# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 01 12 12 32 47 1.404e+05 8.705e+03 9.330e+02 1.360e+02 9.000e+00 2020 01 12 12 42 47 1.342e+05 7.956e+03 7.630e+02 1.080e+02 3.000e+00 2020 01 12 12 52 47 1.321e+05 7.864e+03 8.190e+02 1.120e+02 3.000e+00 2020 01 12 13 02 47 1.361e+05 8.173e+03 8.580e+02 1.360e+02 2.000e+00 2020 01 12 13 12 47 1.403e+05 8.412e+03 8.490e+02 1.270e+02 3.000e+00 2020 01 12 13 22 47 1.446e+05 8.604e+03 8.620e+02 1.270e+02 4.000e+00 2020 01 12 13 32 47 1.417e+05 8.680e+03 8.150e+02 9.700e+01 2.000e+00 2020 01 12 13 42 47 1.427e+05 8.671e+03 8.970e+02 1.220e+02 1.000e+00 2020 01 12 13 52 48 1.460e+05 9.015e+03 9.250e+02 1.180e+02 2.000e+00 2020 01 12 14 02 48 1.437e+05 8.734e+03 9.030e+02 1.280e+02 3.000e+00 2020 01 12 14 12 48 1.401e+05 8.357e+03 8.470e+02 1.170e+02 4.000e+00 2020 01 12 14 22 48 1.347e+05 7.880e+03 7.620e+02 1.040e+02 0.000e+00 2020 01 12 14 32 48 1.461e+05 1.025e+04 1.051e+03 1.210e+02 2.000e+00 2020 01 12 14 42 48 1.457e+05 8.861e+03 8.490e+02 1.330e+02 6.000e+00 2020 01 12 14 52 48 1.440e+05 8.375e+03 7.990e+02 1.110e+02 3.000e+00 2020 01 12 15 02 48 1.400e+05 7.919e+03 7.480e+02 9.800e+01 0.000e+00 2020 01 12 15 12 48 1.380e+05 7.977e+03 7.460e+02 1.010e+02 2.000e+00 2020 01 12 15 22 48 1.414e+05 8.264e+03 8.160e+02 1.090e+02 4.000e+00 2020 01 12 15 32 49 1.424e+05 8.145e+03 8.360e+02 9.900e+01 2.000e+00 2020 01 12 15 42 49 1.426e+05 8.172e+03 8.390e+02 1.280e+02 1.000e+00 2020 01 12 15 52 49 1.366e+05 7.737e+03 7.230e+02 9.300e+01 3.000e+00 2020 01 12 16 02 49 1.337e+05 7.730e+03 7.990e+02 1.080e+02 5.000e+00 2020 01 12 16 12 49 1.346e+05 7.791e+03 8.050e+02 1.090e+02 1.000e+00 2020 01 12 16 22 49 1.322e+05 7.567e+03 7.970e+02 1.140e+02 3.000e+00 2020 01 12 16 32 49 1.329e+05 7.543e+03 7.600e+02 1.100e+02 3.000e+00 2020 01 12 16 42 49 1.335e+05 7.660e+03 8.080e+02 1.140e+02 3.000e+00 2020 01 12 16 52 49 1.357e+05 8.022e+03 8.450e+02 1.240e+02 3.000e+00 2020 01 12 17 02 49 1.355e+05 7.911e+03 8.460e+02 1.260e+02 4.000e+00 2020 01 12 17 12 50 1.362e+05 8.182e+03 8.750e+02 1.140e+02 5.000e+00 2020 01 12 17 22 50 1.397e+05 8.197e+03 8.490e+02 1.170e+02 5.000e+00 2020 01 12 17 32 50 1.685e+05 9.972e+03 9.840e+02 1.220e+02 2.000e+00 2020 01 12 17 42 50 1.705e+05 1.007e+04 9.650e+02 1.310e+02 2.000e+00 2020 01 12 17 52 50 1.693e+05 1.014e+04 1.001e+03 1.300e+02 2.000e+00 2020 01 12 18 02 50 1.775e+05 1.062e+04 9.670e+02 1.260e+02 2.000e+00 2020 01 