# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2017 03 28 00 00 15 4.046e+04 1.552e+03 1.700e+02 3.700e+01 0.000e+00 2017 03 28 00 10 15 4.217e+04 1.456e+03 1.230e+02 2.200e+01 1.000e+00 2017 03 28 00 20 15 4.349e+04 1.641e+03 1.490e+02 3.100e+01 0.000e+00 2017 03 28 00 30 15 4.252e+04 1.459e+03 1.240e+02 2.400e+01 1.000e+00 2017 03 28 00 40 15 4.118e+04 1.449e+03 1.300e+02 2.300e+01 0.000e+00 2017 03 28 00 50 15 4.277e+04 1.567e+03 1.330e+02 3.200e+01 1.000e+00 2017 03 28 01 00 16 5.036e+04 2.080e+03 2.140e+02 4.400e+01 0.000e+00 2017 03 28 01 10 16 6.602e+04 3.235e+03 2.830e+02 5.500e+01 0.000e+00 2017 03 28 01 20 16 4.426e+04 1.742e+03 1.660e+02 3.300e+01 0.000e+00 2017 03 28 01 30 16 4.993e+04 2.171e+03 1.770e+02 4.300e+01 2.000e+00 2017 03 28 01 40 16 4.663e+04 1.915e+03 1.950e+02 4.500e+01 1.000e+00 2017 03 28 01 50 16 3.909e+04 1.640e+03 2.030e+02 5.400e+01 1.000e+00 2017 03 28 02 00 16 5.216e+04 2.112e+03 2.370e+02 6.200e+01 0.000e+00 2017 03 28 02 10 16 4.589e+04 2.062e+03 2.740e+02 7.100e+01 0.000e+00 2017 03 28 02 20 16 5.413e+04 2.280e+03 2.270e+02 5.000e+01 0.000e+00 2017 03 28 02 30 17 5.626e+04 2.279e+03 2.130e+02 5.500e+01 4.000e+00 2017 03 28 02 40 17 5.009e+04 1.990e+03 2.530e+02 6.600e+01 0.000e+00 2017 03 28 02 50 17 4.367e+04 1.696e+03 2.280e+02 6.500e+01 0.000e+00 2017 03 28 03 00 17 5.077e+04 2.105e+03 2.470e+02 5.200e+01 0.000e+00 2017 03 28 03 10 17 5.644e+04 2.448e+03 2.610e+02 6.600e+01 0.000e+00 2017 03 28 03 20 17 6.058e+04 2.498e+03 2.900e+02 7.600e+01 2.000e+00 2017 03 28 03 30 17 5.973e+04 2.546e+03 3.060e+02 8.100e+01 0.000e+00 2017 03 28 03 40 17 6.256e+04 2.721e+03 2.950e+02 8.100e+01 0.000e+00 2017 03 28 03 50 17 6.666e+04 2.822e+03 3.220e+02 8.700e+01 1.000e+00 2017 03 28 04 00 17 7.474e+04 3.056e+03 3.370e+02 8.100e+01 0.000e+00 2017 03 28 04 10 18 8.045e+04 3.191e+03 3.890e+02 8.300e+01 2.000e+00 2017 03 28 04 20 18 8.332e+04 3.531e+03 4.100e+02 9.700e+01 2.000e+00 2017 03 28 04 30 18 8.297e+04 3.461e+03 4.640e+02 1.310e+02 1.000e+00 2017 03 28 04 40 18 9.019e+04 3.621e+03 4.080e+02 9.600e+01 0.000e+00 2017 03 28 04 50 18 9.444e+04 3.835e+03 4.200e+02 1.070e+02 2.000e+00 2017 03 28 05 00 18 1.022e+05 4.152e+03 4.510e+02 9.600e+01 2.000e+00 2017 03 28 05 10 18 1.010e+05 4.086e+03 4.540e+02 1.020e+02 0.000e+00 2017 03 28 05 20 18 1.016e+05 4.174e+03 4.710e+02 1.050e+02 2.000e+00 2017 03 28 05 30 18 1.031e+05 4.112e+03 4.180e+02 9.400e+01 0.000e+00 2017 03 28 05 40 18 1.031e+05 4.039e+03 4.700e+02 1.060e+02 1.000e+00 2017 03 28 05 50 19 1.060e+05 