# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 03 28 00 01 44 1.129e+05 6.734e+03 2.434e+03 4.360e+02 0.000e+00 2020 03 28 00 11 44 1.009e+05 6.758e+03 2.502e+03 4.060e+02 3.000e+00 2020 03 28 00 21 44 9.369e+04 6.864e+03 2.598e+03 5.000e+02 0.000e+00 2020 03 28 00 31 44 8.371e+04 7.208e+03 2.703e+03 4.790e+02 1.000e+00 2020 03 28 00 41 44 8.829e+04 7.436e+03 2.778e+03 4.800e+02 1.000e+00 2020 03 28 00 51 44 7.865e+04 7.201e+03 2.635e+03 4.470e+02 1.000e+00 2020 03 28 01 01 44 8.915e+04 7.421e+03 2.576e+03 4.870e+02 1.000e+00 2020 03 28 01 11 44 8.598e+04 7.524e+03 2.823e+03 4.990e+02 3.000e+00 2020 03 28 01 21 45 8.148e+04 7.359e+03 2.686e+03 4.680e+02 3.000e+00 2020 03 28 01 31 45 7.119e+04 7.117e+03 2.618e+03 4.290e+02 0.000e+00 2020 03 28 01 41 45 7.255e+04 7.938e+03 2.898e+03 5.430e+02 2.000e+00 2020 03 28 01 51 45 6.615e+04 7.456e+03 2.635e+03 4.560e+02 1.000e+00 2020 03 28 02 01 45 6.258e+04 7.369e+03 2.607e+03 4.410e+02 2.000e+00 2020 03 28 02 11 45 5.495e+04 7.777e+03 2.792e+03 4.350e+02 1.000e+00 2020 03 28 02 21 45 6.196e+04 7.963e+03 2.839e+03 4.420e+02 2.000e+00 2020 03 28 02 31 45 6.495e+04 8.264e+03 2.968e+03 4.720e+02 3.000e+00 2020 03 28 02 41 45 5.460e+04 8.060e+03 3.067e+03 5.210e+02 3.000e+00 2020 03 28 02 51 45 4.977e+04 7.993e+03 2.955e+03 4.700e+02 1.000e+00 2020 03 28 03 01 46 4.899e+04 8.438e+03 3.306e+03 5.070e+02 1.000e+00 2020 03 28 03 11 46 5.191e+04 8.202e+03 3.146e+03 5.430e+02 3.000e+00 2020 03 28 03 21 46 5.764e+04 8.469e+03 3.159e+03 5.270e+02 0.000e+00 2020 03 28 03 31 46 5.565e+04 9.200e+03 3.435e+03 5.770e+02 3.000e+00 2020 03 28 03 41 46 5.216e+04 8.656e+03 3.165e+03 5.090e+02 1.000e+00 2020 03 28 03 51 46 5.200e+04 8.920e+03 3.359e+03 5.280e+02 1.000e+00 2020 03 28 04 01 46 5.291e+04 9.645e+03 3.774e+03 7.140e+02 4.000e+00 2020 03 28 04 11 46 5.219e+04 9.951e+03 3.855e+03 6.260e+02 3.000e+00 2020 03 28 04 21 46 5.254e+04 9.711e+03 3.676e+03 6.290e+02 2.000e+00 2020 03 28 04 31 46 5.254e+04 9.714e+03 3.753e+03 6.420e+02 2.000e+00 2020 03 28 04 41 47 5.098e+04 9.345e+03 3.607e+03 5.750e+02 1.000e+00 2020 03 28 04 51 47 5.168e+04 9.163e+03 3.506e+03 5.980e+02 3.000e+00 2020 03 28 05 01 47 6.298e+04 1.027e+04 3.982e+03 6.660e+02 1.000e+00 2020 03 28 05 11 47 6.363e+04 1.015e+04 3.916e+03 5.920e+02 1.000e+00 2020 03 28 05 21 47 6.987e+04 1.029e+04 3.903e+03 6.900e+02 2.000e+00 2020 03 28 05 31 47 6.719e+04 9.655e+03 3.689e+03 6.100e+02 2.000e+00 2020 03 28 05 41 47 7.263e+04 9.560e+03 3.796e+03 6.840e+02 2.000e+00 2020 03 28 05 51 47 6.793e+04 