# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 02 13 00 00 28 5.907e+04 6.468e+03 1.746e+03 2.140e+02 1.000e+00 2020 02 13 00 10 28 5.833e+04 4.932e+03 1.331e+03 1.930e+02 2.000e+00 2020 02 13 00 20 28 6.169e+04 4.396e+03 1.183e+03 2.290e+02 0.000e+00 2020 02 13 00 30 28 7.290e+04 5.578e+03 1.425e+03 2.520e+02 1.000e+00 2020 02 13 00 40 28 6.687e+04 9.052e+03 2.365e+03 3.030e+02 2.000e+00 2020 02 13 00 50 28 4.572e+04 5.276e+03 1.376e+03 2.310e+02 4.000e+00 2020 02 13 01 00 28 4.572e+04 5.501e+03 1.491e+03 1.970e+02 3.000e+00 2020 02 13 01 10 29 4.234e+04 4.612e+03 1.159e+03 1.630e+02 2.000e+00 2020 02 13 01 20 29 3.907e+04 3.772e+03 9.450e+02 1.320e+02 0.000e+00 2020 02 13 01 30 29 3.809e+04 3.135e+03 8.300e+02 1.580e+02 0.000e+00 2020 02 13 01 40 29 3.831e+04 3.260e+03 8.340e+02 1.350e+02 0.000e+00 2020 02 13 01 50 29 4.451e+04 4.684e+03 1.187e+03 1.910e+02 1.000e+00 2020 02 13 02 00 29 4.026e+04 3.674e+03 9.340e+02 1.650e+02 0.000e+00 2020 02 13 02 10 29 4.135e+04 4.855e+03 1.258e+03 1.940e+02 0.000e+00 2020 02 13 02 20 29 3.760e+04 3.742e+03 9.510e+02 1.500e+02 2.000e+00 2020 02 13 02 30 29 3.642e+04 3.265e+03 8.870e+02 1.480e+02 5.000e+00 2020 02 13 02 40 29 3.929e+04 3.528e+03 9.110e+02 1.270e+02 0.000e+00 2020 02 13 02 50 30 4.342e+04 5.588e+03 1.503e+03 2.060e+02 2.000e+00 2020 02 13 03 00 30 4.081e+04 5.547e+03 1.493e+03 1.950e+02 0.000e+00 2020 02 13 03 10 30 3.410e+04 4.230e+03 1.177e+03 1.600e+02 1.000e+00 2020 02 13 03 20 30 2.774e+04 2.776e+03 7.530e+02 1.200e+02 1.000e+00 2020 02 13 03 30 30 2.731e+04 2.669e+03 7.720e+02 1.190e+02 0.000e+00 2020 02 13 03 40 30 2.642e+04 2.366e+03 6.410e+02 1.060e+02 0.000e+00 2020 02 13 03 50 30 2.691e+04 2.360e+03 6.580e+02 1.030e+02 0.000e+00 2020 02 13 04 00 30 2.803e+04 2.456e+03 7.170e+02 1.170e+02 1.000e+00 2020 02 13 04 10 30 3.405e+04 3.946e+03 1.081e+03 1.390e+02 0.000e+00 2020 02 13 04 20 30 3.089e+04 2.634e+03 7.760e+02 1.330e+02 1.000e+00 2020 02 13 04 30 31 3.062e+04 2.620e+03 7.610e+02 1.200e+02 0.000e+00 2020 02 13 04 40 31 3.153e+04 2.655e+03 8.080e+02 1.320e+02 0.000e+00 2020 02 13 04 50 31 3.258e+04 3.247e+03 9.020e+02 1.320e+02 3.000e+00 2020 02 13 05 00 31 4.077e+04 6.782e+03 1.822e+03 1.980e+02 0.000e+00 2020 02 13 05 10 31 3.522e+04 4.213e+03 1.200e+03 1.570e+02 0.000e+00 2020 02 13 05 20 31 3.197e+04 2.928e+03 8.910e+02 1.280e+02 1.000e+00 2020 02 13 05 30 31 3.454e+04 2.901e+03 8.050e+02 1.300e+02 0.000e+00 2020 02 13 05 40 31 3.491e+04 2.945e+03 8.370e+02 1.290e+02 1.000e+00 2020 02 13 05 50 31 3.849e+04 3.342e+03 9.790e+02 1.460e+02 4.000e+00 2020 02 13 06 00 31 4.644e+04 3.908e+03 1.115e+03 1.780e+02 3.000e+00 2020 02 13 06 10 32 5.258e+04 5.108e+03 1.571e+03 2.770e+02 4.000e+00 2020 02 13 06 20 32 8.162e+04 9.360e+03 2.086e+03 3.210e+02 1.000e+00 2020 02 13 06 30 32 4.935e+04 6.647e+03 1.766e+03 2.270e+02 1.000e+00 2020 02 13 06 40 32 4.368e+04 5.512e+03 1.432e+03 1.550e+02 0.000e+00 2020 02 13 06 50 32 3.913e+04 4.571e+03 1.200e+03 1.420e+02 0.000e+00 2020 02 13 07 00 32 3.966e+04 4.749e+03 1.204e+03 1.320e+02 0.000e+00 2020 02 13 07 10 32 4.377e+04 6.122e+03 1.615e+03 1.680e+02 2.000e+00 2020 02 13 07 20 32 4.562e+04 6.338e+03 1.930e+03 2.220e+02 0.000e+00 2020 02 13 07 30 32 5.175e+04 9.946e+03 2.585e+03 2.870e+02 1.000e+00 2020 02 13 07 40 32 5.216e+04 1.082e+04 2.892e+03 3.310e+02 0.000e+00 2020 02 13 07 50 33 4.496e+04 8.176e+03 2.164e+03 2.500e+02 4.000e+00 2020 02 13 08 00 33 4.892e+04 8.687e+03 2.981e+03 3.760e+02 0.000e+00 2020 02 13 08 10 33 5.881e+04 8.714e+03 2.268e+03 2.730e+02 3.000e+00 2020 02 13 08 20 33 6.079e+04 9.049e+03 2.352e+03 2.680e+02 1.000e+00 2020 02 13 08 30 33 6.131e+04 8.980e+03 2.533e+03 3.310e+02 3.000e+00 2020 02 13 08 40 33 7.157e+04 9.599e+03 2.952e+03 2.980e+02 1.000e+00 2020 02 13 08 50 33 9.845e+04 9.256e+03 2.051e+03 2.160e+02 1.000e+00 2020 02 13 09 00 33 1.669e+05 1.079e+04 1.672e+03 1.860e+02 1.000e+00 2020 02 13 09 10 33 2.039e+05 1.126e+04 1.477e+03 1.680e+02 3.000e+00 2020 02 13 09 20 33 2.868e+05 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