# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 03 05 00 05 50 1.259e+05 4.322e+03 1.880e+02 2.900e+01 0.000e+00 2020 03 05 00 15 50 1.183e+05 4.204e+03 1.730e+02 1.300e+01 1.000e+00 2020 03 05 00 25 50 1.248e+05 4.636e+03 2.030e+02 2.800e+01 0.000e+00 2020 03 05 00 35 51 1.407e+05 6.197e+03 2.640e+02 2.100e+01 1.000e+00 2020 03 05 00 45 51 1.372e+05 5.872e+03 2.580e+02 3.000e+01 0.000e+00 2020 03 05 00 55 51 1.446e+05 6.965e+03 3.800e+02 3.700e+01 1.000e+00 2020 03 05 01 05 51 1.488e+05 6.606e+03 3.410e+02 3.400e+01 1.000e+00 2020 03 05 01 15 51 1.497e+05 6.168e+03 2.600e+02 2.400e+01 0.000e+00 2020 03 05 01 25 51 1.571e+05 6.674e+03 2.410e+02 2.500e+01 1.000e+00 2020 03 05 01 35 51 1.544e+05 6.583e+03 2.190e+02 3.000e+01 0.000e+00 2020 03 05 01 45 51 1.447e+05 5.896e+03 2.310e+02 2.700e+01 1.000e+00 2020 03 05 01 55 51 1.681e+05 7.549e+03 3.680e+02 4.400e+01 0.000e+00 2020 03 05 02 05 51 1.834e+05 8.055e+03 3.640e+02 4.100e+01 0.000e+00 2020 03 05 02 15 52 2.098e+05 9.447e+03 3.670e+02 3.700e+01 0.000e+00 2020 03 05 02 25 52 2.330e+05 1.042e+04 4.050e+02 4.300e+01 1.000e+00 2020 03 05 02 35 52 2.327e+05 1.023e+04 3.930e+02 4.800e+01 0.000e+00 2020 03 05 02 45 52 2.342e+05 1.074e+04 3.860e+02 3.500e+01 0.000e+00 2020 03 05 02 55 52 2.385e+05 1.119e+04 4.200e+02 5.100e+01 0.000e+00 2020 03 05 03 05 52 2.319e+05 1.099e+04 4.150e+02 3.900e+01 1.000e+00 2020 03 05 03 15 52 2.311e+05 1.186e+04 4.530e+02 4.000e+01 1.000e+00 2020 03 05 03 25 52 2.461e+05 1.374e+04 4.720e+02 4.600e+01 1.000e+00 2020 03 05 03 35 52 2.397e+05 1.302e+04 5.100e+02 5.200e+01 2.000e+00 2020 03 05 03 45 52 2.392e+05 1.251e+04 5.030e+02 4.700e+01 0.000e+00 2020 03 05 03 55 53 2.336e+05 1.242e+04 5.040e+02 3.700e+01 0.000e+00 2020 03 05 04 05 53 2.421e+05 1.356e+04 5.780e+02 3.400e+01 0.000e+00 2020 03 05 04 15 53 2.602e+05 1.701e+04 7.750e+02 5.600e+01 1.000e+00 2020 03 05 04 25 53 2.649e+05 1.785e+04 9.090e+02 7.800e+01 1.000e+00 2020 03 05 04 35 53 2.666e+05 1.840e+04 1.018e+03 1.260e+02 1.000e+00 2020 03 05 04 45 53 2.657e+05 1.834e+04 9.840e+02 9.500e+01 0.000e+00 2020 03 05 04 55 53 2.596e+05 1.772e+04 9.200e+02 8.500e+01 0.000e+00 2020 03 05 05 05 53 2.410e+05 1.570e+04 8.330e+02 6.200e+01 0.000e+00 2020 03 05 05 15 53 2.392e+05 1.588e+04 7.850e+02 6.600e+01 1.000e+00 2020 03 05 05 25 53 2.397e+05 1.595e+04 8.290e+02 8.100e+01 2.000e+00 2020 03 05 05 35 54 2.408e+05 1.638e+04 8.150e+02 8.400e+01 1.000e+00 2020 03 05 05 45 54 2.472e+05 1.758e+04 9.250e+02 9.100e+01 1.000e+00 2020 03 05 05 