# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 03 08 00 09 07 5.190e+04 5.602e+03 8.250e+02 2.610e+02 3.000e+00 2018 03 08 00 19 07 5.147e+04 5.390e+03 8.240e+02 2.550e+02 2.000e+00 2018 03 08 00 29 07 5.026e+04 5.375e+03 8.120e+02 2.440e+02 1.000e+00 2018 03 08 00 39 08 5.114e+04 5.478e+03 8.330e+02 2.400e+02 3.000e+00 2018 03 08 00 49 08 5.201e+04 5.547e+03 8.030e+02 2.050e+02 0.000e+00 2018 03 08 00 59 08 5.271e+04 5.780e+03 8.320e+02 2.560e+02 2.000e+00 2018 03 08 01 09 08 4.989e+04 5.302e+03 7.710e+02 2.240e+02 2.000e+00 2018 03 08 01 19 08 4.697e+04 4.916e+03 7.230e+02 2.090e+02 1.000e+00 2018 03 08 01 29 08 4.709e+04 4.965e+03 7.150e+02 1.970e+02 3.000e+00 2018 03 08 01 39 08 4.922e+04 5.135e+03 7.530e+02 2.000e+02 0.000e+00 2018 03 08 01 49 08 5.372e+04 5.345e+03 7.780e+02 2.080e+02 1.000e+00 2018 03 08 01 59 08 5.863e+04 5.732e+03 7.560e+02 1.940e+02 1.000e+00 2018 03 08 02 09 08 6.143e+04 5.923e+03 7.680e+02 2.150e+02 0.000e+00 2018 03 08 02 19 09 6.217e+04 6.136e+03 8.020e+02 2.050e+02 1.000e+00 2018 03 08 02 29 09 6.165e+04 6.111e+03 8.480e+02 2.390e+02 1.000e+00 2018 03 08 02 39 09 6.168e+04 6.075e+03 7.680e+02 1.930e+02 1.000e+00 2018 03 08 02 49 09 6.296e+04 6.338e+03 7.970e+02 2.330e+02 3.000e+00 2018 03 08 02 59 09 6.067e+04 6.069e+03 6.960e+02 1.930e+02 1.000e+00 2018 03 08 03 09 09 6.130e+04 6.260e+03 8.150e+02 2.250e+02 2.000e+00 2018 03 08 03 19 09 6.320e+04 6.424e+03 8.500e+02 2.280e+02 1.000e+00 2018 03 08 03 29 09 6.762e+04 6.667e+03 8.270e+02 2.260e+02 1.000e+00 2018 03 08 03 39 09 6.760e+04 6.698e+03 8.170e+02 2.090e+02 3.000e+00 2018 03 08 03 49 09 6.758e+04 6.780e+03 8.400e+02 2.290e+02 3.000e+00 2018 03 08 03 59 10 7.445e+04 7.268e+03 8.730e+02 2.480e+02 1.000e+00 2018 03 08 04 09 10 8.048e+04 7.552e+03 9.630e+02 2.550e+02 0.000e+00 2018 03 08 04 19 10 8.064e+04 7.535e+03 8.530e+02 2.170e+02 1.000e+00 2018 03 08 04 29 10 8.399e+04 7.722e+03 8.840e+02 2.420e+02 1.000e+00 2018 03 08 04 39 10 8.221e+04 7.573e+03 8.440e+02 2.050e+02 0.000e+00 2018 03 08 04 49 10 7.743e+04 7.156e+03 8.120e+02 2.160e+02 2.000e+00 2018 03 08 04 59 10 7.223e+04 7.014e+03 8.310e+02 2.660e+02 0.000e+00 2018 03 08 05 09 10 7.148e+04 6.701e+03 8.020e+02 2.350e+02 1.000e+00 2018 03 08 05 19 10 7.217e+04 6.902e+03 8.350e+02 2.390e+02 3.000e+00 2018 03 08 05 29 11 7.131e+04 6.741e+03 8.580e+02 2.260e+02 1.000e+00 2018 03 08 05 39 11 7.246e+04 6.785e+03 8.280e+02 2.460e+02 1.000e+00 2018 03 08 05 49 11 7.276e+04 6.953e+03 8.240e+02 2.310e+02 2.000e+00 2018 03 08 05 59 11 7.682e+04 