# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 03 22 00 02 33 7.530e+04 2.066e+03 1.230e+02 1.600e+01 0.000e+00 2018 03 22 00 12 33 6.224e+04 1.912e+03 1.150e+02 1.500e+01 0.000e+00 2018 03 22 00 22 33 5.379e+04 1.515e+03 1.040e+02 1.300e+01 1.000e+00 2018 03 22 00 32 34 4.798e+04 1.312e+03 8.100e+01 1.600e+01 0.000e+00 2018 03 22 00 42 34 4.527e+04 1.313e+03 7.000e+01 1.400e+01 0.000e+00 2018 03 22 00 52 34 3.672e+04 1.098e+03 7.400e+01 1.200e+01 0.000e+00 2018 03 22 01 02 34 3.362e+04 9.790e+02 5.700e+01 1.200e+01 0.000e+00 2018 03 22 01 12 34 3.023e+04 9.050e+02 6.500e+01 9.000e+00 0.000e+00 2018 03 22 01 22 34 2.619e+04 9.000e+02 8.700e+01 1.600e+01 0.000e+00 2018 03 22 01 32 34 2.222e+04 6.840e+02 7.500e+01 1.400e+01 0.000e+00 2018 03 22 01 42 34 1.997e+04 6.870e+02 7.400e+01 1.100e+01 0.000e+00 2018 03 22 01 52 34 2.126e+04 6.950e+02 8.000e+01 1.700e+01 0.000e+00 2018 03 22 02 02 34 1.991e+04 7.230e+02 9.100e+01 1.700e+01 0.000e+00 2018 03 22 02 12 35 2.087e+04 5.970e+02 6.200e+01 1.200e+01 0.000e+00 2018 03 22 02 22 35 1.882e+04 4.710e+02 5.600e+01 1.500e+01 0.000e+00 2018 03 22 02 32 35 2.253e+04 8.880e+02 4.400e+01 8.000e+00 0.000e+00 2018 03 22 02 42 35 2.458e+04 1.154e+03 7.400e+01 9.000e+00 0.000e+00 2018 03 22 02 52 35 2.324e+04 1.111e+03 8.100e+01 1.700e+01 1.000e+00 2018 03 22 03 02 35 2.070e+04 9.420e+02 4.300e+01 5.000e+00 0.000e+00 2018 03 22 03 12 35 1.926e+04 7.040e+02 5.800e+01 1.100e+01 0.000e+00 2018 03 22 03 22 35 9.163e+03 6.040e+02 1.190e+02 1.600e+01 1.000e+00 2018 03 22 03 32 35 1.165e+04 7.190e+02 1.190e+02 1.000e+01 0.000e+00 2018 03 22 03 42 35 1.148e+04 7.040e+02 1.040e+02 1.700e+01 0.000e+00 2018 03 22 03 52 36 9.233e+03 5.280e+02 8.300e+01 1.300e+01 0.000e+00 2018 03 22 04 02 36 8.663e+03 5.430e+02 1.040e+02 2.100e+01 0.000e+00 2018 03 22 04 12 36 6.244e+03 4.960e+02 9.800e+01 1.600e+01 0.000e+00 2018 03 22 04 22 36 6.788e+03 5.110e+02 1.030e+02 1.600e+01 0.000e+00 2018 03 22 04 32 36 6.987e+03 5.250e+02 1.030e+02 1.500e+01 0.000e+00 2018 03 22 04 42 36 4.231e+03 5.280e+02 1.140e+02 1.700e+01 0.000e+00 2018 03 22 04 52 36 2.070e+03 4.410e+02 1.030e+02 2.400e+01 0.000e+00 2018 03 22 05 02 36 1.568e+04 7.240e+02 1.080e+02 2.000e+01 0.000e+00 2018 03 22 05 12 36 9.546e+03 4.990e+02 8.700e+01 1.600e+01 0.000e+00 2018 03 22 05 22 36 1.528e+04 5.860e+02 7.800e+01 1.800e+01 0.000e+00 2018 03 22 05 32 37 1.565e+04 5.610e+02 8.400e+01 1.700e+01 0.000e+00 2018 03 22 05 42 37 1.577e+04 5.470e+02 5.900e+01 9.000e+00 2.000e+00 2018 03 22 05 52 37 1.876e+04 