# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2017 02 10 00 00 05 2.713e+03 2.436e+02 8.425e+00 9.500e-01 1.250e-02 2017 02 10 00 02 15 2.728e+03 2.461e+02 8.350e+00 9.125e-01 1.250e-02 2017 02 10 00 04 26 2.675e+03 2.428e+02 8.688e+00 9.500e-01 0.000e+00 2017 02 10 00 06 36 2.657e+03 2.404e+02 8.887e+00 9.625e-01 1.250e-02 2017 02 10 00 08 46 2.599e+03 2.324e+02 7.888e+00 6.750e-01 0.000e+00 2017 02 10 00 10 56 2.638e+03 2.385e+02 7.588e+00 8.375e-01 1.250e-02 2017 02 10 00 13 07 2.632e+03 2.366e+02 7.575e+00 8.500e-01 1.250e-02 2017 02 10 00 15 17 2.584e+03 2.329e+02 7.825e+00 8.750e-01 0.000e+00 2017 02 10 00 17 27 2.514e+03 2.260e+02 7.325e+00 7.500e-01 1.250e-02 2017 02 10 00 19 37 2.445e+03 2.154e+02 7.000e+00 7.500e-01 0.000e+00 2017 02 10 00 21 48 2.455e+03 2.192e+02 7.838e+00 8.625e-01 0.000e+00 2017 02 10 00 23 58 2.415e+03 2.170e+02 7.300e+00 8.500e-01 0.000e+00 2017 02 10 00 26 08 2.425e+03 2.159e+02 6.875e+00 8.625e-01 1.250e-02 2017 02 10 00 28 18 2.401e+03 2.175e+02 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