# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 05 13 00 05 45 9.066e+04 1.020e+04 1.739e+03 5.230e+02 5.000e+00 2018 05 13 00 15 45 7.791e+04 6.958e+03 1.356e+03 4.800e+02 1.000e+01 2018 05 13 00 25 45 6.230e+04 5.127e+03 1.216e+03 4.400e+02 8.000e+00 2018 05 13 00 35 45 5.936e+04 4.219e+03 1.014e+03 3.450e+02 8.000e+00 2018 05 13 00 45 45 6.148e+04 4.427e+03 8.950e+02 3.280e+02 7.000e+00 2018 05 13 00 55 45 5.075e+04 3.493e+03 8.720e+02 3.200e+02 4.000e+00 2018 05 13 01 05 45 4.481e+04 3.067e+03 8.130e+02 2.940e+02 4.000e+00 2018 05 13 01 15 45 4.832e+04 3.299e+03 9.100e+02 3.330e+02 5.000e+00 2018 05 13 01 25 45 4.447e+04 3.615e+03 9.180e+02 3.080e+02 4.000e+00 2018 05 13 01 35 45 4.310e+04 2.824e+03 7.340e+02 2.710e+02 4.000e+00 2018 05 13 01 45 46 4.358e+04 2.861e+03 7.500e+02 2.830e+02 3.000e+00 2018 05 13 01 55 46 4.158e+04 2.789e+03 6.880e+02 2.510e+02 7.000e+00 2018 05 13 02 05 46 4.939e+04 3.883e+03 9.310e+02 2.950e+02 5.000e+00 2018 05 13 02 15 46 4.788e+04 3.299e+03 7.880e+02 2.900e+02 5.000e+00 2018 05 13 02 25 46 4.759e+04 3.289e+03 8.470e+02 3.070e+02 3.000e+00 2018 05 13 02 35 46 5.158e+04 3.862e+03 9.590e+02 3.130e+02 6.000e+00 2018 05 13 02 45 46 5.064e+04 3.637e+03 9.290e+02 3.210e+02 5.000e+00 2018 05 13 02 55 46 5.055e+04 3.608e+03 9.150e+02 3.060e+02 5.000e+00 2018 05 13 03 05 46 4.783e+04 3.198e+03 8.280e+02 3.080e+02 5.000e+00 2018 05 13 03 15 46 4.688e+04 3.118e+03 7.830e+02 2.720e+02 2.000e+00 2018 05 13 03 25 47 4.799e+04 3.277e+03 8.280e+02 2.820e+02 1.000e+00 2018 05 13 03 35 47 4.681e+04 3.119e+03 8.100e+02 2.940e+02 4.000e+00 2018 05 13 03 45 47 4.350e+04 2.799e+03 7.400e+02 2.750e+02 4.000e+00 2018 05 13 03 55 47 4.552e+04 2.826e+03 6.940e+02 2.700e+02 2.000e+00 2018 05 13 04 05 47 4.346e+04 2.872e+03 6.940e+02 2.500e+02 3.000e+00 2018 05 13 04 15 47 4.251e+04 2.899e+03 7.560e+02 2.970e+02 4.000e+00 2018 05 13 04 25 47 4.413e+04 2.927e+03 6.990e+02 2.470e+02 2.000e+00 2018 05 13 04 35 47 4.368e+04 2.978e+03 7.770e+02 2.840e+02 2.000e+00 2018 05 13 04 45 47 4.520e+04 2.927e+03 7.630e+02 2.880e+02 1.000e+00 2018 05 13 04 55 47 4.337e+04 2.945e+03 7.820e+02 2.760e+02 7.000e+00 2018 05 13 05 05 48 4.308e+04 3.096e+03 8.950e+02 3.410e+02 5.000e+00 2018 05 13 05 15 48 4.783e+04 3.009e+03 8.260e+02 3.110e+02 1.000e+00 2018 05 13 05 25 48 5.335e+04 3.327e+03 8.630e+02 2.990e+02 0.000e+00 2018 05 13 05 35 48 4.796e+04 2.894e+03 7.500e+02 2.800e+02 2.000e+00 2018 05 13 05 45 48 4.718e+04 2.873e+03 7.050e+02 2.840e+02 3.000e+00 2018 05 13 05 55 48 4.323e+04 