# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 02 16 09 51 21 3.586e+05 2.237e+04 1.532e+03 2.020e+02 1.000e+00 2020 02 16 10 01 21 3.525e+05 2.163e+04 1.365e+03 1.830e+02 4.000e+00 2020 02 16 10 11 21 3.466e+05 2.082e+04 1.444e+03 1.640e+02 1.000e+00 2020 02 16 10 21 21 3.329e+05 1.971e+04 1.272e+03 1.250e+02 0.000e+00 2020 02 16 10 31 21 3.291e+05 1.889e+04 1.115e+03 9.600e+01 1.000e+00 2020 02 16 10 41 21 3.323e+05 1.839e+04 1.079e+03 1.060e+02 0.000e+00 2020 02 16 10 51 21 3.361e+05 1.943e+04 1.073e+03 8.900e+01 2.000e+00 2020 02 16 11 01 21 3.354e+05 1.876e+04 1.018e+03 9.600e+01 2.000e+00 2020 02 16 11 11 22 3.321e+05 1.876e+04 1.048e+03 1.020e+02 0.000e+00 2020 02 16 11 21 22 3.186e+05 1.699e+04 9.960e+02 9.000e+01 1.000e+00 2020 02 16 11 31 22 3.143e+05 1.608e+04 9.620e+02 8.400e+01 0.000e+00 2020 02 16 11 41 22 3.042e+05 1.421e+04 8.400e+02 5.900e+01 0.000e+00 2020 02 16 11 51 22 3.052e+05 1.464e+04 8.530e+02 8.800e+01 1.000e+00 2020 02 16 12 01 22 3.072e+05 1.453e+04 8.100e+02 6.700e+01 1.000e+00 2020 02 16 12 11 22 2.910e+05 1.331e+04 7.090e+02 5.500e+01 0.000e+00 2020 02 16 12 21 22 2.971e+05 1.385e+04 7.030e+02 6.000e+01 0.000e+00 2020 02 16 12 31 22 2.997e+05 1.398e+04 8.130e+02 7.700e+01 0.000e+00 2020 02 16 12 41 22 2.983e+05 1.400e+04 7.810e+02 7.600e+01 0.000e+00 2020 02 16 12 51 23 2.968e+05 1.454e+04 7.340e+02 7.600e+01 1.000e+00 2020 02 16 13 01 23 2.943e+05 1.442e+04 7.610e+02 6.200e+01 0.000e+00 2020 02 16 13 11 23 2.872e+05 1.434e+04 7.420e+02 7.400e+01 0.000e+00 2020 02 16 13 21 23 2.880e+05 1.475e+04 7.380e+02 6.200e+01 1.000e+00 2020 02 16 13 31 23 2.870e+05 1.498e+04 7.900e+02 8.400e+01 1.000e+00 2020 02 16 13 41 23 2.899e+05 1.554e+04 7.920e+02 5.200e+01 0.000e+00 2020 02 16 13 51 23 2.844e+05 1.488e+04 7.660e+02 6.500e+01 0.000e+00 2020 02 16 14 01 23 2.886e+05 1.593e+04 8.040e+02 6.200e+01 0.000e+00 2020 02 16 14 11 23 2.883e+05 1.558e+04 7.800e+02 6.200e+01 1.000e+00 2020 02 16 14 21 24 2.854e+05 1.563e+04 7.700e+02 6.300e+01 0.000e+00 2020 02 16 14 31 24 2.853e+05 1.600e+04 7.680e+02 8.400e+01 0.000e+00 2020 02 16 14 41 24 2.906e+05 1.673e+04 8.760e+02 7.600e+01 1.000e+00 2020 02 16 14 51 24 2.993e+05 1.796e+04 8.410e+02 7.900e+01 1.000e+00 2020 02 16 15 01 24 3.004e+05 1.834e+04 8.910e+02 6.300e+01 1.000e+00 2020 02 16 15 11 24 3.026e+05 1.913e+04 8.820e+02 5.300e+01 0.000e+00 2020 02 16 15 21 24 3.082e+05 2.076e+04 9.620e+02 9.300e+01 0.000e+00 2020 02 16 15 31 24 3.162e+05 2.372e+04 1.084e+03 1.120e+02 2.000e+00 2020 02 16 15 41 24 3.252e+05 2.706e+04 1.163e+03 1.030e+02 1.000e+00 2020 02 16 15 51 24 3.470e+05 3.298e+04 1.541e+03 1.540e+02 3.000e+00 2020 02 16 16 01 25 3.946e+05 4.240e+04 2.361e+03 2.430e+02 1.000e+00 2020 02 16 16 11 25 4.044e+05 4.618e+04 2.773e+03 2.370e+02 2.000e+00 2020 02 16 16 21 25 4.069e+05 4.804e+04 2.729e+03 2.560e+02 1.000e+00 2020 02 16 16 31 25 4.144e+05 5.240e+04 2.909e+03 2.470e+02 1.000e+00 2020 02 16 16 41 25 4.017e+05 5.007e+04 2.074e+03 1.580e+02 1.000e+00 2020 02 