# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 05 10 00 05 01 2.436e+04 1.654e+03 2.760e+02 1.110e+02 3.000e+00 2018 05 10 00 15 01 2.281e+04 1.563e+03 2.840e+02 9.700e+01 1.000e+00 2018 05 10 00 25 01 2.455e+04 1.703e+03 2.940e+02 1.180e+02 3.000e+00 2018 05 10 00 35 02 2.385e+04 1.761e+03 3.500e+02 1.390e+02 3.000e+00 2018 05 10 00 45 02 2.428e+04 1.785e+03 3.760e+02 1.530e+02 5.000e+00 2018 05 10 00 55 02 2.306e+04 1.653e+03 3.070e+02 1.170e+02 1.000e+00 2018 05 10 01 05 02 2.324e+04 1.735e+03 3.680e+02 1.410e+02 2.000e+00 2018 05 10 01 15 02 2.168e+04 1.606e+03 3.150e+02 1.240e+02 0.000e+00 2018 05 10 01 25 02 2.080e+04 1.506e+03 2.450e+02 8.400e+01 3.000e+00 2018 05 10 01 35 02 2.031e+04 1.515e+03 2.630e+02 8.700e+01 2.000e+00 2018 05 10 01 45 02 2.176e+04 1.518e+03 2.480e+02 1.110e+02 2.000e+00 2018 05 10 01 55 02 2.186e+04 1.486e+03 2.490e+02 9.100e+01 1.000e+00 2018 05 10 02 05 02 2.171e+04 1.497e+03 2.520e+02 9.200e+01 1.000e+00 2018 05 10 02 15 03 2.173e+04 1.541e+03 2.730e+02 8.600e+01 5.000e+00 2018 05 10 02 25 03 2.206e+04 1.549e+03 2.830e+02 9.300e+01 6.000e+00 2018 05 10 02 35 03 2.054e+04 1.444e+03 2.580e+02 7.400e+01 3.000e+00 2018 05 10 02 45 03 2.087e+04 1.447e+03 2.920e+02 1.000e+02 1.000e+00 2018 05 10 02 55 03 2.048e+04 1.400e+03 2.620e+02 9.900e+01 2.000e+00 2018 05 10 03 05 03 2.096e+04 1.319e+03 2.450e+02 8.600e+01 3.000e+00 2018 05 10 03 15 03 2.050e+04 1.421e+03 2.680e+02 1.000e+02 3.000e+00 2018 05 10 03 25 03 2.106e+04 1.350e+03 2.330e+02 9.100e+01 1.000e+00 2018 05 10 03 35 03 2.301e+04 1.503e+03 2.800e+02 9.600e+01 0.000e+00 2018 05 10 03 45 03 2.856e+04 1.885e+03 3.120e+02 1.060e+02 1.000e+00 2018 05 10 03 55 04 2.970e+04 1.995e+03 3.000e+02 9.500e+01 1.000e+00 2018 05 10 04 05 04 3.258e+04 2.112e+03 2.680e+02 8.500e+01 2.000e+00 2018 05 10 04 15 04 3.141e+04 2.098e+03 2.930e+02 9.800e+01 3.000e+00 2018 05 10 04 25 04 3.434e+04 2.315e+03 3.130e+02 1.200e+02 3.000e+00 2018 05 10 04 35 04 3.626e+04 2.521e+03 2.920e+02 1.010e+02 6.000e+00 2018 05 10 04 45 04 4.502e+04 3.368e+03 3.400e+02 1.050e+02 0.000e+00 2018 05 10 04 55 04 4.339e+04 3.263e+03 3.410e+02 1.240e+02 3.000e+00 2018 05 10 05 05 04 3.760e+04 2.743e+03 3.240e+02 1.070e+02 1.000e+00 2018 05 10 05 15 04 3.508e+04 2.571e+03 3.030e+02 1.090e+02 1.000e+00 2018 05 10 05 25 04 5.764e+04 5.382e+03 6.100e+02 1.540e+02 3.000e+00 2018 05 10 05 35 05 5.162e+04 4.467e+03 5.010e+02 1.350e+02 3.000e+00 2018 05 10 05 45 05 5.503e+04 4.517e+03 5.080e+02 1.460e+02 2.000e+00 2018 05 10 05 55 05 5.763e+04 