# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2019 09 30 00 02 09 5.327e+04 2.830e+03 1.073e+03 1.880e+02 2.000e+00 2019 09 30 00 12 09 5.310e+04 2.758e+03 1.025e+03 2.020e+02 1.000e+00 2019 09 30 00 22 09 5.380e+04 2.673e+03 9.380e+02 1.890e+02 2.000e+00 2019 09 30 00 32 10 5.168e+04 2.770e+03 1.037e+03 1.970e+02 7.000e+00 2019 09 30 00 42 10 4.444e+04 2.731e+03 1.052e+03 1.820e+02 1.000e+00 2019 09 30 00 52 10 5.124e+04 2.718e+03 1.022e+03 2.000e+02 3.000e+00 2019 09 30 01 02 17 5.154e+04 2.739e+03 9.760e+02 2.140e+02 7.000e+00 2019 09 30 01 12 17 4.916e+04 2.712e+03 9.760e+02 1.870e+02 3.000e+00 2019 09 30 01 22 17 4.601e+04 2.620e+03 9.780e+02 2.000e+02 3.000e+00 2019 09 30 01 32 17 4.180e+04 2.540e+03 1.013e+03 2.370e+02 2.000e+00 2019 09 30 01 42 17 3.598e+04 2.331e+03 9.480e+02 2.010e+02 1.000e+00 2019 09 30 01 52 17 3.661e+04 2.506e+03 1.052e+03 2.120e+02 5.000e+00 2019 09 30 02 02 17 3.744e+04 2.438e+03 1.031e+03 2.130e+02 6.000e+00 2019 09 30 02 12 17 4.264e+04 2.506e+03 1.035e+03 1.930e+02 5.000e+00 2019 09 30 02 22 17 4.655e+04 2.753e+03 1.050e+03 2.110e+02 1.000e+00 2019 09 30 02 32 18 5.216e+04 2.909e+03 1.107e+03 2.280e+02 0.000e+00 2019 09 30 02 42 18 5.548e+04 2.914e+03 1.027e+03 1.840e+02 3.000e+00 2019 09 30 02 52 18 5.839e+04 3.072e+03 1.103e+03 1.990e+02 3.000e+00 2019 09 30 03 02 18 5.990e+04 3.148e+03 1.140e+03 1.980e+02 6.000e+00 2019 09 30 03 12 18 6.334e+04 3.256e+03 1.127e+03 2.210e+02 8.000e+00 2019 09 30 03 22 18 6.487e+04 3.247e+03 1.199e+03 2.550e+02 5.000e+00 2019 09 30 03 32 18 6.534e+04 3.359e+03 1.224e+03 2.430e+02 6.000e+00 2019 09 30 03 42 18 6.378e+04 3.207e+03 1.171e+03 2.140e+02 1.000e+00 2019 09 30 03 52 18 6.833e+04 3.409e+03 1.243e+03 2.490e+02 4.000e+00 2019 09 30 04 02 18 7.447e+04 3.516e+03 1.298e+03 2.670e+02 7.000e+00 2019 09 30 04 12 19 7.548e+04 3.452e+03 1.208e+03 2.370e+02 3.000e+00 2019 09 30 04 22 19 7.966e+04 3.861e+03 1.273e+03 2.340e+02 2.000e+00 2019 09 30 04 32 19 8.398e+04 3.682e+03 1.231e+03 2.020e+02 2.000e+00 2019 09 30 04 42 19 8.404e+04 3.749e+03 1.296e+03 2.380e+02 9.000e+00 2019 09 30 04 52 19 9.163e+04 3.812e+03 1.275e+03 2.370e+02 4.000e+00 2019 09 30 05 02 19 9.312e+04 3.961e+03 1.296e+03 2.400e+02 1.000e+00 2019 09 30 05 12 19 9.684e+04 4.017e+03 1.266e+03 2.380e+02 4.000e+00 2019 09 30 05 22 19 1.131e+05 4.675e+03 1.490e+03 3.070e+02 8.000e+00 2019 09 30 05 32 19 1.411e+05 5.378e+03 1.618e+03 3.220e+02 9.000e+00 2019 09 30 05 42 19 1.441e+05 5.200e+03 1.565e+03 3.190e+02 3.000e+00 2019 09 30 05 52 19 1.494e+05 