7.069e+03 9.050e+02 2.510e+02 3.000e+00 2018 03 08 06 09 11 8.484e+04 7.367e+03 9.090e+02 2.390e+02 1.000e+00 2018 03 08 06 19 11 9.426e+04 8.010e+03 1.007e+03 2.700e+02 4.000e+00 2018 03 08 06 29 11 9.275e+04 8.496e+03 1.080e+03 2.710e+02 0.000e+00 2018 03 08 06 39 11 9.390e+04 8.583e+03 1.058e+03 2.870e+02 3.000e+00 2018 03 08 06 49 11 9.353e+04 8.621e+03 1.078e+03 2.860e+02 3.000e+00 2018 03 08 06 59 11 8.931e+04 8.421e+03 1.006e+03 2.560e+02 1.000e+00 2018 03 08 07 09 12 9.415e+04 8.468e+03 9.920e+02 2.460e+02 1.000e+00 2018 03 08 07 19 12 9.469e+04 8.575e+03 9.670e+02 2.570e+02 2.000e+00 2018 03 08 07 29 12 1.012e+05 9.213e+03 1.014e+03 2.380e+02 7.000e+00 2018 03 08 07 39 12 1.074e+05 9.496e+03 1.088e+03 2.850e+02 4.000e+00 2018 03 08 07 49 12 1.115e+05 9.892e+03 1.130e+03 2.690e+02 4.000e+00 2018 03 08 07 59 12 1.130e+05 9.870e+03 1.047e+03 2.740e+02 1.000e+00 2018 03 08 08 09 12 1.109e+05 9.601e+03 1.008e+03 2.410e+02 0.000e+00 2018 03 08 08 19 12 1.168e+05 9.804e+03 1.046e+03 2.550e+02 3.000e+00 2018 03 08 08 29 12 1.199e+05 9.493e+03 1.066e+03 2.130e+02 2.000e+00 2018 03 08 08 39 12 1.234e+05 9.722e+03 1.060e+03 2.230e+02 4.000e+00 2018 03 08 08 49 13 1.278e+05 1.002e+04 9.440e+02 1.920e+02 1.000e+00 2018 03 08 08 59 13 1.327e+05 1.015e+04 9.360e+02 1.940e+02 4.000e+00 2018 03 08 09 09 13 1.266e+05 9.005e+03 9.230e+02 1.800e+02 0.000e+00 2018 03 08 09 19 13 1.385e+05 9.625e+03 9.290e+02 1.610e+02 0.000e+00 2018 03 08 09 29 13 1.520e+05 9.704e+03 8.890e+02 1.600e+02 2.000e+00 2018 03 08 09 39 13 1.649e+05 9.934e+03 9.150e+02 1.700e+02 1.000e+00 2018 03 08 09 49 13 1.731e+05 1.040e+04 8.980e+02 1.680e+02 0.000e+00 2018 03 08 09 59 13 1.723e+05 9.824e+03 8.690e+02 1.540e+02 0.000e+00 2018 03 08 10 09 13 1.611e+05 9.081e+03 8.650e+02 1.440e+02 0.000e+00 2018 03 08 10 19 13 1.660e+05 8.887e+03 8.320e+02 1.610e+02 1.000e+00 2018 03 08 10 29 14 1.793e+05 9.383e+03 8.550e+02 1.440e+02 2.000e+00 2018 03 08 10 39 14 1.793e+05 8.886e+03 8.130e+02 1.270e+02 2.000e+00 2018 03 08 10 49 14 1.546e+05 7.070e+03 5.690e+02 9.400e+01 1.000e+00 2018 03 08 10 59 14 1.513e+05 6.257e+03 4.920e+02 7.200e+01 1.000e+00 2018 03 08 11 09 14 1.502e+05 6.000e+03 4.590e+02 7.000e+01 3.000e+00 2018 03 08 11 19 14 1.445e+05 5.538e+03 4.570e+02 6.800e+01 0.000e+00 2018 03 08 11 29 14 1.465e+05 5.319e+03 4.380e+02 7.100e+01 0.000e+00 2018 03 08 11 39 14 1.517e+05 5.616e+03 4.230e+02 6.400e+01 2.000e+00 2018 03 08 11 49 14 1.568e+05 5.647e+03 4.300e+02 7.700e+01 3.000e+00 2018 03 08 11 59 14 1.388e+05 5.039e+03 