# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 03 30 00 02 13 3.932e+04 1.503e+03 2.730e+02 3.700e+01 1.000e+00 2020 03 30 00 12 13 3.713e+04 1.460e+03 2.790e+02 4.800e+01 1.000e+00 2020 03 30 00 22 13 3.572e+04 1.367e+03 2.730e+02 5.600e+01 2.000e+00 2020 03 30 00 32 13 3.544e+04 1.381e+03 2.950e+02 5.700e+01 2.000e+00 2020 03 30 00 42 13 3.539e+04 1.380e+03 2.980e+02 5.600e+01 2.000e+00 2020 03 30 00 52 13 3.385e+04 1.446e+03 3.250e+02 6.700e+01 1.000e+00 2020 03 30 01 02 13 3.289e+04 1.727e+03 4.460e+02 1.000e+02 2.000e+00 2020 03 30 01 12 13 3.217e+04 1.883e+03 5.270e+02 1.120e+02 3.000e+00 2020 03 30 01 22 13 3.178e+04 1.833e+03 5.220e+02 1.230e+02 1.000e+00 2020 03 30 01 32 13 3.172e+04 1.826e+03 5.040e+02 1.190e+02 3.000e+00 2020 03 30 01 42 14 3.156e+04 1.694e+03 4.490e+02 1.090e+02 1.000e+00 2020 03 30 01 52 14 3.342e+04 1.795e+03 4.880e+02 1.360e+02 1.000e+00 2020 03 30 02 02 14 3.389e+04 1.766e+03 4.700e+02 9.600e+01 1.000e+00 2020 03 30 02 12 14 3.347e+04 1.770e+03 4.650e+02 1.080e+02 0.000e+00 2020 03 30 02 22 14 3.169e+04 1.820e+03 4.870e+02 1.070e+02 1.000e+00 2020 03 30 02 32 14 3.167e+04 1.806e+03 4.890e+02 1.250e+02 3.000e+00 2020 03 30 02 42 14 3.275e+04 1.909e+03 5.210e+02 1.310e+02 2.000e+00 2020 03 30 02 52 14 3.495e+04 2.007e+03 4.870e+02 1.130e+02 0.000e+00 2020 03 30 03 02 14 3.885e+04 2.056e+03 4.920e+02 1.040e+02 1.000e+00 2020 03 30 03 12 14 4.376e+04 2.083e+03 4.650e+02 1.100e+02 3.000e+00 2020 03 30 03 22 15 5.269e+04 2.301e+03 4.400e+02 7.700e+01 1.000e+00 2020 03 30 03 32 15 5.492e+04 2.403e+03 4.880e+02 1.160e+02 2.000e+00 2020 03 30 03 42 15 5.406e+04 2.410e+03 4.860e+02 1.200e+02 1.000e+00 2020 03 30 03 52 15 5.317e+04 2.527e+03 5.480e+02 1.240e+02 2.000e+00 2020 03 30 04 02 15 5.222e+04 2.559e+03 5.700e+02 1.240e+02 1.000e+00 2020 03 30 04 12 15 4.976e+04 2.659e+03 6.430e+02 1.610e+02 4.000e+00 2020 03 30 04 22 15 4.457e+04 2.574e+03 7.010e+02 1.800e+02 3.000e+00 2020 03 30 04 32 15 4.389e+04 2.574e+03 6.580e+02 1.750e+02 3.000e+00 2020 03 30 04 42 15 4.949e+04 2.858e+03 6.900e+02 1.530e+02 2.000e+00 2020 03 30 04 52 15 6.858e+04 3.950e+03 8.030e+02 1.640e+02 7.000e+00 2020 03 30 05 02 16 7.970e+04 4.249e+03 8.410e+02 1.860e+02 4.000e+00 2020 03 30 05 12 16 8.526e+04 4.206e+03 8.790e+02 1.880e+02 0.000e+00 2020 03 30 05 22 16 8.948e+04 4.174e+03 8.130e+02 1.890e+02 4.000e+00 2020 03 30 05 32 16 9.493e+04 4.239e+03 7.960e+02 1.920e+02 4.000e+00 2020 03 30 05 42 16 8.122e+04 3.711e+03 8.060e+02 1.970e+02 6.000e+00 2020 03 30 05 52 16 7.379e+04 