8.282e+03 3.034e+03 4.830e+02 1.000e+00 2020 03 28 06 01 47 6.255e+04 7.923e+03 2.870e+03 4.960e+02 0.000e+00 2020 03 28 06 11 47 6.046e+04 7.679e+03 2.651e+03 3.760e+02 1.000e+00 2020 03 28 06 21 48 6.614e+04 6.980e+03 2.240e+03 3.250e+02 0.000e+00 2020 03 28 06 31 48 5.533e+04 6.173e+03 1.923e+03 2.560e+02 0.000e+00 2020 03 28 06 41 48 6.522e+04 6.230e+03 2.066e+03 3.280e+02 0.000e+00 2020 03 28 06 51 48 4.817e+04 5.638e+03 1.842e+03 2.770e+02 2.000e+00 2020 03 28 07 01 48 5.845e+04 6.124e+03 1.972e+03 2.330e+02 1.000e+00 2020 03 28 07 11 48 4.951e+04 5.858e+03 1.897e+03 2.190e+02 1.000e+00 2020 03 28 07 21 48 4.242e+04 7.975e+03 2.845e+03 3.640e+02 1.000e+00 2020 03 28 07 31 48 8.283e+04 1.355e+04 5.234e+03 7.710e+02 0.000e+00 2020 03 28 07 41 48 8.882e+04 1.507e+04 5.586e+03 7.350e+02 1.000e+00 2020 03 28 07 51 48 7.138e+04 1.745e+04 6.350e+03 7.560e+02 1.000e+00 2020 03 28 08 01 49 6.064e+04 1.501e+04 5.593e+03 7.370e+02 0.000e+00 2020 03 28 08 11 49 6.915e+04 1.454e+04 5.561e+03 7.050e+02 1.000e+00 2020 03 28 08 21 49 7.455e+04 1.497e+04 5.486e+03 6.460e+02 1.000e+00 2020 03 28 08 31 49 6.177e+04 1.126e+04 3.910e+03 4.220e+02 0.000e+00 2020 03 28 08 41 49 5.710e+04 1.152e+04 4.001e+03 4.150e+02 0.000e+00 2020 03 28 08 51 49 4.077e+04 9.055e+03 2.983e+03 3.260e+02 2.000e+00 2020 03 28 09 01 49 3.048e+04 6.814e+03 2.305e+03 2.670e+02 0.000e+00 2020 03 28 09 11 49 3.524e+04 8.105e+03 2.739e+03 3.030e+02 1.000e+00 2020 03 28 09 21 49 3.905e+04 9.405e+03 3.251e+03 3.570e+02 3.000e+00 2020 03 28 09 31 49 4.237e+04 1.062e+04 3.685e+03 4.280e+02 2.000e+00 2020 03 28 09 41 50 4.014e+04 9.705e+03 3.345e+03 4.140e+02 0.000e+00 2020 03 28 09 51 50 5.622e+04 1.423e+04 5.649e+03 7.750e+02 1.000e+00 2020 03 28 10 01 50 5.648e+04 1.185e+04 4.480e+03 5.450e+02 4.000e+00 2020 03 28 10 11 50 4.218e+04 1.116e+04 4.596e+03 6.390e+02 1.000e+00 2020 03 28 10 21 50 4.464e+04 9.611e+03 3.909e+03 5.750e+02 3.000e+00 2020 03 28 10 31 50 4.260e+04 8.082e+03 3.154e+03 4.450e+02 0.000e+00 2020 03 28 10 41 50 5.217e+04 7.418e+03 2.787e+03 4.050e+02 1.000e+00 2020 03 28 10 51 50 4.928e+04 6.957e+03 2.614e+03 3.580e+02 0.000e+00 2020 03 28 11 01 50 5.375e+04 7.279e+03 2.672e+03 3.590e+02 1.000e+00 2020 03 28 11 11 50 5.049e+04 8.146e+03 3.099e+03 4.440e+02 2.000e+00 2020 03 28 11 21 51 4.932e+04 9.029e+03 3.399e+03 4.760e+02 1.000e+00 2020 03 28 11 31 51 4.916e+04 1.008e+04 3.790e+03 4.770e+02 1.000e+00 2020 03 28 11 41 51 5.005e+04 1.034e+04 4.109e+03 5.830e+02 1.000e+00 2020 03 28 11 51 51 4.637e+04 9.681e+03 