4.179e+03 4.440e+02 9.600e+01 2.000e+00 2017 03 28 06 00 19 1.152e+05 4.463e+03 4.200e+02 8.100e+01 2.000e+00 2017 03 28 06 10 19 1.245e+05 4.980e+03 4.060e+02 1.080e+02 2.000e+00 2017 03 28 06 20 19 1.337e+05 5.334e+03 3.710e+02 7.400e+01 0.000e+00 2017 03 28 06 30 19 1.407e+05 5.780e+03 4.430e+02 1.020e+02 3.000e+00 2017 03 28 06 40 19 1.536e+05 6.376e+03 4.630e+02 9.400e+01 0.000e+00 2017 03 28 06 50 19 1.682e+05 6.994e+03 5.630e+02 1.230e+02 1.000e+00 2017 03 28 07 00 19 1.541e+05 6.571e+03 4.560e+02 1.030e+02 3.000e+00 2017 03 28 07 10 19 1.422e+05 6.228e+03 5.120e+02 1.090e+02 3.000e+00 2017 03 28 07 20 19 1.320e+05 5.969e+03 4.790e+02 1.140e+02 3.000e+00 2017 03 28 07 30 20 1.329e+05 5.990e+03 4.970e+02 1.140e+02 1.000e+00 2017 03 28 07 40 20 1.367e+05 5.969e+03 5.000e+02 1.180e+02 2.000e+00 2017 03 28 07 50 20 1.500e+05 6.590e+03 5.960e+02 1.420e+02 2.000e+00 2017 03 28 08 00 20 1.469e+05 6.442e+03 5.940e+02 1.440e+02 1.000e+00 2017 03 28 08 10 20 1.420e+05 6.090e+03 5.670e+02 1.390e+02 2.000e+00 2017 03 28 08 20 20 1.346e+05 5.663e+03 5.350e+02 1.180e+02 3.000e+00 2017 03 28 08 30 20 1.438e+05 6.042e+03 5.630e+02 1.200e+02 1.000e+00 2017 03 28 08 40 20 1.455e+05 6.226e+03 6.000e+02 1.460e+02 5.000e+00 2017 03 28 08 50 20 1.533e+05 6.680e+03 6.490e+02 1.360e+02 2.000e+00 2017 03 28 09 00 20 1.389e+05 6.085e+03 5.950e+02 1.700e+02 2.000e+00 2017 03 28 09 10 21 1.292e+05 5.703e+03 5.700e+02 1.340e+02 7.000e+00 2017 03 28 09 20 21 1.246e+05 5.520e+03 5.270e+02 1.200e+02 1.000e+00 2017 03 28 09 30 21 1.183e+05 5.329e+03 5.300e+02 1.390e+02 2.000e+00 2017 03 28 09 40 21 1.243e+05 5.510e+03 5.150e+02 1.320e+02 0.000e+00 2017 03 28 09 50 21 1.046e+05 4.674e+03 4.980e+02 1.140e+02 4.000e+00 2017 03 28 10 00 21 9.948e+04 4.438e+03 4.720e+02 1.200e+02 6.000e+00 2017 03 28 10 10 21 9.109e+04 3.913e+03 4.170e+02 1.120e+02 2.000e+00 2017 03 28 10 20 21 9.874e+04 4.431e+03 4.650e+02 1.050e+02 3.000e+00 2017 03 28 10 30 21 1.047e+05 4.574e+03 4.630e+02 1.160e+02 2.000e+00 2017 03 28 10 40 21 1.016e+05 4.297e+03 3.820e+02 9.600e+01 3.000e+00 2017 03 28 10 50 22 9.736e+04 4.646e+03 4.760e+02 1.160e+02 2.000e+00 2017 03 28 11 00 22 8.934e+04 4.495e+03 4.390e+02 9.200e+01 3.000e+00 2017 03 28 11 10 22 8.599e+04 3.976e+03 4.570e+02 1.130e+02 2.000e+00 2017 03 28 11 20 22 9.280e+04 3.968e+03 3.930e+02 1.070e+02 2.000e+00 2017 03 28 11 30 22 9.555e+04 4.060e+03 4.050e+02 7.500e+01 4.000e+00 2017 03 28 11 40 22 9.508e+04 4.057e+03 4.110e+02 1.090e+02 4.000e+00 2017 03 28 11 50 22 9.478e+04 3.986e+03 