# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 03 15 00 08 24 8.960e+04 2.210e+03 2.450e+02 3.600e+01 0.000e+00 2020 03 15 00 18 24 8.016e+04 2.155e+03 2.530e+02 4.500e+01 2.000e+00 2020 03 15 00 28 24 7.737e+04 2.167e+03 2.280e+02 4.600e+01 0.000e+00 2020 03 15 00 38 24 7.113e+04 1.894e+03 2.130e+02 4.200e+01 0.000e+00 2020 03 15 00 48 24 7.142e+04 1.990e+03 2.060e+02 3.500e+01 0.000e+00 2020 03 15 00 58 24 7.368e+04 2.051e+03 2.010e+02 4.500e+01 0.000e+00 2020 03 15 01 08 24 8.130e+04 2.244e+03 2.270e+02 4.400e+01 0.000e+00 2020 03 15 01 18 24 8.268e+04 2.293e+03 2.310e+02 3.800e+01 1.000e+00 2020 03 15 01 28 24 7.878e+04 2.196e+03 2.590e+02 4.700e+01 0.000e+00 2020 03 15 01 38 24 8.107e+04 2.177e+03 2.470e+02 3.800e+01 1.000e+00 2020 03 15 01 48 25 8.905e+04 2.409e+03 2.230e+02 3.500e+01 1.000e+00 2020 03 15 01 58 25 9.016e+04 2.408e+03 2.680e+02 5.200e+01 0.000e+00 2020 03 15 02 08 25 8.753e+04 2.371e+03 2.920e+02 4.800e+01 2.000e+00 2020 03 15 02 18 25 9.059e+04 2.564e+03 2.860e+02 5.500e+01 2.000e+00 2020 03 15 02 28 25 9.119e+04 2.548e+03 2.740e+02 6.600e+01 3.000e+00 2020 03 15 02 38 25 7.358e+04 1.948e+03 2.450e+02 4.900e+01 0.000e+00 2020 03 15 02 48 25 7.354e+04 1.907e+03 2.050e+02 4.100e+01 1.000e+00 2020 03 15 02 58 25 7.657e+04 2.141e+03 2.920e+02 6.500e+01 3.000e+00 2020 03 15 03 08 25 7.610e+04 2.015e+03 2.230e+02 4.200e+01 1.000e+00 2020 03 15 03 18 25 8.410e+04 2.172e+03 2.350e+02 3.600e+01 0.000e+00 2020 03 15 03 28 26 7.412e+04 2.024e+03 2.850e+02 5.500e+01 0.000e+00 2020 03 15 03 38 26 6.462e+04 1.904e+03 2.460e+02 6.400e+01 1.000e+00 2020 03 15 03 48 26 6.780e+04 1.933e+03 2.360e+02 4.000e+01 1.000e+00 2020 03 15 03 58 26 6.816e+04 1.985e+03 2.480e+02 4.600e+01 1.000e+00 2020 03 15 04 08 26 5.254e+04 1.734e+03 3.160e+02 7.500e+01 0.000e+00 2020 03 15 04 18 26 5.345e+04 1.851e+03 3.450e+02 7.700e+01 2.000e+00 2020 03 15 04 28 26 5.419e+04 1.898e+03 3.440e+02 9.100e+01 3.000e+00 2020 03 15 04 38 26 6.344e+04 2.111e+03 3.730e+02 1.120e+02 2.000e+00 2020 03 15 04 48 26 5.824e+04 2.015e+03 3.790e+02 7.600e+01 3.000e+00 2020 03 15 04 58 26 6.625e+04 2.135e+03 4.120e+02 9.200e+01 1.000e+00 2020 03 15 05 08 27 7.535e+04 2.352e+03 3.440e+02 6.100e+01 2.000e+00 2020 03 15 05 18 27 7.138e+04 2.259e+03 3.800e+02 8.800e+01 2.000e+00 2020 03 15 05 28 27 7.661e+04 2.336e+03 3.620e+02 8.500e+01 3.000e+00 2020 03 15 05 38 27 7.679e+04 2.355e+03 3.630e+02 7.600e+01 3.000e+00 2020 03 15 05 48 27 7.815e+04 2.394e+03 3.730e+02 9.300e+01 0.000e+00 2020 03 15 05 58 27 7.904e+04 