5.445e+03 1.670e+03 2.850e+02 6.000e+00 2019 09 30 06 02 20 1.467e+05 5.433e+03 1.675e+03 3.030e+02 7.000e+00 2019 09 30 06 12 20 1.317e+05 5.080e+03 1.614e+03 3.110e+02 9.000e+00 2019 09 30 06 22 20 1.187e+05 4.916e+03 1.637e+03 3.230e+02 7.000e+00 2019 09 30 06 32 20 1.110e+05 4.610e+03 1.553e+03 3.090e+02 9.000e+00 2019 09 30 06 42 20 1.050e+05 4.528e+03 1.588e+03 3.070e+02 9.000e+00 2019 09 30 06 52 20 9.705e+04 4.133e+03 1.384e+03 2.600e+02 4.000e+00 2019 09 30 07 02 20 8.485e+04 3.582e+03 1.177e+03 2.070e+02 7.000e+00 2019 09 30 07 12 20 8.211e+04 3.281e+03 1.056e+03 2.010e+02 5.000e+00 2019 09 30 07 22 20 7.943e+04 2.976e+03 9.270e+02 1.690e+02 9.000e+00 2019 09 30 07 32 21 7.733e+04 2.929e+03 9.270e+02 1.880e+02 5.000e+00 2019 09 30 07 42 21 7.658e+04 2.784e+03 9.680e+02 1.860e+02 9.000e+00 2019 09 30 07 52 21 7.493e+04 2.508e+03 8.080e+02 1.350e+02 7.000e+00 2019 09 30 08 02 21 7.720e+04 2.656e+03 8.930e+02 1.690e+02 1.100e+01 2019 09 30 08 12 21 8.091e+04 2.748e+03 8.690e+02 1.710e+02 4.000e+00 2019 09 30 08 22 21 8.490e+04 2.803e+03 8.390e+02 1.800e+02 6.000e+00 2019 09 30 08 32 21 8.897e+04 3.125e+03 9.370e+02 1.860e+02 9.000e+00 2019 09 30 08 42 21 9.524e+04 3.264e+03 9.730e+02 1.980e+02 8.000e+00 2019 09 30 08 52 21 1.003e+05 3.338e+03 1.001e+03 2.140e+02 4.000e+00 2019 09 30 09 02 21 1.034e+05 3.179e+03 9.020e+02 1.860e+02 6.000e+00 2019 09 30 09 12 22 1.144e+05 3.202e+03 9.060e+02 2.010e+02 8.000e+00 2019 09 30 09 22 22 1.140e+05 3.062e+03 8.390e+02 1.870e+02 7.000e+00 2019 09 30 09 32 22 1.190e+05 3.173e+03 8.840e+02 2.120e+02 9.000e+00 2019 09 30 09 42 22 1.252e+05 3.176e+03 8.220e+02 1.780e+02 1.400e+01 2019 09 30 09 52 22 1.289e+05 3.651e+03 8.970e+02 1.870e+02 6.000e+00 2019 09 30 10 02 22 1.291e+05 3.637e+03 8.470e+02 1.860e+02 1.100e+01 2019 09 30 10 12 22 1.257e+05 2.827e+03 6.390e+02 1.390e+02 6.000e+00 2019 09 30 10 22 22 1.306e+05 3.075e+03 7.540e+02 1.530e+02 1.500e+01 2019 09 30 10 32 22 1.308e+05 3.262e+03 8.330e+02 2.040e+02 1.300e+01 2019 09 30 10 42 22 1.282e+05 3.061e+03 7.740e+02 1.540e+02 7.000e+00 2019 09 30 10 52 23 1.242e+05 2.919e+03 6.560e+02 1.590e+02 6.000e+00 2019 09 30 11 02 23 1.116e+05 2.377e+03 5.210e+02 1.270e+02 5.000e+00 2019 09 30 11 12 23 1.064e+05 2.499e+03 5.880e+02 1.700e+02 1.200e+01 2019 09 30 11 22 23 9.883e+04 2.268e+03 5.670e+02 1.560e+02 8.000e+00 2019 09 30 11 32 23 1.073e+05 2.675e+03 5.700e+02 1.480e+02 8.000e+00 2019 09 30 11 42 23 1.011e+05 2.213e+03 4.490e+02 1.030e+02 4.000e+00 2019 09 30 11 52 23 1.003e+05 2.369e+03 