# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 05 07 00 04 18 1.630e+05 8.496e+03 2.245e+03 7.820e+02 4.000e+00 2018 05 07 00 14 18 1.583e+05 8.417e+03 2.276e+03 7.740e+02 2.000e+00 2018 05 07 00 24 18 1.602e+05 8.756e+03 2.394e+03 8.620e+02 3.000e+00 2018 05 07 00 34 18 1.648e+05 8.757e+03 2.322e+03 8.650e+02 6.000e+00 2018 05 07 00 44 18 1.638e+05 8.713e+03 2.430e+03 8.790e+02 4.000e+00 2018 05 07 00 54 18 1.583e+05 8.748e+03 2.458e+03 9.080e+02 2.000e+00 2018 05 07 01 04 18 1.602e+05 8.985e+03 2.519e+03 8.930e+02 3.000e+00 2018 05 07 01 14 19 1.545e+05 8.207e+03 2.207e+03 7.730e+02 7.000e+00 2018 05 07 01 24 19 1.500e+05 8.649e+03 2.343e+03 8.530e+02 8.000e+00 2018 05 07 01 34 19 1.531e+05 8.473e+03 2.362e+03 8.250e+02 3.000e+00 2018 05 07 01 44 19 1.488e+05 8.685e+03 2.470e+03 8.940e+02 4.000e+00 2018 05 07 01 54 19 1.456e+05 9.067e+03 2.529e+03 8.530e+02 1.000e+00 2018 05 07 02 04 19 1.439e+05 8.659e+03 2.439e+03 8.430e+02 1.000e+01 2018 05 07 02 14 19 1.504e+05 9.796e+03 2.834e+03 9.980e+02 4.000e+00 2018 05 07 02 24 19 1.470e+05 9.576e+03 2.883e+03 1.025e+03 5.000e+00 2018 05 07 02 34 19 1.286e+05 7.426e+03 2.066e+03 7.420e+02 6.000e+00 2018 05 07 02 44 19 1.033e+05 5.473e+03 1.622e+03 5.670e+02 4.000e+00 2018 05 07 02 54 20 9.221e+04 5.110e+03 1.509e+03 5.060e+02 2.000e+00 2018 05 07 03 04 20 8.723e+04 5.111e+03 1.519e+03 5.400e+02 0.000e+00 2018 05 07 03 14 20 7.807e+04 4.596e+03 1.373e+03 5.180e+02 0.000e+00 2018 05 07 03 24 20 6.749e+04 4.166e+03 1.255e+03 4.500e+02 1.000e+00 2018 05 07 03 34 20 5.057e+04 3.301e+03 9.490e+02 3.630e+02 0.000e+00 2018 05 07 03 44 20 4.585e+04 3.314e+03 1.029e+03 3.520e+02 1.000e+00 2018 05 07 03 54 20 4.185e+04 3.128e+03 9.330e+02 3.230e+02 0.000e+00 2018 05 07 04 04 20 4.491e+04 3.392e+03 1.021e+03 3.200e+02 2.000e+00 2018 05 07 04 14 20 4.533e+04 3.362e+03 9.950e+02 3.350e+02 2.000e+00 2018 05 07 04 24 20 4.542e+04 3.585e+03 1.041e+03 3.800e+02 1.000e+00 2018 05 07 04 34 21 4.301e+04 3.546e+03 1.053e+03 3.570e+02 2.000e+00 2018 05 07 04 44 21 4.299e+04 3.527e+03 1.145e+03 4.110e+02 2.000e+00 2018 05 07 04 54 21 4.325e+04 3.667e+03 1.160e+03 4.160e+02 2.000e+00 2018 05 07 05 04 21 3.917e+04 3.237e+03 1.038e+03 3.740e+02 2.000e+00 2018 05 07 05 14 21 4.041e+04 3.215e+03 9.960e+02 3.310e+02 1.000e+00 2018 05 07 05 24 21 3.796e+04 3.133e+03 9.710e+02 3.480e+02 1.000e+00 2018 05 07 05 34 21 3.423e+04 3.344e+03 1.129e+03 4.260e+02 2.000e+00 2018 05 07 05 44 21 3.568e+04 3.694e+03 1.328e+03 5.160e+02 2.000e+00 2018 05 07 05 54 21 3.144e+04 