# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 03 16 00 01 00 4.741e+04 8.418e+03 2.557e+03 7.880e+02 1.000e+01 2018 03 16 00 11 00 4.554e+04 9.316e+03 2.674e+03 7.620e+02 5.000e+00 2018 03 16 00 21 00 4.217e+04 8.111e+03 2.398e+03 7.180e+02 4.000e+00 2018 03 16 00 31 00 3.884e+04 7.061e+03 2.124e+03 7.130e+02 4.000e+00 2018 03 16 00 41 00 4.076e+04 7.660e+03 2.269e+03 6.980e+02 4.000e+00 2018 03 16 00 51 00 4.107e+04 7.855e+03 2.306e+03 7.390e+02 3.000e+00 2018 03 16 01 01 00 4.089e+04 7.785e+03 2.417e+03 8.390e+02 5.000e+00 2018 03 16 01 11 01 3.869e+04 7.589e+03 2.467e+03 8.300e+02 9.000e+00 2018 03 16 01 21 01 3.323e+04 6.230e+03 2.018e+03 6.600e+02 6.000e+00 2018 03 16 01 31 01 3.426e+04 6.835e+03 2.224e+03 6.730e+02 7.000e+00 2018 03 16 01 41 01 3.534e+04 7.494e+03 2.347e+03 7.570e+02 7.000e+00 2018 03 16 01 51 01 3.549e+04 7.668e+03 2.406e+03 7.420e+02 4.000e+00 2018 03 16 02 01 01 3.330e+04 6.141e+03 2.059e+03 7.170e+02 4.000e+00 2018 03 16 02 11 01 3.664e+04 6.673e+03 2.176e+03 7.130e+02 6.000e+00 2018 03 16 02 21 01 4.266e+04 7.963e+03 2.391e+03 8.020e+02 7.000e+00 2018 03 16 02 31 01 3.892e+04 7.230e+03 2.311e+03 7.950e+02 5.000e+00 2018 03 16 02 41 01 3.860e+04 7.221e+03 2.422e+03 8.490e+02 4.000e+00 2018 03 16 02 51 02 4.141e+04 8.057e+03 2.528e+03 8.570e+02 4.000e+00 2018 03 16 03 01 02 4.749e+04 1.023e+04 3.094e+03 8.970e+02 2.000e+00 2018 03 16 03 11 02 4.461e+04 8.891e+03 2.810e+03 8.880e+02 3.000e+00 2018 03 16 03 21 02 3.970e+04 7.642e+03 2.429e+03 7.780e+02 4.000e+00 2018 03 16 03 31 02 4.403e+04 1.014e+04 3.235e+03 9.710e+02 7.000e+00 2018 03 16 03 41 02 4.613e+04 1.080e+04 3.317e+03 1.008e+03 7.000e+00 2018 03 16 03 51 02 5.172e+04 1.238e+04 4.024e+03 1.207e+03 5.000e+00 2018 03 16 04 01 02 4.506e+04 1.000e+04 3.288e+03 1.115e+03 4.000e+00 2018 03 16 04 11 02 3.986e+04 8.715e+03 2.835e+03 9.370e+02 2.000e+00 2018 03 16 04 21 03 4.886e+04 1.204e+04 3.822e+03 1.136e+03 4.000e+00 2018 03 16 04 31 03 4.540e+04 1.183e+04 3.854e+03 1.172e+03 1.000e+00 2018 03 16 04 41 03 4.426e+04 1.082e+04 3.599e+03 1.148e+03 4.000e+00 2018 03 16 04 51 03 4.684e+04 1.114e+04 3.898e+03 1.330e+03 2.000e+00 2018 03 16 05 01 03 4.531e+04 1.084e+04 3.724e+03 1.199e+03 3.000e+00 2018 03 16 05 11 03 4.293e+04 1.005e+04 3.275e+03 1.075e+03 2.000e+00 2018 03 16 05 21 03 5.165e+04 1.382e+04 4.336e+03 1.331e+03 3.000e+00 2018 03 16 05 31 03 4.896e+04 1.196e+04 3.941e+03 1.248e+03 4.000e+00 2018 03 16 05 41 03 4.606e+04 1.180e+04 3.849e+03 1.186e+03 5.000e+00 2018 03 16 05 51 03 4.188e+04 