3.488e+03 7.600e+02 1.730e+02 5.000e+00 2020 03 30 06 02 18 6.664e+04 3.220e+03 7.050e+02 1.690e+02 2.000e+00 2020 03 30 06 12 18 6.626e+04 3.250e+03 7.660e+02 1.840e+02 5.000e+00 2020 03 30 06 22 18 6.421e+04 3.121e+03 7.060e+02 1.670e+02 2.000e+00 2020 03 30 06 32 18 6.406e+04 3.170e+03 7.310e+02 1.660e+02 3.000e+00 2020 03 30 06 42 18 6.162e+04 3.106e+03 6.810e+02 1.640e+02 4.000e+00 2020 03 30 06 52 18 6.277e+04 3.058e+03 7.020e+02 1.620e+02 7.000e+00 2020 03 30 07 02 18 6.096e+04 2.824e+03 6.890e+02 1.710e+02 6.000e+00 2020 03 30 07 12 18 5.564e+04 2.776e+03 7.100e+02 1.820e+02 6.000e+00 2020 03 30 07 22 18 6.034e+04 3.113e+03 7.850e+02 2.000e+02 9.000e+00 2020 03 30 07 32 18 7.102e+04 3.572e+03 7.500e+02 1.750e+02 2.000e+00 2020 03 30 07 42 19 6.899e+04 3.465e+03 8.300e+02 1.910e+02 4.000e+00 2020 03 30 07 52 19 7.005e+04 3.644e+03 8.450e+02 1.850e+02 4.000e+00 2020 03 30 08 02 19 7.230e+04 3.800e+03 9.480e+02 2.350e+02 5.000e+00 2020 03 30 08 12 19 7.890e+04 4.404e+03 1.045e+03 2.360e+02 7.000e+00 2020 03 30 08 22 19 7.374e+04 4.221e+03 1.055e+03 2.360e+02 6.000e+00 2020 03 30 08 32 19 6.191e+04 3.923e+03 1.066e+03 2.650e+02 5.000e+00 2020 03 30 08 42 19 5.857e+04 3.805e+03 1.037e+03 2.280e+02 6.000e+00 2020 03 30 08 52 19 5.341e+04 3.611e+03 1.091e+03 2.540e+02 8.000e+00 2020 03 30 09 02 19 5.170e+04 3.740e+03 1.076e+03 2.510e+02 3.000e+00 2020 03 30 09 12 19 4.877e+04 3.916e+03 1.155e+03 2.800e+02 4.000e+00 2020 03 30 09 22 20 4.901e+04 3.948e+03 1.200e+03 3.180e+02 6.000e+00 2020 03 30 09 32 20 5.125e+04 4.353e+03 1.251e+03 2.940e+02 6.000e+00 2020 03 30 09 42 20 4.870e+04 3.990e+03 1.217e+03 3.080e+02 1.000e+01 2020 03 30 09 52 20 4.667e+04 4.030e+03 1.241e+03 2.960e+02 2.000e+00 2020 03 30 10 02 20 4.645e+04 4.021e+03 1.275e+03 3.000e+02 5.000e+00 2020 03 30 10 12 20 4.624e+04 3.916e+03 1.186e+03 2.890e+02 3.000e+00 2020 03 30 10 22 20 4.443e+04 3.938e+03 1.188e+03 3.080e+02 6.000e+00 2020 03 30 10 32 20 4.353e+04 3.837e+03 1.188e+03 2.580e+02 5.000e+00 2020 03 30 10 42 20 4.509e+04 3.821e+03 1.201e+03 2.760e+02 3.000e+00 2020 03 30 10 52 20 4.508e+04 3.979e+03 1.226e+03 2.740e+02 3.000e+00 2020 03 30 11 02 21 4.616e+04 3.869e+03 1.218e+03 2.630e+02 7.000e+00 2020 03 30 11 12 21 5.230e+04 3.996e+03 1.190e+03 3.030e+02 3.000e+00 2020 03 30 11 22 21 5.326e+04 4.085e+03 1.189e+03 2.660e+02 7.000e+00 2020 03 30 11 32 21 5.988e+04 4.165e+03 1.212e+03 2.700e+02 2.000e+00 2020 03 30 11 42 21 5.594e+04 3.888e+03 1.209e+03 2.930e+02 4.000e+00 2020 03 30 11 52 21 5.664e+04 3.903e+03 