5.360e+02 1.440e+02 8.000e+00 2019 09 30 12 02 23 9.763e+04 2.198e+03 4.670e+02 1.110e+02 9.000e+00 2019 09 30 12 12 23 9.149e+04 2.047e+03 4.130e+02 1.010e+02 9.000e+00 2019 09 30 12 22 23 9.317e+04 2.099e+03 4.830e+02 1.090e+02 1.100e+01 2019 09 30 12 32 23 9.093e+04 2.017e+03 4.310e+02 9.900e+01 3.000e+00 2019 09 30 12 42 24 8.582e+04 2.046e+03 4.740e+02 1.170e+02 1.000e+01 2019 09 30 12 52 24 8.327e+04 2.134e+03 5.430e+02 1.500e+02 1.000e+01 2019 09 30 13 02 24 8.668e+04 2.401e+03 5.740e+02 1.560e+02 8.000e+00 2019 09 30 13 12 24 9.512e+04 2.573e+03 6.970e+02 1.610e+02 9.000e+00 2019 09 30 13 22 24 9.985e+04 2.938e+03 7.910e+02 1.770e+02 4.000e+00 2019 09 30 13 32 24 1.029e+05 2.968e+03 7.770e+02 1.870e+02 4.000e+00 2019 09 30 13 42 24 9.601e+04 2.790e+03 7.540e+02 2.050e+02 1.400e+01 2019 09 30 13 52 24 9.444e+04 2.818e+03 7.750e+02 2.050e+02 1.100e+01 2019 09 30 14 02 24 9.564e+04 2.441e+03 6.210e+02 1.550e+02 1.300e+01 2019 09 30 14 12 24 9.875e+04 2.696e+03 6.920e+02 1.650e+02 1.600e+01 2019 09 30 14 22 25 9.568e+04 2.536e+03 6.540e+02 1.630e+02 1.000e+01 2019 09 30 14 32 25 9.625e+04 2.572e+03 6.440e+02 1.500e+02 1.000e+01 2019 09 30 14 42 25 9.461e+04 2.233e+03 5.520e+02 1.280e+02 7.000e+00 2019 09 30 14 52 25 9.126e+04 2.152e+03 5.470e+02 1.300e+02 7.000e+00 2019 09 30 15 02 25 9.531e+04 2.292e+03 5.370e+02 1.330e+02 1.000e+01 2019 09 30 15 12 25 9.862e+04 2.329e+03 5.920e+02 1.550e+02 1.000e+01 2019 09 30 15 22 25 9.245e+04 2.159e+03 4.970e+02 1.480e+02 9.000e+00 2019 09 30 15 32 25 9.916e+04 2.533e+03 6.100e+02 1.480e+02 4.000e+00 2019 09 30 15 42 25 9.687e+04 2.358e+03 5.430e+02 1.280e+02 7.000e+00 2019 09 30 15 52 26 1.000e+05 2.381e+03 5.170e+02 1.310e+02 1.600e+01 2019 09 30 16 02 26 1.145e+05 3.084e+03 6.160e+02 1.540e+02 5.000e+00 2019 09 30 16 12 26 1.243e+05 3.622e+03 6.940e+02 1.530e+02 7.000e+00 2019 09 30 16 22 26 1.267e+05 3.555e+03 7.250e+02 1.790e+02 1.200e+01 2019 09 30 16 32 26 1.302e+05 3.649e+03 7.890e+02 2.220e+02 1.200e+01 2019 09 30 16 42 26 1.464e+05 3.820e+03 6.930e+02 1.390e+02 7.000e+00 2019 09 30 16 52 26 1.376e+05 3.507e+03 6.930e+02 1.580e+02 6.000e+00 2019 09 30 17 02 26 1.449e+05 3.907e+03 6.630e+02 1.700e+02 8.000e+00 2019 09 30 17 12 26 1.467e+05 4.246e+03 8.250e+02 2.320e+02 2.200e+01 2019 09 30 17 22 26 1.502e+05 4.409e+03 8.410e+02 2.440e+02 1.800e+01 2019 09 30 17 32 26 1.550e+05 4.500e+03 7.540e+02 1.500e+02 7.000e+00 2019 09 30 17 42 27 1.591e+05 4.744e+03 7.440e+02 1.610e+02 9.000e+00 2019 09 30 17 52 27 1.634e+05 4.810e+03 7.650e+02 1.610e+02 