2.332e+03 3.620e+02 6.500e+01 3.000e+00 2020 03 15 06 08 27 7.441e+04 2.363e+03 3.890e+02 7.800e+01 2.000e+00 2020 03 15 06 18 27 7.401e+04 2.287e+03 3.770e+02 9.300e+01 2.000e+00 2020 03 15 06 28 27 7.822e+04 2.480e+03 3.830e+02 9.800e+01 4.000e+00 2020 03 15 06 38 27 7.537e+04 2.399e+03 4.160e+02 1.060e+02 3.000e+00 2020 03 15 06 48 27 7.174e+04 2.400e+03 4.210e+02 1.120e+02 7.000e+00 2020 03 15 06 58 28 7.227e+04 2.331e+03 3.870e+02 9.700e+01 3.000e+00 2020 03 15 07 08 28 7.156e+04 2.365e+03 4.440e+02 8.100e+01 2.000e+00 2020 03 15 07 18 28 6.188e+04 2.287e+03 4.300e+02 1.020e+02 0.000e+00 2020 03 15 07 28 28 6.362e+04 2.334e+03 3.960e+02 8.800e+01 4.000e+00 2020 03 15 07 38 28 7.641e+04 2.805e+03 3.670e+02 7.300e+01 0.000e+00 2020 03 15 07 48 28 8.362e+04 3.280e+03 4.070e+02 8.800e+01 1.000e+00 2020 03 15 07 58 28 7.420e+04 2.894e+03 3.600e+02 8.300e+01 1.000e+00 2020 03 15 08 08 28 7.926e+04 3.007e+03 3.170e+02 6.200e+01 1.000e+00 2020 03 15 08 18 28 7.952e+04 3.004e+03 3.400e+02 7.100e+01 1.000e+00 2020 03 15 08 28 28 8.606e+04 3.187e+03 3.620e+02 7.700e+01 3.000e+00 2020 03 15 08 38 29 8.182e+04 3.060e+03 3.500e+02 8.900e+01 0.000e+00 2020 03 15 08 48 29 8.747e+04 3.106e+03 3.840e+02 8.800e+01 3.000e+00 2020 03 15 08 58 29 8.398e+04 3.229e+03 4.050e+02 8.700e+01 2.000e+00 2020 03 15 09 08 29 8.652e+04 3.286e+03 4.040e+02 9.200e+01 1.000e+00 2020 03 15 09 18 29 8.620e+04 3.189e+03 4.200e+02 8.400e+01 1.000e+00 2020 03 15 09 28 29 7.340e+04 3.088e+03 5.270e+02 9.500e+01 3.000e+00 2020 03 15 09 38 29 7.461e+04 3.587e+03 6.150e+02 1.180e+02 2.000e+00 2020 03 15 09 48 29 6.007e+04 2.541e+03 5.930e+02 1.150e+02 3.000e+00 2020 03 15 09 58 29 5.437e+04 2.243e+03 5.310e+02 1.170e+02 2.000e+00 2020 03 15 10 08 29 5.265e+04 2.581e+03 7.700e+02 1.290e+02 5.000e+00 2020 03 15 10 18 30 5.465e+04 2.430e+03 6.110e+02 1.090e+02 5.000e+00 2020 03 15 10 28 30 5.530e+04 2.115e+03 4.010e+02 8.700e+01 3.000e+00 2020 03 15 10 38 30 4.210e+04 1.611e+03 3.130e+02 8.300e+01 1.000e+00 2020 03 15 10 48 30 4.530e+04 1.754e+03 3.380e+02 9.100e+01 3.000e+00 2020 03 15 10 58 30 4.309e+04 1.780e+03 3.510e+02 1.030e+02 3.000e+00 2020 03 15 11 08 30 4.167e+04 1.731e+03 3.350e+02 8.300e+01 2.000e+00 2020 03 15 11 18 30 3.922e+04 1.737e+03 3.360e+02 8.800e+01 4.000e+00 2020 03 15 11 28 30 4.038e+04 1.739e+03 3.440e+02 8.100e+01 0.000e+00 2020 03 15 11 38 30 3.940e+04 1.743e+03 3.800e+02 1.010e+02 4.000e+00 2020 03 15 11 48 30 3.620e+04 1.626e+03 3.560e+02 8.500e+01 2.000e+00 2020 03 15 11 58 31 3.596e+04 1.631e+03 