# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2019 03 31 00 06 11 1.961e+05 1.532e+04 1.006e+03 1.520e+02 0.000e+00 2019 03 31 00 16 11 2.004e+05 1.577e+04 1.026e+03 1.560e+02 2.000e+00 2019 03 31 00 26 11 2.036e+05 1.611e+04 9.330e+02 1.360e+02 1.000e+00 2019 03 31 00 36 12 2.024e+05 1.649e+04 1.095e+03 1.570e+02 3.000e+00 2019 03 31 00 46 12 1.978e+05 1.656e+04 1.004e+03 1.300e+02 1.000e+00 2019 03 31 00 56 12 2.112e+05 1.872e+04 1.144e+03 1.400e+02 3.000e+00 2019 03 31 01 06 12 2.027e+05 1.757e+04 9.890e+02 1.430e+02 2.000e+00 2019 03 31 01 16 12 1.859e+05 1.518e+04 8.330e+02 1.080e+02 1.000e+00 2019 03 31 01 26 12 1.779e+05 1.405e+04 7.470e+02 1.140e+02 2.000e+00 2019 03 31 01 36 12 1.769e+05 1.384e+04 7.120e+02 8.400e+01 0.000e+00 2019 03 31 01 46 12 1.675e+05 1.226e+04 6.290e+02 1.010e+02 0.000e+00 2019 03 31 01 56 12 1.447e+05 9.808e+03 4.560e+02 5.500e+01 1.000e+00 2019 03 31 02 06 12 1.296e+05 8.155e+03 4.340e+02 6.600e+01 1.000e+00 2019 03 31 02 16 13 1.229e+05 7.582e+03 4.040e+02 5.700e+01 0.000e+00 2019 03 31 02 26 13 1.193e+05 7.210e+03 3.360e+02 3.900e+01 0.000e+00 2019 03 31 02 36 13 1.153e+05 6.937e+03 3.320e+02 4.200e+01 0.000e+00 2019 03 31 02 46 13 1.128e+05 6.680e+03 3.140e+02 4.600e+01 1.000e+00 2019 03 31 02 56 13 1.038e+05 6.311e+03 2.820e+02 3.500e+01 0.000e+00 2019 03 31 03 06 13 1.019e+05 5.941e+03 2.700e+02 3.400e+01 1.000e+00 2019 03 31 03 16 13 1.010e+05 6.017e+03 2.610e+02 2.900e+01 0.000e+00 2019 03 31 03 26 13 1.018e+05 5.765e+03 2.710e+02 3.600e+01 2.000e+00 2019 03 31 03 36 13 1.096e+05 6.397e+03 3.250e+02 3.300e+01 1.000e+00 2019 03 31 03 46 13 1.098e+05 6.453e+03 3.330e+02 3.800e+01 0.000e+00 2019 03 31 03 56 14 1.129e+05 6.952e+03 4.150e+02 6.300e+01 1.000e+00 2019 03 31 04 06 14 1.143e+05 7.038e+03 3.980e+02 5.400e+01 0.000e+00 2019 03 31 04 16 14 1.167e+05 7.247e+03 3.980e+02 6.500e+01 1.000e+00 2019 03 31 04 26 14 1.223e+05 7.620e+03 4.150e+02 5.000e+01 0.000e+00 2019 03 31 04 36 14 1.265e+05 7.947e+03 4.090e+02 5.600e+01 0.000e+00 2019 03 31 04 46 14 1.302e+05 7.947e+03 4.260e+02 6.800e+01 0.000e+00 2019 03 31 04 56 14 1.373e+05 8.784e+03 4.830e+02 7.700e+01 2.000e+00 2019 03 31 05 06 14 1.553e+05 1.182e+04 6.300e+02 9.600e+01 0.000e+00 2019 03 31 05 16 14 1.717e+05 1.414e+04 7.930e+02 1.210e+02 0.000e+00 2019 03 31 05 26 14 1.760e+05 1.656e+04 1.051e+03 1.410e+02 1.000e+00 2019 03 31 05 36 15 1.641e+05 1.458e+04 9.760e+02 1.500e+02 2.000e+00 2019 03 31 05 46 15 1.573e+05 1.368e+04 1.030e+03 1.540e+02 0.000e+00 2019 03 31 05 56 15 1.491e+05 