# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2018 01 13 00 05 15 6.039e+04 5.022e+03 6.000e+02 1.240e+02 7.000e+00 2018 01 13 00 15 15 5.787e+04 4.737e+03 5.670e+02 1.180e+02 2.000e+00 2018 01 13 00 25 15 5.400e+04 4.348e+03 4.730e+02 1.170e+02 7.000e+00 2018 01 13 00 35 15 5.172e+04 4.141e+03 4.410e+02 9.800e+01 5.000e+00 2018 01 13 00 45 16 5.743e+04 4.711e+03 5.130e+02 1.010e+02 4.000e+00 2018 01 13 00 55 16 5.559e+04 4.665e+03 5.020e+02 1.090e+02 2.000e+00 2018 01 13 01 05 16 4.852e+04 4.220e+03 4.890e+02 1.120e+02 2.000e+00 2018 01 13 01 15 16 5.297e+04 4.711e+03 4.980e+02 1.060e+02 0.000e+00 2018 01 13 01 25 16 5.304e+04 4.651e+03 5.520e+02 1.240e+02 3.000e+00 2018 01 13 01 35 16 4.780e+04 4.041e+03 5.150e+02 9.900e+01 3.000e+00 2018 01 13 01 45 16 4.652e+04 3.890e+03 4.790e+02 9.400e+01 5.000e+00 2018 01 13 01 55 16 5.403e+04 4.434e+03 5.380e+02 9.600e+01 1.000e+00 2018 01 13 02 05 16 5.680e+04 4.556e+03 5.280e+02 1.060e+02 2.000e+00 2018 01 13 02 15 17 5.635e+04 4.758e+03 5.820e+02 1.200e+02 4.000e+00 2018 01 13 02 25 17 6.286e+04 5.249e+03 6.230e+02 1.540e+02 3.000e+00 2018 01 13 02 35 17 7.842e+04 6.054e+03 7.050e+02 1.470e+02 5.000e+00 2018 01 13 02 45 17 8.144e+04 6.372e+03 7.580e+02 1.640e+02 4.000e+00 2018 01 13 02 55 17 9.207e+04 7.108e+03 8.200e+02 1.740e+02 9.000e+00 2018 01 13 03 05 17 1.129e+05 8.494e+03 8.720e+02 1.850e+02 7.000e+00 2018 01 13 03 15 17 1.355e+05 9.983e+03 9.240e+02 1.910e+02 4.000e+00 2018 01 13 03 25 17 1.202e+05 8.832e+03 9.120e+02 1.940e+02 1.100e+01 2018 01 13 03 35 17 1.056e+05 7.974e+03 8.700e+02 1.640e+02 6.000e+00 2018 01 13 03 45 17 1.080e+05 7.630e+03 7.200e+02 1.310e+02 3.000e+00 2018 01 13 03 55 18 9.529e+04 7.072e+03 7.170e+02 1.430e+02 2.000e+00 2018 01 13 04 05 18 8.688e+04 6.731e+03 6.930e+02 1.400e+02 5.000e+00 2018 01 13 04 15 18 8.204e+04 6.299e+03 6.260e+02 1.260e+02 2.000e+00 2018 01 13 04 25 18 8.132e+04 6.224e+03 6.320e+02 1.250e+02 2.000e+00 2018 01 13 04 35 18 8.130e+04 6.255e+03 6.660e+02 1.360e+02 3.000e+00 2018 01 13 04 45 18 7.930e+04 6.007e+03 6.380e+02 1.190e+02 4.000e+00 2018 01 13 04 55 18 8.041e+04 6.070e+03 7.060e+02 1.350e+02 5.000e+00 2018 01 13 05 05 18 8.054e+04 6.140e+03 6.510e+02 1.230e+02 4.000e+00 2018 01 13 05 15 18 7.812e+04 6.015e+03 6.200e+02 1.370e+02 1.000e+00 2018 01 13 05 25 18 7.550e+04 5.898e+03 6.310e+02 1.110e+02 1.000e+00 2018 01 13 05 35 19 7.966e+04 6.179e+03 6.710e+02 1.340e+02 1.000e+00 2018 01 13 05 45 19 7.018e+04 5.650e+03 6.420e+02 9.500e+01 2.000e+00 2018 01 13 05 55 19 7.038e+04 