6.000e+00 2019 09 30 18 02 27 1.697e+05 5.364e+03 8.370e+02 1.930e+02 1.300e+01 2019 09 30 18 12 27 1.705e+05 5.719e+03 9.290e+02 2.020e+02 7.000e+00 2019 09 30 18 22 27 1.593e+05 4.937e+03 8.160e+02 1.830e+02 1.200e+01 2019 09 30 18 32 27 1.589e+05 5.035e+03 8.120e+02 2.020e+02 9.000e+00 2019 09 30 18 42 27 1.655e+05 5.205e+03 8.160e+02 1.710e+02 1.000e+01 2019 09 30 18 52 27 1.657e+05 5.477e+03 9.560e+02 2.190e+02 1.000e+01 2019 09 30 19 02 27 1.679e+05 5.960e+03 9.500e+02 2.260e+02 1.100e+01 2019 09 30 19 12 27 1.685e+05 5.684e+03 9.250e+02 2.010e+02 1.100e+01 2019 09 30 19 22 28 1.772e+05 6.013e+03 9.620e+02 2.350e+02 1.100e+01 2019 09 30 19 32 28 1.856e+05 6.861e+03 1.151e+03 2.510e+02 1.400e+01 2019 09 30 19 42 28 1.883e+05 7.544e+03 1.483e+03 3.900e+02 2.700e+01 2019 09 30 19 52 28 1.897e+05 7.730e+03 1.443e+03 3.710e+02 1.600e+01 2019 09 30 20 02 28 1.847e+05 7.423e+03 1.397e+03 3.270e+02 1.300e+01 2019 09 30 20 12 28 1.902e+05 7.332e+03 1.369e+03 3.220e+02 1.600e+01 2019 09 30 20 22 28 1.926e+05 7.158e+03 1.241e+03 3.040e+02 1.400e+01 2019 09 30 20 32 28 1.912e+05 6.785e+03 1.265e+03 2.910e+02 1.800e+01 2019 09 30 20 42 28 1.812e+05 6.362e+03 1.177e+03 2.550e+02 1.000e+01 2019 09 30 20 52 28 1.722e+05 5.505e+03 1.087e+03 2.640e+02 9.000e+00 2019 09 30 21 02 29 1.692e+05 5.476e+03 1.120e+03 2.560e+02 5.000e+00 2019 09 30 21 12 29 1.639e+05 4.899e+03 1.050e+03 1.950e+02 1.000e+00 2019 09 30 21 22 29 1.697e+05 5.303e+03 1.078e+03 2.490e+02 3.000e+00 2019 09 30 21 32 29 1.688e+05 5.258e+03 1.155e+03 2.460e+02 6.000e+00 2019 09 30 21 42 29 1.712e+05 5.445e+03 1.136e+03 2.420e+02 3.000e+00 2019 09 30 21 52 29 1.665e+05 4.947e+03 1.067e+03 2.240e+02 4.000e+00 2019 09 30 22 02 29 1.672e+05 5.028e+03 1.082e+03 2.240e+02 6.000e+00 2019 09 30 22 12 29 1.618e+05 4.626e+03 1.077e+03 2.440e+02 9.000e+00 2019 09 30 22 22 29 1.653e+05 4.787e+03 1.035e+03 2.040e+02 5.000e+00 2019 09 30 22 32 29 1.649e+05 4.826e+03 1.020e+03 2.170e+02 1.000e+00 2019 09 30 22 42 30 1.664e+05 4.855e+03 1.053e+03 2.380e+02 5.000e+00 2019 09 30 22 52 30 1.643e+05 4.683e+03 1.027e+03 2.010e+02 2.000e+00 2019 09 30 23 02 30 1.668e+05 4.929e+03 1.069e+03 2.310e+02 4.000e+00 2019 09 30 23 12 30 1.660e+05 4.738e+03 1.052e+03 2.210e+02 1.000e+00 2019 09 30 23 22 30 1.705e+05 5.028e+03 1.159e+03 2.790e+02 4.000e+00 2019 09 30 23 32 30 1.687e+05 4.976e+03 1.126e+03 2.490e+02 5.000e+00 2019 09 30 23 42 30 1.754e+05 5.258e+03 1.149e+03 2.450e+02 8.000e+00 2019 09 30 23 52 30 1.778e+05 5.263e+03 1.132e+03 2.420e+02 1.200e+01