4.560e+02 1.380e+02 8.000e+00 2017 03 28 12 00 22 9.989e+04 4.214e+03 4.550e+02 1.180e+02 2.000e+00 2017 03 28 12 10 22 9.859e+04 4.211e+03 4.780e+02 1.260e+02 0.000e+00 2017 03 28 12 20 22 1.099e+05 5.051e+03 6.250e+02 1.490e+02 8.000e+00 2017 03 28 12 30 23 1.130e+05 5.181e+03 5.640e+02 1.540e+02 5.000e+00 2017 03 28 12 40 23 1.146e+05 5.557e+03 6.210e+02 1.660e+02 3.000e+00 2017 03 28 12 50 23 1.109e+05 5.180e+03 6.250e+02 1.470e+02 4.000e+00 2017 03 28 13 00 23 1.104e+05 4.880e+03 5.700e+02 1.580e+02 6.000e+00 2017 03 28 13 10 23 1.191e+05 5.167e+03 5.270e+02 1.320e+02 3.000e+00 2017 03 28 13 20 23 1.148e+05 5.109e+03 5.770e+02 1.510e+02 4.000e+00 2017 03 28 13 30 23 1.210e+05 5.977e+03 6.730e+02 1.780e+02 6.000e+00 2017 03 28 13 40 23 1.315e+05 7.106e+03 8.520e+02 2.320e+02 1.000e+01 2017 03 28 13 50 23 1.397e+05 8.706e+03 1.200e+03 2.960e+02 1.300e+01 2017 03 28 14 00 23 1.442e+05 8.807e+03 1.237e+03 3.430e+02 1.000e+01 2017 03 28 14 10 24 1.480e+05 8.784e+03 1.103e+03 2.750e+02 6.000e+00 2017 03 28 14 20 24 1.388e+05 7.417e+03 9.170e+02 2.400e+02 4.000e+00 2017 03 28 14 30 24 1.407e+05 7.387e+03 8.820e+02 2.200e+02 1.300e+01 2017 03 28 14 40 24 1.429e+05 7.712e+03 1.014e+03 2.760e+02 9.000e+00 2017 03 28 14 50 24 1.327e+05 6.537e+03 7.340e+02 2.060e+02 8.000e+00 2017 03 28 15 00 24 1.340e+05 6.750e+03 7.770e+02 1.940e+02 8.000e+00 2017 03 28 15 10 24 1.258e+05 6.049e+03 6.460e+02 1.800e+02 3.000e+00 2017 03 28 15 20 24 1.286e+05 6.238e+03 6.930e+02 1.830e+02 4.000e+00 2017 03 28 15 30 24 1.265e+05 6.311e+03 6.750e+02 1.650e+02 6.000e+00 2017 03 28 15 40 24 1.253e+05 5.990e+03 6.200e+02 1.550e+02 3.000e+00 2017 03 28 15 50 25 1.202e+05 6.025e+03 7.330e+02 2.020e+02 4.000e+00 2017 03 28 16 00 25 1.080e+05 6.452e+03 1.031e+03 2.710e+02 5.000e+00 2017 03 28 16 10 25 1.110e+05 6.431e+03 9.430e+02 2.570e+02 3.000e+00 2017 03 28 16 20 25 1.160e+05 6.689e+03 9.840e+02 2.650e+02 3.000e+00 2017 03 28 16 30 25 1.196e+05 6.727e+03 9.650e+02 2.620e+02 1.000e+00 2017 03 28 16 40 25 1.220e+05 6.766e+03 9.390e+02 2.320e+02 4.000e+00 2017 03 28 16 50 25 1.218e+05 6.524e+03 9.440e+02 2.380e+02 3.000e+00 2017 03 28 17 00 25 1.230e+05 6.435e+03 8.530e+02 2.320e+02 4.000e+00 2017 03 28 17 10 25 1.267e+05 6.256e+03 7.980e+02 2.240e+02 2.000e+00 2017 03 28 17 20 25 1.271e+05 6.291e+03 8.390e+02 2.010e+02 1.000e+00 2017 03 28 17 30 26 1.305e+05 6.546e+03 7.680e+02 1.970e+02 3.000e+00 2017 03 28 17 40 26 1.514e+05 7.774e+03 9.900e+02 2.520e+02 4.000e+00 2017 03 28 17 50 26 1.447e+05 6.769e+03 7.540e+02 1.710e+02 