# yy mm dd HH MM SS      0.3um      0.5um        1um        2um        5um
2020 01 08 00 02 08  1.094e+05  3.069e+03  1.760e+02  1.800e+01  0.000e+00
2020 01 08 00 12 09  1.042e+05  3.017e+03  1.790e+02  2.400e+01  0.000e+00
2020 01 08 00 22 09  9.342e+04  2.369e+03  1.550e+02  2.000e+01  0.000e+00
2020 01 08 00 32 09  7.667e+04  1.732e+03  1.200e+02  1.600e+01  0.000e+00
2020 01 08 00 42 09  7.931e+04  1.715e+03  1.010e+02  1.100e+01  0.000e+00
2020 01 08 00 52 09  7.759e+04  1.633e+03  9.400e+01  9.000e+00  0.000e+00
2020 01 08 01 02 09  7.587e+04  1.570e+03  1.050e+02  1.300e+01  0.000e+00
2020 01 08 01 12 09  8.314e+04  1.723e+03  1.210e+02  1.800e+01  1.000e+00
2020 01 08 01 22 09  9.040e+04  1.795e+03  9.900e+01  1.000e+01  1.000e+00
2020 01 08 01 32 09  8.939e+04  1.735e+03  1.150e+02  1.000e+01  0.000e+00
2020 01 08 01 42 10  9.662e+04  1.836e+03  1.260e+02  1.900e+01  0.000e+00
2020 01 08 01 52 10  1.010e+05  2.091e+03  1.510e+02  2.200e+01  0.000e+00
2020 01 08 02 02 10  1.071e+05  2.841e+03  1.870e+02  2.400e+01  0.000e+00
2020 01 08 02 12 10  1.150e+05  3.427e+03  2.160e+02  1.800e+01  0.000e+00
2020 01 08 02 22 10  1.266e+05  3.379e+03  1.830e+02  2.800e+01  0.000e+00
2020 01 08 02 32 10  1.385e+05  3.593e+03  2.110e+02  1.600e+01  0.000e+00
2020 01 08 02 42 10  1.506e+05  3.798e+03  2.250e+02  1.600e+01  0.000e+00
2020 01 08 02 52 10  1.599e+05  3.918e+03  2.350e+02  2.900e+01  0.000e+00
2020 01 08 03 02 10  1.543e+05  3.741e+03  2.140e+02  1.900e+01  0.000e+00
2020 01 08 03 12 10  1.555e+05  3.867e+03  1.990e+02  2.500e+01  0.000e+00
2020 01 08 03 22 11  1.507e+05  3.637e+03  1.840e+02  2.400e+01  0.000e+00
2020 01 08 03 32 11  1.542e+05  3.908e+03  1.860e+02  2.300e+01  0.000e+00
2020 01 08 03 42 11  1.601e+05  4.022e+03  1.930e+02  2.000e+01  0.000e+00
2020 01 08 03 52 11  1.618e+05  4.304e+03  1.640e+02  2.100e+01  0.000e+00
2020 01 08 04 02 11  1.820e+05  5.704e+03  2.210e+02  2.000e+01  0.000e+00
2020 01 08 04 12 11  1.838e+05  5.816e+03  1.980e+02  2.000e+01  1.000e+00
2020 01 08 04 22 11  1.629e+05  4.715e+03  1.700e+02  2.000e+01  0.000e+00
2020 01 08 04 32 11  1.597e+05  4.475e+03  1.560e+02  1.100e+01  0.000e+00
2020 01 08 04 42 11  1.602e+05  4.450e+03  1.680e+02  1.600e+01  0.000e+00
2020 01 08 04 52 11  1.434e+05  3.742e+03  1.500e+02  1.000e+01  0.000e+00
2020 01 08 05 02 12  1.362e+05  3.323e+03  1.520e+02  1.400e+01  0.000e+00
2020 01 08 05 12 12  1.383e+05  3.458e+03  1.700e+02  2.300e+01  0.000e+00
2020 01 08 05 22 12  1.396e+05  3.405e+03  1.850e+02  2.100e+01  1.000e+00
2020 01 08 05 32 12  1.438e+05  3.636e+03  1.900e+02  1.700e+01  0.000e+00
2020 01 08 05 42 12  1.284e+05  3.013e+03  1.410e+02  1.900e+01  0.000e+00