1.233e+04 8.990e+02 1.600e+02 0.000e+00 2019 03 31 06 06 15 1.502e+05 1.185e+04 8.810e+02 1.770e+02 2.000e+00 2019 03 31 06 16 15 1.380e+05 9.964e+03 7.930e+02 1.880e+02 0.000e+00 2019 03 31 06 26 15 1.545e+05 1.131e+04 8.520e+02 2.040e+02 0.000e+00 2019 03 31 06 36 15 1.485e+05 1.031e+04 7.720e+02 1.880e+02 1.000e+00 2019 03 31 06 46 15 1.550e+05 1.167e+04 7.630e+02 1.770e+02 1.000e+00 2019 03 31 06 56 15 1.518e+05 1.161e+04 9.420e+02 2.010e+02 2.000e+00 2019 03 31 07 06 16 1.456e+05 1.067e+04 9.290e+02 2.320e+02 1.000e+00 2019 03 31 07 16 16 1.377e+05 9.796e+03 9.870e+02 2.340e+02 3.000e+00 2019 03 31 07 26 16 1.233e+05 8.215e+03 9.610e+02 2.670e+02 3.000e+00 2019 03 31 07 36 16 1.058e+05 6.887e+03 1.022e+03 3.100e+02 4.000e+00 2019 03 31 07 46 16 9.398e+04 5.826e+03 9.920e+02 2.760e+02 2.000e+00 2019 03 31 07 56 16 8.750e+04 5.507e+03 1.088e+03 3.570e+02 9.000e+00 2019 03 31 08 06 16 8.228e+04 5.102e+03 1.102e+03 3.610e+02 3.000e+00 2019 03 31 08 16 16 7.705e+04 4.869e+03 1.125e+03 3.700e+02 3.000e+00 2019 03 31 08 26 16 7.074e+04 4.615e+03 1.088e+03 3.550e+02 5.000e+00 2019 03 31 08 36 16 6.661e+04 4.662e+03 1.184e+03 3.870e+02 4.000e+00 2019 03 31 08 46 17 6.108e+04 4.683e+03 1.266e+03 4.230e+02 4.000e+00 2019 03 31 08 56 17 5.880e+04 4.711e+03 1.300e+03 4.440e+02 8.000e+00 2019 03 31 09 06 17 5.707e+04 4.669e+03 1.400e+03 4.570e+02 5.000e+00 2019 03 31 09 16 17 5.928e+04 4.897e+03 1.367e+03 4.640e+02 2.000e+00 2019 03 31 09 26 17 6.349e+04 5.152e+03 1.465e+03 4.640e+02 1.100e+01 2019 03 31 09 36 17 7.277e+04 5.442e+03 1.419e+03 4.380e+02 9.000e+00 2019 03 31 09 46 17 7.062e+04 5.458e+03 1.439e+03 4.260e+02 3.000e+00 2019 03 31 09 56 17 7.608e+04 5.674e+03 1.525e+03 4.840e+02 3.000e+00 2019 03 31 10 06 17 8.444e+04 5.994e+03 1.482e+03 4.540e+02 5.000e+00 2019 03 31 10 16 17 9.386e+04 6.494e+03 1.392e+03 4.240e+02 6.000e+00 2019 03 31 10 26 18 9.998e+04 6.689e+03 1.466e+03 4.780e+02 6.000e+00 2019 03 31 10 36 18 1.106e+05 7.328e+03 1.483e+03 4.960e+02 4.000e+00 2019 03 31 10 46 18 1.142e+05 7.360e+03 1.385e+03 4.600e+02 4.000e+00 2019 03 31 10 56 18 1.146e+05 7.057e+03 1.347e+03 4.300e+02 5.000e+00 2019 03 31 11 06 18 1.310e+05 7.845e+03 1.356e+03 4.620e+02 8.000e+00 2019 03 31 11 16 18 1.334e+05 7.988e+03 1.413e+03 4.620e+02 1.300e+01 2019 03 31 11 26 18 1.421e+05 7.885e+03 1.303e+03 4.450e+02 6.000e+00 2019 03 31 11 36 18 1.491e+05 8.231e+03 1.418e+03 4.830e+02 1.100e+01 2019 03 31 11 46 18 1.555e+05 8.289e+03 1.448e+03 4.800e+02 5.000e+00 2019 03 31 11 56 18 1.654e+05 8.890e+03 