# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 05 11 00 05 16 6.311e+04 5.644e+03 8.950e+02 2.490e+02 8.000e+00 2018 05 11 00 15 16 4.852e+04 4.057e+03 6.610e+02 2.000e+02 7.000e+00 2018 05 11 00 25 16 5.545e+04 4.680e+03 7.040e+02 2.130e+02 1.000e+01 2018 05 11 00 35 16 5.037e+04 4.104e+03 5.910e+02 1.900e+02 8.000e+00 2018 05 11 00 45 16 4.571e+04 3.689e+03 4.850e+02 1.600e+02 3.000e+00 2018 05 11 00 55 16 4.055e+04 3.297e+03 5.030e+02 1.680e+02 4.000e+00 2018 05 11 01 05 16 3.802e+04 2.991e+03 4.510e+02 1.600e+02 5.000e+00 2018 05 11 01 15 16 3.737e+04 3.031e+03 4.730e+02 1.440e+02 5.000e+00 2018 05 11 01 25 17 3.933e+04 3.259e+03 5.250e+02 1.670e+02 8.000e+00 2018 05 11 01 35 17 3.883e+04 3.152e+03 4.310e+02 1.300e+02 3.000e+00 2018 05 11 01 45 17 3.997e+04 2.971e+03 4.710e+02 1.590e+02 5.000e+00 2018 05 11 01 55 17 4.185e+04 3.249e+03 4.650e+02 1.410e+02 3.000e+00 2018 05 11 02 05 17 4.097e+04 3.193e+03 4.560e+02 1.530e+02 5.000e+00 2018 05 11 02 15 17 4.040e+04 3.146e+03 4.830e+02 1.660e+02 4.000e+00 2018 05 11 02 25 17 4.176e+04 3.171e+03 4.380e+02 1.310e+02 1.000e+00 2018 05 11 02 35 17 4.192e+04 3.118e+03 4.580e+02 1.670e+02 6.000e+00 2018 05 11 02 45 17 4.196e+04 3.019e+03 4.100e+02 1.480e+02 9.000e+00 2018 05 11 02 55 17 4.020e+04 2.864e+03 4.050e+02 1.460e+02 1.000e+00 2018 05 11 03 05 18 3.762e+04 2.580e+03 3.550e+02 1.330e+02 6.000e+00 2018 05 11 03 15 18 3.673e+04 2.631e+03 3.790e+02 1.510e+02 2.000e+00 2018 05 11 03 25 18 3.804e+04 2.644e+03 3.980e+02 1.490e+02 4.000e+00 2018 05 11 03 35 18 3.919e+04 2.746e+03 4.190e+02 1.470e+02 5.000e+00 2018 05 11 03 45 18 4.125e+04 3.165e+03 4.510e+02 1.290e+02 3.000e+00 2018 05 11 03 55 18 4.230e+04 3.320e+03 4.480e+02 1.410e+02 5.000e+00 2018 05 11 04 05 18 4.182e+04 3.167e+03 4.660e+02 1.530e+02 4.000e+00 2018 05 11 04 15 18 4.186e+04 3.072e+03 3.960e+02 1.460e+02 4.000e+00 2018 05 11 04 25 18 4.131e+04 2.756e+03 3.680e+02 1.280e+02 2.000e+00 2018 05 11 04 35 18 4.190e+04 2.883e+03 3.950e+02 1.290e+02 4.000e+00 2018 05 11 04 45 19 4.439e+04 3.052e+03 4.110e+02 1.580e+02 5.000e+00 2018 05 11 04 55 19 4.550e+04 3.181e+03 4.440e+02 1.660e+02 3.000e+00 2018 05 11 05 05 19 4.473e+04 3.096e+03 4.200e+02 1.640e+02 3.000e+00 2018 05 11 05 15 19 4.919e+04 3.571e+03 5.020e+02 1.680e+02 3.000e+00 2018 05 11 05 25 19 5.077e+04 3.490e+03 4.460e+02 1.630e+02 1.100e+01 2018 05 11 05 35 19 5.251e+04 3.817e+03 5.030e+02 1.750e+02 6.000e+00 2018 05 11 05 45 19 5.646e+04 4.323e+03 5.700e+02 1.870e+02 7.000e+00 2018 05 11 05 55 19 5.876e+04 