4.866e+03 6.100e+02 1.620e+02 5.000e+00 2018 05 10 06 05 05 5.008e+04 4.266e+03 5.410e+02 1.530e+02 4.000e+00 2018 05 10 06 15 05 4.210e+04 3.523e+03 5.520e+02 1.690e+02 1.000e+00 2018 05 10 06 25 05 3.386e+04 2.826e+03 4.450e+02 1.390e+02 5.000e+00 2018 05 10 06 35 05 3.584e+04 2.879e+03 4.650e+02 1.620e+02 2.000e+00 2018 05 10 06 45 05 3.672e+04 2.957e+03 5.280e+02 1.780e+02 3.000e+00 2018 05 10 06 55 05 4.144e+04 4.036e+03 6.090e+02 1.820e+02 1.000e+00 2018 05 10 07 05 05 4.161e+04 4.036e+03 6.770e+02 1.760e+02 2.000e+00 2018 05 10 07 15 06 4.416e+04 6.185e+03 1.377e+03 2.240e+02 3.000e+00 2018 05 10 07 25 06 4.434e+04 5.631e+03 1.434e+03 3.170e+02 5.000e+00 2018 05 10 07 35 06 4.605e+04 5.017e+03 1.293e+03 2.630e+02 5.000e+00 2018 05 10 07 45 06 5.384e+04 3.731e+03 6.300e+02 2.070e+02 4.000e+00 2018 05 10 07 55 06 4.774e+04 3.331e+03 5.780e+02 1.880e+02 3.000e+00 2018 05 10 08 05 06 4.866e+04 3.518e+03 6.120e+02 2.100e+02 3.000e+00 2018 05 10 08 15 06 5.009e+04 3.410e+03 5.490e+02 1.780e+02 1.000e+00 2018 05 10 08 25 06 4.333e+04 3.082e+03 4.980e+02 1.800e+02 0.000e+00 2018 05 10 08 35 06 4.256e+04 2.978e+03 4.910e+02 1.490e+02 1.000e+00 2018 05 10 08 45 07 4.168e+04 3.062e+03 5.350e+02 1.880e+02 2.000e+00 2018 05 10 08 55 07 3.919e+04 2.907e+03 5.000e+02 1.650e+02 4.000e+00 2018 05 10 09 05 07 4.026e+04 3.158e+03 6.140e+02 2.050e+02 2.000e+00 2018 05 10 09 15 07 4.943e+04 3.613e+03 6.130e+02 2.090e+02 3.000e+00 2018 05 10 09 25 07 4.565e+04 3.371e+03 5.800e+02 1.920e+02 4.000e+00 2018 05 10 09 35 07 4.175e+04 3.157e+03 5.600e+02 1.780e+02 2.000e+00 2018 05 10 09 45 07 5.140e+04 3.936e+03 6.480e+02 2.250e+02 2.000e+00 2018 05 10 09 55 07 5.445e+04 3.996e+03 6.320e+02 2.100e+02 4.000e+00 2018 05 10 10 05 07 5.817e+04 4.359e+03 6.210e+02 1.950e+02 6.000e+00 2018 05 10 10 15 07 6.995e+04 5.383e+03 6.400e+02 1.830e+02 3.000e+00 2018 05 10 10 25 08 8.382e+04 6.885e+03 6.930e+02 1.960e+02 2.000e+00 2018 05 10 10 35 08 9.460e+04 7.558e+03 7.410e+02 1.780e+02 4.000e+00 2018 05 10 10 45 08 9.684e+04 7.524e+03 7.290e+02 1.920e+02 0.000e+00 2018 05 10 10 55 08 1.007e+05 6.492e+03 6.510e+02 1.770e+02 4.000e+00 2018 05 10 11 05 08 9.081e+04 5.402e+03 5.810e+02 1.580e+02 3.000e+00 2018 05 10 11 15 08 7.543e+04 4.333e+03 3.950e+02 9.100e+01 0.000e+00 2018 05 10 11 25 08 3.858e+04 2.298e+03 2.820e+02 6.700e+01 3.000e+00 2018 05 10 11 35 08 2.441e+04 1.545e+03 2.410e+02 5.900e+01 0.000e+00 2018 05 10 11 45 08 2.125e+04 1.320e+03 2.010e+02 4.700e+01 0.000e+00 2018 05 10 11 55 08 2.316e+04 1.483e+03 