5.725e+03 6.340e+02 1.230e+02 0.000e+00 2018 01 13 06 05 19 7.023e+04 5.787e+03 6.260e+02 1.280e+02 4.000e+00 2018 01 13 06 15 19 6.970e+04 5.620e+03 6.390e+02 1.290e+02 5.000e+00 2018 01 13 06 25 19 7.087e+04 5.857e+03 6.790e+02 1.530e+02 5.000e+00 2018 01 13 06 35 19 7.244e+04 6.037e+03 7.190e+02 1.490e+02 2.000e+00 2018 01 13 06 45 19 6.272e+04 5.515e+03 6.290e+02 1.240e+02 6.000e+00 2018 01 13 06 55 19 5.871e+04 5.351e+03 6.150e+02 1.240e+02 3.000e+00 2018 01 13 07 05 19 5.644e+04 5.294e+03 6.270e+02 1.260e+02 3.000e+00 2018 01 13 07 15 20 5.730e+04 5.266e+03 5.940e+02 1.160e+02 3.000e+00 2018 01 13 07 25 20 5.779e+04 5.361e+03 5.560e+02 1.070e+02 4.000e+00 2018 01 13 07 35 20 5.977e+04 5.435e+03 6.060e+02 1.210e+02 3.000e+00 2018 01 13 07 45 20 6.418e+04 5.767e+03 6.140e+02 1.210e+02 4.000e+00 2018 01 13 07 55 20 7.440e+04 5.844e+03 5.990e+02 1.190e+02 4.000e+00 2018 01 13 08 05 20 8.446e+04 5.868e+03 6.350e+02 1.440e+02 3.000e+00 2018 01 13 08 15 20 9.252e+04 5.895e+03 6.770e+02 1.560e+02 2.000e+00 2018 01 13 08 25 20 9.226e+04 5.725e+03 6.200e+02 1.390e+02 3.000e+00 2018 01 13 08 35 20 8.986e+04 5.522e+03 5.650e+02 1.270e+02 2.000e+00 2018 01 13 08 45 20 7.847e+04 4.956e+03 5.040e+02 1.060e+02 2.000e+00 2018 01 13 08 55 21 7.349e+04 4.723e+03 5.010e+02 1.130e+02 3.000e+00 2018 01 13 09 05 21 6.664e+04 4.483e+03 4.970e+02 9.800e+01 4.000e+00 2018 01 13 09 15 21 6.146e+04 4.609e+03 5.230e+02 9.800e+01 6.000e+00 2018 01 13 09 25 21 5.870e+04 4.854e+03 5.600e+02 1.100e+02 3.000e+00 2018 01 13 09 35 21 5.853e+04 5.001e+03 5.880e+02 1.090e+02 6.000e+00 2018 01 13 09 45 21 5.346e+04 4.572e+03 5.700e+02 1.030e+02 7.000e+00 2018 01 13 09 55 21 4.960e+04 4.180e+03 5.030e+02 1.050e+02 5.000e+00 2018 01 13 10 05 21 4.752e+04 4.152e+03 5.050e+02 9.500e+01 4.000e+00 2018 01 13 10 15 21 4.797e+04 4.018e+03 4.790e+02 9.600e+01 3.000e+00 2018 01 13 10 25 22 5.134e+04 4.043e+03 4.690e+02 9.100e+01 1.000e+00 2018 01 13 10 35 22 5.588e+04 4.078e+03 4.790e+02 1.030e+02 4.000e+00 2018 01 13 10 45 22 5.973e+04 4.299e+03 5.010e+02 1.130e+02 4.000e+00 2018 01 13 10 55 22 6.746e+04 5.063e+03 5.230e+02 1.150e+02 4.000e+00 2018 01 13 11 05 22 6.578e+04 5.242e+03 5.650e+02 1.280e+02 1.100e+01 2018 01 13 11 15 22 4.879e+04 4.235e+03 4.940e+02 9.800e+01 3.000e+00 2018 01 13 11 25 22 4.820e+04 4.110e+03 4.710e+02 1.060e+02 3.000e+00 2018 01 13 11 35 22 4.355e+04 3.606e+03 4.200e+02 1.000e+02 5.000e+00 2018 01 13 11 45 22 4.980e+04 4.081e+03 4.410e+02 9.500e+01 6.000e+00 2018 01 13 11 55 22 5.640e+04 4.488e+03 