# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 04 01 00 02 44 2.890e+05 1.563e+04 1.666e+03 2.800e+02 3.000e+00 2020 04 01 00 12 44 2.887e+05 1.525e+04 1.650e+03 2.750e+02 4.000e+00 2020 04 01 00 22 44 2.895e+05 1.558e+04 1.661e+03 2.710e+02 5.000e+00 2020 04 01 00 32 44 2.912e+05 1.561e+04 1.607e+03 2.740e+02 4.000e+00 2020 04 01 00 42 44 2.822e+05 1.488e+04 1.571e+03 2.600e+02 2.000e+00 2020 04 01 00 52 44 2.736e+05 1.384e+04 1.573e+03 2.780e+02 4.000e+00 2020 04 01 01 02 44 2.712e+05 1.414e+04 1.600e+03 2.710e+02 7.000e+00 2020 04 01 01 12 44 2.739e+05 1.425e+04 1.565e+03 2.950e+02 5.000e+00 2020 04 01 01 22 44 2.782e+05 1.472e+04 1.607e+03 2.840e+02 5.000e+00 2020 04 01 01 32 45 2.707e+05 1.403e+04 1.510e+03 2.660e+02 1.000e+00 2020 04 01 01 42 45 2.794e+05 1.496e+04 1.605e+03 2.610e+02 6.000e+00 2020 04 01 01 52 45 3.115e+05 1.820e+04 1.725e+03 2.890e+02 4.000e+00 2020 04 01 02 02 45 3.145e+05 1.850e+04 1.721e+03 2.690e+02 3.000e+00 2020 04 01 02 12 45 3.174e+05 1.912e+04 1.857e+03 2.730e+02 5.000e+00 2020 04 01 02 22 45 3.264e+05 2.046e+04 1.918e+03 2.950e+02 0.000e+00 2020 04 01 02 32 45 3.285e+05 2.102e+04 2.004e+03 3.190e+02 1.000e+00 2020 04 01 02 42 45 3.398e+05 2.234e+04 2.020e+03 2.780e+02 3.000e+00 2020 04 01 02 52 45 3.320e+05 2.162e+04 1.924e+03 2.690e+02 1.000e+00 2020 04 01 03 02 45 3.246e+05 2.071e+04 1.851e+03 2.830e+02 3.000e+00 2020 04 01 03 12 46 3.261e+05 2.166e+04 1.813e+03 2.550e+02 3.000e+00 2020 04 01 03 22 46 3.303e+05 2.285e+04 1.879e+03 2.620e+02 1.000e+00 2020 04 01 03 32 46 3.313e+05 2.385e+04 1.992e+03 2.480e+02 2.000e+00 2020 04 01 03 42 46 3.360e+05 2.507e+04 1.829e+03 2.310e+02 2.000e+00 2020 04 01 03 52 46 3.329e+05 2.508e+04 1.904e+03 2.460e+02 3.000e+00 2020 04 01 04 02 46 3.345e+05 2.571e+04 1.913e+03 2.260e+02 2.000e+00 2020 04 01 04 12 46 3.386e+05 2.710e+04 2.004e+03 2.600e+02 0.000e+00 2020 04 01 04 22 46 3.425e+05 2.920e+04 2.273e+03 2.910e+02 1.000e+00 2020 04 01 04 32 46 3.334e+05 2.764e+04 2.048e+03 2.820e+02 2.000e+00 2020 04 01 04 42 46 3.348e+05 2.822e+04 1.989e+03 2.440e+02 2.000e+00 2020 04 01 04 52 47 3.364e+05 2.895e+04 1.905e+03 2.610e+02 3.000e+00 2020 04 01 05 02 47 3.391e+05 3.103e+04 2.095e+03 2.740e+02 1.000e+00 2020 04 01 05 12 47 3.365e+05 3.142e+04 2.025e+03 2.370e+02 1.000e+00 2020 04 01 05 22 47 3.340e+05 3.078e+04 1.719e+03 1.680e+02 3.000e+00 2020 04 01 05 32 47 3.283e+05 3.026e+04 1.597e+03 1.740e+02 1.000e+00 2020 04 01 05 42 47 3.235e+05 2.950e+04 1.697e+03 1.620e+02 1.000e+00 2020 04 01 05 52 47 3.171e+05 