16 16 51 25 3.903e+05 4.578e+04 1.748e+03 1.400e+02 1.000e+00 2020 02 16 17 01 25 3.624e+05 3.726e+04 1.341e+03 1.280e+02 2.000e+00 2020 02 16 17 11 25 3.130e+05 2.566e+04 8.850e+02 6.800e+01 0.000e+00 2020 02 16 17 21 25 3.100e+05 2.587e+04 9.990e+02 8.900e+01 1.000e+00 2020 02 16 17 31 25 2.992e+05 2.424e+04 8.180e+02 6.800e+01 0.000e+00 2020 02 16 17 41 26 2.884e+05 2.402e+04 9.080e+02 9.500e+01 1.000e+00 2020 02 16 17 51 26 2.615e+05 2.063e+04 6.590e+02 6.400e+01 0.000e+00 2020 02 16 18 01 26 2.375e+05 1.922e+04 6.430e+02 5.200e+01 0.000e+00 2020 02 16 18 11 26 2.106e+05 1.603e+04 5.410e+02 5.200e+01 1.000e+00 2020 02 16 18 21 26 1.971e+05 1.402e+04 4.010e+02 3.400e+01 0.000e+00 2020 02 16 18 31 26 1.901e+05 1.293e+04 3.530e+02 2.800e+01 1.000e+00 2020 02 16 18 41 26 1.768e+05 1.141e+04 2.950e+02 2.700e+01 2.000e+00 2020 02 16 18 51 26 1.793e+05 1.148e+04 3.220e+02 4.100e+01 0.000e+00 2020 02 16 19 01 26 1.864e+05 1.098e+04 2.890e+02 2.000e+01 0.000e+00 2020 02 16 19 11 26 1.855e+05 9.759e+03 2.500e+02 2.100e+01 0.000e+00 2020 02 16 19 21 27 1.765e+05 8.446e+03 2.710e+02 3.200e+01 0.000e+00 2020 02 16 19 31 27 1.880e+05 8.200e+03 2.220e+02 2.300e+01 0.000e+00 2020 02 16 19 41 27 1.939e+05 8.182e+03 2.490e+02 3.100e+01 0.000e+00 2020 02 16 19 51 27 1.819e+05 7.416e+03 2.240e+02 3.100e+01 1.000e+00 2020 02 16 20 01 27 1.437e+05 5.386e+03 1.970e+02 2.700e+01 0.000e+00 2020 02 16 20 11 27 1.268e+05 4.580e+03 1.990e+02 3.200e+01 0.000e+00 2020 02 16 20 21 27 1.081e+05 3.556e+03 1.530e+02 2.000e+01 1.000e+00 2020 02 16 20 31 27 9.189e+04 2.600e+03 1.340e+02 1.400e+01 0.000e+00 2020 02 16 20 41 27 1.031e+05 2.574e+03 1.430e+02 2.600e+01 1.000e+00 2020 02 16 20 51 27 1.167e+05 2.845e+03 1.000e+02 2.200e+01 0.000e+00 2020 02 16 21 01 28 1.246e+05 3.395e+03 9.900e+01 2.100e+01 0.000e+00 2020 02 16 21 11 28 1.207e+05 3.229e+03 1.090e+02 1.700e+01 0.000e+00 2020 02 16 21 21 28 1.024e+05 2.570e+03 9.700e+01 1.600e+01 0.000e+00 2020 02 16 21 31 28 9.385e+04 1.948e+03 8.900e+01 1.700e+01 0.000e+00 2020 02 16 21 41 28 8.407e+04 1.786e+03 8.500e+01 1.600e+01 0.000e+00 2020 02 16 21 51 28 7.242e+04 1.479e+03 9.200e+01 1.700e+01 0.000e+00 2020 02 16 22 01 28 5.700e+04 9.840e+02 6.900e+01 6.000e+00 0.000e+00 2020 02 16 22 11 28 4.713e+04 7.050e+02 6.000e+01 1.100e+01 0.000e+00 2020 02 16 22 21 28 3.469e+04 6.740e+02 7.200e+01 1.600e+01 0.000e+00 2020 02 16 22 31 28 4.596e+04 7.890e+02 8.100e+01 1.600e+01 0.000e+00 2020 02 16 22 41 29 4.028e+04 1.205e+03 1.780e+02 2.100e+01 0.000e+00 2020 02 16 22 51 29 4.269e+04 1.323e+03 1.730e+02 2.300e+01 0.000e+00 2020 02 16 23 01 29 5.391e+04 1.068e+03 1.550e+02 2.800e+01 0.000e+00 2020 02 16 23 11 29 6.295e+04 1.060e+03 1.310e+02 1.700e+01 1.000e+00 2020 02 16 23 21 29 6.039e+04 1.602e+03 2.080e+02 2.300e+01 1.000e+00 2020 02 16 23 31 29 6.403e+04 1.637e+03 2.180e+02 2.200e+01 0.000e+00 2020 02 16 23 41 29 7.013e+04 1.600e+03 2.070e+02 3.400e+01 1.000e+00 2020 02 16 23 51 29 9.879e+04 1.179e+03 1.310e+02 1.600e+01 0.000e+00