5.460e+02 7.500e+01 2.200e+01 1.000e+00 2018 03 22 06 02 37 2.229e+04 6.500e+02 1.010e+02 2.600e+01 0.000e+00 2018 03 22 06 12 37 2.568e+04 9.030e+02 1.040e+02 2.000e+01 0.000e+00 2018 03 22 06 22 37 3.033e+04 9.480e+02 1.120e+02 2.200e+01 1.000e+00 2018 03 22 06 32 37 2.787e+04 7.650e+02 1.030e+02 1.800e+01 0.000e+00 2018 03 22 06 42 37 3.093e+04 8.370e+02 1.000e+02 1.100e+01 0.000e+00 2018 03 22 06 52 37 2.959e+04 8.220e+02 1.070e+02 2.600e+01 0.000e+00 2018 03 22 07 02 37 2.568e+04 7.470e+02 1.060e+02 3.100e+01 0.000e+00 2018 03 22 07 12 38 2.324e+04 7.840e+02 1.160e+02 2.100e+01 0.000e+00 2018 03 22 07 22 38 2.390e+04 7.550e+02 1.090e+02 2.400e+01 0.000e+00 2018 03 22 07 32 38 2.877e+04 8.180e+02 1.110e+02 2.500e+01 0.000e+00 2018 03 22 07 42 38 3.371e+04 8.550e+02 1.170e+02 2.800e+01 0.000e+00 2018 03 22 07 52 38 3.364e+04 8.900e+02 1.450e+02 3.000e+01 0.000e+00 2018 03 22 08 02 38 3.594e+04 1.059e+03 1.500e+02 4.100e+01 1.000e+00 2018 03 22 08 12 38 3.644e+04 1.119e+03 1.560e+02 3.700e+01 0.000e+00 2018 03 22 08 22 38 4.256e+04 1.335e+03 1.730e+02 4.700e+01 0.000e+00 2018 03 22 08 32 38 4.419e+04 1.306e+03 1.900e+02 4.600e+01 4.000e+00 2018 03 22 08 42 39 4.394e+04 1.527e+03 2.590e+02 6.100e+01 0.000e+00 2018 03 22 08 52 39 3.913e+04 1.353e+03 1.810e+02 4.700e+01 0.000e+00 2018 03 22 09 02 39 2.603e+04 1.108e+03 1.600e+02 4.400e+01 0.000e+00 2018 03 22 09 12 39 2.493e+04 1.267e+03 2.370e+02 6.000e+01 1.000e+00 2018 03 22 09 22 39 2.321e+04 1.205e+03 1.890e+02 5.200e+01 0.000e+00 2018 03 22 09 32 39 2.253e+04 1.181e+03 1.780e+02 5.300e+01 1.000e+00 2018 03 22 09 42 39 2.472e+04 1.340e+03 2.610e+02 6.200e+01 3.000e+00 2018 03 22 09 52 39 2.508e+04 1.335e+03 2.720e+02 7.000e+01 3.000e+00 2018 03 22 10 02 39 2.768e+04 1.172e+03 1.870e+02 5.100e+01 3.000e+00 2018 03 22 10 12 39 2.816e+04 1.093e+03 1.690e+02 5.000e+01 2.000e+00 2018 03 22 10 22 40 2.742e+04 1.100e+03 1.600e+02 3.600e+01 2.000e+00 2018 03 22 10 32 40 2.824e+04 1.221e+03 1.490e+02 3.500e+01 0.000e+00 2018 03 22 10 42 40 2.914e+04 1.208e+03 1.840e+02 4.800e+01 1.000e+00 2018 03 22 10 52 40 3.271e+04 1.451e+03 2.150e+02 5.500e+01 3.000e+00 2018 03 22 11 02 40 3.442e+04 1.544e+03 2.080e+02 5.300e+01 1.000e+00 2018 03 22 11 12 40 3.560e+04 1.622e+03 1.940e+02 5.000e+01 2.000e+00 2018 03 22 11 22 40 3.720e+04 1.563e+03 2.070e+02 5.700e+01 3.000e+00 2018 03 22 11 32 40 3.531e+04 1.546e+03 2.250e+02 6.100e+01 1.000e+00 2018 03 22 11 42 40 4.097e+04 1.565e+03 2.070e+02 4.400e+01 1.000e+00 2018 03 22 11 52 40 4.408e+04 1.933e+03 