2020 01 08 05 52 12  1.247e+05  3.184e+03  1.210e+02  1.200e+01  0.000e+00
2020 01 08 06 02 12  1.328e+05  3.247e+03  1.310e+02  1.300e+01  0.000e+00
2020 01 08 06 12 12  1.333e+05  3.340e+03  1.440e+02  1.700e+01  0.000e+00
2020 01 08 06 22 12  1.496e+05  4.320e+03  1.560e+02  1.300e+01  0.000e+00
2020 01 08 06 32 12  1.579e+05  4.768e+03  1.790e+02  1.600e+01  1.000e+00
2020 01 08 06 42 13  1.730e+05  5.347e+03  2.110e+02  3.300e+01  0.000e+00
2020 01 08 06 52 13  1.921e+05  7.324e+03  2.810e+02  3.000e+01  0.000e+00
2020 01 08 07 02 13  1.687e+05  6.201e+03  2.220e+02  3.200e+01  1.000e+00
2020 01 08 07 12 13  1.810e+05  7.493e+03  2.750e+02  2.600e+01  2.000e+00
2020 01 08 07 22 13  1.889e+05  8.601e+03  3.770e+02  3.200e+01  1.000e+00
2020 01 08 07 32 13  1.960e+05  1.045e+04  4.140e+02  4.700e+01  1.000e+00
2020 01 08 07 42 13  2.112e+05  1.070e+04  3.540e+02  4.100e+01  1.000e+00
2020 01 08 07 52 13  2.192e+05  1.066e+04  3.250e+02  2.900e+01  0.000e+00
2020 01 08 08 02 13  2.231e+05  1.198e+04  3.560e+02  3.800e+01  2.000e+00
2020 01 08 08 12 13  2.277e+05  1.302e+04  3.740e+02  3.200e+01  0.000e+00
2020 01 08 08 22 14  2.305e+05  1.391e+04  4.950e+02  5.700e+01  0.000e+00
2020 01 08 08 32 14  2.238e+05  1.375e+04  4.760e+02  4.800e+01  1.000e+00
2020 01 08 08 42 14  2.278e+05  1.426e+04  5.420e+02  4.300e+01  0.000e+00
2020 01 08 08 52 14  2.364e+05  1.551e+04  5.830e+02  5.100e+01  0.000e+00
2020 01 08 09 02 14  2.422e+05  1.705e+04  6.980e+02  6.900e+01  0.000e+00
2020 01 08 09 12 14  2.502e+05  2.097e+04  8.250e+02  6.500e+01  1.000e+00
2020 01 08 09 22 14  2.590e+05  2.387e+04  8.760e+02  8.200e+01  0.000e+00
2020 01 08 09 32 14  2.742e+05  2.830e+04  1.102e+03  9.400e+01  3.000e+00
2020 01 08 09 42 14  2.821e+05  3.144e+04  1.137e+03  1.050e+02  0.000e+00
2020 01 08 09 52 14  2.892e+05  3.154e+04  1.096e+03  9.400e+01  0.000e+00
2020 01 08 10 02 15  2.813e+05  3.267e+04  1.014e+03  8.200e+01  1.000e+00
2020 01 08 10 12 15  2.880e+05  3.552e+04  1.208e+03  9.900e+01  0.000e+00
2020 01 08 10 22 15  2.744e+05  3.450e+04  1.145e+03  8.500e+01  0.000e+00
2020 01 08 10 32 15  2.605e+05  3.163e+04  1.008e+03  6.900e+01  1.000e+00
2020 01 08 10 42 15  2.385e+05  2.616e+04  7.550e+02  7.200e+01  1.000e+00
2020 01 08 10 52 15  2.321e+05  2.388e+04  7.190e+02  6.200e+01  0.000e+00
2020 01 08 11 02 15  2.454e+05  2.529e+04  7.900e+02  6.100e+01  1.000e+00
2020 01 08 11 12 15  2.428e+05  2.554e+04  7.540e+02  6.700e+01  1.000e+00
2020 01 08 11 22 15  2.405e+05  2.370e+04  7.090e+02  5.500e+01  3.000e+00
2020 01 08 11 32 15  2.046e+05  1.760e+04  6.060e+02  5.900e+01  1.000e+00
2020 01 08 11 42 16  1.507e+05  1.063e+04  4.180e+02  3.600e+01  1.000e+00