3.750e+02 5.800e+01 2.000e+00 2018 03 08 12 09 15 1.199e+05 4.574e+03 3.610e+02 5.200e+01 0.000e+00 2018 03 08 12 19 15 1.205e+05 4.568e+03 4.240e+02 6.400e+01 0.000e+00 2018 03 08 12 29 15 1.253e+05 4.232e+03 3.680e+02 5.000e+01 1.000e+00 2018 03 08 12 39 15 1.191e+05 3.944e+03 3.530e+02 6.400e+01 0.000e+00 2018 03 08 12 49 15 9.549e+04 3.238e+03 3.080e+02 4.100e+01 1.000e+00 2018 03 08 12 59 15 9.658e+04 3.336e+03 3.050e+02 3.900e+01 0.000e+00 2018 03 08 13 09 15 8.996e+04 2.992e+03 2.700e+02 3.500e+01 0.000e+00 2018 03 08 13 19 15 7.700e+04 2.625e+03 2.480e+02 4.500e+01 1.000e+00 2018 03 08 13 29 15 7.922e+04 2.778e+03 2.700e+02 5.500e+01 1.000e+00 2018 03 08 13 39 15 8.144e+04 2.855e+03 3.020e+02 6.300e+01 0.000e+00 2018 03 08 13 49 16 7.759e+04 2.662e+03 2.600e+02 4.900e+01 0.000e+00 2018 03 08 13 59 16 6.757e+04 2.369e+03 2.550e+02 4.900e+01 2.000e+00 2018 03 08 14 09 16 6.795e+04 2.244e+03 2.500e+02 5.400e+01 0.000e+00 2018 03 08 14 19 16 6.345e+04 2.045e+03 2.000e+02 4.000e+01 0.000e+00 2018 03 08 14 29 16 6.343e+04 2.151e+03 2.330e+02 4.200e+01 0.000e+00 2018 03 08 14 39 16 7.409e+04 2.588e+03 2.600e+02 4.300e+01 0.000e+00 2018 03 08 14 49 16 7.878e+04 2.939e+03 2.760e+02 4.300e+01 0.000e+00 2018 03 08 14 59 16 6.544e+04 2.163e+03 2.010e+02 2.600e+01 0.000e+00 2018 03 08 15 09 16 7.115e+04 2.415e+03 2.330e+02 3.900e+01 2.000e+00 2018 03 08 15 19 16 7.598e+04 2.575e+03 2.310e+02 4.600e+01 1.000e+00 2018 03 08 15 29 17 7.842e+04 2.652e+03 2.400e+02 4.600e+01 2.000e+00 2018 03 08 15 39 17 6.708e+04 2.087e+03 1.980e+02 3.700e+01 0.000e+00 2018 03 08 15 49 17 5.760e+04 1.823e+03 1.980e+02 4.600e+01 1.000e+00 2018 03 08 15 59 17 5.261e+04 1.603e+03 1.440e+02 3.200e+01 0.000e+00 2018 03 08 16 09 17 5.875e+04 1.821e+03 2.150e+02 4.200e+01 0.000e+00 2018 03 08 16 19 17 6.290e+04 1.880e+03 1.920e+02 3.600e+01 1.000e+00 2018 03 08 16 29 17 7.736e+04 1.973e+03 1.670e+02 3.000e+01 1.000e+00 2018 03 08 16 39 17 7.799e+04 1.924e+03 1.790e+02 3.200e+01 0.000e+00 2018 03 08 16 49 17 6.450e+04 1.842e+03 2.030e+02 3.500e+01 1.000e+00 2018 03 08 16 59 18 5.461e+04 1.379e+03 1.710e+02 3.800e+01 1.000e+00 2018 03 08 17 09 18 6.969e+04 1.806e+03 1.820e+02 4.600e+01 0.000e+00 2018 03 08 17 19 18 6.920e+04 1.944e+03 2.270e+02 5.600e+01 0.000e+00 2018 03 08 17 29 18 7.448e+04 1.929e+03 1.920e+02 3.700e+01 0.000e+00 2018 03 08 17 39 18 8.262e+04 2.137e+03 2.010e+02 4.300e+01 0.000e+00 2018 03 08 17 49 18 9.282e+04 2.474e+03 2.360e+02 5.300e+01 0.000e+00 2018 03 08 17 59 18 1.051e+05 2.977e+03 2.410e+02 5.000e+01 