4.691e+03 6.120e+02 1.750e+02 4.000e+00 2018 05 11 06 05 19 5.640e+04 3.846e+03 5.310e+02 1.950e+02 8.000e+00 2018 05 11 06 15 19 5.761e+04 3.821e+03 5.190e+02 2.050e+02 6.000e+00 2018 05 11 06 25 20 5.684e+04 3.986e+03 5.590e+02 2.010e+02 7.000e+00 2018 05 11 06 35 20 5.583e+04 3.797e+03 5.240e+02 1.930e+02 3.000e+00 2018 05 11 06 45 20 5.658e+04 3.887e+03 5.020e+02 1.820e+02 5.000e+00 2018 05 11 06 55 20 5.581e+04 3.913e+03 5.740e+02 2.170e+02 7.000e+00 2018 05 11 07 05 20 5.629e+04 3.856e+03 5.300e+02 2.030e+02 6.000e+00 2018 05 11 07 15 20 6.170e+04 4.996e+03 6.550e+02 2.160e+02 5.000e+00 2018 05 11 07 25 20 6.391e+04 5.451e+03 7.190e+02 2.410e+02 8.000e+00 2018 05 11 07 35 20 7.014e+04 5.847e+03 6.840e+02 2.180e+02 9.000e+00 2018 05 11 07 45 20 8.240e+04 6.785e+03 7.600e+02 2.510e+02 9.000e+00 2018 05 11 07 55 20 8.948e+04 6.912e+03 7.710e+02 2.660e+02 3.000e+00 2018 05 11 08 05 21 8.054e+04 5.715e+03 7.130e+02 2.650e+02 8.000e+00 2018 05 11 08 15 21 6.262e+04 4.380e+03 6.620e+02 2.530e+02 5.000e+00 2018 05 11 08 25 21 5.256e+04 4.010e+03 6.760e+02 2.380e+02 8.000e+00 2018 05 11 08 35 21 5.608e+04 4.388e+03 7.360e+02 2.620e+02 6.000e+00 2018 05 11 08 45 21 5.573e+04 4.290e+03 7.120e+02 2.660e+02 1.200e+01 2018 05 11 08 55 21 5.416e+04 4.108e+03 7.370e+02 2.910e+02 9.000e+00 2018 05 11 09 05 21 5.487e+04 4.525e+03 8.220e+02 2.740e+02 7.000e+00 2018 05 11 09 15 21 5.094e+04 3.910e+03 7.360e+02 2.700e+02 4.000e+00 2018 05 11 09 25 21 5.830e+04 4.366e+03 7.540e+02 2.850e+02 1.200e+01 2018 05 11 09 35 21 9.868e+04 7.724e+03 1.255e+03 3.560e+02 1.200e+01 2018 05 11 09 45 22 7.559e+04 7.441e+03 1.393e+03 3.610e+02 1.300e+01 2018 05 11 09 55 22 8.417e+04 6.930e+03 1.084e+03 3.560e+02 1.700e+01 2018 05 11 10 05 22 1.061e+05 9.184e+03 1.312e+03 3.680e+02 1.000e+01 2018 05 11 10 15 22 1.108e+05 9.613e+03 1.256e+03 3.660e+02 1.300e+01 2018 05 11 10 25 22 1.229e+05 1.058e+04 1.229e+03 3.690e+02 1.400e+01 2018 05 11 10 35 22 9.520e+04 8.066e+03 1.129e+03 3.500e+02 1.400e+01 2018 05 11 10 45 22 9.637e+04 8.811e+03 1.376e+03 3.890e+02 1.700e+01 2018 05 11 10 55 22 8.780e+04 8.058e+03 1.271e+03 3.720e+02 1.400e+01 2018 05 11 11 05 22 9.110e+04 8.079e+03 1.231e+03 3.780e+02 1.400e+01 2018 05 11 11 15 22 8.357e+04 7.051e+03 1.169e+03 3.770e+02 9.000e+00 2018 05 11 11 25 23 6.828e+04 5.398e+03 8.920e+02 2.780e+02 1.000e+01 2018 05 11 11 35 23 5.581e+04 4.479e+03 8.820e+02 3.110e+02 6.000e+00 2018 05 11 11 45 23 4.782e+04 3.999e+03 8.370e+02 3.020e+02 1.400e+01 2018 05 11 11 55 23 4.259e+04 3.349e+03 