2.883e+04 1.745e+03 1.700e+02 0.000e+00 2020 04 01 06 02 47 3.153e+05 2.921e+04 1.784e+03 1.830e+02 2.000e+00 2020 04 01 06 12 47 3.166e+05 3.039e+04 1.777e+03 1.700e+02 3.000e+00 2020 04 01 06 22 47 3.159e+05 3.080e+04 1.830e+03 1.880e+02 1.000e+00 2020 04 01 06 32 48 3.183e+05 3.124e+04 1.821e+03 2.200e+02 4.000e+00 2020 04 01 06 42 48 3.183e+05 3.102e+04 1.781e+03 1.930e+02 1.000e+00 2020 04 01 06 52 48 3.179e+05 3.111e+04 1.714e+03 1.700e+02 0.000e+00 2020 04 01 07 02 48 3.119e+05 3.004e+04 1.800e+03 1.870e+02 3.000e+00 2020 04 01 07 12 48 3.132e+05 3.064e+04 1.900e+03 2.070e+02 2.000e+00 2020 04 01 07 22 48 3.159e+05 3.062e+04 1.833e+03 1.860e+02 0.000e+00 2020 04 01 07 32 48 3.108e+05 3.012e+04 1.839e+03 2.060e+02 2.000e+00 2020 04 01 07 42 48 3.026e+05 2.821e+04 1.810e+03 1.850e+02 0.000e+00 2020 04 01 07 52 48 3.110e+05 2.904e+04 1.789e+03 1.840e+02 0.000e+00 2020 04 01 08 02 48 2.962e+05 2.536e+04 1.676e+03 2.230e+02 0.000e+00 2020 04 01 08 12 49 2.942e+05 2.479e+04 1.643e+03 1.690e+02 2.000e+00 2020 04 01 08 22 49 2.964e+05 2.439e+04 1.532e+03 1.780e+02 2.000e+00 2020 04 01 08 32 49 2.963e+05 2.459e+04 1.629e+03 1.940e+02 2.000e+00 2020 04 01 08 42 49 2.972e+05 2.469e+04 1.768e+03 2.160e+02 0.000e+00 2020 04 01 08 52 49 3.031e+05 2.631e+04 2.158e+03 1.980e+02 2.000e+00 2020 04 01 09 02 49 2.805e+05 2.225e+04 1.962e+03 1.960e+02 1.000e+00 2020 04 01 09 12 49 2.727e+05 2.155e+04 1.933e+03 2.250e+02 1.000e+00 2020 04 01 09 22 49 2.573e+05 1.906e+04 1.846e+03 2.100e+02 3.000e+00 2020 04 01 09 32 49 2.496e+05 1.768e+04 1.570e+03 1.910e+02 4.000e+00 2020 04 01 09 42 49 2.377e+05 1.644e+04 1.516e+03 1.890e+02 5.000e+00 2020 04 01 09 52 50 2.264e+05 1.486e+04 1.430e+03 1.480e+02 0.000e+00 2020 04 01 10 02 50 2.596e+05 1.915e+04 2.110e+03 2.150e+02 2.000e+00 2020 04 01 10 12 50 2.618e+05 1.988e+04 2.362e+03 2.480e+02 3.000e+00 2020 04 01 10 22 50 2.414e+05 1.722e+04 2.071e+03 2.200e+02 1.000e+00 2020 04 01 10 32 50 2.252e+05 1.489e+04 1.763e+03 1.780e+02 2.000e+00 2020 04 01 10 42 50 1.918e+05 1.113e+04 1.464e+03 1.770e+02 2.000e+00 2020 04 01 10 52 50 1.634e+05 8.598e+03 1.074e+03 1.070e+02 1.000e+00 2020 04 01 11 02 50 1.503e+05 7.319e+03 9.560e+02 1.170e+02 2.000e+00 2020 04 01 11 12 50 1.238e+05 6.156e+03 9.230e+02 1.140e+02 0.000e+00 2020 04 01 11 22 50 1.142e+05 5.714e+03 9.990e+02 1.110e+02 1.000e+00 2020 04 01 11 32 51 1.008e+05 5.183e+03 9.170e+02 1.260e+02 1.000e+00 2020 04 01 11 42 51 1.088e+05 5.480e+03 9.210e+02 1.030e+02 1.000e+00 2020 04 01 11 52 51 9.189e+04 4.719e+03 