1.000e+00 2017 03 28 18 00 26 1.482e+05 7.178e+03 8.400e+02 1.900e+02 3.000e+00 2017 03 28 18 10 26 1.390e+05 7.423e+03 9.590e+02 1.920e+02 1.000e+00 2017 03 28 18 20 26 1.288e+05 6.187e+03 7.070e+02 1.840e+02 1.000e+00 2017 03 28 18 30 26 1.447e+05 7.292e+03 8.110e+02 1.630e+02 1.000e+00 2017 03 28 18 40 26 1.406e+05 6.052e+03 6.080e+02 1.400e+02 1.000e+00 2017 03 28 18 50 26 1.304e+05 5.518e+03 6.050e+02 1.350e+02 1.000e+00 2017 03 28 19 00 26 1.570e+05 7.052e+03 8.040e+02 1.790e+02 1.000e+00 2017 03 28 19 10 27 1.367e+05 5.882e+03 6.300e+02 1.340e+02 0.000e+00 2017 03 28 19 20 27 1.349e+05 5.977e+03 6.120e+02 1.380e+02 1.000e+00 2017 03 28 19 30 27 1.402e+05 6.273e+03 6.840e+02 1.500e+02 0.000e+00 2017 03 28 19 40 27 1.356e+05 6.044e+03 6.690e+02 1.430e+02 0.000e+00 2017 03 28 19 50 27 1.336e+05 5.881e+03 6.190e+02 1.460e+02 0.000e+00 2017 03 28 20 00 27 1.371e+05 5.838e+03 6.250e+02 1.200e+02 0.000e+00 2017 03 28 20 10 27 1.371e+05 5.888e+03 5.830e+02 1.290e+02 0.000e+00 2017 03 28 20 20 27 1.354e+05 5.845e+03 6.130e+02 1.150e+02 1.000e+00 2017 03 28 20 30 27 1.357e+05 5.684e+03 5.820e+02 1.160e+02 0.000e+00 2017 03 28 20 40 28 1.358e+05 5.824e+03 5.360e+02 1.250e+02 0.000e+00 2017 03 28 20 50 28 1.355e+05 5.849e+03 6.480e+02 1.330e+02 0.000e+00 2017 03 28 21 00 28 1.296e+05 5.357e+03 5.470e+02 1.190e+02 0.000e+00 2017 03 28 21 10 28 1.304e+05 5.211e+03 5.050e+02 1.010e+02 0.000e+00 2017 03 28 21 20 28 1.206e+05 4.883e+03 5.200e+02 1.110e+02 0.000e+00 2017 03 28 21 30 28 1.195e+05 4.741e+03 4.720e+02 8.000e+01 0.000e+00 2017 03 28 21 40 28 1.205e+05 4.808e+03 4.890e+02 1.050e+02 0.000e+00 2017 03 28 21 50 28 1.174e+05 4.807e+03 4.630e+02 1.020e+02 0.000e+00 2017 03 28 22 00 28 1.198e+05 4.837e+03 4.070e+02 8.200e+01 0.000e+00 2017 03 28 22 10 28 1.175e+05 4.734e+03 4.410e+02 8.800e+01 0.000e+00 2017 03 28 22 20 29 1.117e+05 4.388e+03 4.150e+02 7.200e+01 1.000e+00 2017 03 28 22 30 29 1.052e+05 4.276e+03 4.220e+02 8.800e+01 0.000e+00 2017 03 28 22 40 29 1.035e+05 3.936e+03 4.020e+02 1.020e+02 0.000e+00 2017 03 28 22 50 29 1.028e+05 3.862e+03 3.780e+02 8.400e+01 0.000e+00 2017 03 28 23 00 29 1.046e+05 3.978e+03 3.850e+02 9.400e+01 0.000e+00 2017 03 28 23 10 29 9.990e+04 3.707e+03 3.640e+02 8.500e+01 1.000e+00 2017 03 28 23 20 29 8.938e+04 3.442e+03 3.830e+02 1.000e+02 0.000e+00 2017 03 28 23 30 29 9.148e+04 3.434e+03 3.880e+02 9.500e+01 0.000e+00 2017 03 28 23 40 29 1.000e+05 3.764e+03 4.030e+02 8.700e+01 1.000e+00 2017 03 28 23 50 29 1.132e+05 4.407e+03 4.430e+02 9.900e+01 1.000e+00