3.822e+03 4.950e+02 1.000e+00 2020 03 28 12 01 51 4.744e+04 9.795e+03 3.829e+03 5.480e+02 1.000e+00 2020 03 28 12 11 51 4.391e+04 9.514e+03 3.548e+03 4.920e+02 2.000e+00 2020 03 28 12 21 51 4.101e+04 8.850e+03 3.369e+03 4.400e+02 0.000e+00 2020 03 28 12 31 51 4.000e+04 8.363e+03 3.122e+03 4.360e+02 1.000e+00 2020 03 28 12 41 51 4.069e+04 7.036e+03 2.328e+03 3.240e+02 0.000e+00 2020 03 28 12 51 51 4.268e+04 6.781e+03 2.309e+03 3.380e+02 2.000e+00 2020 03 28 13 01 52 4.090e+04 5.666e+03 1.889e+03 2.810e+02 3.000e+00 2020 03 28 13 11 52 4.059e+04 5.508e+03 1.964e+03 2.950e+02 0.000e+00 2020 03 28 13 21 52 3.894e+04 4.971e+03 1.742e+03 2.800e+02 4.000e+00 2020 03 28 13 31 52 4.848e+04 3.768e+03 1.226e+03 1.860e+02 0.000e+00 2020 03 28 13 41 52 5.383e+04 2.659e+03 7.420e+02 1.170e+02 2.000e+00 2020 03 28 13 51 52 4.697e+04 2.392e+03 7.150e+02 1.070e+02 6.000e+00 2020 03 28 14 01 52 4.846e+04 2.457e+03 7.210e+02 9.800e+01 3.000e+00 2020 03 28 14 11 52 4.862e+04 2.410e+03 6.430e+02 1.020e+02 3.000e+00 2020 03 28 14 21 52 5.026e+04 3.005e+03 8.210e+02 1.080e+02 1.000e+00 2020 03 28 14 31 52 4.199e+04 3.278e+03 9.080e+02 1.150e+02 0.000e+00 2020 03 28 14 41 53 3.531e+04 3.763e+03 1.054e+03 1.080e+02 0.000e+00 2020 03 28 14 51 53 3.595e+04 4.478e+03 1.364e+03 1.540e+02 3.000e+00 2020 03 28 15 01 53 3.496e+04 4.263e+03 1.179e+03 1.180e+02 1.000e+00 2020 03 28 15 11 53 3.952e+04 4.398e+03 1.150e+03 1.240e+02 1.000e+00 2020 03 28 15 21 53 3.962e+04 3.946e+03 9.580e+02 9.500e+01 2.000e+00 2020 03 28 15 31 53 4.034e+04 4.125e+03 1.109e+03 1.270e+02 0.000e+00 2020 03 28 15 41 53 4.149e+04 4.312e+03 1.098e+03 1.210e+02 0.000e+00 2020 03 28 15 51 53 4.184e+04 4.302e+03 1.070e+03 1.080e+02 0.000e+00 2020 03 28 16 01 53 4.506e+04 4.586e+03 1.110e+03 1.230e+02 2.000e+00 2020 03 28 16 11 53 5.084e+04 4.309e+03 1.022e+03 1.090e+02 0.000e+00 2020 03 28 16 21 54 6.961e+04 4.802e+03 1.152e+03 1.330e+02 3.000e+00 2020 03 28 16 31 54 5.445e+04 4.008e+03 9.970e+02 1.090e+02 1.000e+00 2020 03 28 16 41 54 6.982e+04 4.095e+03 1.002e+03 1.250e+02 0.000e+00 2020 03 28 16 51 54 6.115e+04 4.479e+03 1.145e+03 1.530e+02 2.000e+00 2020 03 28 17 01 54 5.817e+04 4.985e+03 1.350e+03 1.860e+02 1.000e+00 2020 03 28 17 11 54 6.768e+04 5.566e+03 1.440e+03 2.030e+02 1.000e+00 2020 03 28 17 21 54 7.621e+04 5.983e+03 1.648e+03 2.330e+02 2.000e+00 2020 03 28 17 31 54 7.740e+04 6.483e+03 1.758e+03 2.460e+02 0.000e+00 2020 03 28 17 41 54 7.950e+04 6.444e+03 1.753e+03 2.260e+02 1.000e+00 2020 03 28 17 51 54 9.280e+04 6.084e+03 1.504e+03 2.180e+02 