9.425e+03 3.088e+03 1.010e+03 8.000e+00 2018 03 16 06 01 04 4.216e+04 9.393e+03 2.961e+03 9.330e+02 5.000e+00 2018 03 16 06 11 04 4.197e+04 8.619e+03 2.883e+03 9.400e+02 4.000e+00 2018 03 16 06 21 04 4.124e+04 8.695e+03 2.973e+03 1.002e+03 5.000e+00 2018 03 16 06 31 04 4.080e+04 8.242e+03 2.842e+03 9.500e+02 2.000e+00 2018 03 16 06 41 04 4.175e+04 8.066e+03 2.682e+03 8.950e+02 5.000e+00 2018 03 16 06 51 04 4.403e+04 8.020e+03 2.683e+03 8.970e+02 3.000e+00 2018 03 16 07 01 04 4.548e+04 7.997e+03 2.660e+03 9.040e+02 2.000e+00 2018 03 16 07 11 04 4.080e+04 7.051e+03 2.269e+03 7.320e+02 7.000e+00 2018 03 16 07 21 04 4.099e+04 6.995e+03 2.233e+03 7.070e+02 5.000e+00 2018 03 16 07 31 04 4.174e+04 7.183e+03 2.142e+03 6.200e+02 3.000e+00 2018 03 16 07 41 05 3.854e+04 6.504e+03 1.859e+03 5.290e+02 1.000e+00 2018 03 16 07 51 05 3.827e+04 6.460e+03 1.893e+03 5.710e+02 4.000e+00 2018 03 16 08 01 05 3.657e+04 5.559e+03 1.664e+03 5.410e+02 4.000e+00 2018 03 16 08 11 05 3.458e+04 4.720e+03 1.370e+03 4.380e+02 6.000e+00 2018 03 16 08 21 05 3.484e+04 4.637e+03 1.343e+03 4.380e+02 4.000e+00 2018 03 16 08 31 05 3.597e+04 4.885e+03 1.507e+03 5.350e+02 2.000e+00 2018 03 16 08 41 05 3.752e+04 5.337e+03 1.614e+03 5.660e+02 1.000e+01 2018 03 16 08 51 05 3.761e+04 5.605e+03 1.753e+03 5.880e+02 4.000e+00 2018 03 16 09 01 05 3.920e+04 6.166e+03 1.960e+03 6.820e+02 3.000e+00 2018 03 16 09 11 05 3.938e+04 5.921e+03 1.797e+03 5.810e+02 1.000e+00 2018 03 16 09 21 06 4.068e+04 5.660e+03 1.668e+03 5.840e+02 3.000e+00 2018 03 16 09 31 06 4.470e+04 7.580e+03 2.220e+03 6.710e+02 2.000e+00 2018 03 16 09 41 06 4.360e+04 7.524e+03 2.292e+03 7.490e+02 4.000e+00 2018 03 16 09 51 06 4.233e+04 7.204e+03 2.175e+03 6.620e+02 6.000e+00 2018 03 16 10 01 06 4.318e+04 7.265e+03 2.171e+03 6.610e+02 5.000e+00 2018 03 16 10 11 06 4.139e+04 7.187e+03 2.084e+03 5.840e+02 6.000e+00 2018 03 16 10 21 06 3.930e+04 6.434e+03 1.710e+03 4.450e+02 1.000e+00 2018 03 16 10 31 06 4.020e+04 7.717e+03 2.191e+03 6.220e+02 3.000e+00 2018 03 16 10 41 06 4.035e+04 8.195e+03 2.308e+03 6.120e+02 5.000e+00 2018 03 16 10 51 06 3.758e+04 7.444e+03 2.196e+03 5.890e+02 4.000e+00 2018 03 16 11 01 07 3.862e+04 7.034e+03 1.889e+03 5.140e+02 2.000e+00 2018 03 16 11 11 07 3.872e+04 7.458e+03 2.144e+03 6.370e+02 7.000e+00 2018 03 16 11 21 07 3.512e+04 5.856e+03 1.590e+03 4.790e+02 5.000e+00 2018 03 16 11 31 07 3.103e+04 4.404e+03 1.143e+03 3.580e+02 4.000e+00 2018 03 16 11 41 07 3.097e+04 4.107e+03 1.079e+03 2.970e+02 3.000e+00 2018 03 16 11 51 07 3.272e+04 4.453e+03 