# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 03 03 00 05 20 1.696e+05 5.151e+03 4.960e+02 8.700e+01 0.000e+00 2020 03 03 00 15 20 1.817e+05 5.465e+03 4.970e+02 7.300e+01 1.000e+00 2020 03 03 00 25 20 1.933e+05 5.959e+03 5.450e+02 7.800e+01 2.000e+00 2020 03 03 00 35 20 1.974e+05 6.126e+03 5.270e+02 7.900e+01 2.000e+00 2020 03 03 00 45 20 2.105e+05 6.776e+03 5.640e+02 9.100e+01 3.000e+00 2020 03 03 00 55 20 1.965e+05 6.304e+03 4.680e+02 6.300e+01 0.000e+00 2020 03 03 01 05 20 1.954e+05 6.271e+03 4.700e+02 8.200e+01 1.000e+00 2020 03 03 01 15 20 1.886e+05 5.675e+03 4.880e+02 7.200e+01 1.000e+00 2020 03 03 01 25 20 1.884e+05 5.851e+03 5.180e+02 8.500e+01 0.000e+00 2020 03 03 01 35 21 2.026e+05 6.566e+03 5.820e+02 8.200e+01 2.000e+00 2020 03 03 01 45 21 2.006e+05 6.355e+03 5.900e+02 8.200e+01 2.000e+00 2020 03 03 01 55 21 2.038e+05 6.801e+03 5.430e+02 5.600e+01 1.000e+00 2020 03 03 02 05 21 2.107e+05 7.654e+03 5.790e+02 7.300e+01 2.000e+00 2020 03 03 02 15 21 2.129e+05 7.541e+03 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5.200e+01 2.000e+00 2020 03 03 11 55 27 2.768e+04 1.550e+03 2.460e+02 6.100e+01 3.000e+00 2020 03 03 12 05 27 2.756e+04 1.622e+03 2.440e+02 4.800e+01 6.000e+00 2020 03 03 12 15 27 2.463e+04 1.375e+03 2.240e+02 5.800e+01 0.000e+00 2020 03 03 12 25 27 2.625e+04 1.523e+03 2.320e+02 6.300e+01 3.000e+00 2020 03 03 12 35 27 2.445e+04 1.458e+03 2.250e+02 5.100e+01 5.000e+00 2020 03 03 12 45 27 2.299e+04 1.567e+03 2.900e+02 8.100e+01 3.000e+00 2020 03 03 12 55 27 2.495e+04 1.548e+03 2.410e+02 4.100e+01 1.000e+00 2020 03 03 13 05 28 2.394e+04 1.504e+03 2.220e+02 4.800e+01 2.000e+00 2020 03 03 13 15 28 2.241e+04 1.443e+03 2.650e+02 8.000e+01 7.000e+00 2020 03 03 13 25 28 1.655e+04 1.084e+03 1.540e+02 4.500e+01 1.000e+00 2020 03 03 13 35 28 1.847e+04 1.138e+03 1.820e+02 4.200e+01 2.000e+00 2020 03 03 13 45 28 2.038e+04 1.444e+03 3.140e+02 7.000e+01 3.000e+00 2020 03 03 13 55 28 2.011e+04 1.495e+03 3.620e+02 9.800e+01 7.000e+00 2020 03 03 14 05 28 1.710e+04 1.322e+03 2.970e+02 6.600e+01 3.000e+00 2020 03 03 14 15 28 1.555e+04 1.101e+03 2.310e+02 5.500e+01 5.000e+00 2020 03 03 14 25 28 1.611e+04 1.412e+03 3.250e+02 7.700e+01 7.000e+00 2020 03 03 14 35 28 1.494e+04 1.209e+03 2.700e+02 6.400e+01 4.000e+00 2020 03 03 14 45 28 1.503e+04 1.110e+03 2.600e+02 6.000e+01 3.000e+00 2020 03 03 14 55 29 1.603e+04 1.239e+03 2.680e+02 7.200e+01 8.000e+00 2020 03 03 15 05 29 1.678e+04 1.291e+03 3.200e+02 6.600e+01 1.000e+00 2020 03 03 15 15 29 1.819e+04 1.369e+03 3.160e+02 7.700e+01 7.000e+00 2020 03 03 15 25 29 2.195e+04 1.432e+03 2.710e+02 6.100e+01 3.000e+00 2020 03 03 15 35 29 1.912e+04 1.334e+03 2.830e+02 5.800e+01 4.000e+00 2020 03 03 15 45 29 2.015e+04 1.522e+03 3.470e+02 9.500e+01 4.000e+00 2020 03 03 15 55 29 2.094e+04 1.553e+03 3.250e+02 7.700e+01 4.000e+00 2020 03 03 16 05 29 2.161e+04 1.571e+03 3.790e+02 8.000e+01 5.000e+00 2020 03 03 16 15 29 2.618e+04 1.868e+03 4.330e+02 1.180e+02 1.400e+01 2020 03 03 16 25 30 2.875e+04 2.221e+03 5.020e+02 1.360e+02 7.000e+00 2020 03 03 16 35 30 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