55 54 2.498e+05 1.831e+04 9.930e+02 8.600e+01 0.000e+00 2020 03 05 06 05 54 2.407e+05 1.709e+04 8.660e+02 9.000e+01 1.000e+00 2020 03 05 06 15 54 2.364e+05 1.611e+04 8.760e+02 8.400e+01 0.000e+00 2020 03 05 06 25 54 2.323e+05 1.556e+04 8.150e+02 9.000e+01 0.000e+00 2020 03 05 06 35 54 2.326e+05 1.499e+04 7.720e+02 8.300e+01 0.000e+00 2020 03 05 06 45 54 2.324e+05 1.523e+04 8.190e+02 9.600e+01 2.000e+00 2020 03 05 06 55 54 2.337e+05 1.584e+04 8.040e+02 8.000e+01 1.000e+00 2020 03 05 07 05 54 2.343e+05 1.592e+04 7.590e+02 7.900e+01 0.000e+00 2020 03 05 07 15 55 2.394e+05 1.636e+04 7.330e+02 1.030e+02 2.000e+00 2020 03 05 07 25 55 2.406e+05 1.636e+04 7.490e+02 7.600e+01 0.000e+00 2020 03 05 07 35 55 2.314e+05 1.540e+04 6.770e+02 7.100e+01 1.000e+00 2020 03 05 07 45 55 2.306e+05 1.525e+04 6.600e+02 6.900e+01 0.000e+00 2020 03 05 07 55 55 2.332e+05 1.562e+04 6.610e+02 6.600e+01 0.000e+00 2020 03 05 08 05 55 2.268e+05 1.487e+04 5.950e+02 7.200e+01 0.000e+00 2020 03 05 08 15 55 2.311e+05 1.544e+04 6.680e+02 8.600e+01 4.000e+00 2020 03 05 08 25 55 2.378e+05 1.600e+04 7.190e+02 9.900e+01 2.000e+00 2020 03 05 08 35 55 2.394e+05 1.506e+04 6.770e+02 1.160e+02 3.000e+00 2020 03 05 08 45 55 2.033e+05 1.168e+04 5.940e+02 7.900e+01 0.000e+00 2020 03 05 08 55 56 1.565e+05 8.183e+03 4.180e+02 7.000e+01 3.000e+00 2020 03 05 09 05 56 1.279e+05 6.336e+03 3.080e+02 6.000e+01 4.000e+00 2020 03 05 09 15 56 1.011e+05 4.705e+03 2.840e+02 5.000e+01 3.000e+00 2020 03 05 09 25 56 9.583e+04 4.494e+03 2.960e+02 6.500e+01 2.000e+00 2020 03 05 09 35 56 6.981e+04 3.015e+03 2.400e+02 4.700e+01 1.000e+00 2020 03 05 09 45 56 5.581e+04 2.448e+03 1.970e+02 4.200e+01 4.000e+00 2020 03 05 09 55 56 2.578e+04 1.197e+03 1.550e+02 4.300e+01 2.000e+00 2020 03 05 10 05 56 9.235e+03 5.030e+02 8.800e+01 2.200e+01 1.000e+00 2020 03 05 10 15 56 1.020e+04 5.580e+02 1.200e+02 3.200e+01 2.000e+00 2020 03 05 10 25 56 1.222e+04 6.010e+02 1.130e+02 2.900e+01 1.000e+00 2020 03 05 10 35 57 1.197e+04 5.830e+02 8.500e+01 2.800e+01 1.000e+00 2020 03 05 10 45 57 1.196e+04 6.810e+02 1.270e+02 4.300e+01 5.000e+00 2020 03 05 10 55 57 1.275e+04 6.700e+02 1.640e+02 4.700e+01 1.000e+00 2020 03 05 11 05 57 1.525e+04 7.110e+02 1.120e+02 3.800e+01 3.000e+00 2020 03 05 11 15 57 1.722e+04 7.840e+02 1.040e+02 2.200e+01 0.000e+00 2020 03 05 11 25 57 1.863e+04 9.770e+02 1.450e+02 4.100e+01 2.000e+00 2020 03 05 11 35 57 1.945e+04 9.070e+02 1.460e+02 4.100e+01 5.000e+00 2020 03 05 11 45 57 2.144e+04 1.025e+03 1.720e+02 4.700e+01 4.000e+00 2020 03 