# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 03 02 00 05 06 2.831e+04 3.792e+03 1.052e+03 1.900e+02 2.000e+00 2020 03 02 00 15 06 2.663e+04 3.684e+03 1.036e+03 1.600e+02 2.000e+00 2020 03 02 00 25 06 2.488e+04 3.696e+03 1.059e+03 1.750e+02 0.000e+00 2020 03 02 00 35 07 2.409e+04 3.685e+03 1.018e+03 1.770e+02 1.000e+00 2020 03 02 00 45 07 2.326e+04 3.702e+03 1.028e+03 1.670e+02 0.000e+00 2020 03 02 00 55 07 2.231e+04 3.674e+03 1.062e+03 1.870e+02 3.000e+00 2020 03 02 01 05 07 2.200e+04 3.580e+03 1.007e+03 1.640e+02 3.000e+00 2020 03 02 01 15 07 2.144e+04 3.601e+03 1.039e+03 1.820e+02 4.000e+00 2020 03 02 01 25 07 2.067e+04 3.573e+03 1.024e+03 1.700e+02 3.000e+00 2020 03 02 01 35 07 2.024e+04 3.600e+03 1.002e+03 1.750e+02 0.000e+00 2020 03 02 01 45 07 2.024e+04 3.728e+03 1.110e+03 1.820e+02 1.000e+00 2020 03 02 01 55 07 1.982e+04 3.669e+03 1.090e+03 1.590e+02 1.000e+00 2020 03 02 02 05 07 1.979e+04 3.747e+03 1.059e+03 1.860e+02 2.000e+00 2020 03 02 02 15 08 1.907e+04 3.788e+03 1.095e+03 1.720e+02 1.000e+00 2020 03 02 02 25 08 1.919e+04 3.743e+03 9.670e+02 1.630e+02 0.000e+00 2020 03 02 02 35 08 1.960e+04 3.925e+03 1.040e+03 1.540e+02 2.000e+00 2020 03 02 02 45 08 2.062e+04 3.891e+03 9.920e+02 1.560e+02 0.000e+00 2020 03 02 02 55 08 2.042e+04 3.859e+03 1.021e+03 1.380e+02 1.000e+00 2020 03 02 03 05 08 1.940e+04 3.684e+03 9.010e+02 1.530e+02 0.000e+00 2020 03 02 03 15 08 1.913e+04 3.606e+03 1.041e+03 1.820e+02 0.000e+00 2020 03 02 03 25 08 2.002e+04 3.536e+03 1.051e+03 1.790e+02 3.000e+00 2020 03 02 03 35 08 2.063e+04 3.465e+03 9.750e+02 1.510e+02 4.000e+00 2020 03 02 03 45 08 2.198e+04 3.347e+03 9.340e+02 1.500e+02 1.000e+00 2020 03 02 03 55 09 2.437e+04 3.634e+03 9.650e+02 1.620e+02 1.000e+00 2020 03 02 04 05 09 2.412e+04 3.645e+03 1.061e+03 1.610e+02 0.000e+00 2020 03 02 04 15 09 2.430e+04 3.877e+03 1.078e+03 1.830e+02 3.000e+00 2020 03 02 04 25 09 2.367e+04 3.764e+03 1.050e+03 1.850e+02 1.000e+00 2020 03 02 04 35 09 2.315e+04 3.850e+03 1.098e+03 1.890e+02 1.000e+00 2020 03 02 04 45 09 2.203e+04 3.665e+03 9.910e+02 1.520e+02 0.000e+00 2020 03 02 04 55 09 2.178e+04 3.565e+03 9.700e+02 1.530e+02 1.000e+00 2020 03 02 05 05 09 2.109e+04 3.468e+03 9.740e+02 1.460e+02 1.000e+00 2020 03 02 05 15 09 1.999e+04 3.031e+03 7.910e+02 1.070e+02 1.000e+00 2020 03 02 05 25 09 1.950e+04 3.027e+03 8.450e+02 1.150e+02 0.000e+00 2020 03 02 05 35 10 1.931e+04 2.823e+03 7.520e+02 9.500e+01 0.000e+00 2020 03 02 05 45 10 1.898e+04 2.808e+03 7.200e+02 9.400e+01 0.000e+00 2020 03 02 05 55 10 1.909e+04 