8.430e+02 3.090e+02 1.500e+01 2018 05 11 12 05 23 4.072e+04 3.340e+03 8.400e+02 3.360e+02 1.400e+01 2018 05 11 12 15 23 3.801e+04 3.016e+03 7.080e+02 2.700e+02 1.500e+01 2018 05 11 12 25 23 3.980e+04 3.094e+03 8.170e+02 3.060e+02 1.000e+01 2018 05 11 12 35 23 4.108e+04 3.186e+03 7.660e+02 2.780e+02 1.500e+01 2018 05 11 12 45 23 3.885e+04 2.807e+03 6.300e+02 2.320e+02 3.000e+00 2018 05 11 12 55 23 4.137e+04 2.975e+03 7.200e+02 2.680e+02 9.000e+00 2018 05 11 13 05 24 3.593e+04 2.418e+03 5.780e+02 2.350e+02 6.000e+00 2018 05 11 13 15 24 3.520e+04 2.465e+03 6.220e+02 2.610e+02 8.000e+00 2018 05 11 13 25 24 3.480e+04 2.577e+03 6.160e+02 2.540e+02 7.000e+00 2018 05 11 13 35 24 4.057e+04 3.004e+03 7.550e+02 3.220e+02 1.000e+01 2018 05 11 13 45 24 3.668e+04 2.740e+03 6.540e+02 2.740e+02 1.100e+01 2018 05 11 13 55 24 3.444e+04 2.657e+03 6.900e+02 2.870e+02 1.600e+01 2018 05 11 14 05 24 3.349e+04 2.511e+03 6.800e+02 2.830e+02 9.000e+00 2018 05 11 14 15 24 3.390e+04 2.792e+03 7.370e+02 2.800e+02 1.400e+01 2018 05 11 14 25 24 3.148e+04 2.806e+03 7.140e+02 2.780e+02 1.800e+01 2018 05 11 14 35 24 3.198e+04 3.017e+03 8.690e+02 3.400e+02 9.000e+00 2018 05 11 14 45 25 3.164e+04 2.693e+03 7.240e+02 2.440e+02 1.200e+01 2018 05 11 14 55 25 3.234e+04 2.752e+03 6.900e+02 2.320e+02 5.000e+00 2018 05 11 15 05 25 3.209e+04 2.656e+03 6.860e+02 2.390e+02 7.000e+00 2018 05 11 15 15 25 3.425e+04 2.610e+03 6.550e+02 2.320e+02 8.000e+00 2018 05 11 15 25 25 3.587e+04 2.747e+03 7.030e+02 2.820e+02 1.700e+01 2018 05 11 15 35 25 3.759e+04 3.038e+03 8.480e+02 3.050e+02 1.000e+01 2018 05 11 15 45 25 3.893e+04 4.189e+03 1.223e+03 3.620e+02 1.800e+01 2018 05 11 15 55 25 3.758e+04 3.925e+03 1.123e+03 3.700e+02 6.000e+00 2018 05 11 16 05 25 3.765e+04 3.263e+03 9.530e+02 3.260e+02 1.300e+01 2018 05 11 16 15 25 3.687e+04 2.837e+03 7.590e+02 3.000e+02 7.000e+00 2018 05 11 16 25 26 4.110e+04 3.374e+03 8.780e+02 3.440e+02 1.200e+01 2018 05 11 16 35 26 4.632e+04 4.117e+03 1.073e+03 3.690e+02 1.300e+01 2018 05 11 16 45 26 4.676e+04 4.609e+03 1.225e+03 3.960e+02 1.400e+01 2018 05 11 16 55 26 4.403e+04 4.253e+03 1.144e+03 3.600e+02 8.000e+00 2018 05 11 17 05 26 4.424e+04 4.493e+03 1.249e+03 4.130e+02 1.100e+01 2018 05 11 17 15 26 4.517e+04 4.464e+03 1.232e+03 3.910e+02 7.000e+00 2018 05 11 17 25 26 4.831e+04 4.322e+03 1.069e+03 3.580e+02 5.000e+00 2018 05 11 17 35 26 5.194e+04 4.188e+03 8.770e+02 3.050e+02 1.000e+01 2018 05 11 17 45 26 4.376e+04 3.238e+03 7.700e+02 2.880e+02 3.000e+00 2018 05 11 17 55 26 4.372e+04 3.511e+03 7.400e+02 2.480e+02 