2020 01 08 11 52 16  1.403e+05  8.484e+03  3.400e+02  4.500e+01  1.000e+00
2020 01 08 12 02 16  1.060e+05  5.608e+03  2.680e+02  2.500e+01  1.000e+00
2020 01 08 12 12 16  7.006e+04  3.410e+03  2.150e+02  3.000e+01  0.000e+00
2020 01 08 12 22 16  5.354e+04  2.479e+03  1.840e+02  2.500e+01  1.000e+00
2020 01 08 12 32 16  4.726e+04  2.083e+03  1.600e+02  2.100e+01  0.000e+00
2020 01 08 12 42 16  4.263e+04  1.926e+03  1.670e+02  2.500e+01  2.000e+00
2020 01 08 12 52 16  3.863e+04  1.911e+03  1.770e+02  2.300e+01  2.000e+00
2020 01 08 13 02 16  3.218e+04  1.625e+03  1.420e+02  1.800e+01  2.000e+00
2020 01 08 13 12 16  3.177e+04  1.473e+03  1.380e+02  1.300e+01  2.000e+00
2020 01 08 13 22 17  3.350e+04  1.457e+03  1.160e+02  1.600e+01  0.000e+00
2020 01 08 13 32 17  3.834e+04  1.699e+03  1.470e+02  1.600e+01  0.000e+00
2020 01 08 13 42 17  3.846e+04  1.716e+03  1.820e+02  3.300e+01  2.000e+00
2020 01 08 13 52 17  3.909e+04  1.526e+03  1.510e+02  2.700e+01  1.000e+00
2020 01 08 14 02 17  4.512e+04  1.736e+03  1.540e+02  2.200e+01  0.000e+00
2020 01 08 14 12 17  4.966e+04  1.810e+03  1.460e+02  1.200e+01  0.000e+00
2020 01 08 14 22 17  5.234e+04  1.901e+03  1.750e+02  2.100e+01  0.000e+00
2020 01 08 14 32 17  5.107e+04  1.666e+03  1.500e+02  1.900e+01  1.000e+00
2020 01 08 14 42 17  5.309e+04  1.850e+03  1.710e+02  3.000e+01  1.000e+00
2020 01 08 14 52 17  5.994e+04  1.818e+03  1.680e+02  2.400e+01  1.000e+00
2020 01 08 15 02 18  6.776e+04  2.448e+03  2.590e+02  3.500e+01  1.000e+00
2020 01 08 15 12 18  7.551e+04  2.718e+03  2.670e+02  4.300e+01  1.000e+00
2020 01 08 15 22 18  9.803e+04  3.425e+03  2.800e+02  3.900e+01  1.000e+00
2020 01 08 15 32 18  1.254e+05  4.209e+03  3.190e+02  4.500e+01  2.000e+00
2020 01 08 15 42 18  1.316e+05  4.518e+03  3.670e+02  4.700e+01  1.000e+00
2020 01 08 15 52 18  1.390e+05  5.363e+03  4.190e+02  5.200e+01  0.000e+00
2020 01 08 16 02 18  1.740e+05  6.892e+03  4.710e+02  6.600e+01  1.000e+00
2020 01 08 16 12 18  1.847e+05  7.672e+03  6.360e+02  1.010e+02  2.000e+00
2020 01 08 16 22 18  1.809e+05  7.037e+03  4.870e+02  6.700e+01  1.000e+00
2020 01 08 16 32 18  1.736e+05  6.562e+03  4.660e+02  6.900e+01  3.000e+00
2020 01 08 16 42 19  1.392e+05  4.769e+03  3.380e+02  5.000e+01  3.000e+00
2020 01 08 16 52 19  1.470e+05  4.861e+03  2.780e+02  4.800e+01  0.000e+00
2020 01 08 17 02 19  1.710e+05  6.355e+03  3.410e+02  5.200e+01  1.000e+00
2020 01 08 17 12 19  1.668e+05  5.816e+03  3.200e+02  4.000e+01  3.000e+00
2020 01 08 17 22 19  1.604e+05  5.200e+03  3.260e+02  5.500e+01  0.000e+00
2020 01 08 17 32 19  1.803e+05  5.818e+03  3.660e+02  4.300e+01  0.000e+00
2020 01 08 17 42 19  2.221e+05  8.042e+03  4.600e+02  7.600e+01  3.000e+00
2020 01 08 17 52 19  2.121e+05  8.698e+03  4.920e+02  6.200e+01  2.000e+00
