# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2019 03 13 00 01 39 1.311e+05 8.865e+03 1.311e+03 4.180e+02 1.000e+01 2019 03 13 00 11 39 1.252e+05 8.547e+03 1.241e+03 3.780e+02 1.300e+01 2019 03 13 00 21 39 1.242e+05 8.435e+03 1.210e+03 3.530e+02 8.000e+00 2019 03 13 00 31 39 1.265e+05 8.577e+03 1.283e+03 4.110e+02 9.000e+00 2019 03 13 00 41 40 1.377e+05 9.924e+03 1.449e+03 4.390e+02 1.800e+01 2019 03 13 00 51 40 1.392e+05 1.014e+04 1.388e+03 4.640e+02 1.600e+01 2019 03 13 01 01 40 1.403e+05 1.048e+04 1.514e+03 4.780e+02 1.400e+01 2019 03 13 01 11 40 1.397e+05 1.056e+04 1.474e+03 4.760e+02 1.900e+01 2019 03 13 01 21 40 1.380e+05 1.051e+04 1.467e+03 4.660e+02 8.000e+00 2019 03 13 01 31 40 1.422e+05 1.106e+04 1.573e+03 5.160e+02 1.100e+01 2019 03 13 01 41 40 1.398e+05 1.055e+04 1.533e+03 4.810e+02 1.100e+01 2019 03 13 01 51 40 1.408e+05 1.075e+04 1.481e+03 4.560e+02 1.300e+01 2019 03 13 02 01 40 1.460e+05 1.122e+04 1.524e+03 4.900e+02 1.200e+01 2019 03 13 02 11 41 1.499e+05 1.190e+04 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2019 03 13 14 11 48 3.793e+04 5.512e+03 1.438e+03 4.330e+02 8.000e+00 2019 03 13 14 21 48 3.289e+04 4.883e+03 1.291e+03 3.930e+02 1.200e+01 2019 03 13 14 31 48 3.400e+04 5.294e+03 1.439e+03 4.220e+02 1.700e+01 2019 03 13 14 41 48 3.099e+04 4.246e+03 1.046e+03 3.050e+02 4.000e+00 2019 03 13 14 51 48 2.970e+04 4.058e+03 1.074e+03 3.190e+02 1.300e+01 2019 03 13 15 01 48 2.788e+04 3.722e+03 9.310e+02 2.560e+02 6.000e+00 2019 03 13 15 11 48 2.774e+04 3.874e+03 1.035e+03 3.380e+02 7.000e+00 2019 03 13 15 21 48 2.552e+04 3.825e+03 1.020e+03 3.000e+02 1.000e+01 2019 03 13 15 31 49 2.462e+04 3.831e+03 9.960e+02 3.330e+02 5.000e+00 2019 03 13 15 41 49 2.578e+04 4.894e+03 1.406e+03 4.320e+02 1.200e+01 2019 03 13 15 51 49 2.405e+04 4.405e+03 1.328e+03 4.360e+02 1.500e+01 2019 03 13 16 01 49 2.439e+04 4.247e+03 1.216e+03 3.720e+02 1.700e+01 2019 03 13 16 11 49 2.145e+04 3.790e+03 1.095e+03 3.450e+02 1.200e+01 2019 03 13 16 21 49 2.043e+04 3.647e+03 1.057e+03 3.470e+02 1.500e+01 2019 03 13 16 31 49 2.130e+04 4.032e+03 1.229e+03 4.620e+02 2.400e+01 2019 03 13 16 41 49 2.178e+04 4.290e+03 1.289e+03 4.650e+02 1.700e+01 2019 03 13 16 51 49 2.013e+04 4.047e+03 1.160e+03 3.760e+02 9.000e+00 2019 03 13 17 01 49 2.178e+04 3.949e+03 1.200e+03 4.100e+02 1.400e+01 2019 03 13 17 11 50 1.626e+04 2.444e+03 7.090e+02 2.670e+02 1.600e+01 2019 03 13 17 21 50 1.058e+04 1.314e+03 3.410e+02 1.400e+02 1.400e+01 2019 03 13 17 31 50 1.034e+04 1.219e+03 2.950e+02 1.290e+02 1.400e+01 2019 03 13 17 41 50 9.796e+03 1.180e+03 2.840e+02 1.160e+02 9.000e+00 2019 03 13 17 51 50 9.397e+03 1.129e+03 2.840e+02 1.070e+02 7.000e+00 2019 03 13 18 01 50 9.022e+03 1.128e+03 3.040e+02 1.210e+02 8.000e+00 2019 03 13 18 11 50 7.927e+03 1.128e+03 2.870e+02 1.100e+02 9.000e+00 2019 03 13 18 21 50 8.410e+03 1.156e+03 2.790e+02 1.050e+02 1.200e+01 2019 03 13 18 31 50 8.327e+03 1.172e+03 2.740e+02 9.900e+01 9.000e+00 2019 03 13 18 41 50 7.776e+03 1.094e+03 2.700e+02 1.030e+02 1.200e+01 2019 03 13 18 51 51 8.272e+03 1.115e+03 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