3.610e+02 9.900e+01 6.000e+00 2020 03 15 12 08 31 3.674e+04 1.621e+03 3.800e+02 9.000e+01 1.000e+00 2020 03 15 12 18 31 3.627e+04 1.605e+03 3.440e+02 1.080e+02 8.000e+00 2020 03 15 12 28 31 3.889e+04 1.710e+03 3.500e+02 9.700e+01 3.000e+00 2020 03 15 12 38 31 4.356e+04 1.806e+03 3.760e+02 8.600e+01 1.000e+00 2020 03 15 12 48 31 5.929e+04 2.978e+03 6.130e+02 1.360e+02 6.000e+00 2020 03 15 12 58 31 6.347e+04 3.226e+03 6.310e+02 1.290e+02 3.000e+00 2020 03 15 13 08 31 6.281e+04 3.417e+03 5.940e+02 1.360e+02 1.000e+00 2020 03 15 13 18 31 6.138e+04 3.763e+03 6.570e+02 1.600e+02 3.000e+00 2020 03 15 13 28 31 6.235e+04 3.659e+03 7.080e+02 1.710e+02 5.000e+00 2020 03 15 13 38 31 6.603e+04 3.781e+03 7.320e+02 1.640e+02 7.000e+00 2020 03 15 13 48 32 4.194e+04 2.128e+03 4.460e+02 1.080e+02 5.000e+00 2020 03 15 13 58 32 5.311e+04 2.319e+03 4.210e+02 8.900e+01 1.000e+00 2020 03 15 14 08 32 5.587e+04 2.214e+03 4.170e+02 9.400e+01 0.000e+00 2020 03 15 14 18 32 6.163e+04 2.516e+03 4.730e+02 1.100e+02 3.000e+00 2020 03 15 14 28 32 6.208e+04 2.551e+03 4.490e+02 1.040e+02 0.000e+00 2020 03 15 14 38 32 6.151e+04 2.633e+03 4.970e+02 1.080e+02 1.000e+00 2020 03 15 14 48 32 5.787e+04 2.385e+03 4.170e+02 8.600e+01 0.000e+00 2020 03 15 14 58 32 5.643e+04 2.307e+03 4.010e+02 8.900e+01 0.000e+00 2020 03 15 15 08 32 5.237e+04 2.228e+03 4.070e+02 9.000e+01 2.000e+00 2020 03 15 15 18 32 5.015e+04 2.156e+03 4.070e+02 9.500e+01 5.000e+00 2020 03 15 15 28 33 5.075e+04 2.482e+03 5.030e+02 1.370e+02 5.000e+00 2020 03 15 15 38 33 3.425e+04 2.313e+03 5.400e+02 1.380e+02 4.000e+00 2020 03 15 15 48 33 2.390e+04 1.943e+03 5.230e+02 1.460e+02 5.000e+00 2020 03 15 15 58 33 2.241e+04 1.840e+03 5.270e+02 1.350e+02 0.000e+00 2020 03 15 16 08 33 2.378e+04 1.863e+03 5.370e+02 1.270e+02 1.000e+00 2020 03 15 16 18 33 2.177e+04 1.851e+03 5.310e+02 1.450e+02 4.000e+00 2020 03 15 16 28 33 2.208e+04 1.870e+03 5.450e+02 1.410e+02 4.000e+00 2020 03 15 16 38 33 2.073e+04 1.800e+03 5.220e+02 1.280e+02 4.000e+00 2020 03 15 16 48 33 2.049e+04 1.789e+03 5.510e+02 1.260e+02 1.000e+00 2020 03 15 16 58 34 1.898e+04 1.704e+03 5.200e+02 1.420e+02 2.000e+00 2020 03 15 17 08 35 1.864e+04 1.741e+03 4.800e+02 1.310e+02 3.000e+00 2020 03 15 17 18 35 1.675e+04 1.658e+03 5.270e+02 1.360e+02 4.000e+00 2020 03 15 17 28 35 1.592e+04 1.609e+03 4.860e+02 1.310e+02 2.000e+00 2020 03 15 17 38 35 1.492e+04 1.477e+03 4.900e+02 1.380e+02 1.000e+00 2020 03 15 17 48 35 1.399e+04 1.374e+03 4.400e+02 1.360e+02 4.000e+00 2020 03 15 17 58 35 1.668e+04 1.566e+03 4.890e+02 1.330e+02 