# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 03 01 00 07 13 1.196e+05 1.383e+04 2.431e+03 9.320e+02 1.300e+01 2018 03 01 00 17 13 1.169e+05 1.326e+04 2.383e+03 8.570e+02 1.500e+01 2018 03 01 00 27 13 1.260e+05 1.458e+04 2.602e+03 8.830e+02 1.000e+01 2018 03 01 00 37 13 1.082e+05 1.208e+04 2.055e+03 7.120e+02 4.000e+00 2018 03 01 00 47 13 1.087e+05 1.188e+04 1.974e+03 6.630e+02 2.000e+00 2018 03 01 00 57 13 1.021e+05 1.090e+04 1.775e+03 6.120e+02 4.000e+00 2018 03 01 01 07 13 1.012e+05 1.077e+04 1.774e+03 5.370e+02 5.000e+00 2018 03 01 01 17 14 1.025e+05 1.089e+04 1.785e+03 5.540e+02 4.000e+00 2018 03 01 01 27 14 1.038e+05 1.090e+04 1.826e+03 5.890e+02 4.000e+00 2018 03 01 01 37 14 1.054e+05 1.125e+04 1.773e+03 5.710e+02 4.000e+00 2018 03 01 01 47 14 1.085e+05 1.154e+04 1.876e+03 5.560e+02 5.000e+00 2018 03 01 01 57 14 1.058e+05 1.108e+04 1.803e+03 5.650e+02 2.000e+00 2018 03 01 02 07 14 1.055e+05 1.065e+04 1.729e+03 5.190e+02 2.000e+00 2018 03 01 02 17 14 1.083e+05 1.091e+04 1.705e+03 4.600e+02 3.000e+00 2018 03 01 02 27 14 1.098e+05 1.095e+04 1.753e+03 4.920e+02 8.000e+00 2018 03 01 02 37 14 1.124e+05 1.140e+04 1.777e+03 4.780e+02 4.000e+00 2018 03 01 02 47 14 1.115e+05 1.133e+04 1.724e+03 4.580e+02 3.000e+00 2018 03 01 02 57 15 1.081e+05 1.125e+04 1.865e+03 4.760e+02 3.000e+00 2018 03 01 03 07 15 1.058e+05 1.087e+04 1.854e+03 5.070e+02 4.000e+00 2018 03 01 03 17 15 9.464e+04 9.916e+03 1.679e+03 4.490e+02 0.000e+00 2018 03 01 03 27 15 8.516e+04 8.708e+03 1.424e+03 3.780e+02 1.000e+00 2018 03 01 03 37 15 7.404e+04 7.790e+03 1.399e+03 3.560e+02 3.000e+00 2018 03 01 03 47 15 6.648e+04 7.173e+03 1.262e+03 3.120e+02 2.000e+00 2018 03 01 03 57 15 6.010e+04 7.149e+03 1.459e+03 3.280e+02 1.000e+00 2018 03 01 04 07 15 5.609e+04 7.462e+03 1.566e+03 3.490e+02 1.000e+00 2018 03 01 04 17 15 4.966e+04 8.071e+03 2.048e+03 5.090e+02 3.000e+00 2018 03 01 04 27 15 4.170e+04 7.166e+03 1.908e+03 4.550e+02 0.000e+00 2018 03 01 04 37 16 3.568e+04 6.710e+03 1.796e+03 4.540e+02 0.000e+00 2018 03 01 04 47 16 3.307e+04 6.210e+03 1.625e+03 3.300e+02 2.000e+00 2018 03 01 04 57 16 4.454e+04 7.977e+03 1.946e+03 4.300e+02 2.000e+00 2018 03 01 05 07 16 2.821e+04 6.492e+03 1.882e+03 4.780e+02 0.000e+00 2018 03 01 05 17 16 3.366e+04 8.153e+03 2.439e+03 6.180e+02 6.000e+00 2018 03 01 05 27 16 2.703e+04 7.278e+03 2.331e+03 5.420e+02 2.000e+00 2018 03 01 05 37 16 2.486e+04 7.287e+03 2.296e+03 5.390e+02 0.000e+00 2018 03 01 05 47 16 2.288e+04 6.836e+03 2.108e+03 4.240e+02 2.000e+00 2018 03 01 05 57 16 2.426e+04 