2.635e+03 7.550e+02 2.660e+02 1.000e+00 2018 05 13 06 05 48 4.688e+04 2.965e+03 8.400e+02 3.290e+02 3.000e+00 2018 05 13 06 15 48 5.604e+04 3.734e+03 1.054e+03 4.140e+02 2.000e+00 2018 05 13 06 25 48 4.909e+04 3.226e+03 8.950e+02 3.500e+02 2.000e+00 2018 05 13 06 35 48 4.775e+04 3.430e+03 9.860e+02 3.390e+02 5.000e+00 2018 05 13 06 45 49 3.960e+04 3.008e+03 8.490e+02 2.910e+02 3.000e+00 2018 05 13 06 55 49 4.367e+04 3.439e+03 1.035e+03 4.180e+02 2.000e+00 2018 05 13 07 05 49 4.091e+04 3.425e+03 1.052e+03 4.110e+02 8.000e+00 2018 05 13 07 15 49 4.081e+04 3.509e+03 1.019e+03 3.810e+02 4.000e+00 2018 05 13 07 25 49 4.070e+04 3.614e+03 1.082e+03 3.790e+02 4.000e+00 2018 05 13 07 35 49 4.078e+04 3.615e+03 1.120e+03 4.020e+02 3.000e+00 2018 05 13 07 45 49 3.709e+04 3.001e+03 9.640e+02 4.000e+02 4.000e+00 2018 05 13 07 55 49 4.191e+04 4.372e+03 1.373e+03 4.870e+02 6.000e+00 2018 05 13 08 05 49 3.943e+04 3.539e+03 1.060e+03 4.030e+02 7.000e+00 2018 05 13 08 15 49 3.954e+04 3.337e+03 9.700e+02 3.790e+02 7.000e+00 2018 05 13 08 25 50 4.188e+04 3.445e+03 1.083e+03 4.190e+02 6.000e+00 2018 05 13 08 35 50 4.042e+04 3.596e+03 1.082e+03 4.070e+02 9.000e+00 2018 05 13 08 45 50 3.894e+04 3.804e+03 1.167e+03 4.440e+02 1.000e+01 2018 05 13 08 55 50 3.693e+04 3.259e+03 9.950e+02 3.820e+02 4.000e+00 2018 05 13 09 05 50 3.750e+04 3.369e+03 1.054e+03 4.140e+02 7.000e+00 2018 05 13 09 15 50 4.088e+04 3.783e+03 1.177e+03 4.510e+02 4.000e+00 2018 05 13 09 25 50 4.283e+04 4.388e+03 1.345e+03 4.980e+02 9.000e+00 2018 05 13 09 35 50 4.498e+04 5.229e+03 1.525e+03 5.460e+02 9.000e+00 2018 05 13 09 45 50 4.157e+04 5.075e+03 1.514e+03 5.280e+02 5.000e+00 2018 05 13 09 55 50 4.376e+04 5.605e+03 1.666e+03 5.830e+02 1.000e+01 2018 05 13 10 05 51 4.695e+04 6.152e+03 1.779e+03 5.500e+02 5.000e+00 2018 05 13 10 15 51 5.193e+04 7.208e+03 2.172e+03 7.250e+02 8.000e+00 2018 05 13 10 25 51 4.765e+04 6.017e+03 1.789e+03 6.210e+02 7.000e+00 2018 05 13 10 35 51 4.336e+04 4.893e+03 1.454e+03 5.090e+02 1.000e+01 2018 05 13 10 45 51 4.625e+04 5.502e+03 1.661e+03 5.880e+02 9.000e+00 2018 05 13 10 55 51 4.607e+04 5.803e+03 1.761e+03 6.350e+02 6.000e+00 2018 05 13 11 05 51 4.294e+04 5.747e+03 1.764e+03 6.230e+02 7.000e+00 2018 05 13 11 15 51 4.308e+04 5.894e+03 1.814e+03 6.110e+02 3.000e+00 2018 05 13 11 25 51 4.164e+04 5.843e+03 1.795e+03 6.140e+02 8.000e+00 2018 05 13 11 35 51 4.109e+04 5.497e+03 1.680e+03 5.510e+02 4.000e+00 2018 05 13 11 45 52 4.548e+04 6.647e+03 1.962e+03 6.120e+02 6.000e+00 2018 05 13 11 55 52 3.994e+04 5.369e+03 