9.220e+02 1.190e+02 0.000e+00 2020 04 01 12 02 51 8.228e+04 4.472e+03 8.450e+02 1.060e+02 2.000e+00 2020 04 01 12 12 51 6.883e+04 3.672e+03 7.720e+02 8.700e+01 1.000e+00 2020 04 01 12 22 51 5.990e+04 2.997e+03 5.860e+02 6.900e+01 1.000e+00 2020 04 01 12 32 51 7.409e+04 2.937e+03 5.960e+02 5.900e+01 0.000e+00 2020 04 01 12 42 51 6.705e+04 2.934e+03 5.510e+02 7.800e+01 0.000e+00 2020 04 01 12 52 51 4.294e+04 2.279e+03 4.390e+02 4.100e+01 1.000e+00 2020 04 01 13 02 51 4.080e+04 2.380e+03 4.950e+02 5.400e+01 0.000e+00 2020 04 01 13 12 52 3.441e+04 1.987e+03 4.230e+02 6.500e+01 0.000e+00 2020 04 01 13 22 52 2.461e+04 1.585e+03 3.630e+02 4.700e+01 0.000e+00 2020 04 01 13 32 52 2.573e+04 1.588e+03 3.560e+02 5.100e+01 2.000e+00 2020 04 01 13 42 52 1.749e+04 1.051e+03 2.350e+02 2.800e+01 0.000e+00 2020 04 01 13 52 52 1.533e+04 9.850e+02 1.970e+02 2.600e+01 1.000e+00 2020 04 01 14 02 52 1.573e+04 1.021e+03 2.490e+02 4.200e+01 2.000e+00 2020 04 01 14 12 52 1.460e+04 9.590e+02 1.800e+02 2.400e+01 1.000e+00 2020 04 01 14 22 52 1.066e+04 7.180e+02 1.630e+02 1.900e+01 2.000e+00 2020 04 01 14 32 52 1.157e+04 7.690e+02 1.640e+02 3.500e+01 0.000e+00 2020 04 01 14 42 52 1.008e+04 6.680e+02 1.330e+02 2.400e+01 0.000e+00 2020 04 01 14 52 53 9.849e+03 6.620e+02 1.420e+02 2.600e+01 0.000e+00 2020 04 01 15 02 53 8.636e+03 5.700e+02 1.410e+02 2.300e+01 1.000e+00 2020 04 01 15 12 53 7.911e+03 5.350e+02 1.260e+02 2.200e+01 1.000e+00 2020 04 01 15 22 53 7.724e+03 5.160e+02 1.090e+02 2.100e+01 0.000e+00 2020 04 01 15 32 53 7.616e+03 4.660e+02 1.080e+02 1.900e+01 1.000e+00 2020 04 01 15 42 53 7.676e+03 5.170e+02 1.170e+02 1.900e+01 1.000e+00 2020 04 01 15 52 53 7.891e+03 5.050e+02 1.240e+02 2.000e+01 1.000e+00 2020 04 01 16 02 53 6.974e+03 4.520e+02 9.800e+01 2.400e+01 2.000e+00 2020 04 01 16 12 53 6.376e+03 4.650e+02 8.600e+01 1.100e+01 0.000e+00 2020 04 01 16 22 53 6.435e+03 4.610e+02 1.020e+02 2.000e+01 0.000e+00 2020 04 01 16 32 54 5.740e+03 3.840e+02 8.700e+01 1.800e+01 0.000e+00 2020 04 01 16 42 54 6.129e+03 4.240e+02 1.010e+02 1.800e+01 1.000e+00 2020 04 01 16 52 54 6.263e+03 3.910e+02 9.800e+01 1.400e+01 0.000e+00 2020 04 01 17 02 54 5.642e+03 3.130e+02 8.100e+01 1.800e+01 0.000e+00 2020 04 01 17 12 54 9.882e+03 3.490e+02 7.400e+01 1.600e+01 0.000e+00 2020 04 01 17 22 54 1.355e+04 4.160e+02 1.020e+02 2.600e+01 0.000e+00 2020 04 01 17 32 54 2.213e+04 5.030e+02 1.070e+02 2.600e+01 0.000e+00 2020 04 01 17 42 54 2.161e+04 4.490e+02 7.900e+01 1.300e+01 0.000e+00 2020 04 01 17 52 54 3.510e+04 6.360e+02 1.400e+02 2.900e+01 