2.670e+02 5.800e+01 4.000e+00 2018 03 22 12 02 41 5.044e+04 2.027e+03 2.740e+02 6.400e+01 1.000e+00 2018 03 22 12 12 41 5.046e+04 2.405e+03 3.090e+02 7.900e+01 3.000e+00 2018 03 22 12 22 41 4.581e+04 1.901e+03 2.520e+02 6.100e+01 3.000e+00 2018 03 22 12 32 41 5.917e+04 2.766e+03 3.370e+02 9.200e+01 6.000e+00 2018 03 22 12 42 41 6.365e+04 3.365e+03 3.580e+02 8.100e+01 4.000e+00 2018 03 22 12 52 41 6.920e+04 3.392e+03 3.630e+02 8.200e+01 1.000e+00 2018 03 22 13 02 41 7.078e+04 3.375e+03 3.780e+02 9.000e+01 3.000e+00 2018 03 22 13 12 41 6.563e+04 3.227e+03 3.230e+02 8.200e+01 3.000e+00 2018 03 22 13 22 41 6.352e+04 3.112e+03 3.040e+02 8.200e+01 4.000e+00 2018 03 22 13 32 41 6.186e+04 3.242e+03 3.040e+02 8.100e+01 3.000e+00 2018 03 22 13 42 42 5.776e+04 3.537e+03 3.490e+02 1.130e+02 5.000e+00 2018 03 22 13 52 42 6.379e+04 4.510e+03 3.910e+02 1.060e+02 1.000e+00 2018 03 22 14 02 42 6.225e+04 4.395e+03 3.500e+02 9.700e+01 2.000e+00 2018 03 22 14 12 42 6.363e+04 5.622e+03 3.890e+02 8.500e+01 3.000e+00 2018 03 22 14 22 42 6.424e+04 5.678e+03 3.800e+02 8.600e+01 5.000e+00 2018 03 22 14 32 42 6.509e+04 5.867e+03 4.630e+02 1.310e+02 7.000e+00 2018 03 22 14 42 42 5.693e+04 5.084e+03 4.250e+02 1.140e+02 2.000e+00 2018 03 22 14 52 42 8.500e+04 9.366e+03 6.290e+02 1.450e+02 2.000e+00 2018 03 22 15 02 42 8.622e+04 6.939e+03 5.910e+02 1.550e+02 0.000e+00 2018 03 22 15 12 42 6.869e+04 4.511e+03 4.770e+02 1.230e+02 4.000e+00 2018 03 22 15 22 43 6.556e+04 4.360e+03 5.290e+02 1.390e+02 3.000e+00 2018 03 22 15 32 43 7.700e+04 5.445e+03 6.620e+02 1.560e+02 5.000e+00 2018 03 22 15 42 43 7.741e+04 5.512e+03 7.150e+02 1.590e+02 2.000e+00 2018 03 22 15 52 43 7.347e+04 5.500e+03 6.840e+02 1.690e+02 9.000e+00 2018 03 22 16 02 43 6.443e+04 4.794e+03 5.720e+02 1.570e+02 3.000e+00 2018 03 22 16 12 43 6.569e+04 4.845e+03 5.500e+02 1.380e+02 3.000e+00 2018 03 22 16 22 43 7.369e+04 5.891e+03 6.310e+02 1.490e+02 7.000e+00 2018 03 22 16 32 43 6.927e+04 5.475e+03 6.030e+02 1.710e+02 5.000e+00 2018 03 22 16 42 43 6.650e+04 5.330e+03 5.940e+02 1.720e+02 2.000e+00 2018 03 22 16 52 43 6.678e+04 5.460e+03 6.340e+02 1.820e+02 9.000e+00 2018 03 22 17 02 44 6.789e+04 5.974e+03 7.030e+02 1.990e+02 1.300e+01 2018 03 22 17 12 44 6.864e+04 6.136e+03 8.280e+02 2.640e+02 1.300e+01 2018 03 22 17 22 44 7.701e+04 8.086e+03 1.231e+03 3.340e+02 6.000e+00 2018 03 22 17 32 44 6.934e+04 7.255e+03 1.226e+03 3.270e+02 1.000e+01 2018 03 22 17 42 44 7.210e+04 6.624e+03 1.004e+03 2.790e+02 9.000e+00 2018 03 22 17 52 44 7.255e+04 6.793e+03 8.670e+02 2.310e+02 