1.148e+03 2.570e+02 3.000e+00 2020 03 30 12 02 21 4.920e+04 3.579e+03 1.099e+03 2.660e+02 4.000e+00 2020 03 30 12 12 21 4.697e+04 3.332e+03 1.026e+03 2.380e+02 1.100e+01 2020 03 30 12 22 21 4.930e+04 3.498e+03 1.001e+03 2.090e+02 3.000e+00 2020 03 30 12 32 21 5.415e+04 3.691e+03 1.039e+03 2.020e+02 2.000e+00 2020 03 30 12 42 22 5.059e+04 3.479e+03 1.030e+03 2.340e+02 2.000e+00 2020 03 30 12 52 22 4.863e+04 3.465e+03 1.010e+03 2.270e+02 4.000e+00 2020 03 30 13 02 22 4.592e+04 3.474e+03 1.022e+03 2.340e+02 4.000e+00 2020 03 30 13 12 22 4.706e+04 3.466e+03 1.029e+03 2.330e+02 1.000e+00 2020 03 30 13 22 22 4.857e+04 3.469e+03 1.038e+03 2.330e+02 2.000e+00 2020 03 30 13 32 22 4.712e+04 3.424e+03 9.920e+02 2.000e+02 2.000e+00 2020 03 30 13 42 22 4.157e+04 3.165e+03 9.410e+02 1.880e+02 5.000e+00 2020 03 30 13 52 22 4.061e+04 3.286e+03 9.270e+02 1.990e+02 7.000e+00 2020 03 30 14 02 22 4.066e+04 3.328e+03 1.013e+03 1.770e+02 3.000e+00 2020 03 30 14 12 22 3.766e+04 3.194e+03 9.740e+02 2.100e+02 4.000e+00 2020 03 30 14 22 23 3.558e+04 3.090e+03 9.670e+02 2.190e+02 7.000e+00 2020 03 30 14 32 23 3.502e+04 3.109e+03 9.660e+02 2.220e+02 4.000e+00 2020 03 30 14 42 23 3.459e+04 3.055e+03 9.390e+02 1.960e+02 1.000e+00 2020 03 30 14 52 23 3.090e+04 2.919e+03 9.090e+02 1.950e+02 4.000e+00 2020 03 30 15 02 23 3.192e+04 2.849e+03 8.830e+02 1.980e+02 1.000e+00 2020 03 30 15 12 23 2.949e+04 2.793e+03 8.710e+02 2.020e+02 4.000e+00 2020 03 30 15 22 23 2.893e+04 2.671e+03 8.530e+02 2.230e+02 7.000e+00 2020 03 30 15 32 23 2.845e+04 2.696e+03 8.280e+02 1.970e+02 4.000e+00 2020 03 30 15 42 23 2.730e+04 2.814e+03 9.230e+02 2.020e+02 6.000e+00 2020 03 30 15 52 23 2.676e+04 2.815e+03 9.170e+02 2.000e+02 1.000e+00 2020 03 30 16 02 24 2.699e+04 2.883e+03 9.180e+02 2.000e+02 1.000e+00 2020 03 30 16 12 24 2.620e+04 2.734e+03 9.080e+02 2.190e+02 5.000e+00 2020 03 30 16 22 24 2.638e+04 2.799e+03 9.660e+02 2.250e+02 3.000e+00 2020 03 30 16 32 24 2.685e+04 2.854e+03 9.460e+02 2.130e+02 7.000e+00 2020 03 30 16 42 24 2.700e+04 2.891e+03 9.660e+02 2.220e+02 4.000e+00 2020 03 30 16 52 24 2.650e+04 2.804e+03 9.520e+02 2.000e+02 2.000e+00 2020 03 30 17 02 24 2.722e+04 2.785e+03 8.990e+02 1.860e+02 2.000e+00 2020 03 30 17 12 24 2.599e+04 2.741e+03 9.140e+02 2.240e+02 3.000e+00 2020 03 30 17 22 24 2.473e+04 2.728e+03 9.450e+02 2.230e+02 2.000e+00 2020 03 30 17 32 24 2.539e+04 2.827e+03 9.230e+02 2.200e+02 6.000e+00 2020 03 30 17 42 25 2.702e+04 2.957e+03 9.930e+02 1.810e+02 3.000e+00 2020 03 30 17 52 25 2.434e+04 2.852e+03 9.570e+02 2.070e+02 