8.000e+00 2020 03 15 18 08 35 1.590e+04 1.476e+03 4.560e+02 1.240e+02 0.000e+00 2020 03 15 18 18 35 1.769e+04 1.691e+03 5.180e+02 1.430e+02 0.000e+00 2020 03 15 18 28 36 2.006e+04 1.937e+03 5.070e+02 1.430e+02 3.000e+00 2020 03 15 18 38 36 2.017e+04 1.816e+03 4.980e+02 1.440e+02 3.000e+00 2020 03 15 18 48 36 1.912e+04 1.713e+03 5.010e+02 1.260e+02 0.000e+00 2020 03 15 18 58 36 2.106e+04 1.917e+03 5.420e+02 1.420e+02 4.000e+00 2020 03 15 19 08 36 2.486e+04 2.085e+03 5.730e+02 1.590e+02 2.000e+00 2020 03 15 19 18 36 2.411e+04 2.105e+03 6.140e+02 1.770e+02 1.000e+00 2020 03 15 19 28 36 2.639e+04 2.103e+03 5.770e+02 1.570e+02 2.000e+00 2020 03 15 19 38 36 2.664e+04 2.244e+03 6.540e+02 1.660e+02 1.000e+00 2020 03 15 19 48 36 2.892e+04 2.200e+03 6.190e+02 1.420e+02 3.000e+00 2020 03 15 19 58 36 2.800e+04 2.225e+03 6.110e+02 1.560e+02 2.000e+00 2020 03 15 20 08 36 2.889e+04 2.224e+03 6.550e+02 1.660e+02 1.000e+00 2020 03 15 20 18 37 2.988e+04 2.209e+03 5.990e+02 1.500e+02 1.000e+00 2020 03 15 20 28 37 3.168e+04 2.442e+03 6.720e+02 1.830e+02 1.000e+00 2020 03 15 20 38 37 3.195e+04 2.487e+03 7.360e+02 1.760e+02 4.000e+00 2020 03 15 20 48 37 2.781e+04 2.269e+03 6.390e+02 1.770e+02 4.000e+00 2020 03 15 20 58 37 3.085e+04 2.459e+03 7.200e+02 1.830e+02 3.000e+00 2020 03 15 21 08 37 3.176e+04 2.547e+03 7.210e+02 1.840e+02 2.000e+00 2020 03 15 21 18 37 2.865e+04 2.538e+03 7.110e+02 1.760e+02 1.000e+00 2020 03 15 21 28 37 2.859e+04 2.357e+03 6.530e+02 1.610e+02 0.000e+00 2020 03 15 21 38 38 2.971e+04 2.391e+03 6.440e+02 1.570e+02 2.000e+00 2020 03 15 21 48 38 3.775e+04 3.606e+03 8.160e+02 1.980e+02 5.000e+00 2020 03 15 21 58 38 4.609e+04 4.380e+03 9.970e+02 2.290e+02 7.000e+00 2020 03 15 22 08 38 6.118e+04 6.116e+03 1.323e+03 3.370e+02 6.000e+00 2020 03 15 22 18 38 6.862e+04 6.677e+03 1.552e+03 3.840e+02 1.000e+01 2020 03 15 22 28 38 7.336e+04 6.085e+03 1.410e+03 3.700e+02 1.100e+01 2020 03 15 22 38 38 7.178e+04 5.071e+03 1.192e+03 3.170e+02 4.000e+00 2020 03 15 22 48 38 6.590e+04 4.335e+03 1.029e+03 2.610e+02 6.000e+00 2020 03 15 22 58 38 4.281e+04 2.781e+03 7.010e+02 1.650e+02 5.000e+00 2020 03 15 23 08 38 3.842e+04 2.494e+03 6.430e+02 1.610e+02 3.000e+00 2020 03 15 23 18 38 3.731e+04 2.249e+03 5.930e+02 1.350e+02 3.000e+00 2020 03 15 23 28 38 3.887e+04 2.340e+03 6.190e+02 1.490e+02 2.000e+00 2020 03 15 23 38 39 3.890e+04 2.508e+03 6.560e+02 1.570e+02 3.000e+00 2020 03 15 23 48 39 4.090e+04 2.532e+03 6.500e+02 1.580e+02 2.000e+00 2020 03 15 23 58 39 4.267e+04 2.800e+03 6.910e+02 1.670e+02 3.000e+00