0.000e+00 2018 03 08 18 09 18 1.072e+05 2.835e+03 2.360e+02 4.900e+01 0.000e+00 2018 03 08 18 19 18 1.132e+05 2.825e+03 2.220e+02 5.300e+01 1.000e+00 2018 03 08 18 29 18 1.360e+05 3.919e+03 2.630e+02 5.700e+01 0.000e+00 2018 03 08 18 39 19 1.413e+05 4.371e+03 2.620e+02 5.300e+01 0.000e+00 2018 03 08 18 49 19 1.456e+05 4.435e+03 2.620e+02 6.000e+01 0.000e+00 2018 03 08 18 59 19 1.466e+05 4.388e+03 2.890e+02 3.900e+01 0.000e+00 2018 03 08 19 09 19 1.535e+05 4.626e+03 2.300e+02 4.000e+01 1.000e+00 2018 03 08 19 19 19 1.528e+05 4.739e+03 2.910e+02 6.000e+01 0.000e+00 2018 03 08 19 29 19 1.553e+05 5.085e+03 3.120e+02 5.600e+01 0.000e+00 2018 03 08 19 39 19 1.657e+05 5.528e+03 3.240e+02 6.400e+01 0.000e+00 2018 03 08 19 49 19 1.645e+05 5.699e+03 3.120e+02 5.100e+01 0.000e+00 2018 03 08 19 59 19 1.753e+05 6.429e+03 3.490e+02 6.700e+01 0.000e+00 2018 03 08 20 09 19 1.818e+05 7.147e+03 3.530e+02 8.100e+01 1.000e+00 2018 03 08 20 19 20 1.796e+05 6.904e+03 3.510e+02 7.300e+01 1.000e+00 2018 03 08 20 29 20 1.801e+05 7.655e+03 3.810e+02 9.500e+01 0.000e+00 2018 03 08 20 39 20 1.824e+05 8.005e+03 4.190e+02 9.700e+01 1.000e+00 2018 03 08 20 49 20 1.593e+05 9.591e+03 7.070e+02 1.930e+02 0.000e+00 2018 03 08 20 59 20 1.724e+05 1.093e+04 6.120e+02 1.410e+02 0.000e+00 2018 03 08 21 09 20 1.624e+05 1.061e+04 6.360e+02 1.220e+02 0.000e+00 2018 03 08 21 19 20 1.590e+05 1.138e+04 6.640e+02 1.180e+02 0.000e+00 2018 03 08 21 29 20 1.790e+05 1.208e+04 6.770e+02 1.300e+02 1.000e+00 2018 03 08 21 39 20 1.874e+05 1.305e+04 7.300e+02 1.470e+02 1.000e+00 2018 03 08 21 49 20 1.843e+05 1.770e+04 1.263e+03 2.300e+02 3.000e+00 2018 03 08 21 59 21 1.865e+05 2.206e+04 2.223e+03 4.060e+02 3.000e+00 2018 03 08 22 09 21 1.591e+05 1.758e+04 1.971e+03 4.730e+02 1.000e+00 2018 03 08 22 19 21 1.129e+05 1.436e+04 2.286e+03 5.340e+02 0.000e+00 2018 03 08 22 29 21 7.656e+04 1.222e+04 3.039e+03 8.880e+02 0.000e+00 2018 03 08 22 39 21 5.184e+04 1.103e+04 3.627e+03 1.047e+03 1.000e+00 2018 03 08 22 49 21 3.613e+04 1.127e+04 4.224e+03 1.196e+03 1.000e+00 2018 03 08 22 59 21 3.018e+04 1.153e+04 4.358e+03 1.351e+03 2.000e+00 2018 03 08 23 09 21 3.022e+04 1.182e+04 4.671e+03 1.306e+03 1.000e+00 2018 03 08 23 19 21 3.053e+04 1.226e+04 4.781e+03 1.459e+03 0.000e+00 2018 03 08 23 29 21 2.912e+04 1.132e+04 4.289e+03 1.260e+03 1.000e+00 2018 03 08 23 39 22 2.672e+04 1.042e+04 3.909e+03 1.076e+03 1.000e+00 2018 03 08 23 49 22 2.622e+04 9.874e+03 3.391e+03 8.300e+02 0.000e+00 2018 03 08 23 59 22 2.475e+04 9.071e+03 2.984e+03 6.650e+02 1.000e+00