2020 01 08 18 02 19  1.973e+05  8.424e+03  4.510e+02  5.800e+01  1.000e+00
2020 01 08 18 12 20  1.915e+05  8.138e+03  4.440e+02  7.000e+01  2.000e+00
2020 01 08 18 22 20  1.860e+05  7.585e+03  4.160e+02  7.400e+01  4.000e+00
2020 01 08 18 32 20  1.813e+05  6.918e+03  3.940e+02  4.900e+01  0.000e+00
2020 01 08 18 42 20  1.783e+05  6.781e+03  3.770e+02  5.500e+01  1.000e+00
2020 01 08 18 52 20  1.794e+05  7.151e+03  4.120e+02  6.500e+01  2.000e+00
2020 01 08 19 02 20  1.767e+05  7.945e+03  3.690e+02  4.000e+01  2.000e+00
2020 01 08 19 12 20  1.143e+05  3.395e+03  1.950e+02  2.800e+01  1.000e+00
2020 01 08 19 22 20  1.225e+05  2.593e+03  1.930e+02  2.600e+01  1.000e+00
2020 01 08 19 32 20  8.364e+04  1.561e+03  1.650e+02  2.900e+01  1.000e+00
2020 01 08 19 42 20  7.663e+04  1.259e+03  1.380e+02  1.700e+01  2.000e+00
2020 01 08 19 52 21  7.550e+04  1.542e+03  1.670e+02  3.100e+01  0.000e+00
2020 01 08 20 02 21  7.999e+04  1.695e+03  1.650e+02  2.200e+01  0.000e+00
2020 01 08 20 12 21  6.676e+04  1.473e+03  1.470e+02  1.900e+01  0.000e+00
2020 01 08 20 22 21  1.049e+05  3.300e+03  2.220e+02  3.300e+01  0.000e+00
2020 01 08 20 32 21  1.068e+05  2.749e+03  1.840e+02  2.400e+01  1.000e+00
2020 01 08 20 42 21  1.060e+05  2.157e+03  2.030e+02  3.400e+01  1.000e+00
2020 01 08 20 52 21  1.059e+05  2.476e+03  1.890e+02  2.500e+01  0.000e+00
2020 01 08 21 02 21  1.074e+05  1.984e+03  1.390e+02  1.600e+01  0.000e+00
2020 01 08 21 12 21  1.179e+05  2.631e+03  1.690e+02  2.700e+01  1.000e+00
2020 01 08 21 22 21  1.007e+05  2.191e+03  1.600e+02  2.300e+01  0.000e+00
2020 01 08 21 32 22  8.767e+04  2.619e+03  2.010e+02  2.900e+01  0.000e+00
2020 01 08 21 42 22  1.373e+05  3.208e+03  1.870e+02  3.100e+01  0.000e+00
2020 01 08 21 52 22  1.228e+05  3.236e+03  2.220e+02  2.500e+01  0.000e+00
2020 01 08 22 02 22  1.310e+05  4.860e+03  2.840e+02  4.500e+01  0.000e+00
2020 01 08 22 12 22  1.059e+05  4.205e+03  2.720e+02  3.800e+01  0.000e+00
2020 01 08 22 22 22  2.067e+05  8.629e+03  3.280e+02  4.600e+01  0.000e+00
2020 01 08 22 32 22  1.781e+05  5.903e+03  3.140e+02  3.900e+01  0.000e+00
2020 01 08 22 42 22  2.153e+05  8.944e+03  3.950e+02  3.100e+01  2.000e+00
2020 01 08 22 52 22  2.435e+05  1.334e+04  4.810e+02  3.600e+01  0.000e+00
2020 01 08 23 02 22  2.726e+05  2.136e+04  9.950e+02  5.400e+01  1.000e+00
2020 01 08 23 12 23  2.643e+05  2.002e+04  1.038e+03  6.800e+01  1.000e+00
2020 01 08 23 22 23  2.614e+05  1.904e+04  9.160e+02  8.400e+01  2.000e+00
2020 01 08 23 32 23  2.584e+05  1.852e+04  9.350e+02  8.500e+01  0.000e+00
2020 01 08 23 42 23  2.517e+05  1.597e+04  7.400e+02  8.200e+01  0.000e+00
2020 01 08 23 52 23  2.571e+05  1.913e+04  9.810e+02  7.000e+01  0.000e+00