# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2020 01 11 00 02 52 7.614e+04 5.587e+03 1.110e+03 2.050e+02 0.000e+00 2020 01 11 00 12 52 8.013e+04 5.540e+03 1.053e+03 1.840e+02 4.000e+00 2020 01 11 00 22 52 7.546e+04 5.235e+03 1.059e+03 1.800e+02 2.000e+00 2020 01 11 00 32 52 6.251e+04 4.671e+03 9.590e+02 1.620e+02 1.000e+00 2020 01 11 00 42 52 6.525e+04 4.687e+03 9.370e+02 1.490e+02 2.000e+00 2020 01 11 00 52 53 5.873e+04 4.297e+03 8.880e+02 1.600e+02 4.000e+00 2020 01 11 01 02 53 5.458e+04 4.048e+03 9.120e+02 1.550e+02 2.000e+00 2020 01 11 01 12 53 5.298e+04 4.028e+03 8.720e+02 1.410e+02 0.000e+00 2020 01 11 01 22 53 5.094e+04 3.827e+03 8.430e+02 1.510e+02 3.000e+00 2020 01 11 01 32 53 5.221e+04 3.783e+03 8.050e+02 1.490e+02 1.000e+00 2020 01 11 01 42 53 4.914e+04 3.598e+03 7.550e+02 1.400e+02 3.000e+00 2020 01 11 01 52 53 4.761e+04 3.318e+03 6.980e+02 9.700e+01 1.000e+00 2020 01 11 02 02 53 4.966e+04 3.505e+03 7.290e+02 1.220e+02 3.000e+00 2020 01 11 02 12 53 4.736e+04 3.522e+03 7.790e+02 1.260e+02 3.000e+00 2020 01 11 02 22 53 4.851e+04 3.591e+03 7.100e+02 1.240e+02 3.000e+00 2020 01 11 02 32 54 4.820e+04 3.453e+03 6.900e+02 1.240e+02 1.000e+00 2020 01 11 02 42 54 4.078e+04 2.990e+03 5.930e+02 1.040e+02 2.000e+00 2020 01 11 02 52 54 3.902e+04 2.780e+03 5.740e+02 8.700e+01 2.000e+00 2020 01 11 03 02 54 3.703e+04 2.667e+03 5.660e+02 9.600e+01 3.000e+00 2020 01 11 03 12 54 3.621e+04 2.617e+03 5.580e+02 1.220e+02 1.000e+00 2020 01 11 03 22 54 3.525e+04 2.368e+03 5.110e+02 8.900e+01 2.000e+00 2020 01 11 03 32 54 3.081e+04 2.087e+03 4.640e+02 8.500e+01 1.000e+00 2020 01 11 03 42 54 3.096e+04 2.196e+03 4.480e+02 8.600e+01 4.000e+00 2020 01 11 03 52 54 3.155e+04 2.241e+03 5.070e+02 8.600e+01 1.000e+00 2020 01 11 04 02 54 3.201e+04 2.266e+03 4.540e+02 6.200e+01 0.000e+00 2020 01 11 04 12 55 2.985e+04 2.028e+03 4.600e+02 9.700e+01 0.000e+00 2020 01 11 04 22 55 2.964e+04 2.036e+03 4.300e+02 7.100e+01 2.000e+00 2020 01 11 04 32 55 3.351e+04 2.326e+03 4.640e+02 7.400e+01 2.000e+00 2020 01 11 04 42 55 3.540e+04 2.422e+03 4.910e+02 8.000e+01 1.000e+00 2020 01 11 04 52 55 3.866e+04 2.730e+03 5.410e+02 8.900e+01 2.000e+00 2020 01 11 05 02 55 3.405e+04 2.470e+03 4.650e+02 7.700e+01 3.000e+00 2020 01 11 05 12 55 3.385e+04 2.426e+03 4.790e+02 8.300e+01 0.000e+00 2020 01 11 05 22 55 3.188e+04 2.196e+03 4.420e+02 7.600e+01 1.000e+00 2020 01 11 05 32 55 3.124e+04 2.152e+03 4.340e+02 6.600e+01 2.000e+00 2020 01 11 05 42 55 3.098e+04 2.074e+03 4.380e+02 7.500e+01 2.000e+00 2020 01 11 05 52 56 3.383e+04 2.202e+03 4.240e+02 6.100e+01 0.000e+00 2020 01 11 06 02 56 3.372e+04 2.253e+03 4.070e+02 6.700e+01 0.000e+00 2020 01 11 06 12 56 3.269e+04 2.195e+03 4.120e+02 7.700e+01 2.000e+00 2020 01 11 06 22 56 3.097e+04 2.081e+03 3.900e+02 8.100e+01 6.000e+00 2020 01 11 06 32 56 2.701e+04 1.924e+03 4.050e+02 6.700e+01 0.000e+00 2020 01 11 06 42 56 2.737e+04 1.930e+03 4.040e+02 7.300e+01 1.000e+00 2020 01 11 06 52 56 2.960e+04 1.919e+03 4.110e+02 6.900e+01 3.000e+00 2020 01 11 07 02 56 2.896e+04 1.851e+03 3.950e+02 6.700e+01 0.000e+00 2020 01 11 07 12 56 2.975e+04 1.960e+03 