2.070e+02 4.700e+01 1.000e+00 2018 05 10 12 05 09 3.398e+04 2.278e+03 2.370e+02 6.800e+01 1.000e+00 2018 05 10 12 15 09 4.272e+04 2.749e+03 3.280e+02 6.400e+01 1.000e+00 2018 05 10 12 25 09 4.884e+04 3.109e+03 3.580e+02 8.400e+01 0.000e+00 2018 05 10 12 35 09 4.838e+04 3.100e+03 3.910e+02 8.200e+01 0.000e+00 2018 05 10 12 45 09 3.983e+04 2.505e+03 3.630e+02 8.300e+01 0.000e+00 2018 05 10 12 55 09 3.846e+04 2.302e+03 2.680e+02 6.800e+01 0.000e+00 2018 05 10 13 05 09 2.174e+04 1.388e+03 2.110e+02 4.300e+01 0.000e+00 2018 05 10 13 15 09 1.917e+04 1.190e+03 1.880e+02 4.500e+01 1.000e+00 2018 05 10 13 25 09 2.130e+04 1.338e+03 2.180e+02 6.400e+01 1.000e+00 2018 05 10 13 35 09 2.328e+04 1.508e+03 2.200e+02 6.200e+01 5.000e+00 2018 05 10 13 45 10 2.029e+04 1.229e+03 1.860e+02 4.400e+01 2.000e+00 2018 05 10 13 55 10 2.145e+04 1.344e+03 2.310e+02 7.000e+01 1.000e+00 2018 05 10 14 05 10 1.792e+04 1.128e+03 1.840e+02 4.900e+01 3.000e+00 2018 05 10 14 15 10 2.161e+04 1.518e+03 2.960e+02 9.300e+01 6.000e+00 2018 05 10 14 25 10 2.090e+04 1.342e+03 2.360e+02 6.800e+01 1.000e+00 2018 05 10 14 35 10 2.196e+04 1.339e+03 2.080e+02 5.600e+01 3.000e+00 2018 05 10 14 45 10 3.744e+04 2.448e+03 3.390e+02 9.200e+01 6.000e+00 2018 05 10 14 55 10 3.962e+04 2.509e+03 3.340e+02 8.700e+01 1.000e+00 2018 05 10 15 05 10 3.842e+04 2.306e+03 3.560e+02 1.090e+02 3.000e+00 2018 05 10 15 15 10 2.619e+04 1.644e+03 2.680e+02 7.600e+01 2.000e+00 2018 05 10 15 25 11 2.378e+04 1.583e+03 2.540e+02 6.900e+01 2.000e+00 2018 05 10 15 35 11 2.769e+04 1.600e+03 2.300e+02 6.600e+01 8.000e+00 2018 05 10 15 45 11 2.172e+04 1.249e+03 2.020e+02 7.200e+01 3.000e+00 2018 05 10 15 55 11 2.256e+04 1.343e+03 2.370e+02 7.800e+01 7.000e+00 2018 05 10 16 05 11 2.080e+04 1.110e+03 1.670e+02 4.800e+01 1.000e+00 2018 05 10 16 15 11 2.006e+04 1.162e+03 2.000e+02 7.300e+01 5.000e+00 2018 05 10 16 25 11 2.101e+04 1.239e+03 1.930e+02 6.900e+01 2.000e+00 2018 05 10 16 35 11 2.306e+04 1.266e+03 2.060e+02 6.700e+01 2.000e+00 2018 05 10 16 45 11 2.411e+04 1.417e+03 2.040e+02 6.000e+01 1.000e+00 2018 05 10 16 55 11 2.702e+04 1.500e+03 2.490e+02 7.300e+01 3.000e+00 2018 05 10 17 05 12 2.637e+04 1.404e+03 2.240e+02 6.800e+01 7.000e+00 2018 05 10 17 15 12 2.668e+04 1.450e+03 2.190e+02 7.300e+01 3.000e+00 2018 05 10 17 25 12 2.821e+04 1.498e+03 2.250e+02 6.900e+01 2.000e+00 2018 05 10 17 35 12 2.990e+04 1.853e+03 2.730e+02 9.500e+01 5.000e+00 2018 05 10 17 45 12 2.996e+04 1.733e+03 2.580e+02 5.900e+01 1.000e+00 2018 05 10 17 55 12 3.219e+04 1.928e+03 2.450e+02 6.900e+01 