7.166e+03 2.153e+03 4.820e+02 0.000e+00 2018 03 01 06 07 16 2.404e+04 7.213e+03 2.315e+03 5.900e+02 0.000e+00 2018 03 01 06 17 17 2.325e+04 7.105e+03 2.087e+03 4.750e+02 2.000e+00 2018 03 01 06 27 17 2.237e+04 6.863e+03 2.018e+03 3.880e+02 0.000e+00 2018 03 01 06 37 17 1.959e+04 5.728e+03 1.623e+03 2.990e+02 0.000e+00 2018 03 01 06 47 17 1.755e+04 5.166e+03 1.442e+03 2.770e+02 1.000e+00 2018 03 01 06 57 17 2.246e+04 5.462e+03 1.431e+03 2.480e+02 1.000e+00 2018 03 01 07 07 17 2.828e+04 5.063e+03 1.311e+03 3.010e+02 1.000e+00 2018 03 01 07 17 17 1.570e+04 4.315e+03 1.534e+03 5.690e+02 2.000e+00 2018 03 01 07 27 17 1.808e+04 7.324e+03 3.235e+03 1.247e+03 0.000e+00 2018 03 01 07 37 17 2.001e+04 4.708e+03 1.557e+03 5.140e+02 1.000e+00 2018 03 01 07 47 17 2.524e+04 3.833e+03 9.950e+02 2.450e+02 4.000e+00 2018 03 01 07 57 18 1.912e+04 2.652e+03 6.440e+02 1.760e+02 3.000e+00 2018 03 01 08 07 18 1.641e+04 3.090e+03 9.540e+02 2.610e+02 1.000e+00 2018 03 01 08 17 18 1.820e+04 4.437e+03 1.306e+03 3.830e+02 5.000e+00 2018 03 01 08 27 18 3.094e+04 7.607e+03 2.507e+03 8.050e+02 3.000e+00 2018 03 01 08 37 18 4.379e+04 1.146e+04 3.981e+03 1.246e+03 2.000e+00 2018 03 01 08 47 18 4.968e+04 1.526e+04 5.273e+03 1.650e+03 8.000e+00 2018 03 01 08 57 18 5.759e+04 1.849e+04 6.488e+03 2.076e+03 4.000e+00 2018 03 01 09 07 18 5.844e+04 2.082e+04 7.247e+03 2.212e+03 5.000e+00 2018 03 01 09 17 18 6.596e+04 2.292e+04 7.947e+03 2.437e+03 6.000e+00 2018 03 01 09 27 18 6.972e+04 2.461e+04 8.471e+03 2.703e+03 2.000e+00 2018 03 01 09 37 19 6.486e+04 2.411e+04 8.228e+03 2.566e+03 8.000e+00 2018 03 01 09 47 19 6.214e+04 2.378e+04 7.582e+03 2.069e+03 6.000e+00 2018 03 01 09 57 19 6.193e+04 2.436e+04 7.858e+03 2.138e+03 5.000e+00 2018 03 01 10 07 19 6.033e+04 2.367e+04 7.232e+03 1.944e+03 6.000e+00 2018 03 01 10 17 19 6.767e+04 1.497e+04 4.426e+03 1.175e+03 7.000e+00 2018 03 01 10 27 19 5.857e+04 6.018e+03 1.385e+03 3.960e+02 3.000e+00 2018 03 01 10 37 19 4.851e+04 5.503e+03 1.395e+03 4.150e+02 6.000e+00 2018 03 01 10 47 19 5.367e+04 6.209e+03 1.593e+03 4.980e+02 4.000e+00 2018 03 01 10 57 19 5.204e+04 7.217e+03 2.025e+03 5.740e+02 3.000e+00 2018 03 01 11 07 19 4.859e+04 7.253e+03 2.049e+03 6.190e+02 4.000e+00 2018 03 01 11 17 20 4.458e+04 9.521e+03 2.867e+03 8.640e+02 5.000e+00 2018 03 01 11 27 20 4.052e+04 8.160e+03 2.432e+03 8.000e+02 2.000e+00 2018 03 01 11 37 20 8.606e+04 9.100e+03 1.734e+03 5.610e+02 3.000e+00 2018 03 01 11 47 20 8.829e+04 8.434e+03 1.489e+03 4.230e+02 7.000e+00 2018 03 01 11 57 20 8.697e+04 7.817e+03 