4.000e+00 2020 03 30 18 02 25 2.811e+04 3.119e+03 1.004e+03 2.150e+02 8.000e+00 2020 03 30 18 12 25 3.086e+04 3.171e+03 1.010e+03 1.970e+02 3.000e+00 2020 03 30 18 22 25 3.302e+04 3.413e+03 1.045e+03 2.430e+02 1.000e+00 2020 03 30 18 32 25 4.386e+04 3.824e+03 1.138e+03 2.460e+02 2.000e+00 2020 03 30 18 42 25 5.515e+04 4.435e+03 1.271e+03 2.540e+02 9.000e+00 2020 03 30 18 52 25 6.548e+04 4.754e+03 1.319e+03 2.690e+02 7.000e+00 2020 03 30 19 02 25 7.127e+04 5.005e+03 1.417e+03 2.790e+02 8.000e+00 2020 03 30 19 12 25 5.576e+04 4.405e+03 1.303e+03 2.530e+02 6.000e+00 2020 03 30 19 22 26 5.223e+04 4.378e+03 1.311e+03 2.800e+02 5.000e+00 2020 03 30 19 32 26 4.800e+04 4.325e+03 1.296e+03 2.990e+02 4.000e+00 2020 03 30 19 42 26 4.252e+04 4.054e+03 1.190e+03 2.400e+02 4.000e+00 2020 03 30 19 52 26 3.547e+04 3.551e+03 1.087e+03 2.190e+02 2.000e+00 2020 03 30 20 02 26 3.341e+04 3.461e+03 1.151e+03 2.580e+02 2.000e+00 2020 03 30 20 12 26 3.243e+04 3.291e+03 1.059e+03 2.450e+02 5.000e+00 2020 03 30 20 22 26 3.224e+04 3.145e+03 9.810e+02 2.480e+02 2.000e+00 2020 03 30 20 32 26 3.245e+04 3.065e+03 9.860e+02 2.140e+02 3.000e+00 2020 03 30 20 42 26 3.080e+04 3.099e+03 9.800e+02 1.990e+02 4.000e+00 2020 03 30 20 52 26 2.894e+04 2.948e+03 9.330e+02 2.010e+02 5.000e+00 2020 03 30 21 02 27 3.021e+04 3.050e+03 9.610e+02 2.100e+02 5.000e+00 2020 03 30 21 12 27 3.094e+04 3.083e+03 9.370e+02 1.910e+02 3.000e+00 2020 03 30 21 22 27 2.739e+04 2.832e+03 8.930e+02 2.040e+02 6.000e+00 2020 03 30 21 32 27 2.682e+04 2.755e+03 8.420e+02 1.850e+02 2.000e+00 2020 03 30 21 42 27 2.454e+04 2.535e+03 8.150e+02 1.850e+02 4.000e+00 2020 03 30 21 52 27 2.337e+04 2.458e+03 7.940e+02 1.850e+02 5.000e+00 2020 03 30 22 02 27 2.552e+04 2.533e+03 8.120e+02 1.760e+02 4.000e+00 2020 03 30 22 12 27 2.622e+04 2.612e+03 7.970e+02 1.900e+02 6.000e+00 2020 03 30 22 22 27 2.293e+04 2.472e+03 7.920e+02 1.800e+02 3.000e+00 2020 03 30 22 32 27 2.268e+04 2.373e+03 7.260e+02 1.570e+02 3.000e+00 2020 03 30 22 42 28 2.330e+04 2.385e+03 7.400e+02 1.710e+02 0.000e+00 2020 03 30 22 52 28 2.321e+04 2.353e+03 7.660e+02 1.730e+02 2.000e+00 2020 03 30 23 02 28 2.350e+04 2.379e+03 7.410e+02 1.600e+02 2.000e+00 2020 03 30 23 12 28 2.366e+04 2.398e+03 7.470e+02 1.660e+02 5.000e+00 2020 03 30 23 22 28 2.422e+04 2.446e+03 7.620e+02 1.620e+02 2.000e+00 2020 03 30 23 32 28 2.578e+04 2.405e+03 7.960e+02 1.850e+02 5.000e+00 2020 03 30 23 42 28 2.762e+04 2.660e+03 8.670e+02 1.950e+02 5.000e+00 2020 03 30 23 52 28 2.916e+04 2.822e+03 9.160e+02 2.040e+02 3.000e+00