2.706e+03 6.990e+02 9.200e+01 0.000e+00 2020 03 02 06 05 10 2.355e+04 3.083e+03 7.820e+02 9.800e+01 0.000e+00 2020 03 02 06 15 10 2.646e+04 3.080e+03 7.840e+02 1.200e+02 0.000e+00 2020 03 02 06 25 10 2.363e+04 3.104e+03 8.440e+02 1.090e+02 0.000e+00 2020 03 02 06 35 10 2.356e+04 3.074e+03 8.160e+02 9.700e+01 1.000e+00 2020 03 02 06 45 10 2.561e+04 3.149e+03 8.130e+02 1.170e+02 1.000e+00 2020 03 02 06 55 10 2.510e+04 3.251e+03 8.740e+02 1.110e+02 0.000e+00 2020 03 02 07 05 10 2.503e+04 3.198e+03 8.800e+02 1.350e+02 1.000e+00 2020 03 02 07 15 09 2.524e+04 3.250e+03 8.550e+02 1.340e+02 0.000e+00 2020 03 02 07 25 09 2.427e+04 3.070e+03 8.420e+02 1.400e+02 1.000e+00 2020 03 02 07 35 10 2.394e+04 2.987e+03 8.030e+02 1.430e+02 2.000e+00 2020 03 02 07 45 10 2.860e+04 3.121e+03 7.790e+02 1.190e+02 1.000e+00 2020 03 02 07 55 10 2.204e+04 2.803e+03 7.830e+02 1.410e+02 0.000e+00 2020 03 02 08 05 10 2.152e+04 2.810e+03 7.790e+02 1.430e+02 2.000e+00 2020 03 02 08 15 10 2.328e+04 3.022e+03 8.110e+02 1.730e+02 1.000e+00 2020 03 02 08 25 10 2.718e+04 3.175e+03 8.490e+02 1.590e+02 2.000e+00 2020 03 02 08 35 10 2.742e+04 3.168e+03 8.020e+02 1.680e+02 4.000e+00 2020 03 02 08 45 10 2.679e+04 3.171e+03 8.060e+02 1.370e+02 1.000e+00 2020 03 02 08 55 10 2.833e+04 3.172e+03 8.680e+02 1.290e+02 1.000e+00 2020 03 02 09 05 11 2.788e+04 3.204e+03 8.010e+02 1.200e+02 0.000e+00 2020 03 02 09 15 11 3.002e+04 3.348e+03 7.940e+02 9.400e+01 1.000e+00 2020 03 02 09 25 11 3.370e+04 3.145e+03 6.900e+02 7.600e+01 1.000e+00 2020 03 02 09 35 11 3.894e+04 3.201e+03 6.690e+02 7.800e+01 1.000e+00 2020 03 02 09 45 11 4.315e+04 3.641e+03 7.180e+02 6.600e+01 0.000e+00 2020 03 02 09 55 11 4.648e+04 3.827e+03 7.840e+02 9.200e+01 0.000e+00 2020 03 02 10 05 11 4.795e+04 3.516e+03 7.200e+02 6.800e+01 0.000e+00 2020 03 02 10 15 11 4.575e+04 3.491e+03 7.580e+02 6.900e+01 0.000e+00 2020 03 02 10 25 11 4.243e+04 3.501e+03 7.680e+02 7.700e+01 0.000e+00 2020 03 02 10 35 11 4.174e+04 3.387e+03 7.790e+02 8.100e+01 0.000e+00 2020 03 02 10 45 12 3.892e+04 3.310e+03 7.800e+02 8.500e+01 0.000e+00 2020 03 02 10 55 12 3.689e+04 3.113e+03 7.080e+02 6.000e+01 0.000e+00 2020 03 02 11 05 12 3.770e+04 3.138e+03 7.510e+02 8.400e+01 0.000e+00 2020 03 02 11 15 12 3.929e+04 3.063e+03 7.170e+02 7.600e+01 1.000e+00 2020 03 02 11 25 12 4.372e+04 3.086e+03 6.620e+02 7.100e+01 1.000e+00 2020 03 02 11 35 12 4.392e+04 3.011e+03 6.390e+02 6.900e+01 0.000e+00 2020 03 02 11 45 12 4.463e+04 2.893e+03 6.570e+02 6.800e+01 0.000e+00 2020 03 02 11 55 12 4.270e+04 2.596e+03 