1.320e+03 3.710e+02 4.000e+00 2018 03 01 12 07 20 1.030e+05 7.807e+03 9.980e+02 2.720e+02 3.000e+00 2018 03 01 12 17 20 1.043e+05 7.788e+03 1.045e+03 2.730e+02 1.000e+00 2018 03 01 12 27 20 9.543e+04 6.953e+03 9.450e+02 2.320e+02 4.000e+00 2018 03 01 12 37 20 8.093e+04 6.416e+03 9.940e+02 2.780e+02 2.000e+00 2018 03 01 12 47 20 9.029e+04 7.783e+03 1.256e+03 3.240e+02 2.000e+00 2018 03 01 12 57 21 9.959e+04 9.250e+03 1.615e+03 4.030e+02 6.000e+00 2018 03 01 13 07 21 8.978e+04 8.391e+03 1.533e+03 3.880e+02 8.000e+00 2018 03 01 13 17 21 6.930e+04 7.406e+03 1.566e+03 4.190e+02 8.000e+00 2018 03 01 13 27 21 5.479e+04 6.557e+03 1.507e+03 4.000e+02 3.000e+00 2018 03 01 13 37 21 3.946e+04 5.545e+03 1.384e+03 3.780e+02 5.000e+00 2018 03 01 13 47 21 3.500e+04 5.569e+03 1.448e+03 4.340e+02 7.000e+00 2018 03 01 13 57 21 2.362e+04 4.828e+03 1.443e+03 4.630e+02 7.000e+00 2018 03 01 14 07 21 1.572e+04 4.455e+03 1.346e+03 4.490e+02 3.000e+00 2018 03 01 14 17 21 1.356e+04 4.576e+03 1.392e+03 4.310e+02 1.000e+00 2018 03 01 14 27 21 1.394e+04 4.917e+03 1.476e+03 4.420e+02 6.000e+00 2018 03 01 14 37 22 1.387e+04 4.917e+03 1.505e+03 4.640e+02 3.000e+00 2018 03 01 14 47 22 1.584e+04 5.358e+03 1.629e+03 4.920e+02 2.000e+00 2018 03 01 14 57 22 1.736e+04 5.413e+03 1.596e+03 5.050e+02 7.000e+00 2018 03 01 15 07 22 1.948e+04 5.561e+03 1.670e+03 5.030e+02 6.000e+00 2018 03 01 15 17 22 2.167e+04 5.821e+03 1.669e+03 4.970e+02 1.400e+01 2018 03 01 15 27 22 2.382e+04 6.106e+03 1.735e+03 5.670e+02 9.000e+00 2018 03 01 15 37 22 2.791e+04 6.430e+03 1.848e+03 5.660e+02 6.000e+00 2018 03 01 15 47 22 3.329e+04 6.886e+03 1.907e+03 6.210e+02 1.000e+01 2018 03 01 15 57 22 3.625e+04 7.615e+03 2.103e+03 6.260e+02 1.200e+01 2018 03 01 16 07 22 4.186e+04 7.514e+03 1.978e+03 6.050e+02 1.200e+01 2018 03 01 16 17 23 4.867e+04 8.617e+03 2.163e+03 7.170e+02 2.100e+01 2018 03 01 16 27 23 6.170e+04 9.954e+03 2.248e+03 7.060e+02 2.200e+01 2018 03 01 16 37 23 6.945e+04 1.041e+04 2.189e+03 6.910e+02 1.000e+01 2018 03 01 16 47 23 7.482e+04 1.145e+04 2.321e+03 7.170e+02 1.600e+01 2018 03 01 16 57 23 7.749e+04 1.166e+04 2.305e+03 7.110e+02 7.000e+00 2018 03 01 17 07 23 7.676e+04 1.147e+04 2.273e+03 7.010e+02 1.200e+01 2018 03 01 17 17 23 7.502e+04 1.133e+04 2.215e+03 6.630e+02 8.000e+00 2018 03 01 17 27 23 7.426e+04 1.151e+04 2.138e+03 6.520e+02 1.000e+01 2018 03 01 17 37 23 8.303e+04 1.342e+04 2.469e+03 7.230e+02 1.400e+01 2018 03 01 17 47 23 8.695e+04 1.320e+04 2.365e+03 7.380e+02 9.000e+00 2018 03 01 17 57 24 9.115e+04 1.386e+04 2.490e+03 7.410e+02 