# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2017 09 04 00 00 47 4.951e+04 5.708e+03 1.836e+03 6.420e+02 9.000e+00 2017 09 04 00 10 48 4.714e+04 5.287e+03 1.740e+03 6.200e+02 6.000e+00 2017 09 04 00 20 48 4.934e+04 5.520e+03 1.729e+03 5.700e+02 9.000e+00 2017 09 04 00 30 48 5.538e+04 6.049e+03 1.764e+03 6.000e+02 7.000e+00 2017 09 04 00 40 48 5.975e+04 6.244e+03 1.620e+03 5.580e+02 8.000e+00 2017 09 04 00 50 48 5.515e+04 5.220e+03 1.372e+03 4.570e+02 9.000e+00 2017 09 04 01 00 55 5.367e+04 5.168e+03 1.439e+03 4.890e+02 9.000e+00 2017 09 04 01 10 56 5.198e+04 4.938e+03 1.330e+03 4.570e+02 5.000e+00 2017 09 04 01 20 56 5.394e+04 4.973e+03 1.315e+03 4.170e+02 1.000e+00 2017 09 04 01 30 56 5.648e+04 5.232e+03 1.413e+03 4.840e+02 8.000e+00 2017 09 04 01 40 56 5.461e+04 4.546e+03 1.125e+03 3.780e+02 3.000e+00 2017 09 04 01 50 56 5.564e+04 4.714e+03 1.104e+03 3.580e+02 5.000e+00 2017 09 04 02 00 56 5.808e+04 4.853e+03 1.132e+03 3.350e+02 3.000e+00 2017 09 04 02 10 56 5.632e+04 4.619e+03 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