8.000e+00 2018 03 22 18 02 44 7.494e+04 6.813e+03 7.970e+02 2.330e+02 6.000e+00 2018 03 22 18 12 44 7.351e+04 6.749e+03 7.540e+02 2.260e+02 7.000e+00 2018 03 22 18 22 44 6.685e+04 6.033e+03 6.940e+02 1.810e+02 7.000e+00 2018 03 22 18 32 44 6.164e+04 5.428e+03 6.390e+02 1.840e+02 6.000e+00 2018 03 22 18 42 45 5.860e+04 5.188e+03 6.010e+02 1.790e+02 9.000e+00 2018 03 22 18 52 45 4.930e+04 4.172e+03 5.880e+02 1.840e+02 4.000e+00 2018 03 22 19 02 45 6.590e+04 5.378e+03 7.350e+02 2.190e+02 1.000e+01 2018 03 22 19 12 45 7.093e+04 5.521e+03 7.410e+02 2.310e+02 1.000e+01 2018 03 22 19 22 45 7.466e+04 5.447e+03 7.180e+02 2.040e+02 1.000e+01 2018 03 22 19 32 45 7.490e+04 5.311e+03 6.940e+02 2.220e+02 5.000e+00 2018 03 22 19 42 45 7.727e+04 5.500e+03 7.200e+02 2.280e+02 5.000e+00 2018 03 22 19 52 45 7.659e+04 5.396e+03 7.100e+02 2.240e+02 9.000e+00 2018 03 22 20 02 45 7.209e+04 4.961e+03 6.970e+02 2.290e+02 1.000e+01 2018 03 22 20 12 45 7.872e+04 5.200e+03 6.540e+02 2.130e+02 4.000e+00 2018 03 22 20 22 46 6.976e+04 4.398e+03 5.650e+02 1.570e+02 7.000e+00 2018 03 22 20 32 46 6.735e+04 4.102e+03 5.520e+02 1.620e+02 6.000e+00 2018 03 22 20 42 46 6.717e+04 3.954e+03 4.880e+02 1.480e+02 6.000e+00 2018 03 22 20 52 46 7.117e+04 4.286e+03 5.080e+02 1.690e+02 2.000e+00 2018 03 22 21 02 46 7.432e+04 4.591e+03 5.360e+02 1.470e+02 5.000e+00 2018 03 22 21 12 46 7.258e+04 4.453e+03 5.210e+02 1.770e+02 5.000e+00 2018 03 22 21 22 46 6.749e+04 4.403e+03 5.120e+02 1.840e+02 6.000e+00 2018 03 22 21 32 46 7.234e+04 4.788e+03 5.000e+02 1.360e+02 2.000e+00 2018 03 22 21 42 46 7.844e+04 5.307e+03 6.210e+02 2.100e+02 7.000e+00 2018 03 22 21 52 46 7.234e+04 4.903e+03 5.710e+02 1.690e+02 3.000e+00 2018 03 22 22 02 47 7.113e+04 4.891e+03 5.600e+02 1.700e+02 5.000e+00 2018 03 22 22 12 47 7.015e+04 4.916e+03 5.580e+02 1.540e+02 8.000e+00 2018 03 22 22 22 47 7.446e+04 4.886e+03 5.380e+02 1.710e+02 6.000e+00 2018 03 22 22 32 47 9.039e+04 5.908e+03 6.560e+02 2.120e+02 5.000e+00 2018 03 22 22 42 47 9.081e+04 5.797e+03 6.460e+02 2.080e+02 7.000e+00 2018 03 22 22 52 47 8.680e+04 5.766e+03 6.560e+02 2.190e+02 5.000e+00 2018 03 22 23 02 47 8.103e+04 5.421e+03 6.190e+02 1.800e+02 7.000e+00 2018 03 22 23 12 47 5.265e+04 3.998e+03 4.450e+02 1.100e+02 6.000e+00 2018 03 22 23 22 47 5.095e+04 3.855e+03 4.360e+02 1.190e+02 6.000e+00 2018 03 22 23 32 47 3.669e+04 2.955e+03 3.710e+02 9.800e+01 2.000e+00 2018 03 22 23 42 48 1.862e+04 1.698e+03 2.170e+02 6.100e+01 3.000e+00 2018 03 22 23 52 48 1.359e+04 1.338e+03 1.990e+02 6.500e+01 5.000e+00