1.617e+03 5.540e+02 8.000e+00 2018 05 13 12 05 52 4.389e+04 6.678e+03 1.994e+03 5.790e+02 4.000e+00 2018 05 13 12 15 52 4.412e+04 6.709e+03 2.034e+03 6.290e+02 8.000e+00 2018 05 13 12 25 52 4.207e+04 6.364e+03 1.933e+03 5.960e+02 1.400e+01 2018 05 13 12 35 52 3.859e+04 5.229e+03 1.647e+03 5.240e+02 3.000e+00 2018 05 13 12 45 52 4.173e+04 5.379e+03 1.626e+03 5.600e+02 5.000e+00 2018 05 13 12 55 52 3.830e+04 4.571e+03 1.329e+03 4.700e+02 8.000e+00 2018 05 13 13 05 52 3.528e+04 4.160e+03 1.299e+03 4.680e+02 5.000e+00 2018 05 13 13 15 52 3.229e+04 3.390e+03 1.057e+03 3.820e+02 4.000e+00 2018 05 13 13 25 53 3.297e+04 4.416e+03 1.399e+03 4.720e+02 3.000e+00 2018 05 13 13 35 53 3.281e+04 3.740e+03 1.195e+03 4.230e+02 6.000e+00 2018 05 13 13 45 53 3.199e+04 3.297e+03 1.096e+03 3.970e+02 3.000e+00 2018 05 13 13 55 53 3.456e+04 2.987e+03 1.004e+03 4.050e+02 7.000e+00 2018 05 13 14 05 53 3.438e+04 2.986e+03 9.850e+02 4.040e+02 5.000e+00 2018 05 13 14 15 53 3.799e+04 3.331e+03 9.940e+02 3.890e+02 4.000e+00 2018 05 13 14 25 53 3.299e+04 3.226e+03 1.051e+03 3.470e+02 7.000e+00 2018 05 13 14 35 53 2.989e+04 2.899e+03 9.510e+02 3.280e+02 4.000e+00 2018 05 13 14 45 53 3.255e+04 3.142e+03 8.960e+02 3.220e+02 3.000e+00 2018 05 13 14 55 53 3.805e+04 3.810e+03 1.074e+03 3.980e+02 6.000e+00 2018 05 13 15 05 54 3.900e+04 3.731e+03 1.119e+03 4.090e+02 1.000e+00 2018 05 13 15 15 54 4.036e+04 4.147e+03 1.261e+03 4.200e+02 4.000e+00 2018 05 13 15 25 54 4.666e+04 4.769e+03 1.377e+03 4.540e+02 1.000e+00 2018 05 13 15 35 54 4.402e+04 4.658e+03 1.460e+03 4.650e+02 1.000e+00 2018 05 13 15 45 54 2.848e+04 2.832e+03 9.870e+02 3.340e+02 0.000e+00 2018 05 13 15 55 54 2.358e+04 2.412e+03 8.280e+02 2.610e+02 2.000e+00 2018 05 13 16 05 54 2.297e+04 2.179e+03 7.100e+02 2.040e+02 3.000e+00 2018 05 13 16 15 54 2.363e+04 1.977e+03 6.100e+02 1.730e+02 1.000e+00 2018 05 13 16 25 54 2.439e+04 2.231e+03 6.440e+02 1.530e+02 1.000e+00 2018 05 13 16 35 54 2.030e+04 1.742e+03 4.540e+02 1.070e+02 1.000e+00 2018 05 13 16 45 55 1.646e+04 1.379e+03 3.640e+02 9.200e+01 0.000e+00 2018 05 13 16 55 55 1.979e+04 1.585e+03 3.800e+02 9.200e+01 0.000e+00 2018 05 13 17 05 55 1.760e+04 1.450e+03 3.470e+02 8.500e+01 0.000e+00 2018 05 13 17 15 55 1.681e+04 1.393e+03 3.180e+02 7.900e+01 0.000e+00 2018 05 13 17 25 55 1.624e+04 1.392e+03 3.630e+02 9.700e+01 1.000e+00 2018 05 13 17 35 55 1.548e+04 1.244e+03 2.980e+02 8.000e+01 0.000e+00 2018 05 13 17 45 55 1.808e+04 1.300e+03 2.930e+02 7.200e+01 2.000e+00 2018 05 13 17 55 55 1.640e+04 1.284e+03 2.680e+02 7.200e+01 