2.880e+03 9.150e+02 3.050e+02 0.000e+00 2018 05 07 06 04 21 3.416e+04 3.120e+03 1.100e+03 4.120e+02 1.000e+00 2018 05 07 06 14 22 3.352e+04 2.974e+03 9.510e+02 3.610e+02 0.000e+00 2018 05 07 06 24 22 3.438e+04 3.297e+03 1.093e+03 3.960e+02 2.000e+00 2018 05 07 06 34 22 3.114e+04 3.077e+03 9.700e+02 3.290e+02 0.000e+00 2018 05 07 06 44 22 3.234e+04 3.142e+03 1.022e+03 3.920e+02 3.000e+00 2018 05 07 06 54 22 3.209e+04 3.012e+03 9.710e+02 3.050e+02 2.000e+00 2018 05 07 07 04 22 3.215e+04 3.250e+03 1.071e+03 3.850e+02 4.000e+00 2018 05 07 07 14 22 3.089e+04 3.231e+03 1.069e+03 3.980e+02 3.000e+00 2018 05 07 07 24 22 2.831e+04 2.857e+03 9.340e+02 3.230e+02 1.000e+00 2018 05 07 07 34 22 2.787e+04 2.795e+03 1.012e+03 3.860e+02 0.000e+00 2018 05 07 07 44 22 3.018e+04 2.874e+03 9.560e+02 3.840e+02 2.000e+00 2018 05 07 07 54 23 2.853e+04 2.779e+03 9.460e+02 3.660e+02 6.000e+00 2018 05 07 08 04 23 2.832e+04 2.504e+03 7.690e+02 2.960e+02 1.000e+00 2018 05 07 08 14 23 3.088e+04 2.793e+03 8.560e+02 3.240e+02 3.000e+00 2018 05 07 08 24 23 3.230e+04 2.876e+03 9.350e+02 3.940e+02 0.000e+00 2018 05 07 08 34 23 3.308e+04 3.032e+03 9.880e+02 3.690e+02 2.000e+00 2018 05 07 08 44 23 3.285e+04 2.784e+03 8.340e+02 2.980e+02 6.000e+00 2018 05 07 08 54 23 3.353e+04 2.668e+03 8.310e+02 3.000e+02 3.000e+00 2018 05 07 09 04 23 3.327e+04 2.631e+03 7.820e+02 2.930e+02 5.000e+00 2018 05 07 09 14 23 3.351e+04 2.910e+03 8.210e+02 2.960e+02 4.000e+00 2018 05 07 09 24 23 3.589e+04 3.549e+03 1.001e+03 3.460e+02 4.000e+00 2018 05 07 09 34 24 4.263e+04 4.682e+03 1.266e+03 4.010e+02 6.000e+00 2018 05 07 09 44 24 3.398e+04 2.950e+03 7.650e+02 2.500e+02 3.000e+00 2018 05 07 09 54 24 3.583e+04 3.225e+03 8.290e+02 2.910e+02 3.000e+00 2018 05 07 10 04 24 4.160e+04 3.963e+03 1.153e+03 4.110e+02 3.000e+00 2018 05 07 10 14 24 3.779e+04 2.951e+03 8.640e+02 3.140e+02 4.000e+00 2018 05 07 10 24 24 4.854e+04 4.484e+03 1.352e+03 4.860e+02 5.000e+00 2018 05 07 10 34 24 5.526e+04 4.932e+03 1.437e+03 4.510e+02 6.000e+00 2018 05 07 10 44 24 6.244e+04 5.585e+03 1.523e+03 5.080e+02 9.000e+00 2018 05 07 10 54 24 6.560e+04 5.699e+03 1.488e+03 4.690e+02 5.000e+00 2018 05 07 11 04 24 6.217e+04 4.839e+03 1.353e+03 4.230e+02 6.000e+00 2018 05 07 11 14 25 7.090e+04 5.084e+03 1.489e+03 4.790e+02 4.000e+00 2018 05 07 11 24 25 8.449e+04 5.184e+03 1.494e+03 5.170e+02 6.000e+00 2018 05 07 11 34 25 8.257e+04 5.784e+03 1.721e+03 5.940e+02 8.000e+00 2018 05 07 11 44 25 6.882e+04 5.164e+03 1.558e+03 5.470e+02 8.000e+00 2018 05 07 11 54 25 6.772e+04 4.520e+03 