05 11 55 57 2.311e+04 1.155e+03 1.980e+02 6.000e+01 7.000e+00 2020 03 05 12 05 57 1.459e+04 1.203e+03 4.300e+02 2.060e+02 2.000e+01 2020 03 05 12 15 58 1.266e+04 9.220e+02 3.130e+02 1.390e+02 1.800e+01 2020 03 05 12 25 58 1.166e+04 1.014e+03 3.660e+02 1.740e+02 2.000e+01 2020 03 05 12 35 58 1.190e+04 9.730e+02 3.090e+02 1.490e+02 1.200e+01 2020 03 05 12 45 58 1.233e+04 9.500e+02 2.830e+02 1.320e+02 1.100e+01 2020 03 05 12 55 58 1.262e+04 1.035e+03 3.370e+02 1.620e+02 1.800e+01 2020 03 05 13 05 58 1.284e+04 1.443e+03 6.220e+02 3.170e+02 2.100e+01 2020 03 05 13 15 58 1.279e+04 1.331e+03 4.850e+02 2.330e+02 1.900e+01 2020 03 05 13 25 58 1.180e+04 1.592e+03 7.200e+02 3.840e+02 4.000e+01 2020 03 05 13 35 58 1.229e+04 1.994e+03 1.011e+03 5.120e+02 6.100e+01 2020 03 05 13 45 58 1.162e+04 1.912e+03 9.580e+02 4.640e+02 5.500e+01 2020 03 05 13 55 59 1.052e+04 1.368e+03 6.070e+02 2.820e+02 2.300e+01 2020 03 05 14 05 59 1.103e+04 1.480e+03 6.770e+02 3.340e+02 3.400e+01 2020 03 05 14 15 59 1.064e+04 1.373e+03 6.050e+02 3.120e+02 3.800e+01 2020 03 05 14 25 59 9.904e+03 1.189e+03 4.710e+02 2.200e+02 2.400e+01 2020 03 05 14 35 59 9.467e+03 1.021e+03 3.290e+02 1.360e+02 1.200e+01 2020 03 05 14 45 59 9.236e+03 1.003e+03 3.740e+02 1.470e+02 1.300e+01 2020 03 05 14 55 59 8.749e+03 9.870e+02 3.270e+02 1.300e+02 1.400e+01 2020 03 05 15 05 59 8.556e+03 9.660e+02 3.330e+02 1.300e+02 1.000e+01 2020 03 05 15 15 59 9.249e+03 1.055e+03 3.960e+02 1.820e+02 2.700e+01 2020 03 05 15 25 59 9.718e+03 1.173e+03 4.790e+02 2.290e+02 1.900e+01 2020 03 05 15 36 00 9.544e+03 1.110e+03 4.560e+02 2.150e+02 1.500e+01 2020 03 05 15 46 00 8.648e+03 1.146e+03 4.870e+02 2.270e+02 1.900e+01 2020 03 05 15 56 00 8.403e+03 1.083e+03 4.570e+02 2.210e+02 1.900e+01 2020 03 05 16 06 00 8.063e+03 8.460e+02 3.020e+02 1.280e+02 9.000e+00 2020 03 05 16 16 00 8.224e+03 7.390e+02 2.210e+02 9.200e+01 6.000e+00 2020 03 05 16 26 00 8.240e+03 8.020e+02 2.680e+02 1.170e+02 1.200e+01 2020 03 05 16 46 02 7.616e+03 6.440e+02 1.980e+02 7.700e+01 1.400e+01 2020 03 05 16 56 03 7.814e+03 7.530e+02 2.620e+02 1.130e+02 1.200e+01 2020 03 05 17 06 03 7.952e+03 6.750e+02 1.840e+02 8.300e+01 8.000e+00 2020 03 05 17 16 03 8.069e+03 7.710e+02 2.650e+02 1.060e+02 7.000e+00 2020 03 05 17 26 03 7.570e+03 7.370e+02 2.320e+02 8.600e+01 9.000e+00 2020 03 05 17 36 03 8.127e+03 7.980e+02 2.710e+02 9.500e+01 7.000e+00 2020 03 05 17 46 03 7.540e+03 9.060e+02 3.510e+02 1.520e+02 1.700e+01 2020 03 05 17 56 03 8.897e+03 1.057e+03 3.970e+02 1.720e+02 2.900e+01 2020 