1.185e+03 3.600e+02 5.000e+00 2018 03 16 12 01 07 3.327e+04 4.700e+03 1.303e+03 3.830e+02 3.000e+00 2018 03 16 12 11 07 3.472e+04 4.869e+03 1.380e+03 4.320e+02 3.000e+00 2018 03 16 12 21 07 3.620e+04 5.258e+03 1.518e+03 4.700e+02 4.000e+00 2018 03 16 12 31 07 3.599e+04 5.368e+03 1.540e+03 5.270e+02 5.000e+00 2018 03 16 12 41 08 3.648e+04 5.432e+03 1.613e+03 5.620e+02 5.000e+00 2018 03 16 12 51 08 3.676e+04 5.586e+03 1.578e+03 5.360e+02 2.000e+00 2018 03 16 13 01 08 3.547e+04 5.393e+03 1.576e+03 5.500e+02 4.000e+00 2018 03 16 13 11 08 3.602e+04 5.325e+03 1.659e+03 6.010e+02 1.000e+00 2018 03 16 13 21 08 3.589e+04 4.945e+03 1.420e+03 4.700e+02 2.000e+00 2018 03 16 13 31 08 3.863e+04 5.062e+03 1.459e+03 5.010e+02 4.000e+00 2018 03 16 13 41 08 4.142e+04 5.030e+03 1.337e+03 4.350e+02 2.000e+00 2018 03 16 13 51 08 4.088e+04 4.781e+03 1.113e+03 2.090e+02 2.000e+00 2018 03 16 14 01 08 2.990e+04 4.016e+03 9.890e+02 1.820e+02 1.000e+00 2018 03 16 14 11 08 2.634e+04 3.965e+03 1.005e+03 1.810e+02 1.000e+00 2018 03 16 14 21 09 2.322e+04 3.913e+03 1.055e+03 2.320e+02 1.000e+00 2018 03 16 14 31 09 2.058e+04 3.605e+03 1.048e+03 2.640e+02 2.000e+00 2018 03 16 14 41 09 1.749e+04 3.159e+03 8.260e+02 2.130e+02 1.000e+00 2018 03 16 14 51 09 1.602e+04 3.003e+03 8.620e+02 2.310e+02 0.000e+00 2018 03 16 15 01 09 1.515e+04 3.024e+03 8.610e+02 2.450e+02 0.000e+00 2018 03 16 15 11 09 1.402e+04 2.860e+03 8.420e+02 2.200e+02 1.000e+00 2018 03 16 15 21 09 1.531e+04 2.928e+03 8.720e+02 2.360e+02 1.000e+00 2018 03 16 15 31 09 1.625e+04 3.069e+03 9.300e+02 2.480e+02 1.000e+00 2018 03 16 15 41 09 1.410e+04 2.820e+03 8.670e+02 2.570e+02 1.000e+00 2018 03 16 15 51 09 1.356e+04 2.680e+03 8.100e+02 2.130e+02 0.000e+00 2018 03 16 16 01 10 1.370e+04 2.690e+03 8.670e+02 2.460e+02 1.000e+00 2018 03 16 16 11 10 1.431e+04 2.702e+03 7.800e+02 2.390e+02 1.000e+00 2018 03 16 16 21 10 1.638e+04 2.998e+03 9.160e+02 2.700e+02 2.000e+00 2018 03 16 16 31 10 1.574e+04 2.901e+03 8.650e+02 2.390e+02 3.000e+00 2018 03 16 16 41 10 2.030e+04 3.095e+03 8.580e+02 2.290e+02 2.000e+00 2018 03 16 16 51 10 1.543e+04 2.800e+03 8.350e+02 2.220e+02 2.000e+00 2018 03 16 17 01 10 1.276e+04 2.433e+03 7.270e+02 2.010e+02 0.000e+00 2018 03 16 17 11 10 1.354e+04 2.361e+03 6.790e+02 1.850e+02 1.000e+00 2018 03 16 17 21 10 1.268e+04 2.293e+03 6.660e+02 1.990e+02 1.000e+00 2018 03 16 17 31 10 1.043e+04 2.004e+03 5.480e+02 1.640e+02 2.000e+00 2018 03 16 17 41 11 1.106e+04 2.186e+03 6.870e+02 1.850e+02 0.000e+00 2018 03 16 17 51 11 1.082e+04 2.242e+03 6.360e+02 1.490e+02 