5.030e+02 1.240e+02 5.000e+00 2018 01 13 12 05 23 5.794e+04 4.495e+03 5.270e+02 1.210e+02 1.200e+01 2018 01 13 12 15 23 5.768e+04 4.367e+03 4.890e+02 1.000e+02 6.000e+00 2018 01 13 12 25 23 5.752e+04 4.424e+03 5.230e+02 1.170e+02 5.000e+00 2018 01 13 12 35 23 5.678e+04 4.262e+03 4.650e+02 9.200e+01 4.000e+00 2018 01 13 12 45 23 5.950e+04 4.622e+03 5.220e+02 1.000e+02 7.000e+00 2018 01 13 12 55 23 6.728e+04 5.412e+03 6.140e+02 1.660e+02 5.000e+00 2018 01 13 13 05 23 7.434e+04 6.402e+03 8.030e+02 2.030e+02 6.000e+00 2018 01 13 13 15 23 6.687e+04 6.007e+03 8.420e+02 2.030e+02 8.000e+00 2018 01 13 13 25 23 5.202e+04 4.492e+03 5.950e+02 1.330e+02 4.000e+00 2018 01 13 13 35 23 5.966e+04 5.289e+03 7.640e+02 2.080e+02 1.200e+01 2018 01 13 13 45 24 5.255e+04 4.662e+03 7.190e+02 1.750e+02 4.000e+00 2018 01 13 13 55 24 5.451e+04 4.718e+03 6.090e+02 1.500e+02 1.000e+01 2018 01 13 14 05 24 4.595e+04 3.380e+03 4.660e+02 1.090e+02 4.000e+00 2018 01 13 14 15 24 4.362e+04 3.289e+03 4.340e+02 1.030e+02 3.000e+00 2018 01 13 14 25 24 4.378e+04 3.650e+03 5.350e+02 1.460e+02 7.000e+00 2018 01 13 14 35 24 3.911e+04 3.261e+03 4.600e+02 9.300e+01 1.000e+00 2018 01 13 14 45 24 4.136e+04 3.592e+03 4.770e+02 1.110e+02 3.000e+00 2018 01 13 14 55 24 4.666e+04 3.863e+03 5.660e+02 1.030e+02 6.000e+00 2018 01 13 15 05 24 4.256e+04 3.500e+03 4.260e+02 9.200e+01 7.000e+00 2018 01 13 15 15 24 3.901e+04 3.450e+03 4.830e+02 1.160e+02 6.000e+00 2018 01 13 15 25 25 4.000e+04 3.189e+03 4.220e+02 7.900e+01 5.000e+00 2018 01 13 15 35 25 4.192e+04 3.447e+03 4.470e+02 1.200e+02 6.000e+00 2018 01 13 15 45 25 4.555e+04 4.060e+03 5.280e+02 1.170e+02 7.000e+00 2018 01 13 15 55 25 4.667e+04 4.328e+03 6.600e+02 1.460e+02 3.000e+00 2018 01 13 16 05 25 5.324e+04 5.234e+03 7.340e+02 1.730e+02 6.000e+00 2018 01 13 16 15 25 4.968e+04 4.741e+03 6.340e+02 1.570e+02 6.000e+00 2018 01 13 16 25 25 4.515e+04 4.231e+03 6.370e+02 1.460e+02 7.000e+00 2018 01 13 16 35 25 4.712e+04 4.530e+03 6.790e+02 1.680e+02 5.000e+00 2018 01 13 16 45 25 4.978e+04 5.985e+03 1.110e+03 2.610e+02 1.200e+01 2018 01 13 16 55 25 4.952e+04 5.444e+03 9.310e+02 1.990e+02 1.100e+01 2018 01 13 17 05 26 4.611e+04 5.590e+03 1.072e+03 2.480e+02 3.000e+00 2018 01 13 17 15 26 4.807e+04 4.980e+03 7.940e+02 1.810e+02 6.000e+00 2018 01 13 17 25 26 5.907e+04 6.327e+03 9.410e+02 2.440e+02 1.000e+01 2018 01 13 17 35 26 4.679e+04 3.964e+03 5.260e+02 1.230e+02 7.000e+00 2018 01 13 17 45 26 5.047e+04 4.280e+03 5.630e+02 1.330e+02 4.000e+00 2018 01 13 17 55 26 5.111e+04 4.256e+03 5.540e+02 1.240e+02 