5.780e+02 7.200e+01 2.000e+00 2020 03 02 12 05 12 4.882e+04 2.613e+03 4.930e+02 4.400e+01 0.000e+00 2020 03 02 12 15 12 5.203e+04 2.733e+03 4.970e+02 5.700e+01 0.000e+00 2020 03 02 12 25 13 5.085e+04 2.701e+03 4.530e+02 5.500e+01 2.000e+00 2020 03 02 12 35 13 4.874e+04 2.527e+03 4.590e+02 5.100e+01 0.000e+00 2020 03 02 12 45 13 4.922e+04 2.692e+03 4.720e+02 5.500e+01 0.000e+00 2020 03 02 12 55 13 4.788e+04 2.475e+03 4.230e+02 4.900e+01 1.000e+00 2020 03 02 13 05 13 5.002e+04 2.262e+03 3.150e+02 3.700e+01 0.000e+00 2020 03 02 13 15 13 5.005e+04 2.142e+03 3.090e+02 3.500e+01 1.000e+00 2020 03 02 13 25 13 4.928e+04 1.932e+03 3.000e+02 3.100e+01 0.000e+00 2020 03 02 13 35 13 4.554e+04 1.771e+03 2.580e+02 2.100e+01 1.000e+00 2020 03 02 13 45 13 3.842e+04 1.565e+03 2.150e+02 2.600e+01 0.000e+00 2020 03 02 13 55 13 4.147e+04 1.558e+03 2.050e+02 2.200e+01 2.000e+00 2020 03 02 14 05 14 4.228e+04 1.634e+03 2.180e+02 2.300e+01 2.000e+00 2020 03 02 14 15 14 4.392e+04 1.695e+03 2.240e+02 1.900e+01 0.000e+00 2020 03 02 14 25 14 4.584e+04 1.738e+03 2.280e+02 3.400e+01 1.000e+00 2020 03 02 14 35 14 4.842e+04 1.846e+03 2.360e+02 3.400e+01 0.000e+00 2020 03 02 14 45 14 4.920e+04 1.820e+03 2.480e+02 3.500e+01 0.000e+00 2020 03 02 14 55 14 4.859e+04 1.798e+03 2.680e+02 3.800e+01 0.000e+00 2020 03 02 15 05 14 4.428e+04 1.768e+03 2.640e+02 3.400e+01 0.000e+00 2020 03 02 15 15 14 4.203e+04 1.696e+03 2.820e+02 4.500e+01 1.000e+00 2020 03 02 15 25 14 4.336e+04 1.621e+03 2.350e+02 3.800e+01 0.000e+00 2020 03 02 15 35 14 4.395e+04 1.632e+03 2.550e+02 5.000e+01 0.000e+00 2020 03 02 15 45 15 4.219e+04 1.590e+03 2.630e+02 4.000e+01 1.000e+00 2020 03 02 15 55 15 3.995e+04 1.560e+03 2.840e+02 4.300e+01 2.000e+00 2020 03 02 16 05 15 4.039e+04 1.654e+03 3.110e+02 6.200e+01 2.000e+00 2020 03 02 16 15 15 3.690e+04 1.540e+03 2.900e+02 5.400e+01 1.000e+00 2020 03 02 16 25 15 3.264e+04 1.448e+03 2.840e+02 4.400e+01 0.000e+00 2020 03 02 16 35 15 3.646e+04 1.416e+03 2.350e+02 3.100e+01 1.000e+00 2020 03 02 16 45 15 4.004e+04 1.503e+03 2.670e+02 3.600e+01 1.000e+00 2020 03 02 16 55 15 4.925e+04 1.560e+03 2.090e+02 3.500e+01 0.000e+00 2020 03 02 17 05 15 3.914e+04 1.460e+03 2.230e+02 3.800e+01 0.000e+00 2020 03 02 17 15 15 4.572e+04 1.555e+03 2.660e+02 4.000e+01 1.000e+00 2020 03 02 17 25 16 5.892e+04 1.752e+03 2.370e+02 3.400e+01 1.000e+00 2020 03 02 17 35 16 7.428e+04 2.040e+03 2.340e+02 2.700e+01 0.000e+00 2020 03 02 17 45 16 7.710e+04 2.130e+03 2.510e+02 3.400e+01 0.000e+00 2020 03 02 17 55 16 8.757e+04 2.281e+03 2.630e+02 3.500e+01 