3.000e+00 2020 03 28 18 01 55 1.044e+05 5.573e+03 1.399e+03 1.780e+02 3.000e+00 2020 03 28 18 11 55 1.032e+05 5.084e+03 1.145e+03 1.520e+02 3.000e+00 2020 03 28 18 21 55 1.054e+05 4.980e+03 1.137e+03 1.530e+02 3.000e+00 2020 03 28 18 31 55 9.368e+04 4.490e+03 1.071e+03 1.550e+02 0.000e+00 2020 03 28 18 41 55 8.509e+04 4.448e+03 1.090e+03 1.440e+02 1.000e+00 2020 03 28 18 51 55 9.363e+04 4.205e+03 9.700e+02 1.390e+02 1.000e+00 2020 03 28 19 01 55 1.141e+05 4.269e+03 8.530e+02 1.400e+02 1.000e+00 2020 03 28 19 11 55 1.048e+05 4.254e+03 9.380e+02 1.370e+02 0.000e+00 2020 03 28 19 21 55 1.123e+05 4.399e+03 8.420e+02 1.170e+02 2.000e+00 2020 03 28 19 31 55 1.098e+05 4.442e+03 9.760e+02 1.440e+02 3.000e+00 2020 03 28 19 41 56 4.052e+04 3.142e+03 7.280e+02 9.400e+01 1.000e+00 2020 03 28 19 51 56 3.114e+04 3.231e+03 7.520e+02 1.060e+02 3.000e+00 2020 03 28 20 01 56 2.941e+04 3.124e+03 7.230e+02 9.300e+01 0.000e+00 2020 03 28 20 11 56 2.950e+04 3.137e+03 8.370e+02 1.270e+02 0.000e+00 2020 03 28 20 21 56 3.097e+04 3.373e+03 8.870e+02 1.440e+02 0.000e+00 2020 03 28 20 31 56 2.866e+04 3.194e+03 7.780e+02 9.100e+01 1.000e+00 2020 03 28 20 41 56 3.134e+04 3.625e+03 9.210e+02 1.360e+02 0.000e+00 2020 03 28 20 51 56 3.005e+04 3.471e+03 8.260e+02 1.020e+02 0.000e+00 2020 03 28 21 01 56 3.165e+04 3.767e+03 9.010e+02 1.190e+02 0.000e+00 2020 03 28 21 11 56 3.162e+04 3.894e+03 1.001e+03 1.360e+02 1.000e+00 2020 03 28 21 21 57 3.202e+04 4.014e+03 1.033e+03 1.480e+02 1.000e+00 2020 03 28 21 31 57 3.040e+04 3.764e+03 9.220e+02 1.300e+02 0.000e+00 2020 03 28 21 41 57 3.017e+04 3.684e+03 8.820e+02 1.190e+02 2.000e+00 2020 03 28 21 51 57 3.016e+04 3.639e+03 8.000e+02 8.800e+01 1.000e+00 2020 03 28 22 01 57 2.796e+04 3.442e+03 7.690e+02 1.040e+02 1.000e+00 2020 03 28 22 11 57 2.750e+04 3.475e+03 7.620e+02 1.220e+02 1.000e+00 2020 03 28 22 21 57 2.872e+04 3.815e+03 8.470e+02 1.110e+02 0.000e+00 2020 03 28 22 31 57 3.007e+04 4.160e+03 9.070e+02 1.080e+02 1.000e+00 2020 03 28 22 41 57 3.020e+04 4.140e+03 9.850e+02 1.300e+02 1.000e+00 2020 03 28 22 51 57 2.771e+04 3.884e+03 9.150e+02 1.150e+02 1.000e+00 2020 03 28 23 01 58 2.717e+04 3.774e+03 8.650e+02 1.150e+02 1.000e+00 2020 03 28 23 11 58 2.619e+04 3.594e+03 7.790e+02 1.300e+02 2.000e+00 2020 03 28 23 21 58 2.648e+04 3.712e+03 8.610e+02 1.250e+02 0.000e+00 2020 03 28 23 31 58 2.547e+04 3.514e+03 8.160e+02 1.020e+02 1.000e+00 2020 03 28 23 41 58 2.394e+04 3.267e+03 7.100e+02 9.400e+01 1.000e+00 2020 03 28 23 51 58 2.246e+04 2.977e+03 6.610e+02 9.600e+01 1.000e+00