1.217e+03 4.130e+02 3.000e+00 2018 05 07 12 04 25 6.981e+04 4.087e+03 1.116e+03 3.680e+02 5.000e+00 2018 05 07 12 14 25 7.097e+04 4.153e+03 1.104e+03 3.530e+02 2.000e+00 2018 05 07 12 24 25 8.693e+04 4.338e+03 1.046e+03 3.170e+02 5.000e+00 2018 05 07 12 34 25 8.603e+04 5.130e+03 1.204e+03 3.230e+02 0.000e+00 2018 05 07 12 44 25 6.986e+04 3.661e+03 9.650e+02 2.820e+02 4.000e+00 2018 05 07 12 54 26 6.328e+04 3.298e+03 8.340e+02 2.510e+02 1.000e+00 2018 05 07 13 04 26 5.750e+04 2.873e+03 6.890e+02 2.100e+02 4.000e+00 2018 05 07 13 14 26 5.704e+04 2.877e+03 6.720e+02 2.030e+02 1.000e+00 2018 05 07 13 24 26 6.318e+04 3.982e+03 7.620e+02 2.460e+02 2.000e+00 2018 05 07 13 34 26 5.863e+04 3.276e+03 6.290e+02 1.880e+02 4.000e+00 2018 05 07 13 44 26 5.267e+04 2.607e+03 6.410e+02 1.910e+02 2.000e+00 2018 05 07 13 54 26 5.408e+04 2.789e+03 6.190e+02 1.850e+02 3.000e+00 2018 05 07 14 04 26 5.855e+04 2.991e+03 6.730e+02 1.890e+02 2.000e+00 2018 05 07 14 14 26 7.004e+04 3.724e+03 6.960e+02 1.910e+02 3.000e+00 2018 05 07 14 24 26 6.929e+04 6.503e+03 1.617e+03 5.240e+02 1.800e+01 2018 05 07 14 34 27 6.507e+04 4.377e+03 1.303e+03 4.220e+02 1.200e+01 2018 05 07 14 44 27 6.764e+04 4.921e+03 1.486e+03 5.170e+02 1.000e+01 2018 05 07 14 54 27 8.600e+04 6.138e+03 1.261e+03 3.950e+02 7.000e+00 2018 05 07 15 04 27 9.315e+04 7.479e+03 1.366e+03 3.730e+02 1.000e+01 2018 05 07 15 14 27 8.246e+04 5.754e+03 1.559e+03 4.970e+02 1.000e+01 2018 05 07 15 24 27 8.208e+04 5.159e+03 1.412e+03 4.380e+02 1.200e+01 2018 05 07 15 34 27 7.704e+04 3.760e+03 8.330e+02 2.060e+02 3.000e+00 2018 05 07 15 44 27 8.601e+04 4.352e+03 8.710e+02 2.310e+02 2.000e+00 2018 05 07 15 54 27 9.920e+04 5.206e+03 9.370e+02 2.350e+02 0.000e+00 2018 05 07 16 04 27 9.780e+04 5.444e+03 1.011e+03 2.180e+02 3.000e+00 2018 05 07 16 14 28 1.088e+05 5.697e+03 1.049e+03 2.300e+02 8.000e+00 2018 05 07 16 24 28 1.099e+05 5.350e+03 9.200e+02 2.030e+02 3.000e+00 2018 05 07 16 34 28 1.002e+05 4.973e+03 8.080e+02 1.590e+02 1.000e+00 2018 05 07 16 44 28 7.801e+04 3.777e+03 4.450e+02 9.800e+01 2.000e+00 2018 05 07 16 54 28 6.295e+04 2.930e+03 3.610e+02 6.800e+01 0.000e+00 2018 05 07 17 04 28 5.589e+04 2.402e+03 2.990e+02 5.600e+01 2.000e+00 2018 05 07 17 14 28 5.921e+04 2.177e+03 2.360e+02 4.200e+01 3.000e+00 2018 05 07 17 24 28 8.172e+04 3.565e+03 4.190e+02 8.300e+01 4.000e+00 2018 05 07 17 34 28 9.205e+04 4.052e+03 4.600e+02 1.010e+02 1.000e+00 2018 05 07 17 44 28 9.053e+04 4.123e+03 5.010e+02 1.090e+02 1.000e+00 2018 05 07 17 54 29 7.804e+04 3.459e+03 4.180e+02 7.900e+01 