0.000e+00 2020 03 02 18 05 16 8.684e+04 2.386e+03 2.540e+02 2.700e+01 1.000e+00 2020 03 02 18 15 16 8.366e+04 2.321e+03 2.880e+02 3.200e+01 1.000e+00 2020 03 02 18 25 16 7.589e+04 2.294e+03 2.850e+02 3.300e+01 0.000e+00 2020 03 02 18 35 16 8.418e+04 2.453e+03 2.890e+02 5.300e+01 1.000e+00 2020 03 02 18 45 16 8.292e+04 2.525e+03 3.340e+02 4.800e+01 3.000e+00 2020 03 02 18 55 16 8.120e+04 2.466e+03 3.130e+02 4.300e+01 2.000e+00 2020 03 02 19 05 17 8.457e+04 2.644e+03 3.200e+02 3.900e+01 2.000e+00 2020 03 02 19 15 17 9.106e+04 2.765e+03 3.310e+02 4.200e+01 0.000e+00 2020 03 02 19 25 17 9.684e+04 2.933e+03 3.470e+02 5.200e+01 2.000e+00 2020 03 02 19 35 17 1.058e+05 3.398e+03 3.880e+02 5.100e+01 1.000e+00 2020 03 02 19 45 17 1.159e+05 3.668e+03 3.980e+02 4.300e+01 0.000e+00 2020 03 02 19 55 17 1.062e+05 3.241e+03 3.430e+02 5.000e+01 0.000e+00 2020 03 02 20 05 17 1.141e+05 3.583e+03 4.200e+02 5.200e+01 0.000e+00 2020 03 02 20 15 17 1.124e+05 3.419e+03 3.790e+02 4.200e+01 2.000e+00 2020 03 02 20 25 17 1.038e+05 3.386e+03 3.740e+02 4.300e+01 0.000e+00 2020 03 02 20 35 17 9.740e+04 3.282e+03 3.940e+02 4.600e+01 0.000e+00 2020 03 02 20 45 18 9.630e+04 3.499e+03 3.950e+02 4.500e+01 1.000e+00 2020 03 02 20 55 18 9.216e+04 3.300e+03 3.810e+02 5.500e+01 1.000e+00 2020 03 02 21 05 18 9.302e+04 3.762e+03 4.170e+02 5.100e+01 1.000e+00 2020 03 02 21 15 18 8.643e+04 3.262e+03 3.740e+02 4.700e+01 2.000e+00 2020 03 02 21 25 18 7.846e+04 3.209e+03 3.830e+02 4.700e+01 0.000e+00 2020 03 02 21 35 18 9.094e+04 3.568e+03 4.140e+02 5.000e+01 0.000e+00 2020 03 02 21 45 18 1.040e+05 4.171e+03 4.120e+02 5.700e+01 1.000e+00 2020 03 02 21 55 18 9.250e+04 3.675e+03 3.730e+02 3.900e+01 1.000e+00 2020 03 02 22 05 18 8.067e+04 3.312e+03 3.380e+02 4.400e+01 0.000e+00 2020 03 02 22 15 18 8.570e+04 3.425e+03 3.550e+02 4.900e+01 2.000e+00 2020 03 02 22 25 19 8.314e+04 3.371e+03 3.390e+02 5.100e+01 1.000e+00 2020 03 02 22 35 19 1.359e+05 5.544e+03 5.350e+02 7.400e+01 2.000e+00 2020 03 02 22 45 19 1.449e+05 5.518e+03 5.190e+02 6.200e+01 1.000e+00 2020 03 02 22 55 19 1.538e+05 5.391e+03 4.730e+02 6.000e+01 2.000e+00 2020 03 02 23 05 19 1.656e+05 5.824e+03 5.610e+02 7.200e+01 0.000e+00 2020 03 02 23 15 19 1.689e+05 5.898e+03 5.220e+02 7.400e+01 1.000e+00 2020 03 02 23 25 19 1.711e+05 6.307e+03 6.360e+02 8.200e+01 3.000e+00 2020 03 02 23 35 19 1.715e+05 6.022e+03 5.750e+02 8.700e+01 2.000e+00 2020 03 02 23 45 19 1.712e+05 5.492e+03 5.180e+02 8.000e+01 0.000e+00 2020 03 02 23 55 20 1.669e+05 5.189e+03 4.430e+02 6.800e+01 0.000e+00