.000e+00 2020 04 03 04 53 17 5.020e+04 2.687e+03 5.950e+02 1.110e+02 0.000e+00 2020 04 03 05 03 17 4.919e+04 2.556e+03 5.990e+02 1.300e+02 1.000e+00 2020 04 03 05 13 17 5.420e+04 2.888e+03 6.800e+02 1.560e+02 3.000e+00 2020 04 03 05 23 17 5.337e+04 2.674e+03 6.480e+02 1.470e+02 2.000e+00 2020 04 03 05 33 17 5.241e+04 2.573e+03 5.910e+02 1.140e+02 4.000e+00 2020 04 03 05 43 17 5.291e+04 2.558e+03 5.900e+02 1.350e+02 4.000e+00 2020 04 03 05 53 17 5.345e+04 2.572e+03 5.950e+02 1.290e+02 2.000e+00 2020 04 03 06 03 18 5.670e+04 2.735e+03 5.720e+02 1.270e+02 1.000e+00 2020 04 03 06 13 18 5.627e+04 2.747e+03 5.810e+02 1.260e+02 2.000e+00 2020 04 03 06 23 18 5.472e+04 2.649e+03 5.680e+02 1.130e+02 2.000e+00 2020 04 03 06 33 18 5.746e+04 2.762e+03 6.390e+02 1.340e+02 6.000e+00 2020 04 03 06 43 18 6.147e+04 2.977e+03 6.570e+02 1.380e+02 3.000e+00 2020 04 03 06 53 18 6.039e+04 2.963e+03 5.860e+02 1.340e+02 0.000e+00 2020 04 03 07 03 18 6.082e+04 3.015e+03 6.430e+02 1.360e+02 4.000e+00 2020 04 03 07 13 18 5.953e+04 2.821e+03 6.100e+02 1.310e+02 1.000e+00 2020 04 03 07 23 18 5.579e+04 2.649e+03 5.960e+02 1.280e+02 1.000e+00 2020 04 03 07 33 18 5.421e+04 2.584e+03 5.580e+02 1.180e+02 5.000e+00 2020 04 03 07 43 18 5.195e+04 2.575e+03 5.380e+02 1.250e+02 2.000e+00 2020 04 03 07 53 19 4.896e+04 2.634e+03 5.990e+02 1.320e+02 2.000e+00 2020 04 03 08 03 19 4.794e+04 2.681e+03 6.220e+02 1.180e+02 2.000e+00 2020 04 03 08 13 19 4.607e+04 2.477e+03 6.090e+02 1.160e+02 5.000e+00 2020 04 03 08 23 20 4.658e+04 2.529e+03 5.830e+02 1.220e+02 2.000e+00 2020 04 03 08 33 20 4.542e+04 2.543e+03 5.900e+02 1.320e+02 0.000e+00 2020 04 03 08 43 21 4.524e+04 2.553e+03 6.080e+02 1.350e+02 3.000e+00 2020 04 03 08 53 21 4.318e+04 2.302e+03 5.180e+02 1.220e+02 2.000e+00 2020 04 03 09 03 21 4.658e+04 2.582e+03 5.890e+02 1.230e+02 2.000e+00 2020 04 03 09 13 21 4.656e+04 2.504e+03 5.900e+02 1.270e+02 1.000e+00 2020 04 03 09 23 21 6.121e+04 3.811e+03 7.940e+02 1.720e+02 4.000e+00 2020 04 03 09 33 21 6.126e+04 3.927e+03 8.430e+02 1.860e+02 3.000e+00 2020 04 03 09 43 21 6.695e+04 4.849e+03 1.065e+03 2.340e+02 1.100e+01 2020 04 03 09 53 21 6.562e+04 4.553e+03 1.015e+03 2.090e+02 6.000e+00 2020 04 03 10 03 21 6.528e+04 4.345e+03 9.470e+02 2.010e+02 5.000e+00 2020 04 03 10 13 21 6.963e+04 4.485e+03 9.850e+02 2.230e+02 1.100e+01 2020 04 03 10 23 22 7.129e+04 4.532e+03 1.051e+03 2.190e+02 1.300e+01 2020 04 03 10 33 22 7.529e+04 5.171e+03 1.230e+03 2.780e+02 1.200e+01 2020 04 03 10 43 22 7.996e+04 5.402e+03 1.243e+03 2.770e+02 1.400e+01 2020 04 03 10 53 22 8.619e+04 5.515e+03 1.216e+03 2.700e+02 1.600e+01 2020 04 03 11 03 22 8.416e+04 6.121e+03 1.431e+03 3.260e+02 1.100e+01 2020 04 03 11 13 