03 05 18 06 03 1.021e+04 1.242e+03 4.710e+02 2.180e+02 2.100e+01 2020 03 05 18 16 03 1.092e+04 1.289e+03 4.590e+02 2.190e+02 2.300e+01 2020 03 05 18 26 03 1.174e+04 1.250e+03 4.490e+02 2.060e+02 1.700e+01 2020 03 05 18 36 04 1.227e+04 1.360e+03 4.420e+02 1.890e+02 2.500e+01 2020 03 05 18 46 04 1.302e+04 1.345e+03 4.330e+02 1.860e+02 1.100e+01 2020 03 05 18 56 04 1.384e+04 1.505e+03 5.310e+02 2.260e+02 1.500e+01 2020 03 05 19 06 04 1.336e+04 1.474e+03 4.930e+02 2.090e+02 1.500e+01 2020 03 05 19 16 04 1.401e+04 1.543e+03 4.690e+02 1.800e+02 1.700e+01 2020 03 05 19 26 04 1.492e+04 1.559e+03 5.060e+02 1.900e+02 1.600e+01 2020 03 05 19 36 04 1.382e+04 1.395e+03 4.110e+02 1.400e+02 1.700e+01 2020 03 05 19 46 04 1.467e+04 1.409e+03 3.780e+02 1.340e+02 8.000e+00 2020 03 05 19 56 04 1.465e+04 1.361e+03 3.940e+02 1.470e+02 1.100e+01 2020 03 05 20 06 04 1.509e+04 1.464e+03 3.760e+02 1.350e+02 8.000e+00 2020 03 05 20 16 05 1.557e+04 1.296e+03 3.130e+02 1.100e+02 9.000e+00 2020 03 05 20 26 05 1.564e+04 1.327e+03 3.420e+02 1.010e+02 4.000e+00 2020 03 05 20 36 05 1.611e+04 1.250e+03 3.110e+02 9.900e+01 9.000e+00 2020 03 05 20 46 05 1.636e+04 1.292e+03 3.160e+02 1.090e+02 9.000e+00 2020 03 05 20 56 05 1.681e+04 1.280e+03 3.410e+02 1.170e+02 9.000e+00 2020 03 05 21 06 05 1.941e+04 1.515e+03 3.170e+02 1.090e+02 8.000e+00 2020 03 05 21 16 05 2.037e+04 1.435e+03 3.090e+02 1.060e+02 1.000e+01 2020 03 05 21 26 05 1.988e+04 1.411e+03 2.760e+02 6.800e+01 5.000e+00 2020 03 05 21 36 05 2.235e+04 1.454e+03 2.640e+02 7.100e+01 6.000e+00 2020 03 05 21 46 05 2.407e+04 1.491e+03 2.570e+02 6.800e+01 6.000e+00 2020 03 05 21 56 05 2.417e+04 1.418e+03 2.150e+02 5.000e+01 1.000e+00 2020 03 05 22 06 06 2.526e+04 1.505e+03 2.170e+02 4.700e+01 2.000e+00 2020 03 05 22 16 06 2.548e+04 1.488e+03 2.080e+02 5.300e+01 0.000e+00 2020 03 05 22 26 06 2.774e+04 1.773e+03 2.530e+02 6.700e+01 3.000e+00 2020 03 05 22 36 06 2.926e+04 1.676e+03 2.430e+02 5.700e+01 3.000e+00 2020 03 05 22 46 06 3.069e+04 1.786e+03 2.440e+02 5.400e+01 3.000e+00 2020 03 05 22 56 06 3.017e+04 1.744e+03 2.510e+02 5.800e+01 4.000e+00 2020 03 05 23 06 06 3.019e+04 1.659e+03 2.350e+02 4.700e+01 4.000e+00 2020 03 05 23 16 06 3.223e+04 1.760e+03 2.460e+02 5.100e+01 4.000e+00 2020 03 05 23 26 06 3.218e+04 1.827e+03 2.670e+02 4.900e+01 2.000e+00 2020 03 05 23 36 06 3.084e+04 1.692e+03 2.350e+02 3.700e+01 4.000e+00 2020 03 05 23 46 07 3.189e+04 1.742e+03 2.180e+02 3.900e+01 1.000e+00 2020 03 05 23 56 07 3.262e+04 1.806e+03 2.300e+02 4.200e+01 1.000e+00