# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2017 05 05 00 09 50 9.430e+04 8.790e+03 2.253e+03 7.550e+02 1.100e+01 2017 05 05 00 19 50 9.698e+04 9.656e+03 2.353e+03 7.410e+02 6.000e+00 2017 05 05 00 29 50 9.870e+04 1.022e+04 2.403e+03 7.100e+02 1.000e+01 2017 05 05 00 39 51 9.100e+04 9.325e+03 2.326e+03 7.480e+02 1.100e+01 2017 05 05 00 49 51 1.010e+05 9.379e+03 2.480e+03 8.050e+02 5.000e+00 2017 05 05 00 59 51 9.974e+04 8.818e+03 2.516e+03 8.290e+02 9.000e+00 2017 05 05 01 09 51 9.364e+04 8.434e+03 2.334e+03 7.390e+02 5.000e+00 2017 05 05 01 19 51 9.277e+04 8.658e+03 2.316e+03 7.180e+02 6.000e+00 2017 05 05 01 29 51 9.122e+04 9.324e+03 2.504e+03 7.580e+02 1.200e+01 2017 05 05 01 39 51 9.304e+04 9.644e+03 2.657e+03 8.080e+02 1.100e+01 2017 05 05 01 49 51 9.322e+04 9.804e+03 2.633e+03 8.450e+02 6.000e+00 2017 05 05 01 59 51 8.872e+04 9.315e+03 2.790e+03 9.300e+02 1.200e+01 2017 05 05 02 09 52 9.166e+04 9.033e+03 2.668e+03 8.620e+02 1.100e+01 2017 05 05 02 19 52 9.458e+04 8.689e+03 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