22 7.551e+04 4.928e+03 1.161e+03 3.110e+02 1.300e+01 2020 04 03 11 23 22 7.668e+04 4.824e+03 1.085e+03 2.650e+02 1.200e+01 2020 04 03 11 33 22 7.141e+04 4.342e+03 1.080e+03 2.920e+02 1.300e+01 2020 04 03 11 43 22 6.771e+04 4.004e+03 1.045e+03 2.740e+02 9.000e+00 2020 04 03 11 53 22 7.381e+04 4.479e+03 1.087e+03 2.860e+02 1.500e+01 2020 04 03 12 03 22 7.852e+04 4.825e+03 1.141e+03 2.800e+02 1.700e+01 2020 04 03 12 13 23 7.533e+04 3.905e+03 8.180e+02 2.060e+02 9.000e+00 2020 04 03 12 23 23 7.727e+04 4.070e+03 8.960e+02 2.090e+02 7.000e+00 2020 04 03 12 33 23 8.139e+04 3.958e+03 7.990e+02 1.610e+02 7.000e+00 2020 04 03 12 43 23 8.941e+04 4.021e+03 6.920e+02 1.290e+02 4.000e+00 2020 04 03 12 53 23 9.020e+04 4.157e+03 7.330e+02 1.560e+02 7.000e+00 2020 04 03 13 03 23 8.025e+04 3.630e+03 6.790e+02 1.440e+02 3.000e+00 2020 04 03 13 13 23 7.556e+04 3.646e+03 8.100e+02 1.820e+02 5.000e+00 2020 04 03 13 23 23 7.194e+04 3.863e+03 8.750e+02 2.090e+02 6.000e+00 2020 04 03 13 33 23 6.892e+04 3.663e+03 8.110e+02 2.050e+02 3.000e+00 2020 04 03 13 43 23 6.131e+04 3.238e+03 7.590e+02 1.720e+02 3.000e+00 2020 04 03 13 53 24 5.981e+04 3.136e+03 7.450e+02 1.810e+02 4.000e+00 2020 04 03 14 03 24 6.274e+04 3.346e+03 7.450e+02 1.600e+02 3.000e+00 2020 04 03 14 13 24 6.368e+04 4.108e+03 9.890e+02 1.920e+02 6.000e+00 2020 04 03 14 23 24 5.984e+04 3.510e+03 8.620e+02 1.860e+02 3.000e+00 2020 04 03 14 33 24 6.018e+04 3.457e+03 9.040e+02 2.170e+02 1.000e+01 2020 04 03 14 43 24 5.908e+04 3.565e+03 9.420e+02 2.360e+02 7.000e+00 2020 04 03 14 53 24 5.796e+04 3.400e+03 9.120e+02 2.330e+02 0.000e+00 2020 04 03 15 03 24 5.818e+04 3.406e+03 8.800e+02 2.000e+02 3.000e+00 2020 04 03 15 13 24 5.840e+04 3.259e+03 9.050e+02 2.040e+02 3.000e+00 2020 04 03 15 23 24 6.046e+04 3.692e+03 9.510e+02 2.260e+02 5.000e+00 2020 04 03 15 33 24 6.049e+04 3.999e+03 1.104e+03 3.010e+02 1.900e+01 2020 04 03 15 43 25 5.189e+04 3.105e+03 8.200e+02 2.190e+02 6.000e+00 2020 04 03 15 53 25 5.262e+04 3.207e+03 7.610e+02 1.920e+02 4.000e+00 2020 04 03 16 03 25 5.192e+04 3.696e+03 1.042e+03 2.670e+02 7.000e+00 2020 04 03 16 13 25 4.547e+04 3.394e+03 1.022e+03 2.900e+02 1.100e+01 2020 04 03 16 23 25 4.342e+04 3.194e+03 1.012e+03 2.660e+02 8.000e+00 2020 04 03 16 33 25 4.072e+04 2.842e+03 8.460e+02 2.220e+02 4.000e+00 2020 04 03 16 43 25 4.281e+04 3.502e+03 1.101e+03 2.710e+02 1.100e+01 2020 04 03 16 53 25 4.369e+04 3.268e+03 9.360e+02 2.240e+02 8.000e+00 2020 04 03 17 03 25 4.407e+04 3.386e+03 1.071e+03 2.620e+02 7.000e+00 2020 04 03 17 13 25 4.317e+04 3.360e+03 9.980e+02 2.460e+02 4.000e+00 2020 04 03 17 23 26 4.000e+04 3.037e+03 9.700e+02 2.230e+02 4.000e+00 2020 04 03 17 33 26 4.050e+04 3.007e+03 