1.200e+01 2018 03 01 18 07 24 9.839e+04 1.493e+04 2.706e+03 8.050e+02 1.700e+01 2018 03 01 18 17 24 1.008e+05 1.472e+04 2.614e+03 7.330e+02 1.900e+01 2018 03 01 18 27 24 9.361e+04 1.370e+04 2.320e+03 6.140e+02 9.000e+00 2018 03 01 18 37 24 9.252e+04 1.378e+04 2.420e+03 6.430e+02 5.000e+00 2018 03 01 18 47 24 8.751e+04 1.262e+04 2.203e+03 6.130e+02 1.100e+01 2018 03 01 18 57 24 8.999e+04 1.265e+04 2.144e+03 5.860e+02 9.000e+00 2018 03 01 19 07 24 9.247e+04 1.276e+04 2.044e+03 5.620e+02 6.000e+00 2018 03 01 19 17 24 9.430e+04 1.311e+04 2.114e+03 5.840e+02 3.000e+00 2018 03 01 19 27 25 9.342e+04 1.303e+04 2.151e+03 6.270e+02 7.000e+00 2018 03 01 19 37 25 9.413e+04 1.354e+04 2.404e+03 7.140e+02 8.000e+00 2018 03 01 19 47 25 9.177e+04 1.338e+04 2.245e+03 6.150e+02 5.000e+00 2018 03 01 19 57 25 9.208e+04 1.324e+04 2.304e+03 6.320e+02 1.200e+01 2018 03 01 20 07 25 9.116e+04 1.316e+04 2.178e+03 5.760e+02 6.000e+00 2018 03 01 20 17 25 9.278e+04 1.337e+04 2.291e+03 6.470e+02 9.000e+00 2018 03 01 20 27 25 9.693e+04 1.387e+04 2.237e+03 6.450e+02 1.000e+01 2018 03 01 20 37 25 1.035e+05 1.493e+04 2.328e+03 6.830e+02 6.000e+00 2018 03 01 20 47 25 1.100e+05 1.589e+04 2.524e+03 6.730e+02 4.000e+00 2018 03 01 20 57 25 1.145e+05 1.667e+04 2.566e+03 7.480e+02 4.000e+00 2018 03 01 21 07 26 1.171e+05 1.707e+04 2.724e+03 7.680e+02 1.100e+01 2018 03 01 21 17 26 1.165e+05 1.753e+04 2.837e+03 7.810e+02 3.000e+00 2018 03 01 21 27 26 1.100e+05 1.668e+04 2.664e+03 6.680e+02 2.000e+00 2018 03 01 21 37 26 1.059e+05 1.575e+04 2.531e+03 6.990e+02 4.000e+00 2018 03 01 21 47 26 1.013e+05 1.515e+04 2.386e+03 6.740e+02 1.000e+00 2018 03 01 21 57 26 9.751e+04 1.449e+04 2.318e+03 6.980e+02 8.000e+00 2018 03 01 22 07 26 1.024e+05 1.517e+04 2.495e+03 7.130e+02 5.000e+00 2018 03 01 22 17 26 8.616e+04 1.198e+04 1.869e+03 5.250e+02 6.000e+00 2018 03 01 22 27 26 7.509e+04 1.042e+04 1.538e+03 3.990e+02 6.000e+00 2018 03 01 22 37 26 7.556e+04 1.061e+04 1.622e+03 4.540e+02 7.000e+00 2018 03 01 22 47 27 7.061e+04 9.907e+03 1.445e+03 3.850e+02 7.000e+00 2018 03 01 22 57 27 7.363e+04 1.066e+04 1.734e+03 4.690e+02 6.000e+00 2018 03 01 23 07 27 7.856e+04 1.122e+04 1.748e+03 5.270e+02 1.100e+01 2018 03 01 23 17 27 5.478e+04 7.206e+03 9.650e+02 2.340e+02 9.000e+00 2018 03 01 23 27 27 5.041e+04 6.556e+03 8.210e+02 2.110e+02 4.000e+00 2018 03 01 23 37 27 4.996e+04 6.457e+03 8.280e+02 2.150e+02 5.000e+00 2018 03 01 23 47 27 5.076e+04 6.746e+03 8.480e+02 1.980e+02 7.000e+00 2018 03 01 23 57 27 4.995e+04 6.724e+03 8.780e+02 1.990e+02 1.000e+01