12 18 12 50 1.806e+05 1.075e+04 9.810e+02 1.300e+02 6.000e+00 2020 01 12 18 22 50 1.824e+05 1.072e+04 9.720e+02 1.290e+02 5.000e+00 2020 01 12 18 32 50 1.857e+05 1.114e+04 1.041e+03 1.440e+02 3.000e+00 2020 01 12 18 42 50 1.820e+05 1.093e+04 1.052e+03 1.430e+02 2.000e+00 2020 01 12 18 52 50 1.776e+05 1.088e+04 1.046e+03 1.440e+02 3.000e+00 2020 01 12 19 02 51 1.744e+05 1.059e+04 9.620e+02 1.590e+02 4.000e+00 2020 01 12 19 12 51 1.677e+05 1.004e+04 9.830e+02 1.620e+02 3.000e+00 2020 01 12 19 22 51 1.721e+05 1.008e+04 9.840e+02 1.710e+02 3.000e+00 2020 01 12 19 32 51 1.746e+05 1.039e+04 9.510e+02 1.630e+02 0.000e+00 2020 01 12 19 42 51 1.800e+05 1.057e+04 9.860e+02 1.580e+02 5.000e+00 2020 01 12 19 52 51 1.959e+05 1.187e+04 1.111e+03 1.610e+02 3.000e+00 2020 01 12 20 02 51 1.929e+05 1.155e+04 1.103e+03 1.710e+02 4.000e+00 2020 01 12 20 12 51 1.858e+05 1.096e+04 1.004e+03 1.620e+02 3.000e+00 2020 01 12 20 22 51 1.794e+05 1.032e+04 9.980e+02 1.690e+02 3.000e+00 2020 01 12 20 32 51 1.700e+05 9.606e+03 1.023e+03 1.640e+02 2.000e+00 2020 01 12 20 42 52 1.703e+05 9.865e+03 1.041e+03 1.510e+02 4.000e+00 2020 01 12 20 52 52 1.711e+05 9.696e+03 9.960e+02 1.610e+02 0.000e+00 2020 01 12 21 02 52 1.732e+05 9.765e+03 9.720e+02 1.600e+02 7.000e+00 2020 01 12 21 12 52 1.749e+05 9.761e+03 9.510e+02 1.290e+02 1.000e+00 2020 01 12 21 22 52 1.583e+05 8.535e+03 8.470e+02 1.400e+02 2.000e+00 2020 01 12 21 32 52 1.500e+05 8.127e+03 7.690e+02 1.360e+02 4.000e+00 2020 01 12 21 42 52 1.439e+05 7.947e+03 7.860e+02 1.370e+02 2.000e+00 2020 01 12 21 52 52 1.418e+05 7.741e+03 7.940e+02 1.190e+02 0.000e+00 2020 01 12 22 02 52 1.401e+05 7.485e+03 7.400e+02 1.280e+02 2.000e+00 2020 01 12 22 12 52 1.375e+05 7.491e+03 7.620e+02 1.310e+02 2.000e+00 2020 01 12 22 22 53 1.427e+05 7.978e+03 8.290e+02 1.270e+02 2.000e+00 2020 01 12 22 32 53 1.480e+05 7.998e+03 7.460e+02 1.230e+02 0.000e+00 2020 01 12 22 42 53 1.404e+05 7.531e+03 7.560e+02 1.290e+02 1.000e+00 2020 01 12 22 52 53 1.386e+05 8.116e+03 8.240e+02 1.410e+02 2.000e+00 2020 01 12 23 02 53 1.364e+05 7.242e+03 7.200e+02 1.240e+02 3.000e+00 2020 01 12 23 12 53 1.341e+05 7.247e+03 7.350e+02 1.290e+02 2.000e+00 2020 01 12 23 22 53 1.322e+05 7.083e+03 7.030e+02 1.020e+02 2.000e+00 2020 01 12 23 32 53 1.329e+05 7.021e+03 6.850e+02 1.190e+02 1.000e+00 2020 01 12 23 42 53 1.329e+05 7.041e+03 7.500e+02 1.450e+02 0.000e+00 2020 01 12 23 52 53 1.330e+05 7.317e+03 7.480e+02 1.060e+02 1.000e+00