0.000e+00 2018 03 16 18 01 11 1.149e+04 2.337e+03 6.560e+02 1.510e+02 0.000e+00 2018 03 16 18 11 11 1.240e+04 2.573e+03 6.940e+02 1.710e+02 0.000e+00 2018 03 16 18 21 11 1.272e+04 2.831e+03 7.530e+02 1.920e+02 1.000e+00 2018 03 16 18 31 11 1.398e+04 3.165e+03 8.730e+02 2.370e+02 0.000e+00 2018 03 16 18 41 11 1.384e+04 3.256e+03 9.580e+02 2.750e+02 1.000e+00 2018 03 16 18 51 11 1.060e+04 2.548e+03 7.650e+02 2.610e+02 1.000e+00 2018 03 16 19 01 11 1.226e+04 2.908e+03 9.160e+02 2.860e+02 3.000e+00 2018 03 16 19 11 11 1.240e+04 2.952e+03 9.470e+02 3.000e+02 0.000e+00 2018 03 16 19 21 12 1.359e+04 3.259e+03 1.065e+03 3.360e+02 1.000e+00 2018 03 16 19 31 12 1.462e+04 3.453e+03 1.084e+03 3.450e+02 4.000e+00 2018 03 16 19 41 12 1.506e+04 3.498e+03 1.025e+03 3.120e+02 3.000e+00 2018 03 16 19 51 12 1.352e+04 2.907e+03 8.180e+02 2.560e+02 3.000e+00 2018 03 16 20 01 12 1.285e+04 2.642e+03 7.660e+02 2.480e+02 2.000e+00 2018 03 16 20 11 12 1.371e+04 2.537e+03 6.660e+02 2.320e+02 0.000e+00 2018 03 16 20 21 12 1.418e+04 2.498e+03 6.490e+02 2.240e+02 1.000e+00 2018 03 16 20 31 12 1.403e+04 2.272e+03 5.580e+02 1.600e+02 2.000e+00 2018 03 16 20 41 12 1.349e+04 2.233e+03 5.240e+02 1.500e+02 2.000e+00 2018 03 16 20 51 12 1.341e+04 2.060e+03 4.690e+02 1.560e+02 1.000e+00 2018 03 16 21 01 13 1.417e+04 2.170e+03 4.460e+02 1.330e+02 1.000e+00 2018 03 16 21 11 13 1.381e+04 2.178e+03 4.680e+02 1.240e+02 0.000e+00 2018 03 16 21 21 13 1.468e+04 2.361e+03 5.280e+02 1.580e+02 0.000e+00 2018 03 16 21 31 13 1.523e+04 2.238e+03 4.960e+02 1.560e+02 0.000e+00 2018 03 16 21 41 13 1.626e+04 2.309e+03 5.450e+02 1.620e+02 0.000e+00 2018 03 16 21 51 13 1.400e+04 2.199e+03 4.750e+02 1.290e+02 0.000e+00 2018 03 16 22 01 13 1.580e+04 3.004e+03 5.440e+02 1.580e+02 2.000e+00 2018 03 16 22 11 13 1.661e+04 3.728e+03 6.530e+02 1.310e+02 0.000e+00 2018 03 16 22 21 13 1.663e+04 3.321e+03 7.800e+02 1.670e+02 2.000e+00 2018 03 16 22 31 13 1.755e+04 4.054e+03 9.400e+02 1.820e+02 1.000e+00 2018 03 16 22 41 14 1.638e+04 2.757e+03 7.340e+02 1.780e+02 2.000e+00 2018 03 16 22 51 14 1.797e+04 3.950e+03 9.470e+02 1.820e+02 4.000e+00 2018 03 16 23 01 14 1.687e+04 2.891e+03 7.160e+02 1.900e+02 2.000e+00 2018 03 16 23 11 14 1.721e+04 2.482e+03 5.920e+02 1.590e+02 3.000e+00 2018 03 16 23 21 14 1.787e+04 2.591e+03 6.260e+02 1.690e+02 2.000e+00 2018 03 16 23 31 14 1.777e+04 2.516e+03 5.840e+02 1.660e+02 1.000e+00 2018 03 16 23 41 14 1.822e+04 2.578e+03 6.030e+02 1.550e+02 0.000e+00 2018 03 16 23 51 14 1.863e+04 2.581e+03 6.240e+02 1.850e+02 3.000e+00