1.448e+03 4.700e+02 1.500e+01 2019 03 31 12 06 19 1.616e+05 8.598e+03 1.456e+03 4.790e+02 8.000e+00 2019 03 31 12 16 19 1.673e+05 9.113e+03 1.538e+03 5.150e+02 1.000e+01 2019 03 31 12 26 19 1.680e+05 9.186e+03 1.656e+03 5.400e+02 1.300e+01 2019 03 31 12 36 19 1.748e+05 9.395e+03 1.565e+03 5.400e+02 1.100e+01 2019 03 31 12 46 19 1.749e+05 1.005e+04 1.567e+03 5.460e+02 6.000e+00 2019 03 31 12 56 19 1.814e+05 1.000e+04 1.492e+03 4.910e+02 9.000e+00 2019 03 31 13 06 19 1.809e+05 1.012e+04 1.415e+03 4.480e+02 8.000e+00 2019 03 31 13 16 19 1.812e+05 1.051e+04 1.488e+03 4.960e+02 9.000e+00 2019 03 31 13 26 19 1.815e+05 1.050e+04 1.344e+03 4.550e+02 7.000e+00 2019 03 31 13 36 19 1.792e+05 1.034e+04 1.363e+03 4.190e+02 1.400e+01 2019 03 31 13 46 20 1.784e+05 1.046e+04 1.330e+03 4.200e+02 6.000e+00 2019 03 31 13 56 20 1.827e+05 1.094e+04 1.381e+03 4.530e+02 1.600e+01 2019 03 31 14 06 20 1.645e+05 9.859e+03 1.055e+03 3.400e+02 8.000e+00 2019 03 31 14 16 20 1.315e+05 7.767e+03 8.750e+02 2.890e+02 4.000e+00 2019 03 31 14 26 20 1.337e+05 7.916e+03 8.300e+02 2.590e+02 5.000e+00 2019 03 31 14 36 20 1.240e+05 7.295e+03 7.190e+02 2.090e+02 5.000e+00 2019 03 31 14 46 20 1.192e+05 7.048e+03 7.430e+02 2.400e+02 3.000e+00 2019 03 31 14 56 20 1.183e+05 6.854e+03 7.970e+02 2.400e+02 6.000e+00 2019 03 31 15 06 20 1.207e+05 6.996e+03 6.970e+02 2.210e+02 2.000e+00 2019 03 31 15 16 20 1.206e+05 6.953e+03 7.800e+02 2.240e+02 4.000e+00 2019 03 31 15 26 21 1.236e+05 7.211e+03 7.900e+02 2.390e+02 4.000e+00 2019 03 31 15 36 21 1.148e+05 6.751e+03 7.660e+02 2.470e+02 1.000e+00 2019 03 31 15 46 21 1.076e+05 6.345e+03 7.560e+02 2.320e+02 5.000e+00 2019 03 31 15 56 21 9.035e+04 5.443e+03 5.640e+02 1.710e+02 6.000e+00 2019 03 31 16 06 21 7.878e+04 4.982e+03 5.310e+02 1.400e+02 9.000e+00 2019 03 31 16 16 21 7.081e+04 4.458e+03 4.820e+02 1.320e+02 1.000e+00 2019 03 31 16 26 21 9.961e+04 6.131e+03 6.540e+02 1.870e+02 3.000e+00 2019 03 31 16 36 21 8.280e+04 5.457e+03 5.580e+02 1.390e+02 9.000e+00 2019 03 31 16 46 21 8.353e+04 5.193e+03 5.490e+02 1.800e+02 5.000e+00 2019 03 31 16 56 21 8.114e+04 5.475e+03 5.530e+02 1.660e+02 4.000e+00 2019 03 31 17 06 22 1.203e+05 8.242e+03 1.128e+03 2.950e+02 1.000e+01 2019 03 31 17 16 22 1.219e+05 9.730e+03 1.370e+03 3.250e+02 9.000e+00 2019 03 31 17 26 22 1.144e+05 7.768e+03 9.610e+02 2.540e+02 4.000e+00 2019 03 31 17 36 22 1.219e+05 8.596e+03 9.540e+02 2.250e+02 6.000e+00 2019 03 31 17 46 22 1.184e+05 7.362e+03 1.234e+03 3.990e+02 1.200e+01 2019 03 31 17 56 22 1.270e+05 7.936e+03 1.434e+03 4.970e+02 