3.000e+00 2020 04 01 18 02 54 3.082e+04 6.400e+02 1.270e+02 3.100e+01 1.000e+00 2020 04 01 18 12 55 2.836e+04 5.230e+02 9.000e+01 1.400e+01 0.000e+00 2020 04 01 18 22 55 2.983e+04 5.020e+02 9.800e+01 1.400e+01 0.000e+00 2020 04 01 18 32 55 2.606e+04 5.070e+02 8.100e+01 1.600e+01 0.000e+00 2020 04 01 18 42 55 2.297e+04 5.160e+02 8.800e+01 1.600e+01 1.000e+00 2020 04 01 18 52 55 2.611e+04 5.590e+02 8.600e+01 6.000e+00 0.000e+00 2020 04 01 19 02 55 3.168e+04 6.500e+02 1.270e+02 2.500e+01 2.000e+00 2020 04 01 19 12 55 2.542e+04 5.920e+02 1.000e+02 1.700e+01 0.000e+00 2020 04 01 19 22 55 2.496e+04 5.990e+02 1.090e+02 2.100e+01 1.000e+00 2020 04 01 19 32 55 2.673e+04 6.110e+02 1.100e+02 2.000e+01 0.000e+00 2020 04 01 19 42 55 2.114e+04 6.270e+02 1.150e+02 1.800e+01 1.000e+00 2020 04 01 19 52 56 2.269e+04 6.900e+02 1.120e+02 2.000e+01 0.000e+00 2020 04 01 20 02 56 1.882e+04 5.900e+02 1.300e+02 3.000e+01 2.000e+00 2020 04 01 20 12 56 1.458e+04 5.730e+02 1.060e+02 1.400e+01 1.000e+00 2020 04 01 20 22 56 1.370e+04 5.220e+02 9.600e+01 1.700e+01 0.000e+00 2020 04 01 20 32 56 1.409e+04 5.090e+02 1.150e+02 2.200e+01 0.000e+00 2020 04 01 20 42 56 1.760e+04 5.650e+02 8.800e+01 1.900e+01 1.000e+00 2020 04 01 20 52 56 2.104e+04 5.700e+02 9.900e+01 1.700e+01 1.000e+00 2020 04 01 21 02 56 2.324e+04 5.980e+02 7.200e+01 1.900e+01 0.000e+00 2020 04 01 21 12 56 2.982e+04 9.290e+02 1.070e+02 1.500e+01 0.000e+00 2020 04 01 21 22 56 2.491e+04 1.292e+03 1.880e+02 2.300e+01 0.000e+00 2020 04 01 21 32 57 1.532e+04 6.240e+02 8.400e+01 1.300e+01 0.000e+00 2020 04 01 21 42 57 1.481e+04 5.660e+02 8.900e+01 1.400e+01 0.000e+00 2020 04 01 21 52 57 1.390e+04 5.890e+02 1.040e+02 1.700e+01 0.000e+00 2020 04 01 22 02 57 1.368e+04 6.700e+02 1.120e+02 1.300e+01 1.000e+00 2020 04 01 22 12 57 1.512e+04 7.300e+02 1.660e+02 2.600e+01 0.000e+00 2020 04 01 22 22 57 1.356e+04 6.570e+02 1.460e+02 2.800e+01 0.000e+00 2020 04 01 22 32 57 1.178e+04 5.990e+02 1.390e+02 2.600e+01 1.000e+00 2020 04 01 22 42 57 1.044e+04 4.800e+02 1.230e+02 2.000e+01 0.000e+00 2020 04 01 22 52 57 8.599e+03 4.850e+02 1.080e+02 3.100e+01 1.000e+00 2020 04 01 23 02 57 8.145e+03 4.930e+02 9.600e+01 1.600e+01 0.000e+00 2020 04 01 23 12 58 6.749e+03 4.480e+02 1.020e+02 2.000e+01 1.000e+00 2020 04 01 23 22 58 5.411e+03 4.160e+02 1.270e+02 3.000e+01 0.000e+00 2020 04 01 23 32 58 4.083e+03 3.250e+02 8.600e+01 1.700e+01 0.000e+00 2020 04 01 23 42 58 4.492e+03 3.710e+02 9.200e+01 2.200e+01 0.000e+00 2020 04 01 23 52 58 4.044e+03 3.430e+02 9.200e+01 2.500e+01 0.000e+00