6.000e+00 2018 01 13 18 05 26 5.903e+04 5.067e+03 6.260e+02 1.540e+02 4.000e+00 2018 01 13 18 15 26 6.156e+04 5.363e+03 6.220e+02 1.440e+02 5.000e+00 2018 01 13 18 25 26 6.607e+04 5.509e+03 6.270e+02 1.380e+02 2.000e+00 2018 01 13 18 35 26 6.856e+04 5.404e+03 6.460e+02 1.320e+02 2.000e+00 2018 01 13 18 45 27 7.207e+04 5.685e+03 6.500e+02 1.620e+02 3.000e+00 2018 01 13 18 55 27 7.537e+04 6.012e+03 6.810e+02 1.240e+02 3.000e+00 2018 01 13 19 05 27 7.512e+04 6.437e+03 6.880e+02 1.550e+02 7.000e+00 2018 01 13 19 15 27 7.760e+04 6.591e+03 7.450e+02 1.320e+02 3.000e+00 2018 01 13 19 25 27 8.144e+04 7.171e+03 7.550e+02 1.600e+02 2.000e+00 2018 01 13 19 35 27 8.589e+04 7.552e+03 8.600e+02 1.700e+02 3.000e+00 2018 01 13 19 45 27 8.004e+04 6.783e+03 8.010e+02 1.560e+02 2.000e+00 2018 01 13 19 55 27 7.694e+04 6.455e+03 7.510e+02 1.440e+02 2.000e+00 2018 01 13 20 05 27 8.226e+04 6.749e+03 7.620e+02 1.640e+02 5.000e+00 2018 01 13 20 15 27 8.723e+04 7.023e+03 7.810e+02 1.760e+02 2.000e+00 2018 01 13 20 25 28 1.049e+05 8.588e+03 8.560e+02 1.590e+02 2.000e+00 2018 01 13 20 35 28 1.170e+05 9.420e+03 1.002e+03 1.810e+02 4.000e+00 2018 01 13 20 45 28 1.226e+05 1.047e+04 1.161e+03 2.350e+02 3.000e+00 2018 01 13 20 55 28 1.308e+05 1.138e+04 1.268e+03 2.730e+02 7.000e+00 2018 01 13 21 05 28 1.429e+05 1.226e+04 1.250e+03 2.460e+02 7.000e+00 2018 01 13 21 15 28 1.877e+05 1.797e+04 1.794e+03 3.050e+02 1.000e+01 2018 01 13 21 25 28 1.978e+05 1.858e+04 1.980e+03 3.130e+02 7.000e+00 2018 01 13 21 35 28 1.835e+05 1.660e+04 1.678e+03 2.600e+02 5.000e+00 2018 01 13 21 45 28 1.638e+05 1.490e+04 1.516e+03 2.800e+02 6.000e+00 2018 01 13 21 55 29 1.323e+05 1.172e+04 1.160e+03 2.150e+02 8.000e+00 2018 01 13 22 05 29 1.272e+05 1.103e+04 1.164e+03 2.050e+02 4.000e+00 2018 01 13 22 15 29 1.343e+05 1.140e+04 1.166e+03 2.180e+02 5.000e+00 2018 01 13 22 25 29 1.429e+05 1.233e+04 1.424e+03 2.870e+02 6.000e+00 2018 01 13 22 35 29 1.347e+05 1.158e+04 1.205e+03 2.290e+02 5.000e+00 2018 01 13 22 45 29 1.346e+05 1.124e+04 1.252e+03 2.710e+02 9.000e+00 2018 01 13 22 55 29 1.439e+05 1.122e+04 1.247e+03 2.680e+02 7.000e+00 2018 01 13 23 05 29 1.577e+05 1.268e+04 1.426e+03 2.970e+02 1.500e+01 2018 01 13 23 15 29 1.674e+05 1.368e+04 1.540e+03 3.100e+02 9.000e+00 2018 01 13 23 25 29 1.686e+05 1.414e+04 1.635e+03 3.250e+02 1.200e+01 2018 01 13 23 35 30 1.578e+05 1.351e+04 1.551e+03 3.190e+02 8.000e+00 2018 01 13 23 45 30 1.317e+05 1.125e+04 1.328e+03 2.740e+02 8.000e+00 2018 01 13 23 55 30 1.027e+05 8.373e+03 9.250e+02 1.760e+02 6.000e+00