1.300e+01 2019 03 31 18 06 22 1.296e+05 7.819e+03 1.309e+03 4.260e+02 5.000e+00 2019 03 31 18 16 22 1.401e+05 8.474e+03 1.311e+03 4.290e+02 1.100e+01 2019 03 31 18 26 22 1.409e+05 8.901e+03 1.301e+03 4.310e+02 9.000e+00 2019 03 31 18 36 22 1.478e+05 9.873e+03 1.266e+03 4.290e+02 1.100e+01 2019 03 31 18 46 23 1.553e+05 1.090e+04 1.278e+03 4.520e+02 1.200e+01 2019 03 31 18 56 23 1.538e+05 1.074e+04 1.314e+03 4.120e+02 5.000e+00 2019 03 31 19 06 23 1.537e+05 1.057e+04 1.233e+03 3.490e+02 7.000e+00 2019 03 31 19 16 23 1.584e+05 1.106e+04 1.240e+03 3.630e+02 7.000e+00 2019 03 31 19 26 23 1.573e+05 1.103e+04 1.333e+03 4.050e+02 9.000e+00 2019 03 31 19 36 23 1.616e+05 1.129e+04 1.254e+03 3.940e+02 7.000e+00 2019 03 31 19 46 23 1.672e+05 1.214e+04 1.392e+03 4.230e+02 6.000e+00 2019 03 31 19 56 23 1.670e+05 1.185e+04 1.299e+03 3.880e+02 3.000e+00 2019 03 31 20 06 23 1.535e+05 1.105e+04 1.278e+03 3.930e+02 8.000e+00 2019 03 31 20 16 23 3.010e+04 2.269e+03 3.310e+02 9.800e+01 5.000e+00 2019 03 31 20 26 24 1.078e+04 8.870e+02 1.530e+02 4.800e+01 2.000e+00 2019 03 31 20 36 24 9.345e+03 8.570e+02 1.630e+02 5.100e+01 1.000e+00 2019 03 31 20 46 24 7.941e+03 6.970e+02 1.340e+02 3.500e+01 0.000e+00 2019 03 31 20 56 24 7.759e+03 7.010e+02 1.270e+02 3.200e+01 3.000e+00 2019 03 31 21 06 24 7.786e+03 7.300e+02 1.000e+02 3.300e+01 0.000e+00 2019 03 31 21 16 24 6.868e+03 5.970e+02 9.700e+01 2.800e+01 2.000e+00 2019 03 31 21 26 24 6.824e+03 6.180e+02 1.060e+02 4.000e+01 1.000e+00 2019 03 31 21 36 24 6.694e+03 5.590e+02 7.900e+01 2.200e+01 3.000e+00 2019 03 31 21 46 24 6.505e+03 5.480e+02 9.800e+01 3.100e+01 4.000e+00 2019 03 31 21 56 24 6.422e+03 5.530e+02 9.100e+01 3.200e+01 1.000e+00 2019 03 31 22 06 25 7.132e+03 6.290e+02 1.270e+02 4.000e+01 2.000e+00 2019 03 31 22 16 25 6.793e+03 5.230e+02 8.700e+01 2.900e+01 1.000e+00 2019 03 31 22 26 25 6.395e+03 5.500e+02 1.140e+02 3.000e+01 1.000e+00 2019 03 31 22 36 25 6.333e+03 5.230e+02 9.200e+01 2.500e+01 3.000e+00 2019 03 31 22 46 25 7.593e+03 5.890e+02 1.200e+02 2.800e+01 3.000e+00 2019 03 31 22 56 25 6.752e+03 5.680e+02 9.500e+01 2.900e+01 1.000e+00 2019 03 31 23 06 25 6.649e+03 6.050e+02 1.040e+02 3.400e+01 2.000e+00 2019 03 31 23 16 25 6.684e+03 5.770e+02 1.120e+02 3.000e+01 1.000e+00 2019 03 31 23 26 25 6.654e+03 5.440e+02 8.000e+01 3.000e+01 0.000e+00 2019 03 31 23 36 25 6.851e+03 5.440e+02 9.200e+01 2.600e+01 3.000e+00 2019 03 31 23 46 26 7.032e+03 5.540e+02 8.700e+01 2.800e+01 0.000e+00 2019 03 31 23 56 26 6.947e+03 5.460e+02 9.100e+01 3.000e+01 3.000e+00