9.950e+02 2.590e+02 5.000e+00 2020 04 03 17 43 26 4.097e+04 3.022e+03 9.750e+02 2.350e+02 2.000e+00 2020 04 03 17 53 26 4.120e+04 3.277e+03 1.015e+03 2.450e+02 3.000e+00 2020 04 03 18 03 26 4.378e+04 3.258e+03 9.710e+02 2.390e+02 3.000e+00 2020 04 03 18 13 26 5.307e+04 4.327e+03 1.091e+03 2.420e+02 1.000e+00 2020 04 03 18 23 26 4.594e+04 3.053e+03 8.240e+02 1.930e+02 1.000e+00 2020 04 03 18 33 26 4.436e+04 2.912e+03 7.730e+02 1.750e+02 3.000e+00 2020 04 03 18 43 26 4.565e+04 2.919e+03 8.890e+02 2.000e+02 4.000e+00 2020 04 03 18 53 26 4.727e+04 3.016e+03 8.180e+02 1.600e+02 2.000e+00 2020 04 03 19 03 27 4.548e+04 2.859e+03 8.240e+02 1.750e+02 3.000e+00 2020 04 03 19 13 27 5.002e+04 3.321e+03 8.970e+02 1.860e+02 4.000e+00 2020 04 03 19 23 27 6.882e+04 4.187e+03 1.056e+03 2.230e+02 6.000e+00 2020 04 03 19 33 27 6.327e+04 3.790e+03 9.920e+02 2.070e+02 2.000e+00 2020 04 03 19 43 27 5.047e+04 3.262e+03 8.480e+02 1.760e+02 3.000e+00 2020 04 03 19 53 27 4.598e+04 3.083e+03 8.790e+02 2.020e+02 2.000e+00 2020 04 03 20 03 27 4.285e+04 2.967e+03 8.760e+02 1.920e+02 2.000e+00 2020 04 03 20 13 27 4.148e+04 2.930e+03 8.750e+02 1.860e+02 2.000e+00 2020 04 03 20 23 27 4.211e+04 3.017e+03 9.050e+02 2.110e+02 3.000e+00 2020 04 03 20 33 27 4.310e+04 2.973e+03 9.120e+02 1.910e+02 2.000e+00 2020 04 03 20 43 27 4.209e+04 2.876e+03 8.250e+02 1.780e+02 2.000e+00 2020 04 03 20 53 28 4.262e+04 2.969e+03 8.430e+02 1.550e+02 2.000e+00 2020 04 03 21 03 28 4.208e+04 3.093e+03 9.400e+02 1.960e+02 0.000e+00 2020 04 03 21 13 28 4.174e+04 3.062e+03 9.180e+02 1.920e+02 1.000e+00 2020 04 03 21 23 28 4.248e+04 3.123e+03 8.600e+02 1.880e+02 2.000e+00 2020 04 03 21 33 28 4.257e+04 3.218e+03 9.390e+02 2.210e+02 1.000e+00 2020 04 03 21 43 28 4.424e+04 3.232e+03 9.620e+02 1.940e+02 1.000e+00 2020 04 03 21 53 28 4.515e+04 3.331e+03 9.700e+02 2.050e+02 3.000e+00 2020 04 03 22 03 28 4.596e+04 3.442e+03 1.021e+03 2.350e+02 3.000e+00 2020 04 03 22 13 28 4.754e+04 3.515e+03 1.066e+03 2.580e+02 3.000e+00 2020 04 03 22 23 28 4.927e+04 3.677e+03 1.028e+03 2.060e+02 1.000e+00 2020 04 03 22 33 29 5.192e+04 3.913e+03 1.101e+03 2.450e+02 3.000e+00 2020 04 03 22 43 29 5.246e+04 4.194e+03 1.170e+03 2.800e+02 2.000e+00 2020 04 03 22 53 29 5.089e+04 4.073e+03 1.206e+03 2.480e+02 2.000e+00 2020 04 03 23 03 29 5.000e+04 4.129e+03 1.241e+03 2.750e+02 2.000e+00 2020 04 03 23 13 29 4.846e+04 4.031e+03 1.246e+03 2.650e+02 3.000e+00 2020 04 03 23 23 29 4.704e+04 3.959e+03 1.134e+03 2.430e+02 0.000e+00 2020 04 03 23 33 29 4.765e+04 4.069e+03 1.233e+03 2.080e+02 1.000e+00 2020 04 03 23 43 29 5.155e+04 4.586e+03 1.380e+03 2.980e+02 6.000e+00 2020 04 03 23 53 29 5.261e+04 4.687e+03 1.350e+03 3.070e+02 3.000e+00