4.180e+02 6.500e+01 3.000e+00 2020 01 11 07 22 57 3.382e+04 2.120e+03 4.160e+02 8.400e+01 2.000e+00 2020 01 11 07 32 57 4.065e+04 2.523e+03 4.950e+02 9.900e+01 3.000e+00 2020 01 11 07 42 57 4.259e+04 2.650e+03 4.990e+02 9.700e+01 0.000e+00 2020 01 11 07 52 57 4.733e+04 2.914e+03 5.180e+02 8.600e+01 3.000e+00 2020 01 11 08 02 57 5.236e+04 3.280e+03 5.630e+02 1.010e+02 0.000e+00 2020 01 11 08 12 57 5.241e+04 3.287e+03 5.790e+02 9.400e+01 1.000e+00 2020 01 11 08 22 57 5.255e+04 3.148e+03 5.630e+02 9.100e+01 3.000e+00 2020 01 11 08 32 57 5.417e+04 3.415e+03 6.070e+02 1.040e+02 3.000e+00 2020 01 11 08 42 57 5.534e+04 3.494e+03 5.810e+02 1.080e+02 4.000e+00 2020 01 11 08 52 57 5.676e+04 3.558e+03 6.140e+02 1.240e+02 1.000e+00 2020 01 11 09 02 58 5.706e+04 3.496e+03 5.500e+02 8.700e+01 1.000e+00 2020 01 11 09 12 58 5.361e+04 3.443e+03 5.920e+02 1.050e+02 1.000e+00 2020 01 11 09 22 58 5.879e+04 3.659e+03 5.840e+02 1.020e+02 2.000e+00 2020 01 11 09 32 58 6.554e+04 4.113e+03 6.150e+02 1.130e+02 4.000e+00 2020 01 11 09 42 58 6.804e+04 4.255e+03 6.990e+02 1.140e+02 5.000e+00 2020 01 11 09 52 58 7.221e+04 4.580e+03 7.280e+02 1.450e+02 6.000e+00 2020 01 11 10 02 58 7.354e+04 4.558e+03 7.050e+02 1.470e+02 6.000e+00 2020 01 11 10 12 58 8.561e+04 5.614e+03 8.520e+02 1.290e+02 1.000e+00 2020 01 11 10 22 58 9.652e+04 7.138e+03 1.016e+03 1.740e+02 3.000e+00 2020 01 11 10 32 58 9.804e+04 6.002e+03 7.800e+02 1.570e+02 8.000e+00 2020 01 11 10 42 59 9.746e+04 5.906e+03 8.170e+02 1.530e+02 9.000e+00 2020 01 11 10 52 59 8.668e+04 5.529e+03 8.160e+02 1.650e+02 5.000e+00 2020 01 11 11 02 59 8.912e+04 5.373e+03 8.050e+02 1.380e+02 5.000e+00 2020 01 11 11 12 59 9.161e+04 5.818e+03 8.440e+02 1.800e+02 4.000e+00 2020 01 11 11 22 59 9.436e+04 5.578e+03 8.370e+02 1.620e+02 5.000e+00 2020 01 11 11 32 59 9.551e+04 5.672e+03 9.170e+02 1.580e+02 4.000e+00 2020 01 11 11 42 59 9.117e+04 5.418e+03 8.050e+02 1.570e+02 6.000e+00 2020 01 11 11 52 59 9.791e+04 5.916e+03 8.890e+02 1.570e+02 4.000e+00 2020 01 11 12 02 59 9.916e+04 6.186e+03 9.180e+02 1.550e+02 8.000e+00 2020 01 11 12 12 59 1.040e+05 6.472e+03 9.680e+02 1.660e+02 6.000e+00 2020 01 11 12 23 00 1.166e+05 7.037e+03 1.004e+03 1.810e+02 1.000e+01 2020 01 11 12 33 00 1.101e+05 6.484e+03 9.440e+02 1.750e+02 2.000e+00 2020 01 11 12 43 00 1.002e+05 6.057e+03 8.440e+02 1.300e+02 4.000e+00 2020 01 11 12 53 00 8.572e+04 5.433e+03 8.160e+02 1.210e+02 3.000e+00 2020 01 11 13 03 00 9.165e+04 5.669e+03 8.180e+02 1.360e+02 3.000e+00 2020 01 11 13 13 00 9.291e+04 5.691e+03 8.500e+02 1.300e+02 1.000e+00 2020 01 11 13 23 00 8.910e+04 5.460e+03 7.730e+02 1.280e+02 5.000e+00 2020 01 11 13 33 00 8.984e+04 5.440e+03 8.130e+02 1.400e+02 5.000e+00 2020 01 11 13 43 00 8.684e+04 4.995e+03 7.610e+02 1.380e+02 5.000e+00 2020 01 11 13 53 00 8.234e+04 4.621e+03 7.950e+02 1.470e+02 4.000e+00 2020 01 11 14 03 01 7.947e+04 4.660e+03 7.140e+02 1.330e+02 3.000e+00 2020 01 11 14 13 01 8.109e+04 4.682e+03 8.170e+02 1.580e+02 9.000e+00 2020 01 11 14 23 01 8.110e+04 4.685e+03 7.960e+02 1.490e+02 4.000e+00 2020 01 11 14 33 01 7.763e+04 4.482e+03 7.640e+02 1.220e+02 5.000e+00