0.000e+00 2018 05 13 18 05 55 2.064e+04 1.532e+03 3.290e+02 8.400e+01 1.000e+00 2018 05 13 18 15 55 1.859e+04 1.426e+03 3.030e+02 7.300e+01 0.000e+00 2018 05 13 18 25 56 3.245e+04 2.198e+03 3.240e+02 5.900e+01 0.000e+00 2018 05 13 18 35 56 3.070e+04 1.541e+03 2.260e+02 4.900e+01 0.000e+00 2018 05 13 18 45 56 3.360e+04 1.681e+03 2.380e+02 6.000e+01 1.000e+00 2018 05 13 18 55 56 3.632e+04 1.894e+03 2.470e+02 4.400e+01 0.000e+00 2018 05 13 19 05 56 3.952e+04 1.765e+03 2.230e+02 5.200e+01 0.000e+00 2018 05 13 19 15 56 3.640e+04 1.667e+03 2.070e+02 3.300e+01 1.000e+00 2018 05 13 19 25 56 2.565e+04 1.215e+03 1.580e+02 3.700e+01 1.000e+00 2018 05 13 19 35 56 1.705e+04 1.024e+03 1.530e+02 4.200e+01 0.000e+00 2018 05 13 19 45 56 1.741e+04 1.011e+03 1.510e+02 3.300e+01 0.000e+00 2018 05 13 19 55 56 1.582e+04 8.590e+02 1.100e+02 1.800e+01 0.000e+00 2018 05 13 20 05 57 2.337e+04 1.067e+03 1.100e+02 2.100e+01 0.000e+00 2018 05 13 20 15 57 2.707e+04 1.269e+03 1.270e+02 3.000e+01 0.000e+00 2018 05 13 20 25 57 1.235e+04 7.510e+02 1.180e+02 2.800e+01 1.000e+00 2018 05 13 20 35 57 6.957e+03 5.230e+02 9.100e+01 2.000e+01 0.000e+00 2018 05 13 20 45 57 8.090e+03 5.150e+02 8.500e+01 1.800e+01 0.000e+00 2018 05 13 20 55 57 8.709e+03 5.640e+02 8.900e+01 1.700e+01 0.000e+00 2018 05 13 21 05 57 8.888e+03 5.640e+02 9.000e+01 2.900e+01 2.000e+00 2018 05 13 21 15 57 1.229e+04 6.890e+02 1.170e+02 2.700e+01 1.000e+00 2018 05 13 21 25 57 1.858e+04 8.720e+02 9.400e+01 2.200e+01 1.000e+00 2018 05 13 21 35 57 3.031e+04 1.280e+03 1.330e+02 3.200e+01 1.000e+00 2018 05 13 21 45 58 3.571e+04 1.549e+03 1.480e+02 3.100e+01 0.000e+00 2018 05 13 21 55 58 4.238e+04 1.820e+03 1.560e+02 2.900e+01 1.000e+00 2018 05 13 22 05 58 4.807e+04 2.091e+03 1.690e+02 2.800e+01 0.000e+00 2018 05 13 22 15 58 5.449e+04 2.491e+03 2.280e+02 5.200e+01 1.000e+00 2018 05 13 22 25 58 5.793e+04 2.800e+03 2.160e+02 3.200e+01 0.000e+00 2018 05 13 22 35 58 6.752e+04 3.406e+03 2.550e+02 5.500e+01 0.000e+00 2018 05 13 22 45 58 6.163e+04 3.119e+03 2.110e+02 3.900e+01 1.000e+00 2018 05 13 22 55 58 6.735e+04 3.292e+03 2.260e+02 5.000e+01 2.000e+00 2018 05 13 23 05 58 6.388e+04 3.112e+03 2.030e+02 4.000e+01 0.000e+00 2018 05 13 23 15 58 6.138e+04 3.264e+03 2.240e+02 4.300e+01 1.000e+00 2018 05 13 23 25 59 8.882e+04 5.993e+03 6.850e+02 1.730e+02 3.000e+00 2018 05 13 23 35 59 1.363e+05 1.084e+04 9.390e+02 2.260e+02 1.100e+01 2018 05 13 23 45 59 9.123e+04 5.316e+03 4.320e+02 7.900e+01 1.000e+00 2018 05 13 23 55 59 1.032e+05 5.992e+03 4.160e+02 8.000e+01 0.000e+00