4.000e+00 2018 05 11 18 05 27 4.386e+04 3.647e+03 8.180e+02 3.090e+02 7.000e+00 2018 05 11 18 15 27 4.255e+04 3.320e+03 7.800e+02 2.850e+02 8.000e+00 2018 05 11 18 25 27 4.723e+04 4.143e+03 8.280e+02 2.980e+02 7.000e+00 2018 05 11 18 35 27 4.848e+04 4.082e+03 9.420e+02 3.500e+02 4.000e+00 2018 05 11 18 45 27 4.923e+04 4.389e+03 9.340e+02 3.540e+02 6.000e+00 2018 05 11 18 55 27 9.125e+04 1.214e+04 1.375e+03 3.090e+02 1.200e+01 2018 05 11 19 05 27 9.416e+04 1.217e+04 1.454e+03 4.100e+02 7.000e+00 2018 05 11 19 15 27 1.229e+05 1.709e+04 1.905e+03 5.780e+02 1.900e+01 2018 05 11 19 25 27 5.341e+04 4.957e+03 8.950e+02 3.050e+02 5.000e+00 2018 05 11 19 35 27 5.254e+04 4.686e+03 9.140e+02 3.340e+02 8.000e+00 2018 05 11 19 45 28 5.200e+04 4.863e+03 9.580e+02 3.720e+02 5.000e+00 2018 05 11 19 55 28 6.225e+04 5.547e+03 9.680e+02 3.700e+02 7.000e+00 2018 05 11 20 05 28 6.041e+04 5.249e+03 9.160e+02 3.320e+02 3.000e+00 2018 05 11 20 15 28 5.311e+04 4.492e+03 9.470e+02 3.320e+02 5.000e+00 2018 05 11 20 25 28 5.438e+04 4.618e+03 9.100e+02 3.130e+02 4.000e+00 2018 05 11 20 35 28 5.794e+04 4.489e+03 7.910e+02 2.810e+02 2.000e+00 2018 05 11 20 45 28 5.516e+04 4.274e+03 9.550e+02 3.690e+02 7.000e+00 2018 05 11 20 55 28 6.070e+04 4.493e+03 9.360e+02 3.230e+02 3.000e+00 2018 05 11 21 05 28 6.342e+04 4.520e+03 9.070e+02 3.530e+02 6.000e+00 2018 05 11 21 15 28 5.957e+04 4.171e+03 7.740e+02 2.470e+02 3.000e+00 2018 05 11 21 25 29 5.940e+04 4.366e+03 9.070e+02 3.260e+02 2.000e+00 2018 05 11 21 35 29 7.043e+04 4.968e+03 9.770e+02 3.400e+02 3.000e+00 2018 05 11 21 45 29 6.301e+04 4.411e+03 9.120e+02 3.170e+02 6.000e+00 2018 05 11 21 55 29 6.612e+04 4.728e+03 1.002e+03 3.270e+02 2.000e+00 2018 05 11 22 05 29 6.526e+04 4.762e+03 9.620e+02 3.280e+02 5.000e+00 2018 05 11 22 15 29 6.210e+04 4.529e+03 9.270e+02 3.050e+02 5.000e+00 2018 05 11 22 25 29 5.752e+04 4.389e+03 8.610e+02 3.130e+02 6.000e+00 2018 05 11 22 35 29 5.458e+04 4.301e+03 8.690e+02 3.020e+02 2.000e+00 2018 05 11 22 45 29 5.843e+04 4.763e+03 1.044e+03 3.620e+02 6.000e+00 2018 05 11 22 55 29 5.891e+04 5.034e+03 1.087e+03 3.830e+02 5.000e+00 2018 05 11 23 05 30 6.532e+04 5.296e+03 1.076e+03 3.780e+02 5.000e+00 2018 05 11 23 15 30 6.223e+04 5.304e+03 1.058e+03 3.320e+02 1.000e+01 2018 05 11 23 25 30 6.043e+04 5.602e+03 1.272e+03 3.650e+02 6.000e+00 2018 05 11 23 35 30 6.262e+04 7.335e+03 1.846e+03 5.410e+02 6.000e+00 2018 05 11 23 45 30 6.121e+04 6.715e+03 1.690e+03 4.830e+02 4.000e+00 2018 05 11 23 55 30 5.975e+04 6.214e+03 1.458e+03 4.190e+02 4.000e+00