1.000e+00 2018 05 10 18 05 12 2.975e+04 1.775e+03 2.390e+02 6.700e+01 4.000e+00 2018 05 10 18 15 12 2.764e+04 1.697e+03 2.330e+02 6.800e+01 4.000e+00 2018 05 10 18 25 12 2.644e+04 1.600e+03 2.700e+02 9.400e+01 7.000e+00 2018 05 10 18 35 12 2.676e+04 1.569e+03 2.150e+02 6.700e+01 1.000e+00 2018 05 10 18 45 13 2.837e+04 1.773e+03 2.480e+02 8.000e+01 2.000e+00 2018 05 10 18 55 13 4.015e+04 2.892e+03 2.540e+02 7.000e+01 3.000e+00 2018 05 10 19 05 13 3.190e+04 2.064e+03 3.090e+02 9.600e+01 3.000e+00 2018 05 10 19 15 13 2.692e+04 1.697e+03 2.670e+02 9.200e+01 1.000e+00 2018 05 10 19 25 13 2.893e+04 1.788e+03 2.420e+02 7.400e+01 2.000e+00 2018 05 10 19 35 13 3.203e+04 2.109e+03 2.420e+02 7.600e+01 5.000e+00 2018 05 10 19 45 13 3.256e+04 2.535e+03 2.910e+02 7.100e+01 2.000e+00 2018 05 10 19 55 13 3.576e+04 2.709e+03 3.100e+02 9.800e+01 4.000e+00 2018 05 10 20 05 13 3.620e+04 2.863e+03 3.240e+02 1.010e+02 3.000e+00 2018 05 10 20 15 13 5.149e+04 3.597e+03 3.720e+02 1.180e+02 5.000e+00 2018 05 10 20 25 14 4.436e+04 2.875e+03 3.370e+02 1.020e+02 1.000e+00 2018 05 10 20 35 14 3.883e+04 2.366e+03 2.940e+02 8.800e+01 4.000e+00 2018 05 10 20 45 14 4.300e+04 2.710e+03 3.110e+02 9.400e+01 1.000e+00 2018 05 10 20 55 14 4.013e+04 2.454e+03 3.100e+02 8.600e+01 4.000e+00 2018 05 10 21 05 14 3.371e+04 2.113e+03 3.120e+02 9.900e+01 1.000e+00 2018 05 10 21 15 14 4.505e+04 3.024e+03 4.030e+02 1.170e+02 4.000e+00 2018 05 10 21 25 14 6.413e+04 5.070e+03 5.180e+02 1.420e+02 3.000e+00 2018 05 10 21 35 14 4.732e+04 3.471e+03 3.970e+02 1.120e+02 2.000e+00 2018 05 10 21 45 14 5.803e+04 4.621e+03 5.660e+02 1.360e+02 3.000e+00 2018 05 10 21 55 14 9.434e+04 9.498e+03 1.194e+03 2.700e+02 3.000e+00 2018 05 10 22 05 15 1.031e+05 1.164e+04 1.302e+03 3.150e+02 7.000e+00 2018 05 10 22 15 15 1.010e+05 8.789e+03 9.170e+02 2.290e+02 7.000e+00 2018 05 10 22 25 15 9.953e+04 7.718e+03 9.210e+02 2.480e+02 3.000e+00 2018 05 10 22 35 15 9.251e+04 7.564e+03 9.860e+02 2.930e+02 6.000e+00 2018 05 10 22 45 15 1.095e+05 1.079e+04 1.817e+03 5.680e+02 1.200e+01 2018 05 10 22 55 15 1.012e+05 1.135e+04 2.117e+03 6.210e+02 9.000e+00 2018 05 10 23 05 15 9.370e+04 9.937e+03 1.650e+03 4.840e+02 1.200e+01 2018 05 10 23 15 15 9.742e+04 1.044e+04 1.782e+03 5.230e+02 1.200e+01 2018 05 10 23 25 15 9.762e+04 1.011e+04 1.576e+03 4.090e+02 1.000e+01 2018 05 10 23 35 15 8.702e+04 9.183e+03 1.513e+03 4.550e+02 9.000e+00 2018 05 10 23 45 16 8.756e+04 8.806e+03 1.444e+03 4.180e+02 1.200e+01 2018 05 10 23 55 16 8.293e+04 7.968e+03 1.305e+03 3.780e+02 9.000e+00