0.000e+00 2018 05 07 18 04 29 6.614e+04 2.670e+03 3.290e+02 8.100e+01 0.000e+00 2018 05 07 18 14 29 5.066e+04 2.474e+03 4.130e+02 8.200e+01 1.000e+00 2018 05 07 18 24 29 4.463e+04 2.361e+03 4.190e+02 9.000e+01 0.000e+00 2018 05 07 18 34 29 4.204e+04 2.136e+03 4.010e+02 8.400e+01 0.000e+00 2018 05 07 18 44 29 4.804e+04 2.533e+03 4.720e+02 1.140e+02 2.000e+00 2018 05 07 18 54 29 4.365e+04 2.393e+03 4.530e+02 9.600e+01 1.000e+00 2018 05 07 19 04 29 4.125e+04 2.305e+03 4.300e+02 8.800e+01 2.000e+00 2018 05 07 19 14 29 3.581e+04 1.737e+03 3.010e+02 6.100e+01 2.000e+00 2018 05 07 19 24 29 4.101e+04 1.982e+03 3.250e+02 6.200e+01 2.000e+00 2018 05 07 19 34 30 3.906e+04 1.940e+03 3.330e+02 6.900e+01 0.000e+00 2018 05 07 19 44 30 3.588e+04 1.905e+03 3.220e+02 7.700e+01 0.000e+00 2018 05 07 19 54 30 3.138e+04 1.679e+03 3.250e+02 7.200e+01 3.000e+00 2018 05 07 20 04 30 2.280e+04 1.440e+03 2.760e+02 4.900e+01 1.000e+00 2018 05 07 20 14 30 2.079e+04 1.502e+03 3.470e+02 7.400e+01 1.000e+00 2018 05 07 20 24 30 2.282e+04 2.012e+03 5.310e+02 1.330e+02 0.000e+00 2018 05 07 20 34 30 2.400e+04 2.111e+03 5.790e+02 1.520e+02 1.000e+00 2018 05 07 20 44 30 2.747e+04 2.510e+03 6.580e+02 1.630e+02 3.000e+00 2018 05 07 20 54 30 3.591e+04 3.072e+03 8.310e+02 2.450e+02 2.000e+00 2018 05 07 21 04 30 4.231e+04 3.656e+03 1.036e+03 3.200e+02 5.000e+00 2018 05 07 21 14 31 4.390e+04 3.886e+03 1.176e+03 3.630e+02 1.000e+00 2018 05 07 21 24 31 4.126e+04 3.840e+03 1.242e+03 3.840e+02 0.000e+00 2018 05 07 21 34 31 3.809e+04 3.609e+03 1.212e+03 3.660e+02 2.000e+00 2018 05 07 21 44 31 3.270e+04 3.381e+03 1.205e+03 4.020e+02 1.000e+00 2018 05 07 21 54 31 3.356e+04 3.462e+03 1.159e+03 3.820e+02 0.000e+00 2018 05 07 22 04 31 3.259e+04 3.365e+03 1.164e+03 3.470e+02 1.000e+00 2018 05 07 22 14 31 3.480e+04 3.594e+03 1.204e+03 3.930e+02 2.000e+00 2018 05 07 22 24 31 3.722e+04 3.769e+03 1.270e+03 3.930e+02 1.000e+00 2018 05 07 22 34 31 3.909e+04 3.891e+03 1.184e+03 3.660e+02 2.000e+00 2018 05 07 22 44 31 3.952e+04 3.749e+03 1.030e+03 2.900e+02 3.000e+00 2018 05 07 22 54 32 3.871e+04 3.500e+03 9.730e+02 2.620e+02 2.000e+00 2018 05 07 23 04 32 3.522e+04 3.002e+03 7.920e+02 1.860e+02 3.000e+00 2018 05 07 23 14 32 3.206e+04 2.686e+03 6.710e+02 1.760e+02 2.000e+00 2018 05 07 23 24 32 2.752e+04 2.267e+03 5.770e+02 1.490e+02 1.000e+00 2018 05 07 23 34 32 2.161e+04 1.897e+03 4.680e+02 1.140e+02 5.000e+00 2018 05 07 23 44 32 1.738e+04 1.359e+03 2.720e+02 6.400e+01 0.000e+00 2018 05 07 23 54 32 1.803e+04 1.237e+03 2.650e+02 5.300e+01 1.000e+00